Neutralization of controlled charge of ion implanted workpiece
    21.
    发明专利
    Neutralization of controlled charge of ion implanted workpiece 审中-公开
    离子植入工艺的控制电荷中和

    公开(公告)号:JP2005294269A

    公开(公告)日:2005-10-20

    申请号:JP2005135376

    申请日:2005-04-05

    Inventor: STARCHER RONALD

    CPC classification number: H01J37/3171 H01J37/026 H01J2237/0045

    Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus which has significant advantages over other methods, such as plasma and electron showers and plasma flood system, for neutralizing excess charge due to ion implantation. SOLUTION: A means of neutralizing the excess charge on workpieces, such as semiconductor wafers, that results from ion-implantation processes, wherein the excess positive charge on a small area of the workpiece surface is locally sensed, and in response, an appropriate dose of charge-compensating electrons is delivered from an electron emission source to the area of excess charge on the workpiece. A charge-sensing probe and a voltage-controlled electron generator array are configurationally and operatively coupled in a closed feedback loop, and are made to scan the surface of the workpiece, in close but non-contacting proximity to the surface of the workpiece. Arrays of charge-sensing probes and electron generator arrays can be configured for rapid coverage of the implanted areas of the workpiece. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种比其他方法(例如等离子体和电子淋浴和等离子体淹水系统)具有显着优点的方法和装置,用于中和由于离子注入引起的过量电荷。 解决方案:中和离子注入工艺产生的诸如半导体晶片的工件上的过量电荷的方法,其中在工件表面的小区域上过量的正电荷被局部感测,并且作为响应, 电荷补偿电子的适当剂量从电子发射源传送到工件上的过量电荷区域。 电荷感测探针和电压控制的电子发生器阵列在闭合反馈回路中构造和操作地耦合,并且被制成扫描工件的表面,在接近工件的表面附近但非接触。 电荷感测探针和电子发生器阵列的阵列可被配置为快速覆盖工件的注入区域。 版权所有(C)2006,JPO&NCIPI

    Conductive tube used as reflectron lens
    22.
    发明专利
    Conductive tube used as reflectron lens 有权
    导电管用作电光镜

    公开(公告)号:JP2004288637A

    公开(公告)日:2004-10-14

    申请号:JP2004080821

    申请日:2004-03-19

    Inventor: LAPRADE BRUCE

    CPC classification number: H01J49/405

    Abstract: PROBLEM TO BE SOLVED: To provide a reflectron lens of a simple structure and enabled to be manufactured at low cost and at the same time, with sensitivity and resolution improved, and provide a direction inversion method of ion beams using the lens. SOLUTION: The reflectron-lenses 500, 600, 650 are composed of tubes, and the tubes have a continuous conductive face each along a longitudinal direction in order to provide inside the tube an electric field in which strength varies along the longitudinal direction. The tube may be formed of glass containing metal ions such as lead, and the conductive face can be formed by reducing the glass. As for the direction inversion method of the ion beams, the ion beams are introduced into a first end part of a dielectric tube having the continuous conductive face along the longitudinal direction of the tube, and an electric field gradient in which strength varies along the longitudinal direction of the tube is formed by applying electrical potential passing through the tube, and the ions are taken outside via the first end part of the tube by inverting the direction of the movement of the ions in that electric field gradient. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种简单结构的反射镜,能够以低成本,同时,灵敏度和分辨率提高制造,并提供使用该透镜的离子束的方向反转方法。 解决方案:反射镜透镜500,600,650由管组成,并且管沿着纵向方向具有连续的导电面,以在管的内部提供强度沿着纵向方向变化的电场 。 该管可以由含有诸如铅的金属离子的玻璃形成,并且可以通过还原玻璃来形成导电面。 对于离子束的方向反转方法,离子束被引入沿着管的纵向方向具有连续导电面的电介质管的第一端部,以及强度沿纵向变化的电场梯度 通过施加通过管的电势来形成管的方向,并且通过在该电场梯度中反转离子的移动方向,通过管的第一端部将离子取出到外部。 版权所有(C)2005,JPO&NCIPI

    DEVICE FOR CONTROLLING PAN OPERATION OF CAMERA

    公开(公告)号:JPH03131834A

    公开(公告)日:1991-06-05

    申请号:JP25678790

    申请日:1990-09-25

    Abstract: PURPOSE: To improve efficiency by making a closed circuit television maintenance monitor system easy to use by using four mechanical actuators for moving an especially formed star cam for operating the other cam with which an invert switch actuator is engaged. CONSTITUTION: A star cam 26 is automatically inverted through manual switching in cooperation with a 2nd special cam 28. This 2nd cam 28 is fitted to the same shaft as the star cam 26 and formed almost circular. Then, an actuator 32 of an ordinary electric limit switch 30 is placed on the tableland- shaped section of the 2nd cam 28, and this limit switch 30 is constituted so as to change its state only when first arriving at one side of the tableland- shaped section positioned outside but not to change the state when separating from that tableland-shaped section. Thus, an operator can control the camera under ordinary panning operation by himself/herself and when recovering the original automatic panning operation of a system, a certain place is prevented from disabling the monitor.

    OPTOELECTRONIC MULTIPLIER
    24.
    发明专利

    公开(公告)号:JPH02288145A

    公开(公告)日:1990-11-28

    申请号:JP9992689

    申请日:1989-04-19

    Abstract: PURPOSE: To accomplish improvement in collecting efficiency of a tube, reduction of a total transfer time, and miniaturization of a photomultiplier and the tube as a whole by comprising a plurality of concentric housing electrodes serving as sections of elliptic dome substantially. CONSTITUTION: A photo multiplier tube is constructed of an envelope 12, a face plate 14, a photoelectric emission cathode 16, a photomultiplier structure 18, the first dynode 20, a facing electrode structure 32, focusing electrodes 34, 36, 38, and an evaporator 42. Main segments, which are provided with faces tilted by tilting angles of at least 10 degrees and formed into ellipses or spheroids, are arranged from the photomultiplier part 18 to the photoelectric emission cathode 16 so that their diameters are increased in order while voltage is lowered in order. These focusing electrodes 32 form a precise electric field. In this way, collecting efficiency of the tube can be increased, a total transfer time can be reduced, and the photomultiplier tube 18 and the tube as a whole can be miniaturized.

    Optical alignment system
    26.
    发明授权

    公开(公告)号:US10234674B2

    公开(公告)日:2019-03-19

    申请号:US14924417

    申请日:2015-10-27

    Abstract: A coalignment system including wedge-prism assembly that can be attached to a conventional night vision scope, for example. This could allow a standard handheld night vision scope to be deployed in different modes such as on headmounted goggles or as an augmentation scope in front of a day sight a weapon while enabling Line of sight/point of impact (LOS/POI) correction. In order to ensure maximum compatibility, the coalignment system includes diopter adjustment.

    Electrostatic suppression of ion feedback in a microchannel plate photomultiplier
    27.
    发明授权
    Electrostatic suppression of ion feedback in a microchannel plate photomultiplier 有权
    微通道板光电倍增管中离子反馈的静电抑制

    公开(公告)号:US09425030B2

    公开(公告)日:2016-08-23

    申请号:US14296577

    申请日:2014-06-05

    Inventor: Jeffrey DeFazio

    CPC classification number: H01J43/04 H01J43/246

    Abstract: A photomultiplier tube having an ion suppression electrode positioned between a photocathode and an electron multiplying device in the photomultiplier tube is disclosed. The ion suppression electrode includes a grid that is configured to provide sufficient rigidity to avoid deformation during operation of the photomultiplier tube. The photomultiplier tube also includes a source of electric potential connected to the electron multiplying device and to the ion suppression electrode to provide a first voltage to the second electrode and a second voltage to the suppression grid electrode wherein the second voltage has a magnitude equal to or greater than the magnitude of the first voltage. A method of making the photomultiplier and a method of using it are also disclosed.

    Abstract translation: 公开了一种光电倍增管,其具有位于光电倍增管内的光电阴极和电子倍增装置之间的离子抑制电极。 离子抑制电极包括网格,其被配置为提供足够的刚度以避免在光电倍增管的操作期间的变形。 光电倍增管还包括连接到电子倍增装置和离子抑制电极的电位源,以向第二电极提供第一电压,以及向抑制栅极施加第二电压,其中第二电压的幅度等于或等于 大于第一电压的大小。 还公开了制造光电倍增管的方法及其使用方法。

    MOUNTING SYSTEM AND METHOD FOR NIGHT VISION TUBES
    28.
    发明申请
    MOUNTING SYSTEM AND METHOD FOR NIGHT VISION TUBES 审中-公开
    夜视镜的安装系统和方法

    公开(公告)号:WO2017044713A1

    公开(公告)日:2017-03-16

    申请号:PCT/US2016/050906

    申请日:2016-09-09

    Abstract: A mounting system for night vision tubes includes a multi-part sleeve that opens in the manner of a clamshell to receive the tube. The sleeve includes a longitudinal seam or a partial longitudinal seam and opens around compliant hinge regions. The night vision tube engages a ramp section of the sleeve, urging the sleeve to open and then abuts against a front shoulder, causing the sleeve to clamp shut around the night vision tube. The tube is constrained between the front shoulder and a retaining shoulder. An indexing pin engages the night vision tube and the sleeve to maintain mutual rotational alignment. The sleeve and the tube are inserted into a housing of a night vision system.

    Abstract translation: 用于夜视管的安装系统包括以蛤壳的方式打开以接收管的多部分套筒。 套筒包括纵向接缝或部分纵向接缝,并围绕柔顺铰链区域开口。 夜视管接合套筒的斜坡部分,推动套筒打开,然后抵靠前肩,使套管夹紧在夜视管周围。 管被限制在前肩和保持肩之间。 分度销接合夜视管和套筒以保持相互旋转对准。 套管和管插入夜视系统的外壳中。

    Electrostatic Suppression of Ion Feedback in a Microchannel Plate Photomultiplier
    30.
    发明申请
    Electrostatic Suppression of Ion Feedback in a Microchannel Plate Photomultiplier 有权
    微通道板光电倍增管中离子反馈的静电抑制

    公开(公告)号:US20140361683A1

    公开(公告)日:2014-12-11

    申请号:US14296577

    申请日:2014-06-05

    Inventor: Jeffrey DeFazio

    CPC classification number: H01J43/04 H01J43/246

    Abstract: A photomultiplier tube having an ion suppression electrode positioned between a photocathode and an electron multiplying device in the photomultiplier tube is disclosed. The ion suppression electrode includes a grid that is configured to provide sufficient rigidity to avoid deformation during operation of the photomultiplier tube. The photomultiplier tube also includes a source of electric potential connected to the electron multiplying device and to the ion suppression electrode to provide a first voltage to the second electrode and a second voltage to the suppression grid electrode wherein the second voltage has a magnitude equal to or greater than the magnitude of the first voltage. A method of making the photomultiplier and a method of using it are also disclosed.

    Abstract translation: 公开了一种光电倍增管,其具有位于光电倍增管内的光电阴极和电子倍增装置之间的离子抑制电极。 离子抑制电极包括网格,其被配置为提供足够的刚度以避免在光电倍增管的操作期间的变形。 光电倍增管还包括连接到电子倍增装置和离子抑制电极的电位源,以向第二电极提供第一电压,以及向抑制栅极施加第二电压,其中第二电压的幅度等于或等于 大于第一电压的大小。 还公开了制造光电倍增管的方法及其使用方法。

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