탄소나노튜브 트랜지스터 제조 방법 및 그에 의한탄소나노튜브 트랜지스터
    21.
    发明公开
    탄소나노튜브 트랜지스터 제조 방법 및 그에 의한탄소나노튜브 트랜지스터 有权
    生产碳纳米管晶体管和碳纳米管晶体管的方法

    公开(公告)号:KR1020090080653A

    公开(公告)日:2009-07-27

    申请号:KR1020080006535

    申请日:2008-01-22

    Abstract: A method for manufacturing a carbon nano tube transistor and a carbon nano tube transistor by the same are provided to improve a semiconductor property by removing a metallic property inside a carbon nano tube channel inside a carbon nano tube transistor. In a carbon nano tube transistor, a carbon nano tube channel(30) is formed between a source electrode and a drain electrode(20). A gate electrode is formed in one side of the carbon nano tube channel. The carbon nano tube channel is formed on a substrate(10). The source electrode and the drain electrode are electrically connected to both ends of the carbon nano tube channel. A metallic property inside the carbon nano tube channel is removed by applying a stress voltage between the source electrode and the drain electrode.

    Abstract translation: 提供一种碳纳米管晶体管和碳纳米管晶体管的制造方法,其通过除去碳纳米管晶体管内的碳纳米管通道内的金属特性来提高半导体性能。 在碳纳米管晶体管中,在源电极和漏电极(20)之间形成碳纳米管通道(30)。 栅电极形成在碳纳米管通道的一侧。 碳纳米管通道形成在基板(10)上。 源电极和漏极电连接到碳纳米管通道的两端。 通过在源电极和漏电极之间施加应力电压来去除碳纳米管通道内的金属性质。

    바이오 센서, 그 제조방법 및 이를 이용한 바이오 물질의검출방법
    23.
    发明公开
    바이오 센서, 그 제조방법 및 이를 이용한 바이오 물질의검출방법 有权
    生物传感器,其制造方法和使用它的生物材料的检测方法

    公开(公告)号:KR1020090008798A

    公开(公告)日:2009-01-22

    申请号:KR1020070072051

    申请日:2007-07-19

    Abstract: A biosensor is provided to bind to the specific target biomolecule by segmenting the surface of the long single nanowire device, thereby simultaneously detecting the identical or multiple biomolecules. The biosensor comprises: a source electrode(14), a drain electrode(15) and a transistor consisting of gate and nanowire(10), wherein the nanowire has a plurality of scanning units segmented in the longitudinal direction; the length of transistor is 10mum to 10 cm; and the scanning unit is segmented by the serial manner so as not to overlap the channel region.

    Abstract translation: 提供生物传感器以通过分割长单一纳米线装置的表面来结合特异性目标生物分子,从而同时检测相同或多个生物分子。 生物传感器包括:源电极(14),漏电极(15)和由栅极和纳米线(10)组成的晶体管,其中所述纳米线具有沿纵向方向分割的多个扫描单元; 晶体管的长度为10m到10cm; 并且扫描单元被串行方式分段,以便不与信道区域重叠。

    탄소나노튜브 트랜지스터 어레이를 이용한 미생물 검출센서및 이를 이용한 미생물 검출방법
    24.
    发明公开
    탄소나노튜브 트랜지스터 어레이를 이용한 미생물 검출센서및 이를 이용한 미생물 검출방법 失效
    使用碳纳米管晶体管阵列的微生物检测传感器及其检测微生物的方法

    公开(公告)号:KR1020080082858A

    公开(公告)日:2008-09-12

    申请号:KR1020070023706

    申请日:2007-03-09

    CPC classification number: C12Q1/04 G01N27/30 G01N33/5438 G01N33/56911

    Abstract: A microorganism detecting sensor is provided to estimate existence and concentration of E. coli in a sample simply without requiring any complicated laboratory facilities or equipments or any necessary conditions for culturing. A sensor for detecting microorganism comprises: a carbon nano-tube transistor array including a channel region consisting of a metal source electrode(12), a metal drain electrode(14), a gate(16) and a carbon nano-tube(18); an aptamer(20) which is absorption-modified into the carbon nano-tube, thereby being specifically bonded to microorganism(24); and a fixation material which fixates the aptamer on the carbon nanotube. A method for detecting microorganism comprises the steps of: (a) preparing a plurality of diluted solutions of the microorganisms having different diluted concentrations; (b) precipitating the aptamer of the microorganism detecting sensor having the carbon nanotube transistor in the microorganism diluted solutions; (c) measuring electroconductivity of the carbon nanotube transistor; and (d) after providing 0(on) or 1(off) in accordance with change of the electroconductivity value, estimating the microorganism concentration through an MPN table. Further, the channel region consisting of the carbon nano-tube consists of single wall nano-tube or multi wall nano-tube.

    Abstract translation: 提供微生物检测传感器,以简单地估计样品中大肠杆菌的存在和浓度,而不需要任何复杂的实验室设施或设备或任何必要的培养条件。 一种用于检测微生物的传感器,包括:碳纳米管晶体管阵列,包括由金属源电极(12),金属漏电极(14),栅极(16)和碳纳米管(18)组成的沟道区, ; (20),其被吸收改性为碳纳米管,从而特异性地结合到微生物(24)上; 以及将适体固定在碳纳米管上的固定材料。 检测微生物的方法包括以下步骤:(a)制备具有不同稀释浓度的多种稀释的微生物溶液; (b)在微生物稀释溶液中沉淀具有碳纳米管晶体管的微生物检测传感器的适体; (c)测量碳纳米管晶体管的导电性; 和(d)根据电导率值的变化提供0(on)或1(off)之后,通过MPN表估计微生物浓度。 此外,由碳纳米管组成的通道区域由单壁纳米管或多壁纳米管组成。

    변형전극을 갖는 탄소 나노튜브 트랜지스터
    25.
    发明公开
    변형전극을 갖는 탄소 나노튜브 트랜지스터 失效
    具有涂覆在电极中的SU-8电阻的碳纳米管晶体管

    公开(公告)号:KR1020070002119A

    公开(公告)日:2007-01-05

    申请号:KR1020050057443

    申请日:2005-06-30

    Abstract: A carbon nanotube transistor having a deformation electrode is provided to increase the work function of a metal and to effectively induce hole doping by using an SU-8 negative photoresist on an electrode of the carbon nanotube transistor. An alignment marker is formed on a SiO2/Si substrate(10). A pattern of liquid catalyst is manufactured using a PMMA(polymethylmethacrylate) layer on the SiO2/Si substrate that is insulated by a SiO2 layer. The PMMA layer is removed by an acetone solution. A single walled carbon nanotube(14) is grown at CH4 and H2 atmosphere during 10 minutes in a furnace of 900 ‹C. An electrode(12) is formed by performing photolithography and thermal evaporation on the carbon nanotube. The electrode is connected to the carbon nanotube to configure a carbon nanotube transistor and then an SU-8 negative photoresist(16) is coated on the carbon nanotube transistor to form an insulating layer.

    Abstract translation: 提供具有变形电极的碳纳米管晶体管,以增加金属的功函数,并且通过在碳纳米管晶体管的电极上使用SU-8负性光刻胶来有效地诱导空穴掺杂。 在SiO 2 / Si衬底(10)上形成取向标记。 使用由SiO 2层绝缘的SiO 2 / Si衬底上的PMMA(聚甲基丙烯酸甲酯)层制造液体催化剂的图案。 通过丙酮溶液除去PMMA层。 在900℃的炉中,在CH 4和H 2气氛下10分钟内生长单壁碳纳米管(14)。 通过对碳纳米管进行光刻和热蒸发来形成电极(12)。 电极与碳纳米管连接以构成碳纳米管晶体管,然后在碳纳米管晶体管上涂覆SU-8负性光致抗蚀剂(16)以形成绝缘层。

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