公开(公告)号：US11693021B2

公开(公告)日：2023-07-04

申请号：US17354412

申请日：2021-06-22

Applicant: Infineon Technologies AG

Inventor： Somu Goswami ,  Christian Bretthauer ,  Matthias Friedrich Herrmann ,  Gunar Lorenz ,  Pradyumna Mishra ,  Daniel Neumaier ,  David Tumpold

IPC: G01P15/08 ,  G01P15/09 ,  G01P15/18 ,  G01H11/08 ,  H10N30/30 ,  B81B3/00 ,  H04R17/02 ,  H04R1/28 ,  H04R1/04 ,  H04R7/18 ,  H04R17/10

CPC classification number: G01P15/0802 ,  G01H11/08 ,  G01P15/09 ,  G01P15/18 ,  H04R1/28 ,  H04R17/02 ,  H10N30/302 ,  H10N30/308 ,  B81B3/0021 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2203/0127 ,  G01P2015/084 ,  H04R1/04 ,  H04R7/18 ,  H04R17/10 ,  H04R2201/003

Abstract: A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.

公开(公告)号：US11604171B2

公开(公告)日：2023-03-14

申请号：US17191212

申请日：2021-03-03

Applicant: Infineon Technologies AG

Inventor： David Tumpold

IPC: G01N29/24 ,  G01N29/036

Abstract: A fluid sensor includes a housing structure forming a cavity for an IR emitter for emitting an IR radiation in the cavity, wherein the IR radiation has a center wavelength for providing an interaction of the IR radiation with the target fluid resulting in a temperature change in the cavity or in the housing structure, which effects a mechanical pulse in the housing structure, and an inertial detection sensor mechanically coupled to the housing structure for sensing the mechanical pulse in the housing structure.

公开(公告)号：US11492249B2

公开(公告)日：2022-11-08

申请号：US16400365

申请日：2019-05-01

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Dominic Maier

IPC: B81B7/00 ,  G01N29/24 ,  B81C1/00 ,  H04R19/04 ,  H04R19/00

Abstract: A MEMS sensor includes a sensor package and a membrane arranged in the sensor package, wherein a first partial volume of the sensor package adjoins a first main side of the membrane and a second partial volume of the sensor package adjoins a second main side of the membrane, wherein the second main side is arranged opposite the first main side. The MEMS sensor includes a first opening in the sensor package, said first opening connecting the first partial volume to an external environment of the sensor package in an acoustically transparent fashion. The MEMS sensor includes a second opening in the sensor package, said second opening connecting the second partial volume to the external environment of the sensor package in an acoustically transparent fashion.

公开(公告)号：US20220128515A1

公开(公告)日：2022-04-28

申请号：US17647403

申请日：2022-01-07

Applicant: Infineon Technologies AG

Inventor： Johannes Manz ,  Wolfgang Klein ,  David Tumpold

IPC: G01N29/24 ,  G01N1/22

Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.

公开(公告)号：US11237090B2

公开(公告)日：2022-02-01

申请号：US16807698

申请日：2020-03-03

Applicant: Infineon Technologies AG

Inventor： Michael Schneider ,  Alfons Dehe ,  Manuel Dorfmeister ,  Christoph Glacer ,  Ulrich Krumbein ,  Ulrich Schmid ,  David Tumpold

IPC: G01N15/06

Abstract: A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.

公开(公告)号：US20210349057A1

公开(公告)日：2021-11-11

申请号：US17191212

申请日：2021-03-03

Applicant: Infineon Technologies AG

Inventor： David Tumpold

IPC: G01N29/24 ,  G01N29/036

Abstract: A fluid sensor includes a housing structure forming a cavity for an IR emitter for emitting an IR radiation in the cavity, wherein the IR radiation has a center wavelength for providing an interaction of the IR radiation with the target fluid resulting in a temperature change in the cavity or in the housing structure, which effects a mechanical pulse in the housing structure, and an inertial detection sensor mechanically coupled to the housing structure for sensing the mechanical pulse in the housing structure.

公开(公告)号：US20190246459A1

公开(公告)日：2019-08-08

申请号：US16251713

申请日：2019-01-18

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Sebastian Anzinger ,  Christoph Glacer

IPC: H05B3/20 ,  G01N21/3504 ,  G01N21/17 ,  G01J3/10 ,  H05B3/03

CPC classification number: H05B3/20 ,  G01J3/108 ,  G01N21/1702 ,  G01N21/3504 ,  G01N2021/1704 ,  H05B3/03 ,  H05B2203/032

Abstract: An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.

公开(公告)号：US10352910B2

公开(公告)日：2019-07-16

申请号：US15252332

申请日：2016-08-31

Applicant: Infineon Technologies AG

Inventor： Christoph Glacer ,  Alfons Dehe ,  David Tumpold

IPC: G01N33/00 ,  G01N29/24 ,  G01N29/14

Abstract: A gas analyzer is provided. The gas analyzer may include: a tubular housing having a housing wall extending along an axial direction of the tubular housing and surrounding a gas chamber configured to receive a gas to be analyzed therein, an excitation element positioned at a first axial end of the tubular housing and configured to selectively excite gas molecules of a specific type that is to be detected in the gas received in the gas chamber in a time-varying fashion, thereby generating acoustic waves, and a sensor positioned at a second axial end of the tubular housing and configured to detect acoustic waves generated by the excitation element.

公开(公告)号：US10302599B2

公开(公告)日：2019-05-28

申请号：US15335511

申请日：2016-10-27

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Alfons Dehe ,  Christoph Glacer

IPC: G01N29/24 ,  G01N29/22 ,  G01N29/36

Abstract: A photoacoustic gas detector may include: a gas chamber configured to receive a gas to be analyzed therein, an excitation element configured to selectively excite gas molecules of a specific type that is to be detected in the gas received in the gas chamber in a time-varying fashion, thereby generating pressure differences, a sensor configured to detect pressure differences generated by the excitation element, and a pump configured to pump gas between the exterior of the photoacoustic gas detector and the gas chamber.

公开(公告)号：US20190120797A1

公开(公告)日：2019-04-25

申请号：US15791132

申请日：2017-10-23

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Christoph Glacer

IPC: G01N29/24 ,  G01N33/00

CPC classification number: G01N29/2418 ,  G01N21/1702 ,  G01N33/004 ,  G01N2021/1704 ,  G01N2291/021 ,  G01N2291/02809

Abstract: A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.