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    Method of manufacture of low water peak single mode optical fiber
    233.
    发明申请
    Method of manufacture of low water peak single mode optical fiber 审中-公开
    低水峰单模光纤的制造方法

    公开(公告)号：US20050000253A1

    公开(公告)日：2005-01-06

    申请号：US10874456

    申请日：2004-06-23

    Applicant: Kang Xie ,  Shuqiang Zhang ,  Qingrong Han ,  Tiejun Wang ,  Chenghou Tu ,  Raji Matai

    Inventor： Kang Xie ,  Shuqiang Zhang ,  Qingrong Han ,  Tiejun Wang ,  Chenghou Tu ,  Raji Matai

    IPC: C03B37/018

    CPC classification number: C03B37/01892 ,  C03B37/01807 ,  C03B37/0183 ,  C03B37/01853 ,  C03B37/01861 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/22 ,  C03B2201/31 ,  C03B2207/30 ,  C03B2207/32

    Abstract: The present invention directs to a method of manufacturing low water peak single mode optical fiber, which comprises performing deposition in a substrate tube using PCVD technology, whereby a deposited layer of a certain construction design is formed on the inner wall of the substrate tube, melt contracting the substrate tube into a solid core rod according to melt contraction technology, producing an optical fiber preform by combining the core rod and a jacket tube of low hydroxyl content by means of RIT technology or by depositing an outer cladding on the outer surface of the core rod using OVD technology, sending the optical fiber preform into a fiber drawing furnace to draw it into an optical fiber, wherein: in the PCVD technology, the content of impurities in a gas mixture of raw materials, which is characterized by the infrared spectrum transmissivity thereof, is required to a transmissivity of 90% or greater, the water content in O2 is 100 ppb or less, the water content in C2F6 is 1000 ppb or less, the hydroxyl content of the substrate tube is 1000 ppb or less, the dynamic leak rate of a deposition machine is 1.0×10−5 mbar·l/s or less; during melt contraction of the substrate tube, the dynamic leak rate of a melt contraction machine is 1.0×10−5 mbar·l/s or less; the hydroxyl content of the jacket tube of low hydroxyl content is required to be 10 ppm or less; the relative humidity of environment during the process of manufacture is 25% or less; the ratio of the cladding diameter to the core layer diameter (b/a value) in the waveguide structure of the optical fiber is from 2.0 to 7.0.

    Abstract translation: 本发明涉及制造低水峰单模光纤的方法，其包括使用PCVD技术在衬底管中进行沉积，由此在衬底管的内壁上形成一定的结构设计的沉积层，熔化 根据熔体收缩技术将衬底管收缩成实心芯棒，通过RIT技术将芯棒和低羟基含量的护套管组合在一起，或通过在外部表面上沉积外包层来生产光纤预制棒 使用OVD技术将光纤预制棒发送到光纤拉丝炉中，将其拉入光纤中，其中：在PCVD技术中，原料气体混合物中的杂质含量，其特征在于红外光谱 透过率为90％以上，O 2的含水量为100ppb以下，C2F6的含水量 为1000ppb以下，基材管的羟基含量为1000ppb以下，沉积机的动态泄漏率为1.0×10 -5 mbar·l / s以下。 在基材管熔融收缩期间，熔体收缩机的动态泄漏率为1.0×10 -5 mbar·l / s以下; 低羟基含量的护套的羟基含量为10ppm以下; 制造过程中环境的相对湿度为25％以下; 光纤的波导结构中的包层直径与芯层直径的比（b / a值）为2.0〜7.0。

    Method for fabricating optical fiber preform without hydroxyl group in core
    234.
    发明申请
    Method for fabricating optical fiber preform without hydroxyl group in core 审中-公开
    芯中无羟基的光纤预制棒的制造方法

    公开(公告)号：US20040261461A1

    公开(公告)日：2004-12-30

    申请号：US10489436

    申请日：2004-03-09

    Inventor： Chan-Joo Lee ,  Lae-Hyuk Park ,  Jae-Sun Kim ,  Soon-Il Son

    IPC: C03B037/018

    CPC classification number: C03B37/01853 ,  C03B37/01815 ,  C03B37/01884 ,  C03B2201/075 ,  C03B2201/31

    Abstract: Method for fabricating an optical fiber preform substantially without hydroxyl group in core includes forming clad layer having relatively low refractive index by depositing soot (SiO2, GeO2) to inner surface of quartz tube; and forming core layer having relatively high refractive index on clad layer, which includes (a) a base core layer forming step composed of generating soot by heating inside of quartz tube to 1000null C.-1400null C. with introducing reaction gases (SiCl4GeCl4) into quartz tube, accumulating soot on clad layer removing hydroxyl-groups (OH) and moisture from soot and tube by heating inside of quartz tube to 600null C.-1200null C. with introducing dehydration gases (He, Cl2; O2) into quartz tube, and sintering and vitrifying soot by heating quartz tube inside over 1700null C. with introducing dehydration gas (He, Cl2, O2); and (b) a step of forming at least one additional core layer on base core layer by repeating the accumulating/dehydrating/sintering of the step (a) at least one time.

    Abstract translation: 用于制造基本上没有羟基的光纤预制件的方法包括通过将石墨（SiO 2，GeO 2）沉积到石英管的内表面上而形成具有相对较低折射率的覆层; 以及在包覆层上形成具有较高折射率的芯层，其包括：（a）通过在石英管内加热至1000℃-1400℃，通过引入反应气体（SiCl 4 GeCl 4 ）放入石英管中，通过在石英管内加热至600℃-1200℃，通过引入脱水气体（He，Cl2; O2），在包覆层上堆积煤烟，从烟灰和管中除去羟基（OH）和水分， 加入石英管，并通过加入脱水气体（He，Cl2，O2）将石英管加热到1700℃以上来烧结和玻璃化烟灰; 和（b）通过至少一次重复步骤（a）的累积/脱水/烧结，在基核心层上形成至少一个附加核心层的步骤。

    Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
    236.
    发明申请
    Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass 失效
    真空紫外透射硅氧氟硅光刻玻璃

    公开(公告)号：US20040091798A1

    公开(公告)日：2004-05-13

    申请号：US10702266

    申请日：2003-11-05

    Inventor： Lisa A. Moore ,  Charlene M. Smith

    IPC: G03F009/00 ,  C03C015/00 ,  C03C003/04 ,  C03C003/06 ,  C03C003/112 ,  G03C005/00

    CPC classification number: C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  G03F1/60

    Abstract: High purity silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed with the silicon oxyfluoride glass having a preferred fluorine content

    Abstract translation: 公开了具有优选氟含量<0.5重量％的氟氧化硅玻璃，适合用作光刻应用中的低于190nm的VUV波长区域的光掩模基板的高纯度氟氧化硅玻璃。 本发明的氟氧化硅玻璃在157nm波长下是透射的，使其特别适用于157nm波长区域的光掩模衬底。 本发明的光掩模基材是“真空”的氟氧化硅玻璃，其在真空紫外（VUV）波长区域中表现出非常高的透射率，同时保持通常与高纯度熔融石英相关的优异的热和物理性能。 除了含氟并且具有很少或不具有OH含量之外，本发明的适合用作157nm的光掩模衬底的氟氧化硅玻璃的特征还在于具有小于1×10 17分子/ cm 3的分子氢和低 氯水平。

    Synthetic quartz glass and production process
    238.
    发明授权
    Synthetic quartz glass and production process 失效
    合成石英玻璃及生产工艺

    公开(公告)号：US06705115B2

    公开(公告)日：2004-03-16

    申请号：US09747953

    申请日：2000-12-27

    Applicant: Koji Matsuo ,  Hisatoshi Otsuka ,  Kazuo Shirota

    Inventor： Koji Matsuo ,  Hisatoshi Otsuka ,  Kazuo Shirota

    IPC: C03B1914

    CPC classification number: C03B19/1423 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/36 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2203/40

    Abstract: A process for producing synthetic quartz glass using a burner composed of a plurality of concentric nozzles involves the steps of feeding a silica-forming raw material gas and a fluorine compound gas to a reaction zone from a center nozzle, feeding oxygen gas from a second nozzle outside the center nozzle, and feeding oxygen gas and/or hydrogen gas from a third nozzle. The silica-forming raw material gas is hydrolyzed to form fine particles of silica, which particles are deposited on a rotatable substrate so as to form a porous silica matrix, which is then fused to give the quartz glass. The flow rate of the oxygen gas fed from the second nozzle and the flow rate of the raw material gas are controlled so as to provide a 1.1- to 3.5-fold stoichiometric excess of oxygen. The excess oxygen suppresses Si—Si bond formation in the quartz glass, enabling the production of synthetic quartz glass having a high transmittance in the vacuum ultraviolet region.

    Abstract translation: 使用由多个同心喷嘴构成的燃烧器来生产合成石英玻璃的方法包括以下步骤：将来自中心喷嘴的二氧化硅生成原料气体和氟化合物气体供给到反应区域，从第二喷嘴 在中心喷嘴外部，并且从第三喷嘴供给氧气和/或氢气。 二氧化硅形成原料气体被水解以形成二氧化硅细颗粒，该颗粒沉积在可转动的基底上，以便形成多孔二氧化硅基质，然后熔化以得到石英玻璃。 控制从第二喷嘴供给的氧气的流量和原料气体的流量，从而提供1.1-3.5倍化学计量的过量的氧气。 过量的氧抑制石英玻璃中的Si-Si键的形成，能够在真空紫外线区域中制造具有高透射率的合成石英玻璃。

    Method for producing an optical fibre and blank for an optical fibre
    239.
    发明申请
    Method for producing an optical fibre and blank for an optical fibre 审中-公开
    光纤用光纤和坯料的制造方法

    公开(公告)号：US20030140659A1

    公开(公告)日：2003-07-31

    申请号：US10296089

    申请日：2002-11-22

    Inventor： Heinz Fabian

    IPC: C03B037/028

    CPC classification number: C03B37/01211 ,  C03B37/014 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12

    Abstract: In a known procedure for the manufacture of an optical fiber by drawing from a preform with a core-clad structure or from a coaxial arrangement of several components forming a core-clad structure, a core cylinder is produced with a soot deposition method, with the core cylinder having a core glass layer of a higher refractive index, nullnKnull, and outer diameter, nulldKnull, said core glass layer being encased by a first cladding glass layer having a lower refractive index, nullnM1null, and outer diameter, nulldM1null, followed by applying a second cladding glass layer onto the core cylinder. The modification of this procedure according to the invention is characterized by its lower optical fiber production costs. This is achieved by providing the second cladding glass layer (4) in the form of a cladding tube manufactured in a separate step of the procedure, said cladding tube having a mean OH concentration of max. 1 wt.-ppm, and applying the second cladding glass layer (4) by collapsing the cladding tube onto the core cylinder (2; 3), and by using a core cylinder with a nulldM1null/nulldKnull ratio between 1 and 2.2 and a mean OH concentration of max. 1 wt-ppm in its superficial area up to a depth of 10 nullm (FIG. 1).

    Abstract translation: 在通过从具有芯包层结构的预成型件或由形成芯包层结构的多个部件的同轴布置拉制制造光纤的已知方法中，使用烟灰沉积方法制造芯筒， 具有较高折射率的核心玻璃层“nK”和外径“dK”的芯部圆筒，所述芯部玻璃层被具有较低折射率的第一包层玻璃层“nM1”和外径 ，“dM1”，然后在核心圆筒上施加第二包层玻璃层。 根据本发明的该过程的修改的特征在于其较低的光纤生产成本。 这是通过在步骤的单独步骤中提供以包层管形式形成的第二包覆玻璃层（4）来实现的，所述包层管的平均OH浓度为最大。 1重量ppm，并且通过将包层管折叠到芯筒（2; 3）上并通过使用具有“dM1”/“dK”比的芯筒在1和1之间施加第二包层玻璃层 2.2和平均OH浓度最大。 在其表层面积为1重量ppm至10微米深度（图1）。

    Single mode optical fiber and manufacturing method therefor
    240.
    发明申请
    Single mode optical fiber and manufacturing method therefor 审中-公开
    单模光纤及其制造方法

    公开(公告)号：US20030110811A1

    公开(公告)日：2003-06-19

    申请号：US10304844

    申请日：2002-11-26

    Applicant: SINGLE MODE OPTICAL FIBER AND MANUFACTURING METHOD THEREFOR

    Inventor： Tomohiro Nunome ,  Hiroshi Kutami ,  Manabu Saitou ,  Kenji Okada ,  Munehisa Fujimaki ,  Koichi Harada

    IPC: C03B037/025

    CPC classification number: C03B37/01413 ,  C03B37/02718 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2205/56 ,  G02B6/03622 ,  Y02P40/57

    Abstract: An optical fiber is formed by performing vapor phase deposition of SiO2 on the outside of a glass rod comprising a core section and a first cladding section and drawing a glass preform which formed by a second cladding section. Also, a single mode optical fiber is manufactured so that the ratio of the diameter D of the first cladding section and the diameter d of the core section is in a range of 4.0 to 4.8, and OH concentration is 0.1 ppm or less. Also, an optical fiber is manufactured so that a value of D/d>4.8, and the OH concentration is 0.1 ppm or less. It is thereby possible to maintain an initial loss in the 1380 nm wavelength range even if hydrogen diffusion occurs.

    Abstract translation: 通过在包括芯部和第一包层部分的玻璃棒的外部进行SiO 2的气相沉积并且拉制由第二包层部形成的玻璃预制件来形成光纤。 此外，制造单模光纤，使得第一包层部分的直径D和芯部分的直径d的比率在4.0至4.8的范围内，并且OH浓度为0.1ppm或更小。 此外，制造光纤，使得D / d> 4.8，OH浓度为0.1ppm以下。 因此即使发生氢扩散，也可以保持1380nm波长范围的初始损耗。

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