公开(公告)号：KR1020030049473A

公开(公告)日：2003-06-25

申请号：KR1020010079681

申请日：2001-12-15

Applicant: (주)엘립소테크놀러지

Inventor： 김상준 ,  김상열

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01B11/0641 ,  G01J3/0208 ,  G01J3/2889

Abstract: PURPOSE: An ultra high-speed spectroscopic ellipsometer is provided to improve productivity and quality of articles, such as semiconductor devices and flat-type image display devices, by furnishing spectroscopic ellipse data within a few milli-minute time periods. CONSTITUTION: An ultra high-speed spectroscopic ellipsometer includes a light source(100) for generating white light. A first collimation section(200) receives white light from the light source(100). White light introduced into the first collimation section(200) is incident into a polarization state generator, which polarizes white light. Then, polarized light is incident into a sample(110). The sample(110) reflects polarized light by converting a polarization state of polarized light. Polarized light reflected from the sample(110) is incident into a second collimation section, which converts polarized light into parallel light. A DOAP(400) is provided to polarize parallel light in a stokes vector state. A spectrograph/PDA(500) is provided to measure a quantity of polarized light.

Abstract translation: 目的：通过在几分钟的时间内提供光谱椭圆数据，提供超高速光谱椭偏仪，以提高诸如半导体器件和平面型图像显示器件的物品的生产率和质量。 构成：超高速光谱椭偏仪包括用于产生白光的光源（100）。 第一准直部（200）从光源（100）接收白光。 引入到第一准直部分（200）中的白光入射到偏振状态发生器中，这使得白光偏振。 然后，偏振光入射到样品（110）中。 样品（110）通过转换偏振光的偏振状态来反射偏振光。 从样品（110）反射的偏振光入射到将偏振光转换成平行光的第二准直部分。 提供了一个DOAP（400），用于使斯托克斯矢量状态下的平行光偏振。 提供了一种用于测量偏振光量的光谱仪/ PDA（500）。

公开(公告)号：KR1020010054892A

公开(公告)日：2001-07-02

申请号：KR1019990055885

申请日：1999-12-08

Applicant: (주)파이버프로

Inventor： 정호진 ,  이봉완

IPC: G01J4/00

CPC classification number: G01J4/04

Abstract: PURPOSE: A device and a method for analyzing polarization are provided to provide a compact and inexpensive polarizing analysis device and to accurately measure in a wide wave range without previously knowing an amount of phase delay. CONSTITUTION: A device for analyzing polarization includes a phase delay plate(300), a polarizer(310), a detecting part(320) and a signal processing unit(330). The phase delay plate delays phase between polarizing elements of incident light of a rapid axis and a slow axis, and at the same time, rotates in a first fixed speed. The polarizer changes a polarized condition of light passing the phase delay plate and rotates in a second fixed speed. The detecting part detects strength of light passing the polarizer. The signal processing unit extracts frequency elements of electric signal of the detected light and detects a polarized condition of the incident light.

Abstract translation: 目的：提供一种用于分析极化的装置和方法，以提供紧凑且便宜的偏振分析装置，并且在没有预先知道相位延迟量的情况下在宽波段中精确测量。 构成：用于分析极化的装置包括相位延迟板（300），偏振器（310），检测部分（320）和信号处理单元（330）。 相位延迟板延迟了快速轴和慢轴的入射光的偏振元件之间的相位，并且同时以第一固定速度旋转。 偏振器改变通过相位延迟板的光的偏振条件，并以第二固定速度旋转。 检测部检测通过偏振片的光的强度。 信号处理单元提取检测到的光的电信号的频率元素，并检测入射光的偏振状态。

公开(公告)号：KR1020010037296A

公开(公告)日：2001-05-07

申请号：KR1019990044723

申请日：1999-10-15

Applicant: 한국과학기술원

Inventor： 이창희 ,  신상영 ,  추광욱

IPC: H04B10/07 ,  H04B10/291

CPC classification number: H04B10/077 ,  G01J4/04 ,  H04B10/07955

Abstract: PURPOSE: A device and a method for measuring an optical signal-to-noise ratio are provided to measure a Stokes' parameter of an output light of an optical amplifier, so as to measure the optical signal-to-noise ratio. CONSTITUTION: A band pass optical variable filter(701) passes an output light coincident with a transmission wavelength, if the output light of an optical amplifier is inputted. A 1-by-4 optical divider(702) divides the light passed the band pass optical variable filter(701) into four. Stokes parameter measuring units(703,704,705,706,707) calculates the Stokes' parameters which are S0,S1,S2 and S3 from the divided four light. An optical light strength measuring unit measures the strength of polarized components among output light of the optical amplifier from the Stokes' parameters of S0,S1,S2 and S3. A noise strength measuring unit calculates the noise strength included in the output light of the optical amplifier by using the Stokes' parameter of S0 and the strength of the optical signal. A dividing unit(721) calculates an optical signal strength-to-noise strength ratio for a transmission wavelength, by using the optical signal strength and the noise strength. The optical signal strength-to-noise strength ratios in each wavelength are measured while varying the transmission wavelength of the band pass optical variable filter(701). A peak of the measured strength-to-noise strength ratios is searched, and set up as an optical signal-to-noise ratio.

Abstract translation: 目的：提供一种用于测量光信噪比的装置和方法，以测量光放大器的输出光的斯托克斯参数，以便测量光信噪比。 构成：如果输入光放大器的输出光，则带通光学可变滤波器（701）通过与透射波长一致的输出光。 1/4分频器（702）将通过光通滤光器（701）的光分成四个。 斯托克斯参数测量单元（703,704,705,706,707）从划分的四个光线计算出S0，S1，S2和S3的斯托克斯参数。 光强度测量单元从S0，S1，S2和S3的斯托克斯参数测量光放大器的输出光中的偏振分量的强度。 噪声强度测量单元通过使用S0的斯托克斯参数和光信号的强度来计算包括在光放大器的输出光中的噪声强度。 分割单元（721）通过使用光信号强度和噪声强度来计算透射波长的光信号强度 - 噪声强度比。 在改变带通光可变滤波器（701）的透射波长的同时测量每个波长中的光信号强度 - 噪声强度比。 搜索测得的强度 - 噪声强度比的峰值，并将其设置为光信噪比。

公开(公告)号：EP3341692A1

公开(公告)日：2018-07-04

申请号：EP16732432.6

申请日：2016-06-12

Applicant: Raytheon Company

Inventor： FEST, Eric C. ,  LEIGH, Jon E.

IPC: G01J4/04 ,  G01N21/21 ,  G02B5/30

CPC classification number: G02B27/286 ,  G01J4/04 ,  G02B5/201 ,  G02B5/3025 ,  G06T7/344 ,  G06T2207/10048

Abstract: Polarized pixelated filter sub-array is reconfigured to reduce sensitivity to misalignment. The condition number increases more slowly than the standard polarized pixelated filter sub-array as the misalignment increases. In different embodiments, the filter sub-array is configured such that the condition number has a finite bound at ½ pixel misalignment. The angular values of the polarizer filter array are determined to minimize the sensitivity of the condition number of the data reduction matrix to misalignment. This can be achieved by selecting angular values that minimize the expected value of the condition number E(CN) over the range of misalignment.

公开(公告)号：EP3228977A4

公开(公告)日：2018-07-04

申请号：EP15865560

申请日：2015-10-28

Applicant: SONY CORP

Inventor： KONDO YUHI ,  HIRASAWA YASUTAKA ,  HAYASAKA KENGO

IPC: G01B11/00 ,  G01B11/24 ,  G01C3/06 ,  H04N5/225 ,  H04N5/232 ,  H04N5/247 ,  H04N13/214 ,  H04N13/229 ,  H04N13/271

CPC classification number: H04N13/214 ,  G01B11/00 ,  G01B11/24 ,  G01C3/085 ,  G01J4/04 ,  G06T7/55 ,  H04N5/2254 ,  H04N5/2258 ,  H04N5/247 ,  H04N13/218 ,  H04N13/229 ,  H04N13/232 ,  H04N13/243 ,  H04N13/271 ,  H04N2013/0081

Abstract: A depth map generation unit 22 generates a depth map that generates the depth map from images obtained by picking up a subject at a plurality of viewpoint positions by an image pickup unit 21. On the basis of the depth map generated by the depth map generation unit 22, an alignment unit 23 aligns polarized images obtained by the image pickup unit 21 picking up the subject at the plurality of viewpoint positions through polarizing filters in different polarization directions at the different viewpoint positions. A polarization characteristic acquisition unit 24 acquires a polarization characteristic of the subject from a desired viewpoint position by using the polarized images aligned by the alignment unit 23 to obtain the high-precision polarization characteristic with little degradation in temporal resolution and spatial resolution. It becomes possible to acquire the polarization characteristic of the subject at the desired viewpoint position.

公开(公告)号：EP1902334B2

公开(公告)日：2018-04-04

申请号：EP06763828.8

申请日：2006-06-22

Applicant: Grau, Günter

Inventor： Grau, Günter

IPC: G02B5/30 ,  G01J1/42 ,  G01J4/04 ,  H01L31/0232 ,  H01L27/146 ,  H04N13/04

CPC classification number: G02B5/3025 ,  G01J4/04 ,  H01L27/14625 ,  H04N13/341

公开(公告)号：EP2480869A4

公开(公告)日：2017-03-15

申请号：EP10818498

申请日：2010-09-21

Applicant: VOROTEC LTD

Inventor： VOROVITCHIK SHLOMO

IPC: G01J4/00 ,  G01C17/34 ,  G01C21/02 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01C17/34 ,  G01C21/02 ,  G01J2004/005

Abstract: An apparatus and system for use in determining location of a celestial body are presented. The apparatus comprises: a polarizer comprising an array of polarized light filter cells and a light sensor array. The array of polarized light filter cells comprises at least a first polarization direction and a second polarization direction different from said first polarization direction. And the polarizer thereby produces polarized light of at least first and second different polarizations. The light sensor array is configured to receive the polarized light from the polarizer and produce data indicative of a pattern of at least one of light polarization intensity and direction. The pattern is indicative of at least one of azimuth and elevation of the celestial body to be located.

Abstract translation: 提出了一种用于确定天体位置的装置和系统。 该装置包括：偏振器，包括偏振光滤光器单元阵列和光传感器阵列。 偏振光滤波器单元的阵列至少包括与所述第一偏振方向不同的第一偏振方向和第二偏振方向。 并且偏振器由此产生至少第一和第二不同偏振的偏振光。 光传感器阵列被配置为接收来自偏振器的偏振光，并且产生指示光偏振强度和方向中的至少一个的图案的数据。 该图案表示要定位的天体的方位角和仰角中的至少一个。

公开(公告)号：EP3076160A1

公开(公告)日：2016-10-05

申请号：EP15162031.7

申请日：2015-03-31

Applicant: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

Inventor： VAN BRUG, Hedser ,  VISSER, Huibert

IPC: G01N21/21 ,  G01N21/47 ,  G01N21/17 ,  G01J4/00

CPC classification number: G01N21/21 ,  G01J3/0208 ,  G01J3/0224 ,  G01J4/04 ,  G01N21/538 ,  G01N2021/1793 ,  G01N2021/4704 ,  G01N2021/4711 ,  G01N2021/4792

Abstract: The invention pertains to an aerosol detector system for spatially resolved detection of an aerosol distribution in an area, comprising: a wide field polarization preserving telescope having telecentric imaging optics for imaging the earth surface onto a detector; said detector receiving phase stepped images imaged by said telescope; and a controller coupled to the detector, arranged to provide a resulting image as a function of corresponding pixel values of the multiple images to produce an image at a spatially resolved polarization state corresponding to said aerosol substance; wherein the telescope comprises a first telecentric imaging lens group and a wavelength filter positioned in a field image of the first telescope telecentric beam to define a spectral range of interest; the telescope further comprising: a converging lens group converging the beam to a pupil stop; relay optics including a second telecentric imaging lens group arranged to generate a telecentric beam; and splitter optics, comprising a polarization splitter for the selected wavelength range to split the telecentric beam into polarized beams; a further splitter; and a retarder to create multiple phase stepped images at different polarizations, the detector comprising multiple image sensors positioned in imaging planes after the splitter optics, and said polarization splitter, further splitter and retarder positioned in the telecentric beam of the second telecentric imaging lens group.

Abstract translation: 本发明涉及用于空间分辨检测区域中的气溶胶分布的气溶胶检测器系统，包括：具有用于将地球表面成像到检测器上的远心成像光学器件的宽场偏振保留望远镜; 所述检测器接收由所述望远镜成像的阶段式图像; 以及耦合到所述检测器的控制器，被布置为提供作为所述多个图像的对应像素值的函数的结果图像，以产生对应于所述气溶胶物质的空间分辨的极化状态的图像; 其中望远镜包括位于第一望远镜远心光束的场图像中的第一远心成像透镜组和波长滤光器，以限定感兴趣的光谱范围; 所述望远镜还包括：会聚透镜组，将所述光束会聚到光瞳停止部; 中继光学器件，包括布置成产生远心光束的第二远心成像透镜组; 和分离器光学器件，包括用于所选波长范围的偏振分离器，以将远心光束分裂成偏振光束; 另一个分路器 以及延迟器，以在不同偏振下产生多个相位阶梯图像，所述检测器包括位于分离器光学器件之后的成像平面中的多个图像传感器，并且所述偏振分离器，进一步的分离器和延迟器定位在第二远心成像透镜组的远心光束中。

公开(公告)号：EP3047646A1

公开(公告)日：2016-07-27

申请号：EP14755048.7

申请日：2014-08-12

Applicant: SELEX ES LTD

Inventor： PILKINGTON, Roger Malcolm ,  WONG, Gerald ,  LAMB, Robert A. ,  SINCLAIR, Peter

IPC: H04N5/33 ,  G01J4/04

CPC classification number: G06T5/006 ,  G01J3/0205 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/12 ,  G01J3/2823 ,  G01J4/04 ,  G01J2003/1234 ,  G01J2003/2826 ,  G06T3/4053 ,  G06T7/90 ,  G06T2207/20024 ,  G06T2207/30168 ,  H04N5/2254 ,  H04N5/23232 ,  H04N5/23293 ,  H04N5/33 ,  H04N9/646 ,  H04N17/002

Abstract: A camera for polarimetric, multispectral imaging is described. Such cameras are used in photonics, computational imaging and multispectral imaging in which both multispectral and polarimetric sensing modalities are used simultaneously for detection, recognition and identification. The camera enables multiple spectral images to be recorded simultaneously using polarising beamsplitters and mirrors to divide the image according polarimetric and spectral bands. These multiple, polarised images are recorded on a single focal plane array (FPA) simultaneously. An image processor allows for the resolution of the subsequent image to be improved.

Abstract translation: 描述了用于偏振，多光谱成像的相机。 这种相机用于光子学，计算成像和多光谱成像，其中多光谱和极化感测模式同时用于检测，识别和识别。 相机使得可以使用偏振分光镜和反射镜同时记录多个光谱图像，以根据偏光度和光谱带划分图像。 这些多个偏振图像同时记录在单个焦平面阵列（FPA）上。 图像处理器允许改进后续图像的分辨率。

公开(公告)号：EP3026408A1

公开(公告)日：2016-06-01

申请号：EP15196379.0

申请日：2015-11-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： KAWADA, Yoichi ,  YASUDA, Takashi ,  TAKAHASHI, Hironori

IPC: G01J3/433 ,  G01N21/3581

CPC classification number: G01J1/44 ,  G01J1/0429 ,  G01J1/4228 ,  G01J3/0224 ,  G01J3/0262 ,  G01J3/42 ,  G01J3/433 ,  G01J3/4338 ,  G01J4/04 ,  G01J2001/4242 ,  G01N21/3581 ,  G01R15/241 ,  G01R29/0871

Abstract: In this electric field vector detection method, an electro-optic crystal (3), where a (111) surface (3a)of an optical isotropic medium is cut out, is used as a terahertz wave detection element (3). The method includes: causing polarization of probe light (La) of ultrashort pulsed light to be circular polarization (2); allowing the probe light (La) having circular polarization to enter the terahertz wave detection element (3) and probing the terahertz wave (T); modulating the probe light, having probed the terahertz wave, by a rotating analyzer (9) and detecting the modulated probe light by a photodetector (4, 4A); performing lock-in detection of a detection signal from the photodetector by a lock-in detector using a frequency based on a rotational frequency of the rotating analyzer (9) as a reference signal; and detecting an electric field vector of the terahertz wave (T) based on a detection signal from the lock-in detector.

Abstract translation: 在该电场矢量检测方法中，使用光学各向同性介质的（111）面（3a）的电光晶体（3）作为太赫兹波检测元件（3）。 该方法包括：使超短脉冲光的探测光（La）的极化为圆极化（2）; 允许具有圆极化的探测光（La）进入太赫兹波检测元件（3）并探测太赫兹波（T）; 通过旋转分析器（9）调制探测太赫兹波的探测光并通过光电检测器（4A，4A）检测调制的探测光; 通过锁定检测器使用基于旋转分析仪（9）的旋转频率的频率作为参考信号来执行来自光电检测器的检测信号的锁定检测; 以及基于来自锁定检测器的检测信号来检测太赫兹波（T）的电场矢量。