14.
    发明专利
    未知

    公开(公告)号:DE69313816T2

    公开(公告)日:1998-03-26

    申请号:DE69313816

    申请日:1993-02-11

    Abstract: A process for simultaneously fabricating a flash-EEPROM memory and circuit transistors using the DPCC process wherein the first polysilicon layer is not removed from the circuit area (40a), and the gate regions of the circuit transistors are formed by shorting first and second polysilicon layers. The thin tunnel oxide layer (61) of the memory cells is formed using the same mask (36) provided for implanting boron (38) into the cell area (40b) of the substrate (38). Following implantation and without removing the mask, the gate oxide (35') formed previously over the whole surface of the wafer is removed from the cell area; the boron implant (38) mask is removed; and tunnel oxidation is performed so as to increase the thickness of the tunnel oxide (61) by the desired amount, and slightly increase the thickness of the oxide (gate oxide 35'') in the transistor area (40a).

    15.
    发明专利
    未知

    公开(公告)号:DE69313816D1

    公开(公告)日:1997-10-16

    申请号:DE69313816

    申请日:1993-02-11

    Abstract: A process for simultaneously fabricating a flash-EEPROM memory and circuit transistors using the DPCC process wherein the first polysilicon layer is not removed from the circuit area (40a), and the gate regions of the circuit transistors are formed by shorting first and second polysilicon layers. The thin tunnel oxide layer (61) of the memory cells is formed using the same mask (36) provided for implanting boron (38) into the cell area (40b) of the substrate (38). Following implantation and without removing the mask, the gate oxide (35') formed previously over the whole surface of the wafer is removed from the cell area; the boron implant (38) mask is removed; and tunnel oxidation is performed so as to increase the thickness of the tunnel oxide (61) by the desired amount, and slightly increase the thickness of the oxide (gate oxide 35'') in the transistor area (40a).

    20.
    发明专利
    未知

    公开(公告)号:DE602005019244D1

    公开(公告)日:2010-03-25

    申请号:DE602005019244

    申请日:2005-11-25

    Abstract: Integrated transistor device (10) formed in a chip of semiconductor material (15) having an electrical-insulation region (31) delimiting an active area (30) accommodating a bipolar transistor (11) of vertical type and a MOSFET (12) of planar type, contiguous to one another. The active area accommodates a collector region (18); a bipolar base region (19) contiguous to the collector region; an emitter region (20) within the bipolar base region; a source region (23), arranged at a distance from the bipolar base region; a drain region (24); a channel region (22) arranged between the source region and the drain region; and a well region (35). The drain region (24) and the bipolar base region (19) are contiguous and form a common base structure (19, 24, 37) shared by the bipolar transistor and the MOSFET. Thereby, the integrated transistor device (10) has a high input impedance and is capable of driving high currents, while only requiring a small integration area.

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