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公开(公告)号：KR1020100128151A
公开(公告)日：2010-12-07
申请号：KR1020090046622
申请日：2009-05-27
Applicant: (주)미래컴퍼니 , 고려대학교 산학협력단
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , B23K26/36 , H01L31/04
Abstract: PURPOSE: A laser etching apparatus and an aperture forming method using the same are provided to form a gap pattern on a rear passivation layer through a further simplified process using the laser etching technology in stead of photo etching technology in the manufacturing process of thin solar battery of high efficiency. CONSTITUTION: A stage part(160) supports the silicon substrate of solar battery formed with the rear passivation layer. A laser generator(110) generates the laser beam adjusted according to the passivation information. A beam forming unit(130) modifies the size and the shape of a spot of the laser beam according to the size and the shape of the aperture.
Abstract translation: 目的：提供一种激光蚀刻装置和使用该激光蚀刻装置的孔形成方法，以便在薄的太阳能电池的制造过程中通过使用激光蚀刻技术代替光蚀刻技术的进一步简化的工艺在后钝化层上形成间隙图案 高效率。 构成：台架部分（160）支撑由后钝化层形成的太阳能电池的硅衬底。 激光发生器（110）产生根据钝化信息调节的激光束。 光束形成单元（130）根据孔径的大小和形状修改激光束的斑点的尺寸和形状。
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公开(公告)号：KR1020100128153A
公开(公告)日：2010-12-07
申请号：KR1020090046624
申请日：2009-05-27
Applicant: (주)미래컴퍼니 , 고려대학교 산학협력단
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , B23K26/36 , H01L31/04
Abstract: PURPOSE: A laser etching apparatus and an aperture forming method using the same are provided to form a gap pattern on a rear passivation layer through a further simplified process using the laser etching technology in stead of photo etching technology in the manufacturing process of thin solar battery of high efficiency. CONSTITUTION: A stage part(160) supports the silicon substrate of solar battery formed with the rear passivation layer. A laser generator(110) generates the laser beam adjusted according to the passivation information. A beam forming unit(130) modifies the size and the shape of a spot of the laser beam according to the size and the shape of the aperture. A projection unit(150) concentrates the laser beam scanned by the scanning unit and irradiates the laser beam.
Abstract translation: 目的：提供一种激光蚀刻装置和使用该激光蚀刻装置的孔形成方法，以便在薄的太阳能电池的制造过程中通过使用激光蚀刻技术代替光蚀刻技术的进一步简化的工艺在后钝化层上形成间隙图案 高效率。 构成：台架部分（160）支撑由后钝化层形成的太阳能电池的硅衬底。 激光发生器（110）产生根据钝化信息调节的激光束。 光束形成单元（130）根据孔径的大小和形状修改激光束的斑点的尺寸和形状。 投影单元（150）集中由扫描单元扫描的激光束并照射激光束。
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公开(公告)号：KR1020100128139A
公开(公告)日：2010-12-07
申请号：KR1020090046606
申请日：2009-05-27
Applicant: (주)미래컴퍼니 , 고려대학교 산학협력단
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , B23K26/36 , H01L31/04
Abstract: PURPOSE: A laser etching apparatus and an aperture forming method using the same are provided to form the gap pattern on a rear passivation layer through a process simplified further using the laser etching technology in stead of photo etching technology in the process of manufacturing the thin solar battery of high efficiency. CONSTITUTION: A stage part(160) supports a silicon substrate of solar battery formed with the rear passivation layer. A laser beam generator(110) generates the laser beat adjusted according to the property of the silicon substrate. A bean forming unit(130) modifies the size and the shape of laser beam spot according to the size and the shape of the aperture.
Abstract translation: 目的：提供激光蚀刻装置和使用该激光蚀刻装置的孔形成方法，以通过在制造薄太阳能的过程中使用激光蚀刻技术代替光蚀刻技术进一步简化的方法在后钝化层上形成间隙图案 电池效率高。 构成：台架部件（160）支撑形成有后钝化层的太阳能电池的硅衬底。 激光束发生器（110）产生根据硅衬底的特性调节的激光拍。 豆形成单元（130）根据孔的尺寸和形状修改激光束斑的尺寸和形状。
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公开(公告)号：KR101065769B1
公开(公告)日：2011-09-19
申请号：KR1020090046606
申请日：2009-05-27
Applicant: (주)미래컴퍼니 , 고려대학교 산학협력단
CPC classification number: Y02E10/50 , Y02P70/521
Abstract: 태양전지 제조에 이용되는 레이저 식각장치 및 이를 이용한 공극 형성 방법에 관한 것이다. 본 발명의 일 측면에 따르면, 태양전지 제조 시 후면 패시베이션층에 공극을 형성하기 위한 레이저 식각장치에 있어서, 상기 후면 패시베이션층이 형성된 태양전지의 실리콘 기판을 거치하는 스테이지부와, 실리콘 기판의 특성에 따라 조정된 레이저 빔을 발진하는 레이저 발진부와, 공극의 크기와 모양에 따라 레이저 빔의 스폿의 크기와 모양을 변형하는 빔 형성부와, 하나 이상의 공극이 배열된 공극 패턴에 따라 레이저 빔이 공극의 위치에 조사되도록 스캔하는 스캔부와, 스캔부에 의해 스캔된 레이저 빔을 집광하여 조사하는 투영부를 포함하는 레이저 식각장치에 의하면, 고효율의 박형화된 태양전지를 제조하는 과정에서 사진 식각 기술 대신에 레이저 식각 기술을 이용하여 보다 단순화된 공정을 통해서 후면 패시베이션층에 공극 패턴을 형성� � 수 있다.
태양전지, 레이저, 식각, 패시베이션-
公开(公告)号：KR1020130035464A
公开(公告)日：2013-04-09
申请号：KR1020110099772
申请日：2011-09-30
Applicant: (주)미래컴퍼니
Abstract: PURPOSE: A device using polarized lights for measuring a 3D shape and thickness is provided to simultaneously obtain a surface shape and the thickness information of a target object by using the polarized lights. CONSTITUTION: A device(200) using polarized lights for measuring a 3D shape and thickness comprises a white light source(210), a first beam splitter(220), a linear polarizer(230), a second beam splitter(270), a mirror(280), and a spectroscope(290). The first beam splitter sorts white light incident from the white light source into reference lights and measurement lights, thereby irradiating the same respectively to a reference mirror(240) and a measurement object(260). The first beam splitter interferes in the reference and measurement lights, which are reflected by the reference mirror and measurement object, thereby generating coherent lights. The linear polarizer linear-polarizes the reference lights so that the reference lights have only first polarizing components. [Reference numerals] (AA,BB,DD,) Vertical polarization; (CC,FF) Horizontal polarization; (EE) Shape, thickness;
Abstract translation: 目的：提供使用偏振光来测量3D形状和厚度的装置，以通过使用偏振光同时获得目标物体的表面形状和厚度信息。 构成：使用用于测量3D形状和厚度的偏振光的装置（200）包括白色光源（210），第一分束器（220），线性偏振器（230），第二分束器（270），第二分束器 镜（280）和分光镜（290）。 第一分束器将从白色光源入射的白光分成参考光和测量光，从而将其照射到参考反射镜（240）和测量对象（260）。 第一个分光器干涉参考和测量光，由参考镜和测量对象反射，从而产生相干光。 线性偏振器线性偏振参考光，使得参考光仅具有第一偏振分量。 （标号）（AA，BB，DD，）垂直极化; （CC，FF）水平极化; （EE）形状，厚度;
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Patent Agency Ranking
公开(公告)号：KR101149766B1
公开(公告)日：2012-06-11
申请号：KR1020100131318
申请日：2010-12-21
Applicant: (주)미래컴퍼니
IPC: H01L31/18 , H01L31/042 , B23K26/36
CPC classification number: Y02E10/50 , H01L31/18 , B23K26/36 , H01L31/042
Abstract: PURPOSE: A multilayer substrate manufacturing apparatus which simultaneously performing edge deletion and isolation processes and a manufacturing method thereof are provided to reduce tact time of entire processes by integrating isolation and edge deletion processes. CONSTITUTION: A support table(30) supports a multilayer substrate(50) transferred into an apparatus through a transport part(40). A P4 processing unit(10) performs an isolation process with respect to the multilayer substrate loaded on the support table. A P5 processing unit(20) performs an edge deletion process with respect to the multilayer substrate loaded on the support table. The transport part supports the lower part of both edge parts of the multilayer substrate. The transport part comprises a transfer roller(42) and a roller support(44) for supporting the transfer roller.
Abstract translation: 目的：提供同时执行边缘删除和隔离处理的多层基板制造装置及其制造方法，以通过集成隔离和边缘删除处理来减少整个处理的节拍时间。 构成：支撑台（30）支撑通过运输部件（40）转移到装置中的多层基板（50）。 P4处理单元（10）相对于载置在支撑台上的多层基板进行隔离处理。 P5处理单元（20）相对于装载在支撑台上的多层基板进行边缘删除处理。 运输部件支撑多层基板的两个边缘部分的下部。 输送部件包括用于支撑转印辊的转印辊（42）和辊支撑（44）。
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公开(公告)号：KR1020120055075A
公开(公告)日：2012-05-31
申请号：KR1020100116577
申请日：2010-11-23
Applicant: (주)미래컴퍼니
IPC: G02F1/1345 , G02F1/13
CPC classification number: G02F1/1309 , G02F2001/136263 , G02F2201/503 , H01L21/76894
Abstract: PURPOSE: A method for repairing a bus line of a liquid crystal panel and a device thereof are provided to precisely repair defects of a gate bus line or a data bus line on a non image area. CONSTITUTION: A laser processing unit(110) irradiates a laser beam wherein the laser beam has a feature which responds to a protective layer. The protective layer is formed on a damaged part of a bus line. The laser processing unit forms a recess area from which the protective layer is removed. A patterning unit(120) coats and hardens conductive ink in the recess area. The patterning unit generates a repair pattern.
Abstract translation: 目的：提供一种用于修复液晶面板的总线的方法及其装置，以精确地修复非图像区域上的栅极总线或数据总线的缺陷。 构成：激光处理单元（110）照射激光束，其中激光束具有响应于保护层的特征。 保护层形成在总线的损坏部分上。 激光处理单元形成凹部，从该区域去除保护层。 图案形成单元（120）在凹陷区域中涂覆和硬化导电油墨。 图案形成单元产生修复图案。
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公开(公告)号：KR101283557B1
公开(公告)日：2013-07-15
申请号：KR1020100047421
申请日：2010-05-20
Applicant: (주)미래컴퍼니
IPC: B23K26/06 , B23K26/064 , H05K3/46 , H01L21/027
Abstract: 여러 층이 적층된 다층기판에 대하여 복수 파장의 레이저빔을 조사하여 가공하는 레이저 가공장치에 있어서, 서로 다른 파장의 레이저빔을 조사하는 복수의 레이저광원과, 일차원 원형 빔 또는 사각형 빔을 조사하여 스테이지에 거치된 다층기판의 일부 층을 1차 가공하고, 1차 가공에 의해 노출된 영역에 일차원 원형 빔 또는 사각형 빔보다 작거나 큰 단면적을 가지는 레이저 빔을 조사하여 다층기판의 동일 지점에 대하여 나머지 층 전부 혹은 일부를 2차 가공하는 빔 조사부를 포함하는 레이저 가공장치가 제공된다. 이에 의하면, 다층기판 가공 중에 사용되는 서로 다른 파장을 가지는 복수의 레이저빔을 동축으로 입사시키는 구조를 가지며, 2회 이상의 반복동작이 요구되던 레이저 가공 과정을 1회로 단순화함으로써 가공시간을 단축시키는 것이 가능하다.
Abstract translation: 目的：提供一种激光加工设备，通过简化激光加工程序来缩短制造时间。 构成：激光加工装置包括第一激光光源（10a），第二激光光源（10b）和光束激发单元。 第一激光光源照射第一波长的激光束。 第二激光光源用具有第一波长的激光束照射具有不同光轴的第二波长的激光束。 光束激光单元改变通道，使得第一波长的激光束具有与第二波长的激光束相同的光轴，并将第一波长的激光束和第二波长的激光束照射在第二波长的激光束中 多层板（1）为同轴。
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公开(公告)号：KR1020130039005A
公开(公告)日：2013-04-19
申请号：KR1020110103415
申请日：2011-10-11
Applicant: (주)미래컴퍼니
Abstract: PURPOSE: A device for measuring a 3D shape and thickness is provided to improve anti-vibration properties when measuring the 3D shape or thickness as errors caused by mechanical movement are reduced. CONSTITUTION: A device(200) for measuring a 3D shape and thickness comprises a white light source(210), a wavelength variable device(220), a first beam splitter(230), a linear polarizer(240), a second beam splitter(280), first and second image acquisition units(290), and a data processing unit. The white light source emits white lights. The wavelength variable device splits the white light incident from the white light source into a plurality of short wavelength lights, and the short wavelength lights are successively emitted per each wavelength. The first beam splitter separates the short wavelength lights into reference lights and measurement light, irradiates the light to a reference mirror(250) and a measurement object(270), and interferes the reference lights and measurement light reflected by the reference mirror and the measurement object, thereby generating coherent lights.
Abstract translation: 目的：提供一种用于测量3D形状和厚度的装置，以便在测量3D形状或厚度时提高抗振性能，因为机械运动引起的误差降低。 构成：用于测量3D形状和厚度的装置（200）包括白色光源（210），波长可变装置（220），第一分束器（230），线性偏振器（240），第二分束器 （280），第一和第二图像获取单元（290）和数据处理单元。 白光源发出白光。 波长可变装置将从白色光源入射的白色光分离成多个短波长的光，并且每个波长连续地发射短波长的光。 第一分束分离器将短波长光分离成参考光和测量光，将光照射到参考反射镜（250）和测量对象（270），并干扰参考光和参考反射镜反射的测量光以及测量 对象，从而产生相干光。
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公开(公告)号：KR1020120012001A
公开(公告)日：2012-02-09
申请号：KR1020100073796
申请日：2010-07-30
Applicant: (주)미래컴퍼니
IPC: H01L31/18 , H01L31/042 , B23K26/402 , B23K26/08
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , B23K26/08 , B23K26/402 , H01L31/042
Abstract: PURPOSE: A multilayer substrate processing apparatus which uses a laser beam with a plurality of wavelengths and a multilayer substrate processing method are provided to convert a processing direction without the rotation of a laser processing part using a wavelength plate and a polarization optical system. CONSTITUTION: A transfer table(20) supports a loaded multilayer substrate. The transfer table is able to reciprocate along a first driving axis. A laser processing part(40) changes a polarization property of one laser beam among a plurality of laser beams according to the rotation of a wavelength plate. The laser processing part processes the multilayer substrate along an aligned processing axis. A gantry unit(30) reciprocates the laser processing part along a second driving axis.
Abstract translation: 目的：提供使用具有多个波长的激光束和多层基板处理方法的多层基板处理装置，使用波长板和偏振光学系统不使用激光加工部的旋转来转换处理方向。 构成：转印台（20）支撑装载的多层基板。 传送台能够沿着第一驱动轴往复运动。 激光处理部件（40）根据波长板的旋转改变多个激光束中的一个激光束的偏振特性。 激光加工部件沿着对准的处理轴处理多层基板。 台架单元（30）沿着第二驱动轴往复运动激光加工部件。
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