公开(公告)号：AU5464700A

公开(公告)日：2001-01-02

申请号：AU5464700

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS AND PLASTICS INC

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  KHAUND ARUP

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano-chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：ES2185144T3

公开(公告)日：2003-04-16

申请号：ES98903491

申请日：1998-01-14

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  KAVANAUGH MICHAEL D

IPC: B02C19/00 ,  C09K3/14

Abstract: Porous ceramic particles can be fragmented by generating a gas inside the pores at a sufficient pressure to cause the particles to be fragmented. The preferred way of generating the pressure is by immersing the particles in a liquid that at ambient temperatures and pressures is a gas until the liquid is absorbed into the pores and thereafter rapidly changing the conditions such that the liquid becomes a gas resulting in explosive fragmentation of the ceramic particles.

公开(公告)号：AU754328B2

公开(公告)日：2002-11-14

申请号：AU7090000

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：BR0014533A

公开(公告)日：2002-06-04

申请号：BR0014533

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS E PLASTI

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：BR0012290A

公开(公告)日：2002-04-16

申请号：BR0012290

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  KHAUND ARUP

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano-chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：CA2344980A1

公开(公告)日：2001-11-04

申请号：CA2344980

申请日：2001-04-25

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K

IPC: C04B38/06 ,  C01F7/02 ,  C01F7/44 ,  C04B35/111 ,  C09K3/14

Abstract: Alpha alumina abrasive grits which are particularly well- suited to medium to low pressure grinding applications wherein the grits comprise uniformly dispersed microvoids.

公开(公告)号：AU7090000A

公开(公告)日：2001-04-30

申请号：AU7090000

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.

公开(公告)号：CA2382724A1

公开(公告)日：2001-04-12

申请号：CA2382724

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R ,  GARG AJAY K

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particle s having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：CA2374373C

公开(公告)日：2005-04-05

申请号：CA2374373

申请日：2000-06-06

Applicant: SAINT GOBAIN CERAMICS

Inventor： GARG AJAY K ,  KHAUND ARUP ,  TANIKELLA BRAHMANANDAM V

IPC: B24B37/00 ,  C01F17/00 ,  C09K3/14 ,  H01L21/304 ,  H01L21/306

Abstract: A polishing slurry, useful in optical or CMP applications, comprises a ceria with a BET surface area of at least 10 m2/gm. The slurry may be made by subjecting a commercial ceria slurry comprising agglomerates to a mechano- chemical treatment at a pH of from 9 to 11 using media that are low purity alpha alumina or zirconia. Preferred slurries maintain a positive surface charge at all pH values. CMP slurries preferably comprise in addition an anionic surfactant to aid in removal of surface residues.

公开(公告)号：BR0014755A

公开(公告)日：2002-09-24

申请号：BR0014755

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS E PLASTI

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM V ,  DELANEY WILLIAM R

IPC: B24B57/02 ,  B24B37/24 ,  B24D3/00 ,  B24D3/28 ,  B24D3/34 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304

Abstract: Abrasive materials comprising silica-coated transitional alumina particles with an average particle size of less than 50 nanometers and a BET surface area of at least 50 m2/gm are useful in CMP processes either in the form of slurries or as fixed abrasives.