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公开(公告)号：KR1020090025971A
公开(公告)日：2009-03-11
申请号：KR1020070091213
申请日：2007-09-07
Applicant: 한국표준과학연구원
CPC classification number: G01B11/2441
Abstract: A shape measuring apparatus and method are provided to improve the measurement precision by using a plurality of laser devices outputting interference signal for detecting the wavelength of the generated beam. A shape measuring apparatus comprises a plurality of laser devices(111,116) which generate beams, emit the specific frequency beam among the generated beams, and output interference signal for detecting the wavelength of the generated beam; and a controller(120) which detects the wavelength of the generated beam from the outputted interference signal and controls the laser devices based on the detected wavelength.
Abstract translation: 提供一种形状测量装置和方法，通过使用多个激光装置输出用于检测所产生的光束的波长的干涉信号来提高测量精度。 一种形状测量装置，包括产生光束的多个激光装置（111,116），在产生的光束之间发射特定频率波束，并输出用于检测所产生的波束的波长的干扰信号; 以及控制器（120），其根据所输出的干扰信号检测所生成的光束的波长，并根据所检测的波长控制激光装置。
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公开(公告)号：KR100875489B1
公开(公告)日：2008-12-22
申请号：KR1020070042722
申请日：2007-05-02
Applicant: 한국표준과학연구원
Abstract: A thermal expansion coefficient measuring interferometer and a method thereof are provided to measure thermal expansion coefficient more accurately by measuring the minute length change of a measurement object according to the temperature change. A thermal expansion coefficient measuring interferometer comprises a polarization beam splitter(220) and a plurality of corner cube prisms(232,234,236). The polarization beam splitter reflects and transmits a first beam and a second beam according to the polarization component so that the first beam is split into a third beam and a fourth beam and the second beam into a fifth beam and a sixth beam. The corner cube prism changes the beam path of the incident beam if at least one of the third beam and the sixth beam enters from the polarization beam splitter.
Abstract translation: 提供一种热膨胀系数测量干涉仪及其方法，通过根据温度变化测量测量对象的微小长度变化来更精确地测量热膨胀系数。 热膨胀系数测量干涉仪包括偏振分束器（220）和多个隅角棱镜（232,234,236）。 偏振分束器根据偏振分量反射和发送第一光束和第二光束，使得第一光束被分成第三光束和第四光束，而第二光束被分成第五光束和第六光束。 如果第三光束和第六光束中的至少一个从偏振分束器进入，则角锥棱镜改变入射光束的光束路径。
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公开(公告)号：KR1020080107168A
公开(公告)日：2008-12-10
申请号：KR1020070055145
申请日：2007-06-05
Applicant: 한국표준과학연구원
IPC: G05D1/10
CPC classification number: G01B11/24 , G01B11/03 , G01B11/04 , G01B11/2441
Abstract: An apparatus and a method for measuring three dimensional coordinates are provided to measure a moving pate of an object, to obtain a wide measurement range and to measure three dimensional coordinates rapidly of the object with high resolution. A light generator(410) generates the light. A reference optical fiber irradiates the generated light. An object optical fiber is installed in the object to be measured and irradiates the light. A plurality of optical detectors(441,449) detects an interference pattern generated by the light irradiated in the reference optical fiber(420) and the object light fiber(430). An operation unit(450) calculates 3D position vector of the object to be measured from a plurality of detected interference pattern.
Abstract translation: 提供了一种用于测量三维坐标的装置和方法，以测量物体的运动状态，获得宽的测量范围，并以高分辨率快速测量物体的三维坐标。 光发生器（410）产生光。 参考光纤照射所产生的光。 物体光纤安装在待测物体中并照射光。 多个光检测器（441,449）检测由在基准光纤（420）和物体光纤（430）中照射的光产生的干涉图案。 操作单元（450）从多个检测到的干涉图案计算待测物体的3D位置矢量。
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公开(公告)号：KR1020080097627A
公开(公告)日：2008-11-06
申请号：KR1020070042727
申请日：2007-05-02
Applicant: 한국표준과학연구원
Abstract: An interferometer for measuring thermal expansion coefficient can calculate the amount of length change of a measurement object more accurately without an error due to the deformation of the glass plate according to temperature. An interferometer for measuring thermal expansion coefficient includes a measurement target system(250), an optical system(210), and a vacuum chamber(200). The measurement target system comprises a measurement object(254) and a reference plate(255) on which the measurement object is loaded. The optical system splits incident light, modulates the frequency of the split light, and projects the modulated light to the measurement object and the reference plate respectively. The optical system also couples the respective light reflected from the measurement object and the reference plate, and detects the beat signal generated due to the interference generated in the optical coupling. The vacuum chamber maintains the vacuum condition with the measurement target system and optical system installed inside.
Abstract translation: 用于测量热膨胀系数的干涉仪可以更准确地计算测量对象的长度变化量，而不会由于玻璃板根据温度的变形而产生误差。 用于测量热膨胀系数的干涉仪包括测量目标系统（250），光学系统（210）和真空室（200）。 测量对象系统包括测量对象（254）和参考板（255），测量对象被加载到其上。 光学系统分离入射光，调制分光的频率，并将调制光分别投射到测量对象和参考板。 光学系统还耦合从测量对象和参考板反射的各个光，并且检测由于在光耦合中产生的干扰而产生的拍频信号。 真空室保持真空状态，测量目标系统和光学系统安装在内部。
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公开(公告)号：KR101566383B1
公开(公告)日：2015-11-05
申请号：KR1020140041462
申请日：2014-04-07
Applicant: 한국표준과학연구원
Abstract: 본발명은두께측정장치및 두께측정방법을제공한다. 이두께측정광학장치는복수의파장에서발진하는광대역레이저광원; 상기광대역레이저광원의출력광을제1 포트로제공받아제2 포트로제공하고제2 포트로제공받은광을제3 포트로출력하는광서큘레이터; 상기광서큘레이터의제2 포트로부터출력되는광의일부를투과시키고나머지를반사시키는광분할기; 및상기광분할기로부터제공된광을반사시키는미러를포함한다. 측정대상은상기광분할기와상기미러사이에배치되고, 상기측정대상은상기광분할기를투과한광의일부를반사시키고나머지를투과시키어상기미러에제공한다.
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Patent Agency Ranking
公开(公告)号：KR101544968B1
公开(公告)日：2015-08-19
申请号：KR1020130078751
申请日：2013-07-05
Applicant: 한국표준과학연구원
IPC: G01B11/06
CPC classification number: G01B11/06 , G01B9/0201 , G01B9/02081 , G01B11/14 , G01N21/211 , G01N21/45 , G01N2021/213 , G01S17/36
Abstract: 본발명은두께측정장치및 두께측정방법을제공한다. 두께측정방법은제1 파장(λ)의제1 레이저빔을투명기판에조사시키고, 상기투명기판을투과한제1 레이저빔의세기를측정하는단계; 제2 파장(λ)의제2 레이저빔을상기투명기판을투과키고, 투과한제2 레이저빔의세기를측정하는단계; 및상기투명기판을투과한상기제1 레이저빔과상기제2 레이저빔을이용한리사주(Lissajous) 그래프에서회전각을추출하는단계;를포함한다. 상기제1 레이저빔의다중내부반사에의한이웃한레이들(rays) 사이의위상차이와상기제2 레이저빔의다중내부반사에의한이웃한레이들(rays) 사이의위상차이는π/2를유지한다.
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公开(公告)号：KR101328996B1
公开(公告)日：2013-11-13
申请号：KR1020120114099
申请日：2012-10-15
Applicant: 한국표준과학연구원
CPC classification number: G01D5/34707 , G01D5/34776 , G01D18/00
Abstract: In an absolute position measuring method prepared by the present invention, a data cell expressing one bit of an absolute position binary cord (APBC) includes a data section, a neutral section, and a clock section at a relatively fixed position. The method comprises as follows: a step where each section includes one or more segments, the data cell is subdivided by segments at regular intervals, and a binary scale composed of the APBC is provided; a step of acquiring the image of the binary scale; and a step of calculating an absolute position by processing the image. In the magnification of an optical system, the width of an image corresponding to one segment is integer times of a pixel width of a photo sensor array. [Reference numerals] (S102) Obtain binary scale intensity profile or image;(S112) Trace clock pixel;(S114) Set clock pixel index;(S122) Obtain absolute code pixel index;(S124) Determine binary sate of pixel sub-set by using the intensity of absolute code pixels corresponding to absolute code pixel index;(S126) Convert binary code of pixel sub-sets in which binary state is determined into absolute location through rockup table;(S130) Fine data pixel corresponding to the location of data section with maximum intensity in each pixel sub-set;(S142) Calculate relative phase of the data section by using pixel vales around the data pixels;(S144) Take -2� when the relative phase is over zero;(S150) Calculate absolute position by using absolute position code, absolute code pixel index and relative phase
Abstract translation: 在通过本发明制备的绝对位置测量方法中，表示绝对位置二进制线（APBC）的一位的数据单元包括在相对固定位置的数据部分，中性部分和时钟部分。 该方法包括如下步骤：其中每个部分包括一个或多个片段，数据单元以规则的间隔细分，并提供由APBC组成的二进制尺度; 获取二进制尺度的图像的步骤; 以及通过处理图像来计算绝对位置的步骤。 在光学系统的放大倍数中，对应于一个段的图像的宽度是光传感器阵列的像素宽度的整数倍。 （S102）获取二进制刻度强度分布或图像;（S112）跟踪时钟像素;（S114）设定时钟像素索引;（S122）获取绝对代码像素索引;（S124）确定像素子集的二进制 通过使用与绝对代码像素索引相对应的绝对代码像素的强度;（S126）通过摇动表将二进制状态的二进制状态转换成绝对位置的像素子集的二进制码;（S130）对应于绝对代码像素索引的位置的精细数据像素 数据部分，每个像素子集具有最大强度;（S142）通过使用数据像素周围的像素值计算数据部分的相对相位;（S144）当相对相位超过零时，取-2;;（S150）计算 绝对位置采用绝对位置码，绝对码像素索引和相对相位
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公开(公告)号：KR101282932B1
公开(公告)日：2013-07-05
申请号：KR1020100104862
申请日：2010-10-26
Applicant: 한국표준과학연구원
IPC: G01B9/02 , G01N33/483
Abstract: 본 발명은 가시도 향상 저결맞음 간섭계에 관한 것으로, 더 상세하게는 백색광(다파장)을 이용하여 유체 내에 있거나 반투명 바이오샘플 등 저반사율물질의 결맞음에 의한 단차 측정시 반사광의 광량을 주입잠금기법에 의해 위상 왜곡없이 증폭하여 기준면과 측정면에서 각각 반사된 기준광신호와 반사광신호를 동일 또는 유사하게 하여 가시도를 향상시킨 가시도 향상 저결맞음 간섭계에 관한 것이다.
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公开(公告)号：KR101133562B1
公开(公告)日：2012-04-05
申请号：KR1020100041061
申请日：2010-04-30
Applicant: 한국표준과학연구원
Abstract: 본 발명은 비점수차를 갖는 렌즈를 이용하여 초점오차신호를 검출하고, 이를 이용하여 미세 형상을 측정하는 비점수차 렌즈를 이용한 형상측정장치에 관한 것이다.
본 발명의 비점수차 렌즈를 이용한 형상측정장치는 빛을 조사하는 광원과, 상기 광원으로부터 조사된 빛을 다점으로 통과시키는 다수의 구멍이 2차원 배열로 형성된 마스크를 포함하여 구성되어 측정대상물에 다점광을 제공하는 조명부와 ; 상기 측정대상물로부터 반사된 빛이 맺히는 결상수단와, 상기 결상수단과 측정 대상물 사이에 설치된 비점수차렌즈를 포함하여 구성됨을 특징으로 한다.-
公开(公告)号：KR101091111B1
公开(公告)日：2011-12-09
申请号：KR1020100020597
申请日：2010-03-09
Applicant: 한국표준과학연구원
Abstract: 본발명이해결하려는과제는종래공초점현미경의광축주사과정을제거하여한번의측정데이터로초점위치를검출하고 3차원형상을복원하는광축주사과정을제거한공초점현미경을제공하는것이다. 본발명광축주사과정을제거한공초점현미경은, 복수의광검출기로구성된공초점현미경과; 상기공초점현미경을통해검출된복수의광을이용하여초점위치를검출하는처리부로구성된것을특징으로한다. 상기처리부에서초점검출방법은복수의광검출기의광축위치를설정하는단계와; 상기광축위치에서복수의광검출기를이용하여광량을검출하는단계와; 상기광검출기의설정된광축위치와광축위치에서검출된광량을이용하여측정시편의초점위치를검출하는단계로구성된것을특징으로한다. 본발명에의하면, 종래공초점현미경의광축주사과정을제거하여한번의측정데이터로초점위치를검출하므로측정시편의초점위치를검출하는시간이감소하게되고, 초점을검출하는시간이감소함으로서 3차원형상을복원하는시간이감소하게된다. 아울러, 광축주사과정을제거하여광축주사과정으로인하여공초점현미경에미치는물리적영향을최소화하여정확한측정을할 수있다.
Abstract translation: 问题本发明要解决这是消除共聚焦显微镜的传统的光学扫描过程中检测的聚焦位置到一者的测量数据，并提供共焦显微镜除去重建三维形状的光学扫描步骤。 根据本发明的没有光轴扫描过程的共聚焦显微镜包括由多个光电探测器组成的共焦显微镜; 以及处理器，用于使用通过共焦显微镜检测到的多个光来检测焦点位置。 处理部分中的焦点检测方法可以包括：设置多个光电检测器的光轴位置; 使用光轴位置处的多个光电检测器来检测光量; 并且使用在设定的光轴位置和光检测器的光轴位置处检测到的光量来检测测量样本的焦点位置。 根据本发明，由于传统的除去光轴为共焦显微镜的注射来检测聚焦位置的一个的测量数据，从而减少了检测的测定试样，三维的聚焦位置的时候，通过的时间来检测焦点减小 恢复形状的时间减少了。 另外，通过消除光轴扫描过程，光轴扫描过程可以最小化共焦显微镜上的物理效应，从而实现准确的测量。
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