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    Vorrichtung zur Detektion von Wärmestrahlung mit hoher Auflösung, Verfahren zum Herstellen und Verwendung der Vorrichtung
    11.
    发明专利
    Vorrichtung zur Detektion von Wärmestrahlung mit hoher Auflösung, Verfahren zum Herstellen und Verwendung der Vorrichtung 未知

    公开(公告)号：DE102007046451B4

    公开(公告)日：2011-08-25

    申请号：DE102007046451

    申请日：2007-09-28

    Applicant: PYREOS LTD

    Inventor： GIEBELER CARSTEN DR ,  RETTIG UWE DR ,  SCHREITER MATTHIAS

    IPC: H01L25/03 ,  G01J5/34 ,  H01L23/36 ,  H01L27/16 ,  H01L37/00

    Abstract: Vorrichtung zur Detektion von Wärmestrahlung, mit einer auf einem Silizium-Substrat angeordneten Membran (101) und mindestens zwei Detektorelementen (11, 12), die jeweils zum Umwandeln von Wärmestrahlung in ein elektrisches Signal eingerichtet und auf der Membran (101) nebeneinander liegend angebracht sind, wobei auf der den Detektorelementen (11, 12) zugewandten Seite der Membran (100) mindestens eine Wärmeableitbahn (104) vorgesehen ist, die eine höhere Wärmeleitfähigkeit als die Membran (101) hat und mit den Detektorelementen (11, 12) via die Membran (101) thermisch leitend verbunden ist, so dass Wärme von den Detektorelementen (11, 12) mit der Wärmeableitbahn (104) abführbar ist, wodurch die Ansprechzeit der Detektorelemente (11, 12) niedrig ist, wobei die Wärmeleitbahn (104) von einer Dünnschicht gebildet ist, die auf der Membran (101) zwischen den Detektorelementen (11, 12) angeordnet ist und ausgelegt ist, um ein thermisches Übersprechen zu verhindern, und wobei in der Membran (101) integriert mindestens eine Wärmebarriere (105) vorgesehen ist, die eine niedrigere...

    Device having a sandwich structure for detecting thermal radiation, method of production and use of the device
    13.
    发明专利
    Device having a sandwich structure for detecting thermal radiation, method of production and use of the device 未知

    公开(公告)号：AU2008256414A1

    公开(公告)日：2008-12-04

    申请号：AU2008256414

    申请日：2008-05-28

    Applicant: PYREOS LTD

    Inventor： GIEBELER CARSTEN ,  SCHREITER MATTHIAS ,  ZAPF JORG

    IPC: G01J5/34 ,  G01J5/10 ,  H01L27/16 ,  H01L31/0203

    Abstract: In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

    15.
    发明专利
    未知

    公开(公告)号：BRPI0812098A2

    公开(公告)日：2014-11-25

    申请号：BRPI0812098

    申请日：2008-05-28

    Applicant: PYREOS LTD

    Inventor： GIEBELER CARSTEN ,  SCHREITER MATTHIAS ,  ZAPF JOERG

    IPC: G01J5/34 ,  G01J5/10 ,  H01L27/16 ,  H01L31/0203

    Abstract: In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

    Device having a membrane structure for detecting thermal radiation, method of production and use of the device
    17.
    发明专利
    Device having a membrane structure for detecting thermal radiation, method of production and use of the device 未知

    公开(公告)号：AU2008256413B2

    公开(公告)日：2013-09-12

    申请号：AU2008256413

    申请日：2008-05-28

    Applicant: PYREOS LTD

    Inventor： SCHREITER MATTHIAS ,  PAULUS CHRISTIAN ,  GIEBELER CARSTEN

    IPC: G01J5/04 ,  G01J5/10 ,  G01J5/22

    Abstract: The invention relates to a device for detecting thermal radiation, comprising at least one membrane on which at least one thermal detector element for converting the thermal radiation to an electrical signal is arranged, and at least one circuit carrier for carrying the membrane and for carrying at least one readout circuit for reading out the electrical signal, the detector element and the readout circuit being electrically interconnected through the membrane through an electrical via. The invention also relates to a method for producing said device by way of the following process steps: a) providing the membrane having the detector element and at least one electrical via and providing the circuit carrier, and b) uniting the membrane and the circuit carrier in such a manner that the detector element and the readout circuit are electrically interconnected through the membrane through an electrical via. The production is preferably carried out on the wafer level: Functionalized silicon substrates are stacked, firmly interconnected and then subdivided. The detector elements are preferably pyroelectric detector elements. The device according to the invention is used in motion detectors, presence detectors and thermal imaging cameras.

    УСТРОЙСТВО С МЕМБРАННОЙ КОНСТРУКЦИЕЙ ДЛЯ ОБНАРУЖЕНИЯ ТЕПЛОВОГО ИЗЛУЧЕНИЯ, СПОСОБ ЕГО ИЗГОТОВЛЕНИЯ И ИСПОЛЬЗОВАНИЯ
    18.
    发明专利
    УСТРОЙСТВО С МЕМБРАННОЙ КОНСТРУКЦИЕЙ ДЛЯ ОБНАРУЖЕНИЯ ТЕПЛОВОГО ИЗЛУЧЕНИЯ, СПОСОБ ЕГО ИЗГОТОВЛЕНИЯ И ИСПОЛЬЗОВАНИЯ 未知

    公开(公告)号：RU2468346C2

    公开(公告)日：2012-11-27

    申请号：RU2009144001

    申请日：2008-05-28

    Applicant: PYREOS LTD

    Inventor： GIEBELER CARSTEN ,  SCHREITER MATTHIAS ,  PAULUS CHRISTIAN

    IPC: G01J5/10

    Abstract: Изобретениеотноситсяк теплометриии можетбытьиспользованоприобнаружениитепловогоизлучения. Устройствосодержитпоменьшеймереоднумембрану, накоторойрасположенпоменьшеймереодиндатчиктепладляпреобразованиятепловогоизлученияв электрическийсигнали поменьшеймереоднуподложкуконтура, несущуюмембрану, ипоменьшеймереодинсчитывающийконтурдлясчитыванияэлектрическогосигнала. Датчикэлектрическисвязанчерезмембранусосчитывающимконтуромпосредствомсквозногоконтакта. Изобретениетакжеотноситсяк способуизготовленияуказанногоустройства, содержащемуследующиешаги: берутмембранус датчикоми поменьшеймереоднимсквознымэлектрическимконтактом, атакжеподложкуконтураи собираютмембрануи подложкуконтуратакимобразом, чтопроходящийчерезмембранусквознойконтактзамыкаетэлектрическуюцепьмеждудатчикоми считывающимконтуром. Предпочтительноустройстваизготавливаютв видесхемнаобщихпластинах. Такиефункциональныекремниевыепластинысобираютв стопу, надежносоединяют, азатемотдельныеготовыеустройстваразделяют. Вкачестведатчиковпредпочтительноиспользуютпироэлектрическиедатчики. Устройство, согласноизобретению, используютв качестведатчикадвижения, датчикаприсутствияи вкачестветепловизоров. Техническийрезультат: повышениеточностии информативноститеплометрическихизмерений. 2 н. и 13 з.п. ф-лы, 2 ил.

    20.
    发明专利
    未知

    公开(公告)号：DE102007024903B4

    公开(公告)日：2009-05-07

    申请号：DE102007024903

    申请日：2007-05-29

    Applicant: PYREOS LTD

    Inventor： GIEBELER CARSTEN ,  SCHREITER MATTHIAS ,  ZAPF JOERG

    IPC: H01L37/00 ,  G01J5/02 ,  G01J5/12 ,  G01J5/34

    Abstract: In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.

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