公开(公告)号：CA2397760A1

公开(公告)日：2001-07-26

申请号：CA2397760

申请日：2001-01-18

Applicant: XROS INC

Inventor： SLATER TIMOTHY G

IPC: H01L21/20 ,  H01L21/762

Abstract: A bonded wafer fabrication mechanism for a micro-mirror structure provides f or oxidizing a device wafer instead of a handle wafer or splitting thermal oxidation processing between the device wafer and the handle wafer prior to etching. The flatness of mirrors in micro-mirror structures fabricated according to such a mechanism is substantially improved.

公开(公告)号：CA2340192A1

公开(公告)日：2000-03-09

申请号：CA2340192

申请日：1999-09-02

Applicant: XROS INC

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P

IPC: B81B3/00 ,  G01P9/04 ,  G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B26/08 ,  G02B26/10 ,  H04Q11/00 ,  G01C19/00 ,  G01P15/08

Abstract: A monolithically fabricated micromachined structure couples a reference fram e (56) to a dynamic plate (58). Performance of torsional oscillators or scanne rs benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segmen t (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).

公开(公告)号：WO0013210A9

公开(公告)日：2000-08-31

申请号：PCT/US9920218

申请日：1999-09-02

Applicant: XROS INC

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P

IPC: B81B3/00 ,  G01P9/04 ,  G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B26/08 ,  G02B26/10 ,  H04Q11/00 ,  G01C19/00 ,  G01P15/08

CPC classification number: H04Q11/0005 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

Abstract: A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).

Abstract translation: 单片制造的微机械结构将参考框架（56）耦合到动态板（58）。 扭转振荡器或扫描仪的性能通过将框架（56）与折叠式扭转挠曲铰链（96）而不是扭转杆耦合到板（58）大大有益。 用于从框架（56）支撑板（58）的折叠式扭转挠曲铰链（96）由三个基本铰链部分（102a，102b，102c）组成。 每个基本铰链段（102a，102b，102c）具有纵向轴线（98），该纵向轴线不垂直于板（58）的旋转轴线（62）定向。 折叠的扭转挠曲铰链（96）的中间区域（104）将基本铰链节段（102a，102b，102c）的直接相邻的端部（106）连接在一起。 基本铰链部分（102b）可以包括用于测量板（58）相对于框架（56）围绕轴线（62）的角度旋转的扭转传感器（108）。

公开(公告)号：WO0013210A3

公开(公告)日：2000-06-15

申请号：PCT/US9920218

申请日：1999-09-02

Applicant: XROS INC

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P

IPC: B81B3/00 ,  G01P9/04 ,  G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B26/08 ,  G02B26/10 ,  H04Q11/00 ,  G01C19/00 ,  G01P15/08

CPC classification number: H04Q11/0005 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

Abstract: A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).

Abstract translation: 单片制造的微加工结构将参考框架（56）耦合到动态板（58）。 通过用折叠的扭转挠性铰链（96）而不是扭杆将框架（56）联接到板（58）上，扭转振荡器或扫描器的性能受益匪浅。 用于从框架（56）支撑板（58）的折叠扭转挠曲铰链（96）由三个基本铰链段（102a，102b，102c）组成。 每个基本铰链段（102a，102b，102c）具有不垂直于板（58）的旋转轴线（62）定向的纵向轴线（98）。 折叠的扭转挠性铰链（96）的中间区域（104）将基本铰链段（102a，102b，102c）的紧邻的端部（106）联接在一起。 基本铰链段（102b）可以包括用于相对于框架（56）测量围绕轴线（62）的板（58）的角度旋转的扭转传感器（108）。

公开(公告)号：WO0020899A2

公开(公告)日：2000-04-13

申请号：PCT/US9921139

申请日：1999-09-15

Applicant: XROS INC

Inventor： NEUKERMANS ARMAND P ,  SLATER TIMOTHY G ,  BAUGHMAN TYLER L ,  DOWNING JAMES P ,  FORKER JOHN S ,  REZNICK GREGORY A ,  CALMES SAM ,  CLARK STEVEN M ,  FOSTER JACK D ,  SCHUMAN MARC R ,  RAMASWAMI RAJIV

IPC: B81B3/00 ,  G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B26/08 ,  H04B10/02 ,  H04Q11/00 ,  G02B

CPC classification number: G02B6/3518 ,  G02B6/32 ,  G02B6/327 ,  G02B6/352 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3636 ,  G02B6/3656 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q11/0005 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

Abstract: A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs of deflectors (172) coupling a beam of light (108) between optical fibers (106).

Abstract translation: 光纤开关（400）包括接收并固定光纤（106）的端部（104）的光纤切换模块（100）。 模块（100）包括多个反射光束偏转器（172），所述反射光束偏转器可被选择为用于在一对光纤（106）之间耦合光束（108）的对。 模块（100）还从每个偏转器（172）产生指示其方向的方位信号。 包括在开关（400）中的端口卡（406）将驱动信号提供给模块（100）以定向至少一个偏转器（172）。 门卡（406）还接收由该偏转器（172）产生的定向信号以及指定偏转器（172）的定向的坐标。 portcard（406）将接收的坐标与从偏转器（172）接收的方位信号进行比较，并调整提供给模块（100）的驱动信号以减小接收的坐标和方位信号之间的差异。 开关（400）还采用光学对准以精确地定向耦合光纤（106）之间的光束（108）的成对偏转器（172）。

公开(公告)号：EP1012890A4

公开(公告)日：2000-06-28

申请号：EP98915245

申请日：1998-04-01

Applicant: XROS INC

Inventor： NEUKERMANS ARMAND P ,  SLATER TIMOTHY G ,  DOWNING PHILIP

IPC: B81B3/00 ,  G01C19/56 ,  G01P9/04 ,  G02B26/08 ,  G02B26/10 ,  H01L41/09 ,  H02K33/18 ,  H01L41/08

CPC classification number: B81B3/0078 ,  B81B2203/0109 ,  B81C2201/0167 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  G02B26/101 ,  H02K33/18

Abstract: An improved micromachined structure used for beam scanners, gyroscopes, etc. includes a reference member (154, 54) from which project a first pair of axially aligned torsion bars (156, 56). A first dynamic member (54 or 52), coupled to and supported from the reference member (154, 54) by the torsion bars (156, 56), oscillates in one-dimension about the torsion bar's axis. A second dynamic member (52) may be supported from the first dynamic member (54) by a second pair of axially aligned torsion bars (56) for two-dimensional oscillation. The dynamic members (54, 52) respectively exhibit a plurality of vibrational modes each having a frequency and a Q. The improvement includes means for altering a characteristic of the dynamic member's frequency and Q. Coupling between dynamic members (54, 52) permits altering the second dynamic member's frequency and Q by techniques applied to the first dynamic member (54). Some techniques disclosed also increase oscillation amplitude or reduce driving voltage, and also increase mechanical ruggedness of the structure.

公开(公告)号：WO0161400A3

公开(公告)日：2003-07-10

申请号：PCT/US0105309

申请日：2001-02-16

Applicant: XROS INC NORTEL NETWORKS ,  SLATER TIMOTHY G ,  NEUKERMANS ARMAND P ,  BAJIKAR SATEESH S ,  DOWNING JAMES P ,  SCHUMAN MARC R ,  CALMES SAM ,  ROMANSOVSKY ALEXANDER B ,  GREEN JOHN

Inventor： SLATER TIMOTHY G ,  NEUKERMANS ARMAND P ,  BAJIKAR SATEESH S ,  DOWNING JAMES P ,  SCHUMAN MARC R ,  CALMES SAM ,  ROMANSOVSKY ALEXANDER B ,  GREEN JOHN

IPC: G02B26/08 ,  G02B26/02

CPC classification number: G02B26/085 ,  G02B26/0841

Abstract: A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. Torsion sensors (244) are provided along the axes of rotation to control deflection of the quadrant deflection electrodes. The shielded sensor structure (240) includes a silicon layer (241), an insulating layer (242) and a metal layer (243). The structure further includes a sensor implant resistor (244) in the silicon layer (241) and a shield (245) that is applied over the sensor implant resistor (244) to stabilise sensor output and eliminate light sensitivity.

Abstract translation: 提出了具有多个具有改进的偏转和其它特性的二维微镜结构的微镜条组件。 在微镜结构中，用于静电偏转的电极设置在被加工，附接或模制成基底的锥形或准圆锥形实体上。 扭转传感器（244）沿旋转轴提供以控制象限偏转电极的偏转。 屏蔽传感器结构（240）包括硅层（241），绝缘层（242）和金属层（243）。 该结构还包括在硅层（241）中的传感器注入电阻器（244）和施加在传感器注入电阻器（244）上方以稳定传感器输出并消除光敏感的屏蔽件（245）。

公开(公告)号：WO0154176A9

公开(公告)日：2003-01-16

申请号：PCT/US0101758

申请日：2001-01-18

Applicant: XROS INC NORTEL NETWORKS ,  SLATER TIMOTHY G

Inventor： SLATER TIMOTHY G

IPC: H01L21/20 ,  H01L21/762

CPC classification number: H01L21/2007 ,  H01L21/76251

Abstract: A bonded wafer fabrication mechanism for a micro-mirror structure provides for oxidizing a device wafer instead of a handle wafer or splitting thermal oxidation processing between the device wafer and the handle wafer prior to etching. The flatness of mirrors in micro-mirror structures fabricated according to such a mechanism is substantially improved.

Abstract translation: 用于微镜结构的接合晶片制造机构提供了在蚀刻之前，在器件晶片和处理晶片之间氧化器件晶片而不是处理晶片或分裂热氧化处理。 根据这种机制制造的微镜结构中的反射镜的平面度显着提高。

公开(公告)号：WO9905635A9

公开(公告)日：1999-07-08

申请号：PCT/US9815509

申请日：1998-07-23

Applicant: XROS INC

Inventor： NEUKERMANS ARMAND P ,  DOWNING JAMES P ,  SLATER TIMOTHY G

IPC: G06T1/00 ,  H04N1/00 ,  H04N1/107 ,  H04N1/12 ,  H04N1/193 ,  H04N1/10 ,  H04N1/17

CPC classification number: H04N1/00689 ,  H04N1/00885 ,  H04N1/00891 ,  H04N1/0476 ,  H04N1/107 ,  H04N1/1072 ,  H04N1/1078 ,  H04N1/121 ,  H04N1/193 ,  H04N2201/0096 ,  H04N2201/0471 ,  H04N2201/04732 ,  H04N2201/04737

Abstract: A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

Abstract translation: 用于扫描器（100）的文件传送装置具有邻近文件（134）设置的柔性细长的手指（226），并且施加到手指（226）的力促使手指（226）上的齿（233）接触 其中文档（134）沿着通过扫描器（100）的路径敦促文档（134）。 向手指（226）施加力的压电板（222）仅需要少量的电力。 为了横穿扫描器（100），文档（134）也可以沿着引导件（272）手动馈送。 沿着由文件（134）穿过的路径设置的第一和第二速度感测检测器（276a和276b）允许扫描器（100）确定手动馈送的文件（134）穿过扫描仪（100）的速度， 。 为了节省电能，扫描器（100）还包括用于在存在待扫描的文件（134）时启动扫描器（100）的原稿存在检测器（274）。

公开(公告)号：WO9905635A2

公开(公告)日：1999-02-04

申请号：PCT/US9815509

申请日：1998-07-23

Applicant: XROS INC

Inventor： NEUKERMANS ARMAND P ,  DOWNING JAMES P ,  SLATER TIMOTHY G

IPC: G06T1/00 ,  H04N1/00 ,  H04N1/107 ,  H04N1/12 ,  H04N1/193 ,  G06K

CPC classification number: H04N1/00689 ,  H04N1/00885 ,  H04N1/00891 ,  H04N1/0476 ,  H04N1/107 ,  H04N1/1072 ,  H04N1/1078 ,  H04N1/121 ,  H04N1/193 ,  H04N2201/0096 ,  H04N2201/0471 ,  H04N2201/04732 ,  H04N2201/04737

Abstract: A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

Abstract translation: 用于扫描器（100）的文件传送器具有邻近文件（134）设置的柔性细长指状件（226），并且施加到指状件（226）的力促使指状件（226）上的齿（233）接触 与沿着通过扫描仪（100）的路径推动文件（134）的文件（134）。 将力施加到手指（226）的压电板（222）仅需要少量的电力。 为了穿过扫描仪（100），文件（134）也可以沿着引导件（272）手动馈送。 沿着由文件（134）横穿的路径设置的第一和第二速度感测检测器（276a和276b）允许扫描仪（100）确定手动馈送文件（134）穿过扫描仪（100）的速度， 。 为了节省电能，扫描仪（100）还包括文件存在检测器（274），用于当待扫描文件（134）存在时激活扫描仪（100）。