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公开(公告)号：US20080309191A1
公开(公告)日：2008-12-18
申请号：US11818315
申请日：2007-06-14
Applicant: Tsung-Kuan Allen Chou , Oing Ma
Inventor： Tsung-Kuan Allen Chou , Oing Ma
CPC classification number: B81B3/0051 , B81B2201/11 , B81B2203/056 , H02N1/008
Abstract: A MEMS platform with four actuators and four corresponding actuation electrodes. Movement of the platform in the x-y lateral plane is controlled by voltages applied to the four actuation electrodes. Other embodiments are described and claimed.
Abstract translation: 具有四个致动器和四个相应的致动电极的MEMS平台。 平台在x-y横向平面中的运动由施加到四个致动电极的电压控制。 描述和要求保护其他实施例。
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12.发明授权Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit 失效微镜单元，使用其的光盘驱动器以及微镜单元的制造方法公开(公告)号：US07215630B2
公开(公告)日：2007-05-08
申请号：US11114868
申请日：2005-04-26
Applicant: Masaki Hara , Kazuhito Hori , Hiroto Ido , Naoto Kojima , Kazuhiro Hane
Inventor： Masaki Hara , Kazuhito Hori , Hiroto Ido , Naoto Kojima , Kazuhiro Hane
CPC classification number: G11B7/08564 , B81B2201/042 , B81B2201/11 , B81B2203/0109 , B81C1/00595 , G02B7/1821 , G02B26/0841 , G11B7/08576 , Y10T428/24942
Abstract: The hinge (13) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body (12) to effectively prevent the hinge (13) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge (13) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge (13) is formed from a different material, such as SiNx, from the mirror substrate material from which the frame (11) and mirror body (12) are formed.
Abstract translation: 优选地，铰链（13）形成为具有比以往更高的抗反射镜主体（12）的枢转的阻力，以有效地防止铰链（13）被损坏。 通过根据需要采用各种生产步骤中的合适的一种，铰链（13）可以更精细地形成并且具有更高的精度，从而可以在更短的时间内更容易地制造微反射镜单元。 为此，铰链（13）由形成框架（11）和反射镜主体（12）的反射镜基板材料由不同的材料（例如SiN x x）形成。
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公开(公告)号：US5536988A
公开(公告)日：1996-07-16
申请号：US69725
申请日：1993-06-01
Applicant: Z. Lisa Zhang , Noel C. MacDonald
Inventor： Z. Lisa Zhang , Noel C. MacDonald
CPC classification number: H02N1/008 , B81B3/0021 , B81B3/0062 , B81C1/0019 , B82Y15/00 , B81B2201/11 , B81B2203/053 , B81B2203/055 , B81B2207/07
Abstract: A microelectromechanical compound stage microactuator assembly capable of motion along x, y, and z axes for positioning and scanning integrated electromechanical sensors and actuators is fabricated from submicron suspended single crystal silicon beams. The microactuator incorporates an interconnect system for mechanically supporting a central stage and for providing electrical connections to componants of the microactuator and to devices carried thereby. The microactuator is fabricated using a modified single crystal reactive etching and metallization process which incorporates an isolation process utilizing thermal oxidation of selected regions of the device to provide insulating segments which define conductive paths from external circuitry to the actuator components and to microelectronic devices such as gated field emitters carried by the actuator.
Abstract translation: 由亚微米悬浮单晶硅光束制造能够沿x，y和z轴运动的微机电复合级微致动器组件，用于定位和扫描集成的机电传感器和致动器。 该微型致动器包括用于机械地支撑中央级并用于提供与微型致动器的部件的电连接以及由此承载的装置的互连系统。 使用改进的单晶反应蚀刻和金属化工艺制造微致动器，其包括利用设备的选定区域的热氧化的隔离工艺，以提供绝缘段，其限定从外部电路到致动器部件的导电路径以及限定门控的微电子器件 由致动器承载的场致发射体。
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公开(公告)号：EP2678265B1
公开(公告)日：2018-08-01
申请号：EP12710454.5
申请日：2012-02-24
Applicant: HARTING AG & Co. KG
Inventor： GATZEN, Hans-Heinrich , GRIESBACH, Tim
IPC: B81B3/00
CPC classification number: H05K1/0271 , B81B3/0072 , B81B2201/11 , B81C2201/0167 , H05K3/303 , Y10T29/49133
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公开(公告)号：EP2049435A2
公开(公告)日：2009-04-22
申请号：EP07813329.5
申请日：2007-07-25
Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
Inventor： HARTWELL, Peter , PICCIOTTO, Carl
CPC classification number: B81C1/0023 , B81B3/0062 , B81B2201/0235 , B81B2201/11 , B81B2207/012 , B82Y10/00 , G01P15/08 , G01P15/125 , G01P15/18 , G11B9/1436
Abstract: An electronic apparatus includes a first die, a second die, a third die, and a fourth die (101-104), wherein a portion of the second die (50) and a portion of the third die (150) are movably connected between the first die and the fourth die (101, 104).
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Patent Agency Ranking
公开(公告)号：JP2007174891A
公开(公告)日：2007-07-05
申请号：JP2006319120
申请日：2006-11-27
Inventor： PARK HONG-SIK , HONG SEUNG-BUM , SHIM JONG-YOUP
CPC classification number: H02K41/0354 , B81B3/0062 , B81B2201/038 , B81B2201/11 , B81B2203/051 , B82Y10/00 , G11B9/1436 , H02K2201/18
Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro-actuator with a media stage.
SOLUTION: The method for manufacturing the micro-actuator with the media stage having a media loading surface and a coil for driving the media stage, on the bottom of the media loading surface is provided. The method for manufacturing the micro-actuator comprises: (a) a stage for forming a groove with a predetermined depth and area on a first substrate; (b) a stage for forming the coil on a second substrate; (c) a stage for bonding the surface in which the coil is formed on the second substrate to the surface in which the groove is formed on the first substrate; and (d) a stage for processing the rear surface of the surface bonded to the first substrate in the second substrate as the media loading surface.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供一种用于制造具有介质台的微致动器的方法。 提供了在介质装载面的底部上制造具有介质台的微致动器的方法，该介质载台具有介质装载面和用于驱动介质台的盘管。 微型致动器的制造方法包括：（a）在第一基板上形成具有预定深度和面积的槽的台; （b）在第二基板上形成线圈的平台; （c）将在第二基板上形成线圈的表面与形成有槽的表面接合在第一基板上的台阶; 和（d）用于处理结合到第二基板中的第一基板的表面的后表面作为介质装载表面的台。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2014508653A
公开(公告)日：2014-04-10
申请号：JP2013554905
申请日：2012-02-24
Applicant: ハルティング コマンデイトゲゼルシャフト アウフ アクチエンHARTING KGaA
Inventor： ガッツェン ハンス−ハインリヒ , グリースバッハ ティム
CPC classification number: H05K1/0271 , B81B3/0072 , B81B2201/11 , B81C2201/0167 , H05K3/303 , Y10T29/49133
Abstract: 本発明では、省スペースのマイクロ素子およびナノ素子およびその製造方法が提案される。 これらの素子は、極めて厚い硬質の基板を有していない、という特徴を有する。
ここで、素子内で、変形および／または突出を生起させる機械的な応力は、機械的に応力が補償される構造および／またはアクティブな機械的な応力補償を用いて、適切な応力補償層を配置することによって補償されるので、比較的厚い基板は必要とされない。 従って、素子の全体的な厚さは小さくなり、技術的なシステムに組み込む可能性が改善される。 付加的に、このような素子の使用領域が拡張される。-
公开(公告)号：JP4789162B2
公开(公告)日：2011-10-12
申请号：JP2008508667
申请日：2007-03-30
Applicant: パイオニア株式会社
CPC classification number: H02N1/008 , B81B3/0037 , B81B2201/033 , B81B2201/034 , B81B2201/11 , B81B2203/051 , B82Y10/00 , G11B9/1454
Abstract: An actuator comprises a connection section having one end rotatably connected to a connection point (C1) of a fixed section and the other end rotatably connected to a connection point (C2) of a moving section, a connection section having one end rotatably connected to a connection point (C3) of the fixed section and the other end rotatably connected to a connection point (C4) of the moving sections a comb-teeth electrode having the root section connected to a comb-teeth base point (B1) and the fore-end section extending along the turning path, and a comb-teeth electrode having the root section connected to the fixed section and the other section extending along the curve of the comb-teeth electrode and opposed to the comb-teeth electrode with a predetermined gap.
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公开(公告)号：WO2008014305A3
公开(公告)日：2008-07-31
申请号：PCT/US2007074292
申请日：2007-07-25
Applicant: HEWLETT PACKARD DEVELOPMENT CO , HARTWELL PETER , PICCIOTTO CARL
Inventor： HARTWELL PETER , PICCIOTTO CARL
CPC classification number: B81C1/0023 , B81B3/0062 , B81B2201/0235 , B81B2201/11 , B81B2207/012 , B82Y10/00 , G01P15/08 , G01P15/125 , G01P15/18 , G11B9/1436
Abstract: An electronic apparatus includes a first die, a second die, a third die, and a fourth die (101-104), wherein a portion of the second die (50) and a portion of the third die (150) are movably connected between the first die and the fourth die (101, 104).
Abstract translation: 电子设备包括第一模具，第二模具，第三模具和第四模具（101-104），其中第二模具（50）的一部分和第三模具（150）的一部分可移动地连接在 第一管芯和第四管芯（101,104）。
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公开(公告)号：WO2008014305A2
公开(公告)日：2008-01-31
申请号：PCT/US2007/074292
申请日：2007-07-25
Inventor： HARTWELL, Peter , PICCIOTTO, Carl
IPC: B81B3/00
CPC classification number: B81C1/0023 , B81B3/0062 , B81B2201/0235 , B81B2201/11 , B81B2207/012 , B82Y10/00 , G01P15/08 , G01P15/125 , G01P15/18 , G11B9/1436
Abstract: An electronic apparatus includes a first die, a second die, a third die, and a fourth die (101-104), wherein a portion of the second die (50) and a portion of the third die (150) are movably connected between the first die and the fourth die (101, 104).
Abstract translation: 一种电子设备，包括第一裸片，第二裸片，第三裸片和第四裸片（101-104），其中，第二裸片（50）的一部分和第三裸片 模具（150）可移动地连接在第一模具和第四模具（101,104）之间。
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