MIRROR GROUP, IN PARTICULAR FOR A PICOPROJECTOR, COMPRISING MICROMIRRORS MADE USING THE MEMS TECHNOLOGY
    12.
    发明公开
    MIRROR GROUP, IN PARTICULAR FOR A PICOPROJECTOR, COMPRISING MICROMIRRORS MADE USING THE MEMS TECHNOLOGY 审中-公开
    MIRROR GROUP,特别是PICOPROJECTOR,包括使用MEMS技术制造的微反射镜

    公开(公告)号:EP3206071A1

    公开(公告)日:2017-08-16

    申请号:EP16194664.5

    申请日:2016-10-19

    Abstract: The mirror group (30) is formed by a monolithic frame (31) bent along a bending line (C) and including a first and a second supporting portions (32, 33) carrying, respectively, a first and a second chips forming two micromirrors made using MEMS technology. The first and second supporting portions (32, 33) are arranged on opposite sides of the bending line of the frame (C), angularly inclined with respect to each other. The mirror group is obtained by separating a shaped metal tape carrying a plurality of frames, having flexible electric connection elements. After attaching the chips, the frames are precut, bent along the bending line, and separated.

    Abstract translation: 镜组(30)由沿着弯曲线(C)弯曲并包括第一和第二支撑部分(32,33)的整体框架(31)形成,所述第一和第二支撑部分分别承载形成两个微镜的第一和第二芯片 使用MEMS技术制造。 第一支撑部分和第二支撑部分(32,33)布置在框架(C)的弯曲线的相对侧上,相对于彼此成角度地倾斜。 镜组通过分离带有多个框架的成形金属带而获得,所述金属带具有柔性电连接元件。 在连接芯片后,框架被预切,沿弯曲线弯曲并分离。

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