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公开(公告)号：KR1020100128153A
公开(公告)日：2010-12-07
申请号：KR1020090046624
申请日：2009-05-27
Applicant: (주)미래컴퍼니 , 고려대학교 산학협력단
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , B23K26/36 , H01L31/04
Abstract: PURPOSE: A laser etching apparatus and an aperture forming method using the same are provided to form a gap pattern on a rear passivation layer through a further simplified process using the laser etching technology in stead of photo etching technology in the manufacturing process of thin solar battery of high efficiency. CONSTITUTION: A stage part(160) supports the silicon substrate of solar battery formed with the rear passivation layer. A laser generator(110) generates the laser beam adjusted according to the passivation information. A beam forming unit(130) modifies the size and the shape of a spot of the laser beam according to the size and the shape of the aperture. A projection unit(150) concentrates the laser beam scanned by the scanning unit and irradiates the laser beam.
Abstract translation: 目的：提供一种激光蚀刻装置和使用该激光蚀刻装置的孔形成方法，以便在薄的太阳能电池的制造过程中通过使用激光蚀刻技术代替光蚀刻技术的进一步简化的工艺在后钝化层上形成间隙图案 高效率。 构成：台架部分（160）支撑由后钝化层形成的太阳能电池的硅衬底。 激光发生器（110）产生根据钝化信息调节的激光束。 光束形成单元（130）根据孔径的大小和形状修改激光束的斑点的尺寸和形状。 投影单元（150）集中由扫描单元扫描的激光束并照射激光束。
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公开(公告)号：KR1020100128139A
公开(公告)日：2010-12-07
申请号：KR1020090046606
申请日：2009-05-27
Applicant: (주)미래컴퍼니 , 고려대학교 산학협력단
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , B23K26/36 , H01L31/04
Abstract: PURPOSE: A laser etching apparatus and an aperture forming method using the same are provided to form the gap pattern on a rear passivation layer through a process simplified further using the laser etching technology in stead of photo etching technology in the process of manufacturing the thin solar battery of high efficiency. CONSTITUTION: A stage part(160) supports a silicon substrate of solar battery formed with the rear passivation layer. A laser beam generator(110) generates the laser beat adjusted according to the property of the silicon substrate. A bean forming unit(130) modifies the size and the shape of laser beam spot according to the size and the shape of the aperture.
Abstract translation: 目的：提供激光蚀刻装置和使用该激光蚀刻装置的孔形成方法，以通过在制造薄太阳能的过程中使用激光蚀刻技术代替光蚀刻技术进一步简化的方法在后钝化层上形成间隙图案 电池效率高。 构成：台架部件（160）支撑形成有后钝化层的太阳能电池的硅衬底。 激光束发生器（110）产生根据硅衬底的特性调节的激光拍。 豆形成单元（130）根据孔的尺寸和形状修改激光束斑的尺寸和形状。
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公开(公告)号：KR101417924B1
公开(公告)日：2014-07-11
申请号：KR1020130017748
申请日：2013-02-20
Applicant: (주)미래컴퍼니
Abstract: Disclosed are a laser processing apparatus and a laser processing method. The laser processing method comprises a step for providing a bonded panel bonded by interposing an intermediate layer between a first panel and a second panel; a step for inserting a film between the second panel and the intermediate layer to correspond with a processing object position; and a step for cutting a part of the second panel by irradiating the part with a laser. In the cutting step, damage to the intermediate layer in a laser processing step is prevented by controlling a processing depth of a laser corresponding to the thickness of the film. According to the present invention, the laser processing method is capable of selectively cutting one side of an LCD panel, which is formed by bonding a color filter panel and a TFT panel, using a laser depending on the need. Therefore, damage, which might be generated, can be prevented and repaired even if the damage is generated.
Abstract translation: 公开了一种激光加工装置和激光加工方法。 激光加工方法包括通过在第一面板和第二面板之间插入中间层来提供接合的面板的步骤; 用于在第二面板和中间层之间插入薄膜以对应于处理对象位置的步骤; 以及通过用激光照射该部分来切割第二面板的一部分的步骤。 在切割步骤中，通过控制与膜的厚度相对应的激光的处理深度来防止激光加工步骤中的中间层的损坏。 根据本发明，根据需要，激光加工方法能够选择性地切割通过使用激光结合滤色器面板和TFT面板而形成的LCD面板的一侧。 因此，即使产生损害，也可以防止和修复损坏。
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公开(公告)号：KR101214046B1
公开(公告)日：2012-12-20
申请号：KR1020100073793
申请日：2010-07-30
Applicant: (주)미래컴퍼니
IPC: B23K26/16 , B23K26/402 , B23K26/08 , H01L31/18
CPC classification number: Y02P70/521
Abstract: 다층기판을가공하는레이저가공장치가개시된다. 다층기판을지지하는지지테이블과, 지지테이블상에지지되는다층기판에대하여스캐너에의해조정된위치로레이저빔을조사하는레이저가공부와, 제1 주행축을따라왕복이동가능하며, 레이저가공부가제1 주행축과교차하는제2 주행축을따라왕복이동가능하도록결합되는갠트리유닛과, 레이저가공부와다층기판사이에위치하며, 레이저빔에의해다층기판으로부터발생되는분진을집진하는집진부를포함하되, 집진부에는레이저빔이조사되어레이저가공되는가공영역에대응되는형상을가지고레이저빔을관통시키는개구부가형성되어있는것을특징으로하는레이저가공장치에의, 다층기판의레이저가공시 레이저빔이기판을투과하지않고기판에증착된물질과직접반응하여해당물질을제거할때 발생하는분진을집진함에있어서기구물구성을최소화하며, 진공형성을위한집진용량을최소화하고, 집진유량을높임으로써집진효율을극대화할수 있다.
Abstract translation: 公开了一种用于处理多层基板的激光加工设备。 和用于支撑多层基板，支撑激光一个支撑台，研究相对于被支撑在其上照射在由扫描仪的调整后的位置的激光束的表多层基板，第一驱动沿轴线往复运动，并且激光进行了研究 如权利要求位于台架单元之间并且激光进行了研究，其沿着所述第二行进交叉的第一驱动轴，以便往复运动耦合，所述多层基板，包括：灰尘用于通过激光束收集从多层基板所产生的粉尘收集部 其中，集尘单元设置有用于使激光束穿过激光束的开口，所述激光束具有与激光束照射的加工区域对应的形状并且被激光加工。 它将收集当材料直接与沉积在基材上的物质直接反应而不渗透的产生的灰尘的设备结构最小化， 最小化的二进制容量，它可以通过增加的集尘率收集效率最大化。
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公开(公告)号：KR1020120079849A
公开(公告)日：2012-07-13
申请号：KR1020100138429
申请日：2010-12-30
Applicant: (주)미래컴퍼니
Abstract: PURPOSE: An apparatus and method for processing a glass substrate using a disc wheel are provided to reduce a tact time with extending the life time of the wheel by finish-cutting the glass substrate. CONSTITUTION: A method for processing a glass substrate stuck on a support table(110) is as follows. A recessed portion(5c) of the glass substrate is firstly cut by a rough cutting unit(120) having a disc wheel(122). The support table rotates at a predetermined angle. The recessed portion of the glass substrate is secondly cut by a finish cutting unit having a grinder wheel.
Abstract translation: 目的：提供一种使用盘轮加工玻璃基板的装置和方法，通过精加工玻璃基板来延长车轮的使用寿命，从而缩短了飞行时间。 构成：用于处理粘贴在支撑台（110）上的玻璃基板的方法如下。 玻璃基板的凹部（5c）首先由具有盘轮（122）的粗切割单元（120）切割。 支撑台以预定角度旋转。 玻璃基板的凹部由具有研磨轮的精加工切割单元二次切割。
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Patent Agency Ranking
公开(公告)号：KR1020120001871A
公开(公告)日：2012-01-05
申请号：KR1020100062474
申请日：2010-06-30
Applicant: (주)미래컴퍼니
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , H01L31/04
Abstract: PURPOSE: A device and method for processing a multilayer substrate are provided to shorten process time by performing a laser process in all directions. CONSTITUTION: A transfer table(20) supports a loaded thin film type solar cell board(50). A laser processing unit(40) processes the thin film type solar cell board using one of laser beams with different wavelengths. The laser processing unit includes a first laser source(42a), a second laser source(42b), and a rotation polarization optical system. The rotation polarization optical system branches another optical path according to the rotation of the optical system. A gantry unit(30) reciprocates the laser processing unit along a second driving shaft(36) cross a first driving shaft(24).
Abstract translation: 目的：提供一种用于处理多层基板的装置和方法，以通过在所有方向执行激光处理来缩短处理时间。 构成：转印台（20）支撑装载的薄膜型太阳能电池板（50）。 激光处理单元（40）使用不同波长的激光束之一来处理薄膜型太阳能电池板。 激光处理单元包括第一激光源（42a），第二激光源（42b）和旋转偏振光学系统。 旋转偏振光学系统根据光学系统的旋转分支另一光路。 台架单元（30）沿着穿过第一驱动轴（24）的第二驱动轴（36）使激光加工单元往复运动。
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公开(公告)号：KR101094324B1
公开(公告)日：2011-12-19
申请号：KR1020100039906
申请日：2010-04-29
Applicant: (주)미래컴퍼니
CPC classification number: Y02E10/50 , Y02P70/521
Abstract: 박막형 태양전지의 제조방법 및 레이저 가공장치가 개시된다. 일 실시예에 따른 레이저 가공장치는, 적재된 박막형 태양전지 기판을 지지하면서 제1 주행축을 따라 왕복 이동가능한 이송테이블과, 작업 영역의 일부가 서로 중첩되는 복수의 레이저 유닛을 포함하는 레이저 통합부와, 제1 주행축과 교차하여 형성된 제2 주행축을 따라 레이저 통합부를 왕복 이동시키는 갠트리 유닛을 포함할 수 있으며, 아이솔레이션 공정과 에지 딜리션 공정을 통합하여 하나의 장비에서 수행가능하도록 시스템 통합함으로써 택트 타임을 단축시키고 전체적인 제조 비용을 절감할 수 있다.
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公开(公告)号：KR1020110129321A
公开(公告)日：2011-12-01
申请号：KR1020100073793
申请日：2010-07-30
Applicant: (주)미래컴퍼니
IPC: B23K26/16 , B23K26/402 , B23K26/08 , H01L31/18
CPC classification number: Y02P70/521
Abstract: PURPOSE: A laser processing apparatus for a multilayer substrate is provided to efficiently collect dust because a dust collecting unit is always located directly above a processing area. CONSTITUTION: A laser processing apparatus for a multilayer substrate comprises a support table(40) for supporting a multilayer substrate, a laser processing unit(10) which irradiates a laser beam to a position of the multilayer substrate regulated by a scanner, a gantry unit(30) which reciprocates along a first transfer axis(45) and is mounted with the laser processing unit to reciprocate along a second transfer axis(35) crossing the first transfer axis, and a dust collecting unit(20) which is located between the laser processing unit and the multilayer substrate and collects dust produced from the multilayer substrate by the laser beam.
Abstract translation: 目的：提供一种用于多层基板的激光加工设备，用于有效地收集灰尘，因为灰尘收集单元始终位于处理区域正上方。 构成：用于多层基板的激光加工装置包括用于支撑多层基板的支撑台（40），激光处理单元（10），其将激光束照射到由扫描仪调节的多层基板的位置，台架单元 （30），其沿着第一传送轴线（45）往复运动，并且安装有所述激光加工单元，沿着与所述第一传送轴线交叉的第二传送轴线（35）往复运动;以及集尘单元（20），其位于 激光加工单元和多层基板，并通过激光束收集由多层基板产生的灰尘。
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公开(公告)号：KR1020110127910A
公开(公告)日：2011-11-28
申请号：KR1020100047421
申请日：2010-05-20
Applicant: (주)미래컴퍼니
IPC: B23K26/06 , B23K26/064 , H05K3/46 , H01L21/027
CPC classification number: B23K26/0626 , B23K26/0613 , G03F7/2004 , H01L21/0275 , H05K3/4602
Abstract: PURPOSE: A laser processing apparatus is provided to reducing the manufacturing time by simplifying the laser processing procedure to one time. CONSTITUTION: A laser processing apparatus comprises a first laser light source(10a), a second laser light source(10b) and a beam lasing unit. The first laser light source irradiates the laser beam of a first wave length. The second laser light source irradiates the laser beam of a second wavelength having a different optical axis with the laser beam of the first wave length. The beam lasing unit changes a passage in order that the laser beam of the first wave length have the same optical axis as the laser beam of the second wavelength and irradiates the laser beam of the first wave length and laser beam of the second wavelength in a multi-layer plate(1) as the same axis.
Abstract translation: 目的：提供一种激光加工设备，通过简化激光加工程序来缩短制造时间。 构成：激光加工装置包括第一激光光源（10a），第二激光光源（10b）和光束激发单元。 第一激光光源照射第一波长的激光束。 第二激光光源用具有第一波长的激光束照射具有不同光轴的第二波长的激光束。 光束激光单元改变通道，使得第一波长的激光束具有与第二波长的激光束相同的光轴，并将第一波长的激光束和第二波长的激光束照射在第二波长的激光束中 多层板（1）为同轴。
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公开(公告)号：KR101065769B1
公开(公告)日：2011-09-19
申请号：KR1020090046606
申请日：2009-05-27
Applicant: (주)미래컴퍼니 , 고려대학교 산학협력단
CPC classification number: Y02E10/50 , Y02P70/521
Abstract: 태양전지 제조에 이용되는 레이저 식각장치 및 이를 이용한 공극 형성 방법에 관한 것이다. 본 발명의 일 측면에 따르면, 태양전지 제조 시 후면 패시베이션층에 공극을 형성하기 위한 레이저 식각장치에 있어서, 상기 후면 패시베이션층이 형성된 태양전지의 실리콘 기판을 거치하는 스테이지부와, 실리콘 기판의 특성에 따라 조정된 레이저 빔을 발진하는 레이저 발진부와, 공극의 크기와 모양에 따라 레이저 빔의 스폿의 크기와 모양을 변형하는 빔 형성부와, 하나 이상의 공극이 배열된 공극 패턴에 따라 레이저 빔이 공극의 위치에 조사되도록 스캔하는 스캔부와, 스캔부에 의해 스캔된 레이저 빔을 집광하여 조사하는 투영부를 포함하는 레이저 식각장치에 의하면, 고효율의 박형화된 태양전지를 제조하는 과정에서 사진 식각 기술 대신에 레이저 식각 기술을 이용하여 보다 단순화된 공정을 통해서 후면 패시베이션층에 공극 패턴을 형성� � 수 있다.
태양전지, 레이저, 식각, 패시베이션
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