公开(公告)号：US20020113281A1

公开(公告)日：2002-08-22

申请号：US10025974

申请日：2001-12-19

Inventor： Shawn Jay Cunningham ,  Dana R. DeReus

IPC: H01L029/82

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: MEMS Device having an Actuator with Curved Electrodes. According to one embodiment of the present invention, an actuator is provided for moving an actuating device linearly. The actuator includes a substrate having a planar surface and an actuating device movable in a linear direction relative to the substrate. The actuator includes at least one electrode beam attached to the actuating device and having an end attached to the substrate. The electrode beam is flexible between the actuating device and the end of the electrode beam attached to the substrate. Furthermore, the actuator includes at least one electrode attached to the substrate. The electrode has a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear direction as the electrode beam moves in a curved fashion corresponding substantially to the curved surface of the electrode.

Abstract translation: 具有带弯曲电极的致动器的MEMS器件。 根据本发明的一个实施例，提供了用于使致动装置线性移动的致动器。 致动器包括具有平面表面的基板和可相对于基板沿线性方向移动的致动装置。 致动器包括附接到致动装置的至少一个电极束，并且具有连接到基底的一端。 电极束在致动装置和连接到基板的电极束的端部之间是柔性的。 此外，致动器包括附接到基板的至少一个电极。 电极具有与电极束的长度相邻的位置对齐的弯曲表面，由此当电极束以基本上对应于电极的弯曲表面的弯曲方式移动时，致动装置可在其基本线性方向上移动。

公开(公告)号：US20020041729A1

公开(公告)日：2002-04-11

申请号：US09925847

申请日：2001-08-08

Applicant: STMicroelectronics S.r.I.

Inventor： Ubaldo Mastromatteo ,  Bruno Murari

IPC: G02B006/26 ,  G02B006/35

CPC classification number: H02N1/004 ,  B81B3/0051 ,  B81B2201/045 ,  B81B2203/051 ,  B81B2203/058 ,  F16H21/02 ,  G02B26/0841 ,  G02B26/0866

Abstract: A microelectromechanical structure, usable in an optical switch for directing a light beam towards one of two light guide elements, including: a mirror element, rotatably movable; an actuator, which can translate; and a motion conversion assembly, arranged between the mirror element and the actuator. The motion conversion assembly includes a projection integral with the mirror element and elastic engagement elements integral with the actuator and elastically loaded towards the projection. The elastic engagement elements are formed by metal plates fixed to the actuator at one of their ends and engaging the projection with an abutting edge countershaped with respect to the projection.

公开(公告)号：US20020018613A1

公开(公告)日：2002-02-14

申请号：US09799923

申请日：2001-03-05

Inventor： Carl O. Bozler ,  Steven Rabe

IPC: G02B006/35

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：US06330102B1

公开(公告)日：2001-12-11

申请号：US09536164

申请日：2000-03-25

Applicant: Michael J. Daneman ,  Behrang Behin ,  Satinderpall Pannu

Inventor： Michael J. Daneman ,  Behrang Behin ,  Satinderpall Pannu

IPC: G02B2600

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

公开(公告)号：US20010048784A1

公开(公告)日：2001-12-06

申请号：US09751660

申请日：2000-12-28

Inventor： Behrang Behin ,  Michael J. Daneman ,  Meng-Hsiung Kiang ,  Kam-Yin Lau ,  Satinderpall Pannu

IPC: G02B006/35

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the inner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器位于万向架结构的外框架和基座之间，第二组垂直梳齿驱动致动器定位在万向架结构的内部和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：US20010008457A1

公开(公告)日：2001-07-19

申请号：US09789887

申请日：2001-02-21

Applicant: ADC Telecommunications, Inc.

Inventor： Nan Zhang

IPC: G02F001/01 ,  G02F001/03 ,  G02F001/07 ,  G02B026/00

CPC classification number: G02B6/357 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00182 ,  B81C2201/0109 ,  B81C2203/0136 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/3584 ,  H02N1/008

Abstract: A MEMS-based optical switch having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb drive actuator having a deflecting beam structure and a mirror coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.

公开(公告)号：US5867302A

公开(公告)日：1999-02-02

申请号：US908639

申请日：1997-08-07

Applicant: James G. Fleming

Inventor： James G. Fleming

IPC: B81B3/00 ,  G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0054 ,  G02B26/0825 ,  H01G5/16 ,  H01G5/38 ,  H01G5/40 ,  B81B2201/018 ,  B81B2201/045 ,  B81B2203/0109 ,  H01H2001/0042 ,  Y10S359/904

Abstract: A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing.

Abstract translation: 双稳态微机电（MEM）致动器形成在基板上并且包括大致矩形形状的应力膜，其在释放时呈现曲线形横截面形状，这是由于在中间点附接到弹性构件，并且在相对的边缘处与一对细长 支持。 应力膜可以在具有镜像对称性的一对机械状态之间静电切换，在执行编程电压之后，MEM致动器保持静止状态。 根据本发明的各种实施例的双稳态MEM致动器可以用于形成非易失性存储元件，光学调制器（在膜上方支撑并且当膜被切换时同步地移动的一对反射镜），可切换镜 具有在其中间点处支撑在膜上方的单个反射镜）和闭锁继电器（具有一对在膜被切换时打开和关闭的触点）。 双稳态MEM致动器的阵列可以形成用于包括非易失性存储器，光学显示器和光学计算的应用。

公开(公告)号：WO2016038984A1

公开(公告)日：2016-03-17

申请号：PCT/JP2015/068606

申请日：2015-06-29

Applicant: 日立オートモティブシステムズ株式会社

Inventor： 金丸　昌敏 ,  林　雅秀 ,  由良　昌士 ,  鄭　希元

IPC: G01P21/00 ,  B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C99/0045 ,  G01C19/574 ,  G01P15/08 ,  G01P15/125 ,  G01P21/00 ,  H01L29/84

Abstract: 　ＭＥＭＳプロセスによって製造した小型のセンサでは、最終工程の電極パッドもしくは配線、シールド層を形成すると物理量をセンシングする構造体が良好に加工されているか非破壊で調査することが困難である。　ＭＥＭＳ構造体によって形成された物量量センサにおいて、電極基板表面に貫通配線の表面電極が形成され、かつ、その周囲は絶縁された構造において、平面視で電極基板表面に形成された金属材料からなるシールド層を形成し、そのシールド層内部に内部観察用の空間を設けた構造を適用する構造。これにより、内部不良を確認できる。

Abstract translation: 对于通过MEMS工艺制造的小型传感器，当在最终步骤中形成电极焊盘，布线或屏蔽层时，难以非破坏性地研究用于感测物理量的结构是否已经被令人满意地处理。 在本发明中，在由MEMS结构形成的物理量传感器中，在电极基板的表面上形成有通过布线的表面电极和其周边的结构绝缘，形成包含金属 在平面图中的电极基板的表面上的材料和在屏蔽层内部提供用于内部观察的空间使得可以检查内部缺陷。

公开(公告)号：WO2014120444A1

公开(公告)日：2014-08-07

申请号：PCT/US2014/011660

申请日：2014-01-15

Applicant: PIXTRONIX, INC.

Inventor： VILLARREAL, Javier ,  BROSNIHAN, Timothy J. ,  STEYN, Jasper Lodewyk ,  PAYNE, Richard S. ,  LEWIS, Stephen R.

IPC: B81B3/00 ,  G02B26/02

CPC classification number: G02B26/02 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0163 ,  B81B2203/051 ,  B81C2201/053 ,  B81C2201/112 ,  G02B26/023 ,  G09G3/22

Abstract: This disclosure provides systems, methods and apparatus for providing relatively thinner and less stiff compliant beams for a shutter assembly. A protective coating is deposited and patterned over the shutter assembly before it is released from a sacrificial mold over which the shutter assembly is formed. Because some primary surfaces of the compliant beams are in contact with the sacrificial mold, these primary surfaces are not coated with the protective coating. Therefore, when the shutter assembly is finally released, the resulting compliant beams are relatively thinner and less stiff providing a reduction in an actuation voltage used to operate the shutter assembly. In some instances, the protective coating is patterned into discontinuous segments before release.

Abstract translation: 本公开提供了用于为快门组件提供相对较薄且较不硬的柔性梁的系统，方法和装置。 在从快门组件形成的牺牲模具释放之前，将保护涂层沉积并在其上形成图案。 由于柔性梁的一些主表面与牺牲模具接触，所以这些主表面没有涂覆保护涂层。 因此，当快门组件最终被释放时，所产生的柔性梁相对较薄并且较不硬，从而降低用于操作闸板组件的致动电压。 在一些情况下，保护性涂层在释放之前被图案化成不连续段。

公开(公告)号：WO2009127275A3

公开(公告)日：2010-04-29

申请号：PCT/EP2008067690

申请日：2008-12-17

Applicant: BOSCH GMBH ROBERT ,  PIRK TJALF ,  PINTER STEFAN ,  KRUEGER MICHAEL ,  MUCHOW JOERG ,  FRITZ JOACHIM ,  FRIESE CHRISTOPH

Inventor： PIRK TJALF ,  PINTER STEFAN ,  KRUEGER MICHAEL ,  MUCHOW JOERG ,  FRITZ JOACHIM ,  FRIESE CHRISTOPH

IPC: B81B3/00

CPC classification number: B81B3/004 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0136 ,  G02B26/0841 ,  H02N1/008

Abstract: The invention relates to an electrode comb (52, 54) for a micromechanical component. Said electrode comb (52, 54) is designed such that at least two electrode fingers (52a, 54a) are mounted on a first fastening part (52b, 54b) at a first end while being mounted on a second fastening part (52b, 54b) at a second end lying opposite the first end. The invention additionally relates to a micromechanical component comprising a stator electrode comb (54) and an actuator electrode comb (52) between which a voltage (U) can be applied such that the actuator electrode comb (54) can be rotated about an axis of rotation (56) of the actuator electrode comb (52). The axis of rotation (56) of the actuator electrode comb (52) vertically penetrates at least one surface of an electrode finger (54a) of the stator electrode comb (44, 54). The invention further relates to a method for producing an electrode comb (52, 54) and a method for producing a micromechanical component.

Abstract translation: 本发明涉及一种如此形成，使得至少两个电极指（52A，54A）在其第一端的第一附接部（52B，54B）被固定且相对的第一端部用于微机械部件的电极梳（52,54） 第二端连接到第二附接部分（52B，54B）附连。 此外，本发明涉及一种具有定子电极的梳（54）和致动器的电极的梳（52），在它们之间的电压（U）可应用于微机械部件，其特征在于，由（定子电极的梳54之间施加的电压（U） ）和致动器的电极的梳（52），致动器的电极的梳（52）（围绕致动器的电极的梳（52的旋转轴线56））是可旋转的，并且其中所述致动器的电极的梳（52）的至少一个表面的旋转（56）的轴线 定子电极的梳（44,54）的电极指（54A）垂直地刺穿。 此外，本发明涉及一种用于电极的梳（52,54）和用于微机械部件的制造方法的制造方法。