公开(公告)号：DE4400199A1

公开(公告)日：1994-07-14

申请号：DE4400199

申请日：1994-01-05

Applicant: FUSION SYSTEMS CORP

Inventor： URY MICHAEL G ,  WOOD CHARLES H

IPC: F21S2/00 ,  H01J61/02 ,  H01J61/52 ,  H01J65/04 ,  H01J61/35 ,  H05H1/46

Abstract: A microwave-powered discharge lamp having a microwave cavity, a discharge lamp mounted within the cavity, a reflector for light emitted by the lamp mounted outside the cavity, and a non-conductive reflector mounted within the cavity for outwardly reflecting light emitted from the lamp.

公开(公告)号：HUT65057A

公开(公告)日：1994-03-28

申请号：HU109493

申请日：1991-10-24

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHARLES H ,  WAYMOUTH JOHN F

IPC: G03F7/20 ,  H01J17/20 ,  H01J61/02 ,  H01J61/073 ,  H01J61/12 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H05B41/24 ,  H01J61/18 ,  H01J61/22

Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).

公开(公告)号：AU3977193A

公开(公告)日：1993-11-18

申请号：AU3977193

申请日：1993-04-13

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHARLES H ,  TURNER BRIAN ,  WAYMOUTH JOHN F

IPC: H01J61/18 ,  G03F7/20 ,  H01J7/24 ,  H01J9/395 ,  H01J61/02 ,  H01J61/04 ,  H01J61/12 ,  H01J61/20 ,  H01J61/24 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J61/88 ,  H01J65/04

公开(公告)号：DE3624384A1

公开(公告)日：1987-01-29

申请号：DE3624384

申请日：1986-07-18

Applicant: FUSION SYSTEMS CORP

Inventor： URY MICHAEL G ,  MATTHEWS JOHN C ,  ROUNDS STUART N

IPC: H01L21/30 ,  G03F7/00 ,  G03F7/30 ,  G03F7/42 ,  H01L21/027 ,  H01L21/302 ,  H01L21/3065 ,  B08B7/00

Abstract: A device for quickly removing a layer of photoresist material is described in which an oxidising agent such as ozone is used. A narrow gap of 2 mm or less is produced adjoining the photoresist layer and ozone is fed in in a flow quantity which results in a high flow rate in the gap, whilst the substrate on which the photoresist layer is located is heated to a temperature above 300 DEG C. Additionally, the photoresist can be exposed to ultraviolet light with an exposure strength of approximately 800 mW/cm . The narrow gap can be produced using a quartz plate.

公开(公告)号：ES2101759T3

公开(公告)日：1997-07-16

申请号：ES91919776

申请日：1991-10-24

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHARLES H ,  WAYMOUTH JOHN F

IPC: G03F7/20 ,  H01J17/20 ,  H01J61/02 ,  H01J61/073 ,  H01J61/12 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H05B41/24 ,  H01J61/18 ,  H01J61/22

Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).

公开(公告)号：CA2133344A1

公开(公告)日：1993-10-28

申请号：CA2133344

申请日：1993-04-13

Applicant: FUSION SYSTEMS CORP

Inventor： DOLAN JAMES T ,  URY MICHAEL G ,  WOOD CHARLES H ,  TURNER BRIAN ,  WAYMOUTH JOHN F

IPC: H01J61/18 ,  G03F7/20 ,  H01J7/24 ,  H01J9/395 ,  H01J61/02 ,  H01J61/04 ,  H01J61/12 ,  H01J61/20 ,  H01J61/24 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J61/88 ,  H01J65/04

Abstract: 2133344 9321655 PCTABS00027 The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp which is operated at a pressure of at least about 1 atmosphere contains a low ionization potential substance in the fill. Characteristics which are improved are one or more of spatial color uniformity, extinguishing characteristics, and bulb starting reliability. Particular substances which are added to the fill are alkali metal containing substances, III B metal containing substances, and alkaline earth metal containing substances. When light is reflected back into the bulb, the light which is re-emitted is stronger in the higher wavelengths.

公开(公告)号：DE4307946A1

公开(公告)日：1993-09-16

申请号：DE4307946

申请日：1993-03-12

Applicant: FUSION SYSTEMS CORP

Inventor： SIMPSON JAMES E ,  KAMATEHI MOHAMMED ,  TURNER BRIAN ,  URY MICHAEL G

IPC: H01J65/04 ,  H05B41/24 ,  H05H1/46

Abstract: The microwave supplied lamp has a tube (2) within a discharge cavity (1) at the point of highest field strength. The presence of the tube changes the field within the space. The central region (3) of the lower wall is formed by a wire mesh (3). A waveguide (4) is coupled to the space and has a slot shaped coupling aperture (5). The waveguide can also be located on the top surface. The discharge tube is made of quartz and has reflectors (8, 8') on both sides. The end of the unit has a location provided for a magnetron unit (6), supplying the lamp with energy. USE/ADVANTAGE - For incoherent optical radiation. Covers wide wave-band, from ultraviolet to visible or infrared range. Provides uniform discharge along wave-band. Lamp is uniformly excitable.

公开(公告)号：DE4241911A1

公开(公告)日：1993-06-17

申请号：DE4241911

申请日：1992-12-11

Applicant: FUSION SYSTEMS CORP

Inventor： WOOD CHARLES H ,  URY MICHAEL G ,  FERRIS DAVID

IPC: F21S2/00 ,  F21V29/00 ,  G03F7/20 ,  H01J61/52 ,  H01J65/04 ,  H05B41/24

Abstract: The lamp cooling system uses a cooling gas stream directed onto the lamp flask (18b), while the latter is rotated at a rate of between 650 and 950 rotations per min. Pref. the lamp flask (18b) is spherical, with a dia. of 3.048 cm. Jets (30a, 30b) spaced around its surface are used to provide the cooling gas stream. The rotation is effected via an attached shaft (18a) coupled to an electric motor. USE/ADVANTAGE - Plasma lamp stimulated by microwaves or HF waves to stimulate emission in UV, visible, or IR range, preventing overheating to extend working life.

公开(公告)号：DE4011951A1

公开(公告)日：1990-10-18

申请号：DE4011951

申请日：1990-04-12

Applicant: FUSION SYSTEMS CORP

Inventor： URY MICHAEL G

IPC: H05B41/36 ,  H01J61/52 ,  H01J65/04 ,  H05B41/392

公开(公告)号：DE3935058A1

公开(公告)日：1990-05-10

申请号：DE3935058

申请日：1989-10-20

Applicant: FUSION SYSTEMS CORP

Inventor： SIMPSON JAMES E ,  KAMAREHI MOHAMMED ,  URY MICHAEL G

IPC: H05B41/24 ,  F21S2/00 ,  H01J65/04

Abstract: An electrodeless lamp which couples to a small bulb and obtains a relatively high light output therefrom. A cavity which comprises a compound resonant structure including vestibule and reflector portions is provided. The combination of vestibule and reflector results in a condition of resonance throughout the cavity, whereby strong fields are coupled to the small bulb and a reflector is provided for directing and enhancing light output.