Abstract:
A multi-device module (61), comprising: a first substrate (23), which houses a first MEMS transducer (21, 1), designed to transduce a first environmental quantity into a first electrical signal, and an integrated circuit (22, 22'), coupled to the first MEMS transducer for receiving the first electrical signal; a second substrate (49), which houses a second MEMS transducer (41, 42), designed to transduce a second environmental quantity into a second electrical signal; and a flexible printed circuit (36), mechanically connected to the first and second substrates and electrically coupled to the integrated circuit and to the second MEMS transducer so that the second electrical signal flows, in use, from the second MEMS transducer to the integrated circuit.
Abstract:
The mirror group (30) is formed by a monolithic frame (31) bent along a bending line (C) and including a first and a second supporting portions (32, 33) carrying, respectively, a first and a second chips forming two micromirrors made using MEMS technology. The first and second supporting portions (32, 33) are arranged on opposite sides of the bending line of the frame (C), angularly inclined with respect to each other. The mirror group is obtained by separating a shaped metal tape carrying a plurality of frames, having flexible electric connection elements. After attaching the chips, the frames are precut, bent along the bending line, and separated.
Abstract:
A transducer module (10), comprising: a supporting substrate (23), having a first side (23a) and a second side (23b); a cap (27), which extends over the first side of the supporting substrate and defines therewith a first chamber (108) and a second chamber (109) internally isolated from one another; a first transducer (1) in the first chamber (8); a second transducer (42) in the second chamber (18); and a control chip (22), which extends at least partially in the first chamber and/or in the second chamber and is functionally coupled to the first and second transducers for receiving, in use, the signals transduced by the first and second transducers.
Abstract:
A transducer module (10), comprising: a supporting substrate (23), having a first side (23a) and a second side (23b); a cap (27), which extends over the first side of the supporting substrate and defines therewith a first chamber (108) and a second chamber (109) internally isolated from one another; a first transducer (1) in the first chamber (8); a second transducer (42) in the second chamber (18); and a control chip (22), which extends at least partially in the first chamber and/or in the second chamber and is functionally coupled to the first and second transducers for receiving, in use, the signals transduced by the first and second transducers.
Abstract:
The mirror group (30) is formed by a monolithic frame (31) bent along a bending line (C) and including a first and a second supporting portions (32, 33) carrying, respectively, a first and a second chips forming two micromirrors made using MEMS technology. The first and second supporting portions (32, 33) are arranged on opposite sides of the bending line of the frame (C), angularly inclined with respect to each other. The mirror group is obtained by separating a shaped metal tape carrying a plurality of frames, having flexible electric connection elements. After attaching the chips, the frames are precut, bent along the bending line, and separated.
Abstract:
In a microfluidic assembly (20), a microfluidic device (1') is provided with a body (4) in which at least a first inlet (7) for loading a fluid to analyse and a buried area (8) in fluidic communication with the first inlet (7) are defined. An analysis chamber (10') is in fluidic communication with the buried area (8) and an interface cover (23) is coupled in a fluid-tight manner above the microfluidic device (1'). The interface cover (23) is provided with a sealing portion (35) in correspondence to the analysis chamber (10'), adapted to assume a first configuration, at rest, in which it leaves the analysis chamber (10') open, and a second configuration, as a consequence of a stress, in which it closes in a fluid-tight manner the same analysis chamber.