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公开(公告)号：KR101388141B1
公开(公告)日：2014-04-23
申请号：KR1020120058443
申请日：2012-05-31
Applicant: 전자부품연구원
Abstract: 간단한 공정으로 소형화된 CMOS 회로가 집적된 마이크로폰 및 그 제조방법이 제안된다. 제안된 마이크로폰은 CMOS 회로가 집적된 마이크로폰으로서, 실리콘 기판상에 실리콘 나노와이어를 포함하는 음향센서 및 CMOS 신호처리 회로가 일체형으로 위치한다.
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公开(公告)号：KR1020140033668A
公开(公告)日：2014-03-19
申请号：KR1020120099773
申请日：2012-09-10
Applicant: 전자부품연구원
IPC: G01N27/403 , G01N33/487 , A61B5/145
Abstract: Provided are an electrode body for detecting glucose with an impurity blocking structure and a glucose detecting sensor using the same. According to an embodiment of the present invention, the electrode body for detecting glucose with an impurity blocking structure includes: a substrate; a reactor layer provided on the upper side of the substrate, in which glucose existing in a bio-material is oxidized; an enzyme layer provided on the upper side of the reactor layer, which accelerates the oxidation of the glucose in the bio-material; and an impurity blocking layer provided on the upper side of the enzyme layer, which prevents impurities existing in the bio-material from entering. Thereby, when urine glucose is tested, oxidation of the electrodes is prevented by blocking impurities in urine from entering into the electrode body and consequently the lifespan of a urine glucose detection sensor is extended.
Abstract translation: 提供一种用于利用杂质阻挡结构检测葡萄糖的电极体和使用该电极体的葡萄糖检测传感器。 根据本发明的实施例，用于检测具有杂质阻挡结构的葡萄糖的电极体包括：基底; 设置在所述基板的上侧的反应器层，其中存在于生物材料中的葡萄糖被氧化; 设置在反应器层的上侧的酶层，其加速生物材料中的葡萄糖的氧化; 以及设置在酶层上侧的杂质阻挡层，其防止存在于生物材料中的杂质进入。 因此，当测试尿葡萄糖时，通过阻止尿液中的杂质进入电极体，从而延长尿糖检测传感器的寿命，防止了电极的氧化。
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公开(公告)号：KR1020130140356A
公开(公告)日：2013-12-24
申请号：KR1020120063663
申请日：2012-06-14
Applicant: 전자부품연구원
CPC classification number: C01B32/23 , B82B1/00 , B82B3/0009 , C01B2204/22
Abstract: Disclosed is a hybrid composite of graphene oxide and quantum dots, which has the properties of semiconductor and improved electric conductance and can be used in various fields. The disclosed hybrid composite of graphene oxide and quantum dots includes graphene oxide and quantum dots combined with the graphene oxide.
Abstract translation: 公开了一种石墨烯氧化物和量子点的混合复合材料，其具有半导体的性质和改善的电导率，并可用于各种领域。 公开的石墨烯氧化物和量子点的混合复合物包括氧化石墨烯和氧化石墨烯结合的量子点。
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公开(公告)号：KR101294344B1
公开(公告)日：2013-08-06
申请号：KR1020120023722
申请日：2012-03-08
Applicant: 전자부품연구원
Abstract: PURPOSE: A method for manufacturing a micro metal mesh structure is provided to utilize a silicon substrate as a sacrificial layer, thereby manufacturing the micro metal mesh structure released from the substrate. CONSTITUTION: A method for manufacturing a micro metal mesh structure includes the following steps of: forming an oxide layer (120) on the top of a silicon substrate (110); forming a mesh pattern unit (130) and a supporting unit (140) by etching the oxide layer; forming a support post (111) under the mesh pattern unit and the supporting unit by vertically etching the silicon substrate which is exposed to the outside by the etching of the oxide layer; wet-etching the support post and depositing a metallic foil (150) on the surface of the manufactured structure; removing the support post positioned under the mesh pattern unit; and forming the mesh pattern unit into a tube shape by rolling the mesh pattern unit toward the supporting unit with the foil stress.
Abstract translation: 目的：提供一种用于制造微金属网结构的方法，以利用硅衬底作为牺牲层，从而制造从衬底释放的微金属网结构。 构成：微金属网结构的制造方法，其特征在于，包括以下工序：在硅衬底（110）的顶部形成氧化物层（120）。 通过蚀刻所述氧化物层形成网格图案单元（130）和支撑单元（140）; 通过垂直蚀刻通过氧化物层的蚀刻暴露于外部的硅衬底，在网状图案单元下方形成支撑柱（111）和支撑单元; 湿蚀刻支撑柱并在制造结构的表面上沉积金属箔（150）; 移除位于网格图案单元下方的支撑柱; 并且通过以箔应力将网格图案单元向支撑单元滚动而将网格图案单元形成为管状。
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公开(公告)号：KR1020120099835A
公开(公告)日：2012-09-12
申请号：KR1020110018292
申请日：2011-03-02
Applicant: 전자부품연구원
Abstract: PURPOSE: A silicon nano wire bio sensor module is provided to reduce a size and energy consumption and to use a current flowing in both end part of a silicon nano wire as signals. CONSTITUTION: A silicon nano wire bio sensor module comprises a first silicon substrate(110), a second silicon substrate(130), a light guide unit(140), and a light source unit(150). Silicon nano wires(120) are formed on the first silicon substrate. The second silicon substrate is bonded to the first silicon substrate. A micro fluid channel is formed on the second silicon substrate so that the silicon nano wires are exposed to outside. The light guide unit is arranged to be inserted into the second silicon substrate and a part of the light guide unit is projected to the outside of the second silicon substrate. The light source unit is arranged to be spaced from an end part of the light guide unit at a predetermined interval.
Abstract translation: 目的：提供硅纳米线生物传感器模块以减小尺寸和能量消耗，并使用在硅纳米线的两端部分流动的电流作为信号。 构成：硅纳米线生物传感器模块包括第一硅衬底（110），第二硅衬底（130），导光单元（140）和光源单元（150）。 在第一硅衬底上形成硅纳米线（120）。 第二硅衬底被结合到第一硅衬底。 微流体通道形成在第二硅衬底上，使得硅纳米线暴露于外部。 导光单元布置成插入到第二硅衬底中，并且导光单元的一部分投影到第二硅衬底的外部。 光源单元布置成以预定间隔与导光单元的端部间隔开。
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Patent Agency Ranking
公开(公告)号：KR101163202B1
公开(公告)日：2012-07-05
申请号：KR1020090133183
申请日：2009-12-29
Applicant: 전자부품연구원 , 주식회사 아이엠헬스케어
CPC classification number: H01L2924/0002 , H01L2924/00
Abstract: 본 발명은 탑 다운 방식에 기초한 실리콘 나노와이어의 제조 공정을 바탕으로 양산성 있는 실리콘 나노와이 소자 제조 방법에 관한 것으로, 보다 상세하게는 제 1 실리콘 기판의 중앙부에 실리콘 나노와이어를 제작하는 제 1 단계; 상기 기판의 실리콘 나노와이어가 형성된 일측에 접착물질을 코팅하고, 상기 접착물질의 일측에 제 2 유전체기판을 본딩하는 제 2 단계; 상기 제 1 실리콘 기판의 하부를 연마하여 중앙부의 실리콘 나노와이어 센싱부를 외부로 노출시키고, 상기 노출된 실리콘 나노와이어를 지지하고 있는 양측의 넓은 지지 구조물에 전극을 형성하는 제 3 단계; 상기 전극에 전극보호물질을 형성하는 제 4 단계; 및 상기 노출된 실리콘 나노와이어를 덮고 있는 산화막을 제거한 후 전극보호물질을 제거하는 제 5단계를 포함하는 실리콘 나노와이어 소자 제조방법에 관한 것이다.
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公开(公告)号：KR101135419B1
公开(公告)日：2012-04-12
申请号：KR1020090083011
申请日：2009-09-03
Applicant: 전자부품연구원
IPC: G01N27/72 , G01N33/483 , B82B3/00
Abstract: 자성 나노 입자를 이용하여 생체물질의 정량적 분석장치가 개시된다. 개시되는 분석장치는 외부 자기장에 의해 자화되고 갭(Gap) 영역에 자속(Flux)을 집중시키는 자속 집중기(Flux Concentrator)와, 샘플용액을 갭 영역에 주입시키는 마이크로 채널과, 자속 집중기 사이의 갭 영역의 기판상에 형성되어 자성 나노 입자에 의한 갭 영역의 자기장 변화를 감지하는 자기센서를 포함하는 센서부를 포함한다.
GMR 센서, 마이크로 채널, 생체분자-
公开(公告)号：KR1020110087714A
公开(公告)日：2011-08-03
申请号：KR1020100007272
申请日：2010-01-27
Applicant: 전자부품연구원
IPC: G01N33/553 , G01N21/03 , G01N21/25
Abstract: PURPOSE: A system for analyzing disease diagnosis are provided to obtain quantitative pattern of an antigen and to test for immunity test. CONSTITUTION: A system(100) for analyzing disease diagnosis comprises: a cuvette which is filled with an antibody-conjugated gold nanoparticle solution(20); a sample storage part(30) for inflow of a test sample(31); a laser light source unit(40) for irradiating light to the cuvette; a light sensor(50) for measuring absorbance change; and a signal processor(60) and display device(70) which are coupled to the light sensor.
Abstract translation: 目的：提供一种分析疾病诊断的系统，以获得抗原的定量模式并进行免疫测试。 构成：用于分析疾病诊断的系统（100）包括：填充有抗体缀合的金纳米颗粒溶液（20）的比色皿; 用于测试样品（31）的流入的样品储存部分（30）; 激光光源单元，用于将光照射到所述比色杯; 用于测量吸光度变化的光传感器（50）; 以及耦合到光传感器的信号处理器（60）和显示装置（70）。
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公开(公告)号：KR101040090B1
公开(公告)日：2011-06-09
申请号：KR1020090129480
申请日：2009-12-23
Applicant: 전자부품연구원
IPC: H04R17/00
CPC classification number: H04R17/00
Abstract: PURPOSE: A microphone of piezoresistive type and a manufacturing method thereof are provided to simplify a sensing circuit and a manufacturing process, by removing the necessity of manufacturing a parallel plate electrode structure. CONSTITUTION: A first substrate has a silicon nano wire(21) in the center. A silicon body of the bottom of the nano wire is etched. An electrode layer(22) is formed on the first substrate. The first substrate is divided into two parts. A membrane film(23) is formed on the first substrate, and reveals the electrode layer. An adhesive layer is formed on the membrane film on the divided substrate. A second substrate is attached to the adhesive layer, and is etched to reveal the electrode and the center sensing part externally.
Abstract translation: 目的：提供压阻型麦克风及其制造方法，通过消除制造平行板电极结构的必要性来简化感测电路和制造工艺。 构成：第一衬底在中心具有硅纳米线（21）。 蚀刻纳米线底部的硅体。 在第一基板上形成电极层（22）。 第一衬底分为两部分。 在第一基板上形成膜膜（23），并显示电极层。 在分割的基板上的膜膜上形成粘接层。 将第二基板连接到粘合剂层，并被蚀刻以从外部露出电极和中心感测部分。
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公开(公告)号：KR1020100082512A
公开(公告)日：2010-07-19
申请号：KR1020090001849
申请日：2009-01-09
Applicant: 전자부품연구원
Abstract: PURPOSE: A gas sensor and a method of manufacture thereof is provided to manufacture a gas sensor having fast response speed and high reproducibility. CONSTITUTION: A gas sensor comprises an insulating layer(120), a restored metal sensitizer(130), a source electrode(140) and a drain electrode(150). The insulating layer is formed on a substrate(110). The metal sensitizer comprises metal and the restored carbon nanotube. The restored metal is formed on the insulating layer and senses gas. The substrate is composed of the silicon substrate. The insulating layer comprises the silicon oxide film.
Abstract translation: 目的：提供气体传感器及其制造方法，以制造具有快速响应速度和高再现性的气体传感器。 构成：气体传感器包括绝缘层（120），恢复的金属敏化剂（130），源电极（140）和漏电极（150）。 绝缘层形成在基板（110）上。 金属敏化剂包括金属和还原的碳纳米管。 恢复的金属形成在绝缘层上并感测气体。 基板由硅基板构成。 绝缘层包括氧化硅膜。
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