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    CAVITY PRESSURE MODIFICATION USING LOCAL HEATING WITH A LASER
    11.
    发明申请
    CAVITY PRESSURE MODIFICATION USING LOCAL HEATING WITH A LASER 有权

    公开(公告)号：US20170096330A1

    公开(公告)日：2017-04-06

    申请号：US15383755

    申请日：2016-12-19

    Applicant: INVENSENSE, INC.

    Inventor： Michael DUEWEKE ,  Martin LIM

    IPC: B81B7/00 ,  B81C1/00

    CPC classification number: B81B7/0038 ,  B81B7/02 ,  B81B2207/012 ,  B81B2207/07 ,  B81C1/00285 ,  B81C1/00293 ,  B81C2201/0161 ,  B81C2203/0785

    Abstract: A method and system for changing a pressure within at least one enclosure in a MEMS device are disclosed. In a first aspect, the method comprises applying a laser through one of the at least two substrates onto a material which changes the pressure within at least one enclosure when exposed to the laser, wherein the at least one enclosure is formed by the at least two substrates. In a second aspect, the system comprises a MEMS device that includes a first substrate, a second substrate bonded to the first substrate, wherein at least one enclosure is located between the first and the second substrates, a metal layer within one of the first substrate and the second substrate, and a material vertically oriented over the metal layer, wherein when the material is heated the material changes a pressure within the at least one enclosure.

    Cavity pressure modification using local heating with a laser
    12.
    发明授权
    Cavity pressure modification using local heating with a laser 有权
    使用局部加热激光进行腔压力修改

    公开(公告)号：US09556019B2

    公开(公告)日：2017-01-31

    申请号：US14705630

    申请日：2015-05-06

    Applicant: InvenSense, Inc.

    Inventor： Michael Dueweke ,  Martin Lim

    IPC: H01L29/84 ,  B81C1/00 ,  B81B7/00

    CPC classification number: B81B7/0038 ,  B81B7/02 ,  B81B2207/012 ,  B81B2207/07 ,  B81C1/00285 ,  B81C1/00293 ,  B81C2201/0161 ,  B81C2203/0785

    Abstract: A method and system for changing a pressure within at least one enclosure in a MEMS device are disclosed. In a first aspect, the method comprises applying a laser through one of the at least two substrates onto a material which changes the pressure within at least one enclosure when exposed to the laser, wherein the at least one enclosure is formed by the at least two substrates. In a second aspect, the system comprises a MEMS device that includes a first substrate, a second substrate bonded to the first substrate, wherein at least one enclosure is located between the first and the second substrates, a metal layer within one of the first substrate and the second substrate, and a material vertically oriented over the metal layer, wherein when the material is heated the material changes a pressure within the at least one enclosure.

    Abstract translation: 公开了一种用于改变MEMS装置中的至少一个外壳内的压力的方法和系统。 在第一方面，所述方法包括将激光通过所述至少两个基板之一施加到当暴露于所述激光器时改变至少一个外壳内的压力的材料，其中所述至少一个外壳由所述至少两个基板形成 底物。 在第二方面，该系统包括MEMS器件，其包括第一衬底，与第一衬底结合的第二衬底，其中至少一个外壳位于第一和第二衬底之间，第一衬底之一内的金属层 和第二基底以及垂直取向在金属层上的材料，其中当材料被加热时，材料改变至少一个外壳内的压力。

    Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials
    14.
    发明申请
    Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials 失效
    用于化学和生物材料的基于微通道的集成传感器的制造方法

    公开(公告)号：US20030045019A1

    公开(公告)日：2003-03-06

    申请号：US10231962

    申请日：2002-08-30

    Applicant: HRL LABORATORIES, LLC

    Inventor： Randall L. Kubena

    IPC: H01L021/00

    CPC classification number: B81C1/00206 ,  B81B2201/0214 ,  B81C1/00904 ,  B81C2201/0161 ,  G01N29/036 ,  G01N2291/0256

    Abstract: A method for fabricating a sensor for chemical and/or biological materials, comprising steps of providing a wafer comprising a plurality of cantilever assemblies, each of the assemblies comprising a cantilever member and a micro-channel plate bonded to the cantilever member, the micro-channel plate further comprising a micro-channel, functionalizing each of the cantilevers by directing a flow of a plurality of functionalizing materials through the micro-channels, and dicing the wafer into a plurality of the sensors. Each of the cantilever assemblies comprises substrate comprising control and sense electrodes deposited on its top side and scribe marks etched on its back side; a cantilever member comprising a cantilever, a seed layer and a contact pad formed on top side of the cantilever member; and the micro-channel plate comprises a micro-channel housing defining the micro-channel etched through the housing, wherein the back side of the cantilever member is bonded to the substrate and the micro-channel plate is bonded to said top side of the cantilever member. Control electronics are incorporated into the substrate for a completely integrated design.

    Abstract translation: 一种用于制造用于化学和/或生物材料的传感器的方法，包括提供包括多个悬臂组件的晶片的步骤，每个组件包括悬臂构件和结合到悬臂构件的微通道板， 通道板还包括微通道，通过引导多个功能化材料的流动通过微通道来对每个悬臂进行功能化，并将晶片切割成多个传感器。 每个悬臂组件包括包括沉积在其顶侧上的控制和感测电极的基板以及在其背面蚀刻的划痕; 悬臂构件，其包括形成在悬臂构件的顶侧上的悬臂，种子层和接触垫; 并且所述微通道板包括限定通过所述壳体蚀刻的所述微通道的微通道壳体，其中所述悬臂构件的背面接合到所述基板，并且所述微通道板结合到所述悬臂的所述顶侧 会员。 控制电子器件集成到基板中，用于完全集成的设计。

    MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS
    16.
    发明申请
    MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS 审中-公开
    MEMS显示器扩大高度执行器

    公开(公告)号：WO2015026490A1

    公开(公告)日：2015-02-26

    申请号：PCT/US2014/048477

    申请日：2014-07-28

    Applicant: PIXTRONIX, INC.

    Inventor： DUNN, Tyler A. ,  BROSNIHAN, Timothy J.

    IPC: G02B26/02 ,  B81B3/00

    CPC classification number: G02B26/02 ,  B81B3/0086 ,  B81B5/00 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2203/056 ,  B81C1/00634 ,  B81C2201/0161 ,  G02B26/023 ,  G02B26/0841

    Abstract: This disclosure provides systems, methods, and apparatus for a MEMS display incorporating extended height actuators. A light modulating component can be positioned between a substrate and an opposing surface coupled to the substrate. A suspended electrode can be coupled to the light modulating component and suspended between the substrate and the opposing surface. An extended-height electrode can be positioned immediately adjacent to the suspended electrode, and can extend from the substrate up to a height beyond the height of the suspended electrode. The suspended electrode and the extended-height electrode can be configured to move the light modulating component laterally with respect to the substrate.

    Abstract translation: 本公开提供了用于包括扩展高度致动器的MEMS显示器的系统，方法和装置。 光调制组件可以位于衬底和耦合到衬底的相对表面之间。 悬挂的电极可以耦合到光调制部件并悬挂在基板和相对的表面之间。 延伸高度的电极可以紧邻悬挂的电极定位，并且可以从衬底延伸到高于悬挂电极的高度的高度。 悬置电极和延伸高度电极可以被配置为相对于衬底横向移动光调制组件。

    A METHOD OF FABRICATION OF A SENSOR
    17.
    发明申请
    A METHOD OF FABRICATION OF A SENSOR 审中-公开
    一种传感器的制造方法

    公开(公告)号：WO03020634A3

    公开(公告)日：2003-07-10

    申请号：PCT/US0227708

    申请日：2002-08-30

    Applicant: HRL LAB LLC ,  KUBENA RANDALL L

    Inventor： KUBENA RANDALL L

    IPC: B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  G01N27/00 ,  H01L21/00

    CPC classification number: B81C1/00206 ,  B81B2201/0214 ,  B81C1/00904 ,  B81C2201/0161 ,  G01N29/036 ,  G01N2291/0256

    Abstract: A method for fabricating a sensor for chemical and/or biological materials, comprisingsteps of providing a wafer comprising a plurality of cantilever assemblies, each of theassemblies comprising a cantilever member and a micro-channel plate bonded to thecantilever member, the micro-channel plate further comprising a micro-channel, functionalizing each of the cantilevers by directing a flow of a plurality of functionalizingmaterials through the micro-channels, and dicing the wafer into a plurality of the sensors.Each of the cantilever assemblies comprises substrate comprising control and senseelectrodes deposited on its top side and scribe marks etched on its back side; a cantilevermember comprising a cantilever, a seed layer and a contact pad formed on top side of thecantilever member; and the micro-channel plate comprises a micro-channel housing defining the micro-channel etched through the housing, wherein the back side of the cantilevermember is bonded to the substrate and the micro-channel plate is bonded to said top side ofthe cantilever member. Control electronics are incorporated into the substrate for a completely integrated design.

    Abstract translation: 一种制造用于化学和/或生物材料的传感器的方法，包括提供包括多个悬臂组件的晶片的步骤，每个组件包括悬臂构件和结合到悬臂构件的微通道板，微通道板进一步 其包括微通道，通过引导多种官能化材料的流动通过微通道来使每个悬臂功能化，以及将晶片切割成多个传感器。每个悬臂组件包括基板，所述基板包括沉积在基板上的控制电极和感测电极 它的顶面和划线标记在其背面蚀刻; 悬臂构件，其包括悬臂，种子层和在所述悬臂构件的顶侧上形成的接触垫; 并且所述微通道板包括微通道壳体，所述微通道壳体限定通过所述壳体蚀刻的所述微通道，其中所述悬臂构件的所述背面结合到所述衬底并且所述微通道板结合到所述悬臂构件的所述顶面。 控制电子器件被整合到基板中以实现完全集成的设计。

    A METHOD OF FABRICATION OF A SENSOR
    19.
    发明申请
    A METHOD OF FABRICATION OF A SENSOR 审中-公开
    传感器的制造方法

    公开(公告)号：WO2003020634A2

    公开(公告)日：2003-03-13

    申请号：PCT/US2002/027708

    申请日：2002-08-30

    Applicant: HRL LABORATORIES, LLC ,  KUBENA, Randall, L.

    Inventor： KUBENA, Randall, L.

    IPC: B81B3/00

    CPC classification number: B81C1/00206 ,  B81B2201/0214 ,  B81C1/00904 ,  B81C2201/0161 ,  G01N29/036 ,  G01N2291/0256

    Abstract: A method for fabricating a sensor for chemical and/or biological materials, comprisingsteps of providing a wafer comprising a plurality of cantilever assemblies, each of theassemblies comprising a cantilever member and a micro-channel plate bonded to thecantilever member, the micro-channel plate further comprising a micro-channel, functionalizing each of the cantilevers by directing a flow of a plurality of functionalizingmaterials through the micro-channels, and dicing the wafer into a plurality of the sensors.Each of the cantilever assemblies comprises substrate comprising control and senseelectrodes deposited on its top side and scribe marks etched on its back side; a cantilevermember comprising a cantilever, a seed layer and a contact pad formed on top side of thecantilever member; and the micro-channel plate comprises a micro-channel housing defining the micro-channel etched through the housing, wherein the back side of the cantilevermember is bonded to the substrate and the micro-channel plate is bonded to said top side ofthe cantilever member. Control electronics are incorporated into the substrate for a completely integrated design.

    Abstract translation: 一种用于制造用于化学和/或生物材料的传感器的方法，包括提供包括多个悬臂组件的晶片的步骤，每个组件包括悬臂构件和结合到所述悬臂构件的微通道板，所述微通道板进一步 包括微通道，通过引导多个功能化材料的流动通过微通道来对每个悬臂进行功能化，并将晶片切割成多个传感器。每个悬臂组件包括基板，其包括控制和沉积在 其顶侧和划痕标记在其背面蚀刻; 悬臂构件，其包括形成在所述悬臂构件的顶侧上的悬臂，种子层和接触垫; 并且所述微通道板包括限定通过所述壳体蚀刻的所述微通道的微通道壳体，其中所述悬臂构件的背面接合到所述基板，并且所述微通道板结合到所述悬臂构件的所述顶侧。 将控制电子器件整合到基板中以实现完全集成的设计。

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