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公开(公告)号:DE68921033D1
公开(公告)日:1995-03-23
申请号:DE68921033
申请日:1989-09-11
Applicant: CANON KK
Inventor: MORI MAKIKO , OZAWA KUNITAKA , UDA KOJI , SHIMODA ISAMU , UZAWA SHUNICHI , SAKAMOTO FIJI
IPC: G03F1/76 , G03F7/20 , H01L21/027
Abstract: A method of exposing a wafer to exposure energy such as ultraviolet rays or X-rays through a mask to transfer a pattern of the mask onto the wafer, for example. The temperature of the mask and/or the wafer increases during the exposure operation by absorption of the exposure energy. During the wafer being exposed, the temperature of the mask and/or the wafer is detected. If the temperature is going to exceed the exposable temperature range determined on the basis of the line width of the pattern to be transferred, the exposure operation is interrupted. Then, the heat accumulated in the mask and/or the wafer is removed. Thereafter, the exposure operation is resumed. This is repeated until the predetermined or required amount of exposure is reached, for one shot. By this, the thermal expansion of the mask and the wafer during the exposure operation is prevented to assure the precision of the pattern transfer.
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公开(公告)号:DE3851083T2
公开(公告)日:1995-01-12
申请号:DE3851083
申请日:1988-04-27
Applicant: CANON KK
Inventor: OKUNUKI MASAHIKO , SEKI MITSUAKI , SHIMODA ISAMU , MIYAWAKI MAMORU , TSUKAMOTO TAKEO , SUZUKI AKIRA , KANEKO TETSUYA , TAKEDA TOSHIHIKO
IPC: H01J37/073 , H01J37/317 , H01J1/30
Abstract: A multi-electron-beam pattern drawing apparatus having a plurality of electron beam sources (ES0-ES15) and a plurality of electron beam sensors (e.g. S1-S9), provided on a common base member (MB), is disclosed. The electron beam sources can be selectively driven for different uses, such as a pattern drawing (exposure) purpose and position detecting purpose, for example. In another aspect the apparatus is provided with a function for correcting the pattern drawing magnification.
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公开(公告)号:DE3851083D1
公开(公告)日:1994-09-22
申请号:DE3851083
申请日:1988-04-27
Applicant: CANON KK
Inventor: OKUNUKI MASAHIKO , SEKI MITSUAKI , SHIMODA ISAMU , MIYAWAKI MAMORU , TSUKAMOTO TAKEO , SUZUKI AKIRA , KANEKO TETSUYA , TAKEDA TOSHIHIKO
IPC: H01J37/073 , H01J37/317 , H01J1/30
Abstract: A multi-electron-beam pattern drawing apparatus having a plurality of electron beam sources (ES0-ES15) and a plurality of electron beam sensors (e.g. S1-S9), provided on a common base member (MB), is disclosed. The electron beam sources can be selectively driven for different uses, such as a pattern drawing (exposure) purpose and position detecting purpose, for example. In another aspect the apparatus is provided with a function for correcting the pattern drawing magnification.
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公开(公告)号:DE3878298D1
公开(公告)日:1993-03-25
申请号:DE3878298
申请日:1988-05-05
Applicant: CANON KK
Inventor: TSUKAMOTO TAKEO , MIYAWAKI MAMORU , KANEKO TETSUYA , SUZUKI AKIRA , SHIMODA ISAMU , TAKEDA TOSHIHIKO , OKUNUKI MASAHIKO
Abstract: An electron emission device comprises an electron emission electrode (2) with a pointed end and a counter electrode (3) positioned opposite to the pointed end, both formed by fine working of a conductive layer laminated on an insulating substrate.
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公开(公告)号:AU1134388A
公开(公告)日:1988-08-11
申请号:AU1134388
申请日:1988-02-05
Applicant: CANON KK
Inventor: OKUNUKI MASAHIKO , ICHIKAWA TAKESHI , YONEHARA TAKAO , TAKEDA TOSHIHIKO , TSUKAMOTO TAKEO , KANEKO TETSUYA , SHIMODA ISAMU , SUZUKI AKIRA
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公开(公告)号:DE3856492D1
公开(公告)日:2001-10-25
申请号:DE3856492
申请日:1988-02-04
Applicant: CANON KK
Inventor: OKUNUKI MASAHIKO , SUZUKI AKIRA , SHIMODA ISAMU , KANEKO TETSUYA , TSUKAMOTO TAKEO , TAKEDA TOSHIHIKO , YONEHARA TAKAO , ICHIKAWA TAKESHI
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公开(公告)号:DE69228465D1
公开(公告)日:1999-04-01
申请号:DE69228465
申请日:1992-10-29
Applicant: CANON KK
Inventor: SHIMODA ISAMU
Abstract: According to the invention, to make the reading operation of an eyesight handicapped person easy, the result of the image pickup of a camera unit to photoelectrically convert the character information is displayed by a pin pattern on a display. When the operator detects the character area from the display result, an area of an object for character recognition for the result of the image pickup is designated by an input unit and the execution of the character recognition is instructed. A processor recognizes the character with respect to the result of the image pickup of the designated area and displays the character so that it can be perceived in a tactile manner. Whether the result of the reading of the character is correct or not can be checked by a tactile perception. The recognition result of the character recognized can be generated by an audio output by an audio output unit.
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公开(公告)号:DE69227876D1
公开(公告)日:1999-01-28
申请号:DE69227876
申请日:1992-09-10
Applicant: CANON KK
Inventor: YOSHIDA MASAAKI , SHIMODA ISAMU , MATSUOKA MIKIHARA , MIYAZAKI YASUKO , KANASHIKI MASAAKI
Abstract: A communication apparatus for a handicapped person, includes a plurality of first key switches for inputting character input data in a general input mode, a single second key switch for inputting character input data in a second key input mode, a character input device (50) for inputting the character input data in the general input mode inputted by operating the plurality of first key switches or in the single key input mode inputted by operating the single second key switch, a character output device (54) for outputting at least character output data which corresponds to the character input data inputted by the character input device, a mode selector for selecting the character input data input in the general input mode by the character input device (50) or the character input data input in the single key input mode by the character input device, and a controller for controlling the operation of the character input device (50), the character output device (54), and the input mode selector (51a)
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公开(公告)号:DE68928460T2
公开(公告)日:1998-04-02
申请号:DE68928460
申请日:1989-09-05
Applicant: CANON KK
Inventor: CHIBA YUJI , FUJIOKA HIDEHIKO , MIZUSAWA NOBUTOSHI , KARIYA TAKAO , SHIMODA ISAMU
IPC: G03F7/20 , H01L21/677 , H01L21/68
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公开(公告)号:DE68928460D1
公开(公告)日:1998-01-08
申请号:DE68928460
申请日:1989-09-05
Applicant: CANON KK
Inventor: CHIBA YUJI , FUJIOKA HIDEHIKO , MIZUSAWA NOBUTOSHI , KARIYA TAKAO , SHIMODA ISAMU
IPC: G03F7/20 , H01L21/677 , H01L21/68
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