公开(公告)号：CA2281373C

公开(公告)日：2005-03-22

申请号：CA2281373

申请日：1999-09-03

Applicant: XEROX CORP

Inventor： NOOLANDI JAAN ,  PEETERS ERIC ,  VOLKEL ARMIN R ,  BOLTE STEVEN B ,  SHI AN-CHANG ,  APTE RAJ B ,  KOVACS GREGORY J ,  ANDERSON GREGORY B ,  FLOYD PHILIP D ,  ENDICOTT FREDERICK J ,  HAYS DAN A ,  SMALL JONATHAN A ,  KUBBY JOEL A ,  JACKSON WARREN B ,  LEAN MENG H

IPC: B41J2/01 ,  B41J2/14 ,  B41J2/21 ,  B41J2/11

Abstract: A marking apparatus is disclosed in which a propellant stream is passed through a channel and directed toward a substrate. Marking material, such as ink, toner, etc., is controllably introduced into the propellant stream and imparted with sufficient kinetic energy thereby to be made incident upon a substrate. At sufficient velocity, and with appropriate marking material, th e marking material may be kinetically fused to the substrate. A multiplicity o f channels for directing the propellant and marking material allow for high throughput, high resolution marking. Multiple marking materials may be introduced into the channel and mixed therein prior to being made incident o n the substrate, or mixed or superimposed on the substrate without registratio n. One example is a single-pass, full-color printer.

公开(公告)号：CA2460765A1

公开(公告)日：2004-09-19

申请号：CA2460765

申请日：2004-03-12

Applicant: XEROX CORP

Inventor： GERMAN KRISTINE A ,  KUBBY JOEL A ,  FEINBERG KATHLEEN A ,  MA JUN ,  LIN PINYEN ,  GULVIN PETER M

IPC: G02B26/02 ,  B81B3/00 ,  G02B6/12 ,  G02B6/35 ,  H04Q3/52 ,  B81B7/02

Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M .times. N optical signal switching system. The optical MEMS switch comprises a plurali ty of optical waveguides formed on a cantilever beam platform for switching optica l states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical A dd- Drop Multiplexers (ROADMs), may be fabricated.

公开(公告)号：BR0204570A

公开(公告)日：2004-06-08

申请号：BR0204570

申请日：2002-10-31

Applicant: XEROX CORP

Inventor： KUBBY JOEL A ,  LIN PINYEN ,  CHEN JINGKUANG ,  SU YI

IPC: G02B6/12 ,  B81B3/00 ,  G02B6/34 ,  G02B6/35 ,  G02B6/293 ,  H01L27/14

Abstract: A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments, the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optical switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.

公开(公告)号：CA2411012A1

公开(公告)日：2003-05-08

申请号：CA2411012

申请日：2002-11-01

Applicant: XEROX CORP

Inventor： LIN PINYEN ,  KUBBY JOEL A ,  CHEN JINGKUANG ,  SU YI

IPC: G02B6/12 ,  B81B3/00 ,  G02B6/34 ,  G02B6/35 ,  H04J14/02 ,  G02B26/08

Abstract: 25 A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments , the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optics switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.

公开(公告)号：DE60324487D1

公开(公告)日：2008-12-18

申请号：DE60324487

申请日：2003-01-06

Applicant: XEROX CORP

Inventor： KUBBY JOEL A

IPC: B81B3/00 ,  B81C1/00 ,  G02F1/01 ,  G02F1/025 ,  H01L21/764

Abstract: A silicon structure is at least partially thermally isolated from a substrate (210) by a gap (232) formed in an insulation layer (230) disposed between the substrate (210) and a silicon layer (220) in which the silicon structure is formed. In embodiments, the substrate (210) is made of silicon and the silicon layer (220) is made of single crystal silicon. In embodiments, the gap (232) is formed such that a surface of the substrate (210) under the gap (232) is maintained substantially unetched. In other embodiments, the gap (232) is formed without affecting the surface of the substrate (210) underlying the gap (232). In particular, the gap (232) may be formed by removing a portion of the insulation layer (230) with an etch that does not affect the surface of the substrate (210) underlying the gap. In embodiments the etch is highly selective between the material of the insulation layer (230) and the material of the substrate (210). The etch selectivity may be about 20:1 or greater.

公开(公告)号：DE60128440T2

公开(公告)日：2008-01-24

申请号：DE60128440

申请日：2001-11-27

Applicant: MICROSCAN SYSTEMS INC ,  XEROX CORP

Inventor： SCHARF BRUCE R ,  GULVIN PETER M ,  CHEN JINGKUANG ,  KUBBY JOEL A ,  LIN CHUANG-CHIA ,  TRAN ALEX T

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/762 ,  H01L27/14

Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a pattern on a single crystal silicon layer separated by an insulator layer from a substrate layer; defining a structure in the single-crystal silicon layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; and releasing the formed structure.

公开(公告)号：CA2411012C

公开(公告)日：2007-08-07

申请号：CA2411012

申请日：2002-11-01

Applicant: XEROX CORP

Inventor： SU YI ,  CHEN JINGKUANG ,  LIN PINYEN ,  KUBBY JOEL A

IPC: G02B6/12 ,  H04J14/02 ,  B81B3/00 ,  G02B6/34 ,  G02B6/35 ,  G02B26/08

Abstract: 25 A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments , the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optics switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.

公开(公告)号：DE69737431T2

公开(公告)日：2007-06-14

申请号：DE69737431

申请日：1997-06-24

Applicant: XEROX CORP

Inventor： PEETERS ERIC ,  KUBBY JOEL A

IPC: H01L21/302 ,  H01L21/3065 ,  B81C1/00 ,  H01L21/306 ,  H01L21/3063 ,  H01L21/465 ,  H01L49/00

Abstract: A dry etch process for etching a semiconductor substrate having a p-n heterojunction formed by contact between a p-layer and a n-layer requires application of a reverse bias voltage of less than a p-n breakdown voltage across the p-n heterojunction. A plasma containing chemically reactive negative ions is directed against the n-layer, with etching of non-masked regions of the substrate continuing until it is substantially stopped at the reverse biased p-n heterojunction. The semiconductor substrate can be cooled or periodically recoated with erodable protective material to limit sidewall damage to the semiconductor substrate while still allowing downward etching. This dry etch process is well suited for construction of dimensionally accurate microdevices and microelectromechanical systems.

公开(公告)号：DE69707043T2

公开(公告)日：2002-02-14

申请号：DE69707043

申请日：1997-04-14

Applicant: XEROX CORP

Inventor： PEETERS ERIC ,  VITURRO ENRIQUE R ,  DESHPANDE NARAYAN V ,  KUBBY JOEL A ,  DELOUISE LISA A

IPC: B41J2/05 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16

Abstract: A thermal ink-jet ejector (10) having a fluid flow channel (12) extending between an ink inlet (16) and a nozzle (18) for the ejection of liquid ink therefrom, includes a rear channel diffuser (30) disposed between the heating element (20) and the inlet (16), and/or a front channel diffuser (32) disposed between the heating element (20) and the nozzle (16). Each diffuser (30, 32) includes an arrangement of tapers which decrease the flow impedance of liquid ink flowing toward the nozzle (18), and increase the flow impedance of liquid ink flowing toward the inlet (16). The arrangement increases the kinetic energy of droplets being ejected, and also increases the speed of re-fill of the channel with liquid ink following ejection.

公开(公告)号：BR0005555A

公开(公告)日：2001-07-03

申请号：BR0005555

申请日：2000-11-24

Applicant: XEROX CORP

Inventor： HUBBLE FRED F III ,  KUBBY JOEL A

IPC: B41J29/46 ,  B41J2/525 ,  G01J3/02 ,  G01J3/46 ,  G01J3/50 ,  G03G15/00 ,  G03G15/01 ,  G03G21/00 ,  H04N1/23 ,  H04N1/60

Abstract: An improved spectrophotometer for non-contact measuring of the colors of colored target areas, especially, test patches on moving printed test sheets in an unrestrained normal output path of a color printer, which test patches may be sequentially angularly illuminated with multiple different colors, with a photosensor providing electrical signals in response, the spectrophotometer having a lens system for transmitting that reflected illumination from the test patch to the photosensor with a lens magnification ratio of approximately one to one. The exemplary spectrophotometer provides non-contact color measurements of moving color target areas variably displaced therefrom within normal paper path baffle spacings, with a displacement insensitivity of at least 6 millimeters about a nominal target to spectrophotometer separation.