Non-volatile mems micro-relays using magnetic actuators
    21.
    发明公开
    Non-volatile mems micro-relays using magnetic actuators 有权
    非易失性MEMS微动继电器使用磁性致动器

    公开(公告)号:EP1093141A2

    公开(公告)日:2001-04-18

    申请号:EP00308867.1

    申请日:2000-10-09

    CPC classification number: H01H50/005 H01H2050/007 H02K99/20 Y10S310/06

    Abstract: An actuation device employing square-loop latchable magnetic material (14, 16) having a magnetization direction (polarization) capable of being changed in response to exposure to an external magnetic field is disclosed. The magnetic field is created by a conductor assembly with non-solenoid configuration. Once the magnetization direction of the material is so changed, the external magnetic field is no longer required to maintain the new magnetization direction. The latchable magnetic material (14) is disposed on the mobile electrode (20) of a switching device, and another magnetic material (16) is disposed in spaced relation to the latchable magnetic material on a stationary electrode or surface (28). By applying an electrical current to a conductor assembly arranged proximate the latchable material, a magnetic field is created about the latchable magnetic material, to change the magnetization direction and thereby enable the attraction or repulsion of another magnetic material located on the stationary electrode. The resulting relative displacement of the mobile (20) and stationary (18) electrodes effects the selective connection or disconnection of electrical contacts carried on or associated with the respective electrodes of the actuation device without requiring additional power in order to maintain the switched state of the electrodes.

    Micro-electro-mechanical optical device
    22.
    发明公开
    Micro-electro-mechanical optical device 审中-公开
    微电子机械光学器件

    公开(公告)号:EP1093005A2

    公开(公告)日:2001-04-18

    申请号:EP00308683.2

    申请日:2000-10-03

    Abstract: A micro-electro-mechanical (MEM) optical device having a reduced footprint for increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and second pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second beam ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device for reducing the contact area between the optic device edge and the substrate.

    Abstract translation: 微电子机械(MEM)光学器件具有减小的占地面积以增加衬底上的产量。 MEM装置包括具有外边缘并由设置在基板上的支撑结构支撑的光学元件。 该支撑结构通过第一和第二对梁机械地连接到基板,该第一和第二对梁将该结构移动到激活位置,以将光学装置升高到基板上方。 当处于升高的位置时,光学装置可以选择性地倾斜以偏转光学信号。 梁的一端连接到支撑结构,另一端连接到衬底并且被设置为使得第一和第二梁端位于光学装置外边缘附近。 在优选实施例中,在光学装置的外边缘上包括粘滞力减小元件,用于减小光学装置边缘与基底之间的接触面积。

    Hybrid electro-optic device with combined mirror arrays
    23.
    发明公开
    Hybrid electro-optic device with combined mirror arrays 审中-公开
    Elektrooptische Hybridvorrichtung mit Spiegelanordnung

    公开(公告)号:EP1093004A2

    公开(公告)日:2001-04-18

    申请号:EP00308118.9

    申请日:2000-09-18

    Abstract: An optical signal processing apparatus includes at least two mirror array chips mounted on an upper surface of a base in close proximity to each other to form a compound array. Each mirror array chip includes a substrate, and a plurality of spaced-apart mirrors mounted on an upper surface of the substrate. The mirrors are movable in response to an electrical signal. A plurality of electrical leads for conduct the electrical signals to the mirrors, at least a portion of the electrical leads extending at least partially along the upper surface of the base between a lower surface of the substrate and the upper surface of the base.

    Abstract translation: 光信号处理装置包括安装在彼此靠近的基座的上表面上的至少两个反射镜阵列芯片,以形成复合阵列。 每个反射镜阵列芯片包括衬底和安装在衬底的上表面上的多个间隔开的反射镜。 反射镜响应于电信号而是可移动的。 用于将电信号传导到反射镜的多个电引线,至少一部分电引线至少部分地沿着基底的上表面延伸到基底的下表面和基底的上表面之间。

    Article comprising an inductor
    24.
    发明公开
    Article comprising an inductor 有权
    Vorrichtung mit einerInduktivität

    公开(公告)号:EP0986106A1

    公开(公告)日:2000-03-15

    申请号:EP99306918.6

    申请日:1999-08-31

    Abstract: An article comprising a micro-machined, passively self-assembling inductor (102) is disclosed. The inductor is fabricated using MEMS technology and advantageously utilizes materials compatible with CMOS such that the inductor is monolithically integrable with a CMOS chip. The inductor includes passive self-assembly means (110, 114) by which the inductor loop (104) is moved away from an underlying substrate (100), typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.

    Abstract translation: 公开了一种包括微加工的被动自组装电感器(102)的物品。 使用MEMS技术制造电感器,并有利地利用与CMOS兼容的材料,使得电感器可与CMOS芯片单片集成。 电感器包括无源自组装装置(110,114),在电感器组件的最后步骤中,电感器环路(104)通过该无源自组装装置移动远离下面的衬底(100)(通常为硅)。 这种被动自组装不需要单独的启动或监视步骤。

    Article comprising a photostrictive switching element
    25.
    发明公开
    Article comprising a photostrictive switching element 有权
    包含光敏开关元件的物品

    公开(公告)号:EP0902311A2

    公开(公告)日:1999-03-17

    申请号:EP98306994.9

    申请日:1998-09-01

    Abstract: A switching element according to this invention comprises a photostrictive member (12). Exposing the member to control light (18) results in a dimensional change in the material. This change is utilized for changing the relative position between an optical fiber (e.g., 111) and another element (e.g., 112), exemplarily a further fiber, a corrugated member, or a mirror, such that signal radiation is directed to a predetermined output port. A variety of exemplary switching elements are disclosed, including interferometric, beam-steering, evanescent field and mode conversion switching elements. Disclosed are also optical communication systems that utilize such switching elements, including passive optical networks.

    Abstract translation: 根据本发明的开关元件包括光致构件(12)。 暴露部件以控制光(18)导致材料的尺寸变化。 这种改变被用于改变光纤(例如111)和另一元件(例如112)之间的相对位置,示例性地是另一光纤,波纹构件或反射镜,使得信号辐射被引导至预定输出 港口。 公开了各种示例性开关元件,包括干涉式光束引导,瞬逝场和模式转换开关元件。 也公开了利用这种开关元件的光通信系统,包括无源光网络。

    Micro-electro-mechanical optical device
    30.
    发明公开
    Micro-electro-mechanical optical device 审中-公开
    一种微机电光学器件

    公开(公告)号:EP1093005A3

    公开(公告)日:2004-03-10

    申请号:EP00308683.2

    申请日:2000-10-03

    Abstract: A micro-electro-mechanical (MEM) optical device having a reduced footprint for increasing yield on a substrate. The MEM device includes an optical element having an outer edge and supported by a support structure disposed on a substrate. The support structure is mechanically connected to the substrate through first and second pairs of beams which move the structure to an active position for elevating the optic device above the substrate. When in an elevated position, the optical device can be selectively tilted for deflecting optic signals. The beams are connected at one end to the support structure, at the other end to the substrate and are disposed so that the first and second beam ends are located proximate the optical device outer edge. In a preferred embodiment, a stiction force reducing element is included on the outer edge of the optical device for reducing the contact area between the optic device edge and the substrate.

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