PLASMA DISPLAY PANEL MANUFACTURING METHOD AND MANUFACTURING DEVICE
    14.
    发明公开
    PLASMA DISPLAY PANEL MANUFACTURING METHOD AND MANUFACTURING DEVICE 有权
    方法和设备制造等离子SCOREBOARD

    公开(公告)号:EP2093306A4

    公开(公告)日:2010-03-03

    申请号:EP07830048

    申请日:2007-10-18

    Applicant: ULVAC INC

    CPC classification number: C23C14/081 C23C14/568 H01J9/02 H01J11/12 H01J11/40

    Abstract: [Object] To simplify a production process regarding a production method for a plasma display panel by lowering a deposition temperature so that a (111)-oriented MgO layer can be easily obtained as a protective layer. [Solving Means] In a production method for a plasma display panel constituted of a front substrate including a scanning electrode, a sustaining electrode, a dielectric layer, and a protective layer, and a back substrate including an address electrode, a barrier rib, and a phosphor, a temperature of a glass substrate before being subjected to vapor deposition in an electron beam vapor deposition apparatus is set at room temperature (120°C or less), and an MgO deposition rate of the electron beam vapor deposition apparatus is set to be 8000 Å*m/min or more. By the deposition at room temperature, an MgO layer equivalent to that obtained by conventional deposition at high temperature can be obtained.

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