公开(公告)号：KR1020100085920A

公开(公告)日：2010-07-29

申请号：KR1020107008483

申请日：2008-09-18

Applicant: 베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크.

Inventor： 에로킨유리 ,  설리번폴 ,  왈더스티븐알. ,  누난피터

IPC: H01L21/265 ,  H01L21/60

CPC classification number: H01L21/76251 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/201 ,  H01J2237/202 ,  H01L21/26506 ,  H01L21/6835 ,  H01L2221/68359 ,  H01L2924/30105

Abstract: A method for wafer bonding two substrates activated by ion implantation is disclosed. An in situ ion bonding chamber allows ion activation and bonding to occur within an existing process tool utilized in a manufacturing process line. Ion activation of at least one of the substrates is performed at low implant energies to ensure that the wafer material below the thin surface layers remains unaffected by the ion activation.

Abstract translation: 公开了一种通过离子注入激活的晶片接合两个基板的方法。 原位离子键合室允许在制造生产线中使用的现有工艺工具中发生离子活化和结合。 在低注入能量下进行至少一个衬底的离子激活，以确保薄表面层下面的晶片材料不受离子激活的影响。

公开(公告)号：US20240153733A1

公开(公告)日：2024-05-09

申请号：US17981188

申请日：2022-11-04

Applicant: Applied Materials, Inc.

Inventor： Michael Mason Carrell ,  Jason M. Schaller ,  Victor Flores Iracheta

IPC: H01J37/20 ,  C23C14/48 ,  C23C14/56 ,  H01J37/317 ,  H01L21/67

CPC classification number: H01J37/20 ,  C23C14/48 ,  C23C14/566 ,  H01J37/3171 ,  H01L21/67201 ,  H01J2237/201 ,  H01J2237/204

Abstract: An ion implantation system including an ion source for generating an ion beam, an end station containing a platen for supporting a substrate to be implanted by the ion beam, and a load lock disposed adjacent the end station and adapted to transfer substrates between an external environment and the end station. The load lock may include a transfer chamber having a hollow interior, a first isolation door affixed to a first side of the transfer chamber and openable to the external environment, a second isolation door affixed to a second side of the transfer chamber and openable to an interior of the end station, and a volume filling cassette disposed within the hollow interior of the transfer chamber and adapted to hold at least one substrate.

公开(公告)号：US20240014013A1

公开(公告)日：2024-01-11

申请号：US18217885

申请日：2023-07-03

Applicant: Tokyo Electron Limited

Inventor： Nobuo MATSUKI ,  Hiroyuki MATSUURA ,  Taro IKEDA

IPC: H01J37/32

CPC classification number: H01J37/32568 ,  H01J37/32082 ,  H01J37/3244 ,  H01J37/32715 ,  H01J2237/201 ,  H01J2237/332 ,  H01L21/32051

Abstract: A plasma processing apparatus includes a processing container having an opening in a sidewall, a partition wall that covers the opening and defines an internal space communicating with an inside of the processing container, and an internal electrode that passes through the partition wall, is airtightly inserted into the internal space, and is supplied with RF power. A first gap is provided between the partition wall and the internal electrode.

公开(公告)号：US20230260760A1

公开(公告)日：2023-08-17

申请号：US18106036

申请日：2023-02-06

Applicant: Tokyo Electron Limited

Inventor： Ibuki HAYASHI

IPC: H01J37/32 ,  C23C16/458 ,  C23C16/455 ,  C23C16/50

CPC classification number: H01J37/32449 ,  H01J37/32513 ,  C23C16/4584 ,  C23C16/45565 ,  C23C16/50 ,  H01J2237/201 ,  H01J2237/20214 ,  H01J2237/24578 ,  H01J2237/332

Abstract: A substrate processing apparatus includes a vacuum container, a placing part provided inside the vacuum container and having a placing surface on which a substrate is placed, and a ceiling member provided above the placing part. The ceiling member includes a fixed member fixed to the vacuum container, a movable member attached to the fixed member and having a first facing surface facing the placing surface, a spacer sandwiched between the fixed member and the movable member, a first seal member provided between the fixed member and the spacer, a second seal member provided between the movable member and the spacer, and a plurality of adjustment bolts screwed into the fixed member through the movable member.

公开(公告)号：US09772265B2

公开(公告)日：2017-09-26

申请号：US15052313

申请日：2016-02-24

Applicant: FEI Company

Inventor： Hervé-William Rémigy

IPC: H01J37/26 ,  H01J37/20 ,  G01N1/28 ,  G01N1/42

CPC classification number: G01N1/2813 ,  G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/002 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/201 ,  H01J2237/208

Abstract: A system and method for preparing a sample for study in a charged-particle microscope is disclosed. A sample holder comprises substantially parallel opposing faces connected by apertures spanned by a perforated membrane. Blotting material is placed against the outer membrane surface, and liquid films may then be deposited onto the inner membrane surface within each aperture where each aperture can contain a unique sample. Liquids from each sample flow through the perforations in the membrane to be absorbed by the blotting material. After completion of deposition of liquid samples, the sample holder is raised off the blotting material, leaving aqueous samples within the perforations of the membrane. The sample holder may then be immersed in a vitrifying bath of liquid oxygen to form a cryo-sample for microscopic imaging and analysis.

公开(公告)号：US09601305B2

公开(公告)日：2017-03-21

申请号：US14538332

申请日：2014-11-11

Applicant: Howard Hughes Medical Institute

Inventor： John H. Price ,  Dravida Bock

IPC: H01J37/20 ,  G01N1/28 ,  H01J37/26 ,  H01J37/02 ,  H01J37/18 ,  G01N35/00 ,  G01N1/32

CPC classification number: H01J37/20 ,  G01N1/32 ,  G01N35/00732 ,  H01J37/023 ,  H01J37/185 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20278 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/26 ,  H01J2237/2602

Abstract: An electron microscope specimen sample holder including a thin sheet base member with a first surface and an opposing second surface, the first surface defining a seat and support surface for a specimen holding film held by the sample holder, the base member including an aperture through the second surface exposing the holding film held by the sample holder, and including a grip engagement zone defined at least on part of the first surface arranged to engage a gripping device, and wherein at least one of the first or second surface has machine readable structures formed thereon arranged in patterns embodying data that defines at least one predetermined characteristic of the sample holder.

公开(公告)号：US20160245732A1

公开(公告)日：2016-08-25

申请号：US15052313

申请日：2016-02-24

Applicant: FEI Company

Inventor： Hervé-William Rémigy

IPC: G01N1/28 ,  H01J37/20 ,  G01N1/42 ,  H01J37/26

CPC classification number: G01N1/2813 ,  G01N1/42 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/002 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/201 ,  H01J2237/208

Abstract: A system for preparing a sample for study in a charged-particle microscope by: Providing a substantially planar sample holder having opposed faces substantially parallel to one another, comprising at least one aperture that connects said faces and across which a membrane has been mounted, which membrane comprises at least one perforation; Spanning a film of aqueous liquid across said perforation, which liquid comprises at least one study specimen suspended therein; Prior to said spanning step, placing a blotting sheet of blotting material in intimate contact with a first surface of said membrane, at a side distal from said sample holder; Depositing said aqueous liquid through said aperture and onto a second surface of said membrane, opposite said first surface; and Subsequently removing said blotting sheet from said membrane.

Abstract translation: 一种用于制备用于在带电粒子显微镜中研究的样品的系统，其通过以下方式来制备：提供具有基本上彼此平行的相对面的基本平坦的样品保持器，所述样品保持器包括连接所述面并且已经安装有膜的至少一个孔， 膜包括至少一个穿孔; 跨过所述穿孔跨越水性液体膜，该液体包括悬浮在其中的至少一个研究样本; 在所述跨越步骤之前，在远离所述样品保持器的一侧放置吸印材料的印迹片与所述膜的第一表面紧密接触; 将所述水性液体通过所述孔沉积到与所述第一表面相对的所述膜的第二表面上; 然后从所述膜中除去所述印迹片。

公开(公告)号：US20160181465A1

公开(公告)日：2016-06-23

申请号：US15054049

申请日：2016-02-25

Applicant: Intevac, Inc.

Inventor： Babak Adibi ,  Moon Chun

IPC: H01L31/18 ,  H01J37/32 ,  H01L31/068

CPC classification number: H01L31/1876 ,  C23C14/042 ,  C23C14/48 ,  H01J37/185 ,  H01J37/3171 ,  H01J37/32412 ,  H01J37/32422 ,  H01J2237/0437 ,  H01J2237/184 ,  H01J2237/201 ,  H01J2237/327 ,  H01J2237/3365 ,  H01L21/2236 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/547 ,  Y02P70/521

Abstract: An ion implantation system having a grid assembly. The system includes a plasma source configured to provide plasma in a plasma region; a first grid plate having a plurality of apertures configured to allow ions from the plasma region to pass therethrough, wherein the first grid plate is configured to be biased by a power supply; a second grid plate having a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate, wherein the second grid plate is configured to be biased by a power supply; and a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the second grid plate.

公开(公告)号：US09304067B2

公开(公告)日：2016-04-05

申请号：US13734121

申请日：2013-01-04

Applicant: Kenneth Jeffrey Hayworth ,  Amy Au Hayworth

Inventor： Kenneth Jeffrey Hayworth ,  Amy Au Hayworth

IPC: G01N1/06 ,  G01N1/28 ,  G01N1/36 ,  G01N1/31

CPC classification number: G01N1/06 ,  G01N1/286 ,  G01N1/312 ,  G01N2001/066 ,  G01N2001/362 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/26 ,  Y10T156/1052 ,  Y10T156/1056 ,  Y10T156/1057 ,  Y10T156/1059 ,  Y10T156/1062 ,  Y10T156/12 ,  Y10T156/1322 ,  Y10T156/1712

Abstract: Methods, apparatus and systems for collecting thin tissue samples for imaging. Thin tissue sections may be cut from tissue samples using a microtome-quality knife. In one example, tissue samples are mounted to a substrate that is rotated such that thin tissue sections are acquired via lathing. Collection of thin tissue sections may be facilitated by a conveyor belt. Thin tissue sections may be mounted to a thin substrate (e.g., by adhering thin tissue sections to a thin substrate via a roller mechanism) that may be imaged, for example, by an electron beam (e.g., in an electron microscope). Thin tissue sections may be strengthened before cutting via a blockface thinfilm deposition technique and/or a blockface taping technique. An automated reel-to-reel imaging technique may be employed for collected/mounted tissue sections to facilitate random-access imaging of tissue sections and maintaining a comprehensive library including a large volume of samples.

Abstract translation: 用于收集用于成像的薄组织样本的方法，装置和系统。 可以使用切片机质量刀从组织样品切割薄组织切片。 在一个实例中，将组织样品安装到旋转的基底上，使得通过车床获得薄的组织切片。 通过传送带可以促进薄组织切片的收集。 薄组织切片可以例如通过电子束（例如，在电子显微镜中）被安装到薄基底（例如，通过将薄组织切片通过辊机构粘附到薄基底上）。 在通过块状薄膜沉积技术和/或块状胶带技术切割之前可以加强薄组织切片。 可以采用自动卷线对卷成像技术来收集/安装的组织切片，以促进组织切片的随机取景成像并维持包括大量样品的综合库。

公开(公告)号：US09303314B2

公开(公告)日：2016-04-05

申请号：US14510109

申请日：2014-10-08

Applicant: Intevac, Inc.

Inventor： Babak Adibi ,  Moon Chun

IPC: H01L31/18 ,  C23C14/48 ,  C23C14/04 ,  H01J37/32 ,  H01L21/223 ,  H01J37/18 ,  H01J37/317 ,  H01L31/068

CPC classification number: H01L31/1876 ,  C23C14/042 ,  C23C14/48 ,  H01J37/185 ,  H01J37/3171 ,  H01J37/32412 ,  H01J37/32422 ,  H01J2237/0437 ,  H01J2237/184 ,  H01J2237/201 ,  H01J2237/327 ,  H01J2237/3365 ,  H01L21/2236 ,  H01L31/068 ,  H01L31/0682 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/547 ,  Y02P70/521

Abstract: An ion implantation system having a grid assembly. The system includes a plasma source configured to provide plasma in a plasma region; a first grid plate having a plurality of apertures configured to allow ions from the plasma region to pass therethrough, wherein the first grid plate is configured to be biased by a power supply; a second grid plate having a plurality of apertures configured to allow the ions to pass therethrough subsequent to the ions passing through the first grid plate, wherein the second grid plate is configured to be biased by a power supply; and a substrate holder configured to support a substrate in a position where the substrate is implanted with the ions subsequent to the ions passing through the second grid plate.