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    Micro-electro-mechanical component functioning as filter, for use in the range of radio-frequencies
    11.
    发明专利
    Micro-electro-mechanical component functioning as filter, for use in the range of radio-frequencies 未知

    公开(公告)号：FR2828186A1

    公开(公告)日：2003-02-07

    申请号：FR0110495

    申请日：2001-08-06

    Applicant: MEMSCAP

    Inventor： MHANI AHMED ,  FEDELI JEAN MARC

    IPC: B81B7/02 ,  H01F21/06 ,  H01F27/00 ,  H03H5/12 ,  H03H7/12 ,  H03H9/02 ,  H03H9/24

    Abstract: The microelectromechanical component (1) is implemented on a semiconductor-material substrate (10) and comprises two input terminals (7,8), two output terminals (26,27), an input metallic coil (2) connected to the input terminals and generating a magnetic field when carrying an electric current, a mobile part (3) connected to the substrate (10) by at least one deformable portion and comprising pads (11,12) made of ferromagnetic material, and an output part (4) forming a magnetic sensor connected to the output terminals and capable of generating an electric signal which is variable as a function of the displacement of the mobile part (3). The mobile part (3) can be displaced by the effect of a force acting on the pad (11) due to the magnetic field generated by the input coil (2). The input metallic coil (2) is of type solenoid, as in the first and the second embodiments, and of type planar spiral as in in the third embodiment. The mobile part (3) is laid out along the axis (9) of the input solenoid (2) and comprises two pads (11,12) separated by a longitudinal beam (14). Each pad (11,12) is connected to a pad (16,17) fixed on the substrate (10) by the intermediary of a set of beams, transversal beams (18,19,20,21) and longitudinal beams (23,24). The longitudinal beams (23,24) are connected to the fixed pads (16,17) by the intermediary of pairs of transversal portions joined to the fixed pads (16,17). The pads (11,12) are made of ferromagnetically soft material which becomes magnetized by the effect of magnetic field generated by the input coil, or made of ferromagnetically hard material forming permanent magnets. The first pad (11) is subjected to the force due to the magnetic field generated by the input coil (2), and the second spiral, as in the third embodiment. The output part in the second embodiment is a magnetic sensor from the group comprising the Hall effect sensor, the flux magnetometer, the magneto-resistances, the magneto-diodes, and the magneto-inductive sensors.

    13.
    发明专利
    未知

    公开(公告)号：FR2790328B1

    公开(公告)日：2001-04-20

    申请号：FR9902658

    申请日：1999-02-26

    Applicant: MEMSCAP

    Inventor： BARTERES LAURENT ,  MHANI AHMED ,  VALENTIN FRANCOIS ,  KARAM JEAN MICHEL

    IPC: H01F27/28 ,  H01F17/00 ,  H01L21/822 ,  H01L23/64 ,  H01L27/04 ,  H01F21/00

    Abstract: An inductive component (1) comprises a quartz substrate (2) and a planar inductor coil of copper strip (3) of specified thickness. A novel inductive component (1) comprises a quartz substrate layer (2) and a planar inductor formed of a spirally wound copper strip (3) of greater than 10 mu m thickness. Independent claims are also included for the following: (i) an integrated transformer comprising a quartz substrate (2) and two planar inductor coils which are wound within one another and which are formed of copper strip (3) of greater than 10 mu m thickness; and (ii) an IC associated with the above inductive component or integrated transformer mounted by means of conductive spacer elements which provide electrical connections between IC connection pads and connection terminals of the inductive component or integrated transformer, the inductive component or integrated transformer being oriented with respect to the IC such that its face including the inductors faces the IC. Preferred Features: The strip is about 30 mu m thick. A polyimide layer is provided between the inductor (3) and the substrate (2) and within the strip segment (8) connecting the coil center (9) to the strip end (10) forming a connection terminal. The strip is coated with a gold layer on its surfaces other than those in contact with the substrate or the polyimide layer and the spaces between the facing surfaces of adjacent windings is free from any material. The strip forms a circular spiral or two parallel series-connected spirals, the spiral nearest the substrate being embedded in a polyimide layer which is covered with a silica barrier layer. Spacer elements, of height close to the strip thickness, are mounted on the connection terminal-forming ends of the strip and have a cylindrical shape with a diameter of about three times their height.

    COMPOSANT MICROELECTROMECANIQUE
    15.
    发明专利
    COMPOSANT MICROELECTROMECANIQUE 未知

    公开(公告)号：CA2397187A1

    公开(公告)日：2003-02-06

    申请号：CA2397187

    申请日：2002-08-06

    Applicant: MEMSCAP

    Inventor： MHANI AHMED ,  FEDELI JEAN-MARC

    IPC: B81B7/02 ,  H01F21/06 ,  H01F27/00 ,  H03H5/12 ,  H03H7/12 ,  H03H9/02 ,  H03H9/24

    Abstract: Composant microélectromécanique (1) assurant des fonctions de filtrage, réalisé sur un substrat (10) à base de matériau semi-conducteur, et comporta nt deux bornes d'entrée (7, 8) et deux bornes de sortie (26, 27), caractérisé e n ce qu'il comporte également ~ un bobinage métallique d'entrée (2), relié aux bornes d'entrée (7, 8), et apte à générer un champ magnétique lorsqu'il est parcouru par un courant ; ~ un équipage mobile (3), relié au substrat par au moins une portion déformable, et incluant au moins une région (11, 12) réalisée en un matériau ferromagnétique, ledit équipage mobile (3) étant apte à se déplacer sous l'effet de la force subie par la région (11) en matériau ferromagnétique engendrée par le champ magnétique généré par le bobinage d'entrée (2) ; ~ un organe de sortie (4) formant un capteur magnétique, relié aux bornes de sortie (26, 27) et apte à générer un signal de nature électrique qui est variable en fonction du déplacement de l'équipage mobile (3).

    19.
    发明专利
    未知

    公开(公告)号：FR2790328A1

    公开(公告)日：2000-09-01

    申请号：FR9902658

    申请日：1999-02-26

    Applicant: MEMSCAP

    Inventor： BARTERES LAURENT ,  MHANI AHMED ,  VALENTIN FRANCOIS ,  KARAM JEAN MICHEL

    IPC: H01F27/28 ,  H01F17/00 ,  H01L21/822 ,  H01L23/64 ,  H01L27/04 ,  H01F21/00

    Abstract: An inductive component (1) comprises a quartz substrate (2) and a planar inductor coil of copper strip (3) of specified thickness. A novel inductive component (1) comprises a quartz substrate layer (2) and a planar inductor formed of a spirally wound copper strip (3) of greater than 10 mu m thickness. Independent claims are also included for the following: (i) an integrated transformer comprising a quartz substrate (2) and two planar inductor coils which are wound within one another and which are formed of copper strip (3) of greater than 10 mu m thickness; and (ii) an IC associated with the above inductive component or integrated transformer mounted by means of conductive spacer elements which provide electrical connections between IC connection pads and connection terminals of the inductive component or integrated transformer, the inductive component or integrated transformer being oriented with respect to the IC such that its face including the inductors faces the IC. Preferred Features: The strip is about 30 mu m thick. A polyimide layer is provided between the inductor (3) and the substrate (2) and within the strip segment (8) connecting the coil center (9) to the strip end (10) forming a connection terminal. The strip is coated with a gold layer on its surfaces other than those in contact with the substrate or the polyimide layer and the spaces between the facing surfaces of adjacent windings is free from any material. The strip forms a circular spiral or two parallel series-connected spirals, the spiral nearest the substrate being embedded in a polyimide layer which is covered with a silica barrier layer. Spacer elements, of height close to the strip thickness, are mounted on the connection terminal-forming ends of the strip and have a cylindrical shape with a diameter of about three times their height.

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