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    11.
    发明专利
    未知

    公开(公告)号：DE69937217T2

    公开(公告)日：2008-07-03

    申请号：DE69937217

    申请日：1999-08-31

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： BARBER BRADLEY PAUL ,  BELK NATHAN ,  BISHOP DAVID JOHN ,  GAMMEL PETER LEDEL

    IPC: B81C1/00 ,  H01L27/08 ,  H01F17/00 ,  H01F27/06 ,  H01L21/02

    Abstract: An article comprising a micro-machined, passively self-assembling inductor (102) is disclosed. The inductor is fabricated using MEMS technology and advantageously utilizes materials compatible with CMOS such that the inductor is monolithically integrable with a CMOS chip. The inductor includes passive self-assembly means (110, 114) by which the inductor loop (104) is moved away from an underlying substrate (100), typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.

    12.
    发明专利
    未知

    公开(公告)号：DE69937217D1

    公开(公告)日：2007-11-15

    申请号：DE69937217

    申请日：1999-08-31

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： BARBER BRADLEY PAUL ,  BELK NATHAN ,  BISHOP DAVID JOHN ,  GAMMEL PETER LEDEL

    IPC: B81C1/00 ,  H01L27/08 ,  H01F17/00 ,  H01F27/06 ,  H01L21/02

    Abstract: An article comprising a micro-machined, passively self-assembling inductor (102) is disclosed. The inductor is fabricated using MEMS technology and advantageously utilizes materials compatible with CMOS such that the inductor is monolithically integrable with a CMOS chip. The inductor includes passive self-assembly means (110, 114) by which the inductor loop (104) is moved away from an underlying substrate (100), typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.

    13.
    发明专利
    未知

    公开(公告)号：DE69825226D1

    公开(公告)日：2004-09-02

    申请号：DE69825226

    申请日：1998-09-08

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  BISHOP DAVID JOHN ,  GAMMEL PETER LEDEL

    IPC: G12B5/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/18 ,  G02B21/26 ,  H02N1/00 ,  G02B21/00

    Abstract: A micromachined xyz stage, and microscopes utilizing such a stage, are disclosed. The xyz stage includes co-planar x- and y-drive means linked to a sample stage. Such x- and y- drive means are operable to position the sample stage in an x-y plane. The xyz stage further includes z-drive means operable to moves the sample stage out of the x-y plane. The z-drive means can be implemented by suspending a flat-plate electrode over the sample stage using hinged plate supports. As a voltage is applied across the plate electrode and the sample stage, an electrostatic force is generated, causing the sample stage to move towards the plate electrode. The hinged plate supports facilitate assembly of the z-drive means, in addition to providing support for it in its assembled configuration. By incorporating an optical fiber, the aperture of which has be drawn down to submicron size, a near-field scanning optical microscope can be formed. By forming a micromachined tip on the xyz stage, a scanning tunneling microscope or an atomic force microscope can be formed.

    14.
    发明专利
    未知

    公开(公告)号：DE69811563T2

    公开(公告)日：2004-02-19

    申请号：DE69811563

    申请日：1998-05-05

    Applicant: LUCENT TECHNOLOGIES INC

    Inventor： AKSYUK VLADIMIR ANATOLYEVICH ,  GAMMEL PETER LEDEL ,  BISHOP DAVID JOHN

    IPC: G02B6/35 ,  G02B26/08 ,  G02B6/26 ,  G02B26/02

    Abstract: Optical switches utilizing electrostatically-driven actuators formed from micro machined plates are disclosed. Under an applied voltage, a movable plate moves toward a fixed plate or a conductive region of an underlying support. The switches further include a mechanical linkage from the actuator to an optical device. The displacement of the movable plate generated at the actuator is transferred, via the mechanical linkage, to the optical device. The optical device, which is positioned in close proximity to optically-aligned spaced optical fibers, is movable into and out of an optical path defined by the optical cores of the optical fibers by the action of the actuator. An "in-plane" optical switch includes an actuator having two vertically-oriented electrodes, which generates a substantially horizontally-directed displacement of the movable plate and the linked optical device. An "out-of-plane" optical switch includes an actuator having at least one horizontally-disposed suspended above a conductive region of an underlying support. The actuator generates a substantially vertically-directed displacement of the movable plate and the linked optical device.

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