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    Threshold acceleration sensor
    21.
    发明公开
    Threshold acceleration sensor 有权
    阈值加速度传感器

    公开(公告)号：EP1394555A1

    公开(公告)日：2004-03-03

    申请号：EP02425540.8

    申请日：2002-08-30

    Applicant: STMicroelectronics S.r.l. ,  Nokia Corporation

    Inventor： Zerbini, Sarah ,  Merassi, Angelo ,  Spinola Durante, Guido ,  De Masi, Biagio

    IPC: G01P15/08 ,  G01P15/03 ,  G01P15/06 ,  H01H1/00 ,  H04M1/725 ,  G01P15/00

    CPC classification number: G01P1/127 ,  G01P15/06 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/18 ,  G01P2015/0814 ,  H01H1/0036 ,  H01H35/146

    Abstract: An inertial sensor with failure threshold includes: a first body (2) and a second body (18), which can move relatively with respect to one another and are constrained by a plurality of elastic elements; and at least one sample element (6) connected between the first body (2) and the second body (18) and shaped so as to be subjected to a stress when the second body (18) is outside of a relative resting position with respect to the first body (2). The sample element (6) has at least one weakened region (9, 10).

    Abstract translation: 具有故障阈值的惯性传感器包括：第一主体（2）和第二主体（18），其能够相对于彼此移动并且被多个弹性元件约束; 和至少一个连接在第一主体（2）和第二主体（18）之间的样本元件（6），并且其形状能够在第二主体（18）处于相对静止位置之外时承受应力 到第一机体（2）。 样本元件（6）具有至少一个弱化区域（9,10）。

    Method for assembling an actuator device for a hard disc, comprising a read/write transducer, a microactuator and a suspension and actuator device thus obtained
    22.
    发明公开
    Method for assembling an actuator device for a hard disc, comprising a read/write transducer, a microactuator and a suspension and actuator device thus obtained 失效
    中，Microaktuator和悬架和致动器装置这样获得一种用于生产的致动器用于硬盘装置，具有读/写头处理

    公开(公告)号：EP0977180A1

    公开(公告)日：2000-02-02

    申请号：EP98830465.5

    申请日：1998-07-30

    Applicant: STMicroelectronics S.r.l.

    Inventor： Sassolini, Simone ,  Zerbini, Sarah ,  Vigna, Benedetto ,  Mastromatteo, Ubaldo

    IPC: G11B5/55

    CPC classification number: G11B5/5552 ,  G11B5/11

    Abstract: The microactuator (9) is attached to a first face (43) of a coupling (8) formed on a suspension (5), so that the R/W transducer (6) projects from the opposite face (44). A hole (41; 56) in the coupling (8) permits passage of an adhesive mass (42) interposed between the rotor (11) of the microactuator (9) and the R/W transducer (6). A strip (40) of adhesive material extends between the die (25) accommodating the microactuator (9) and the coupling (8), and externally surrounds the microactuator (9). The coupling (8) acts as a protective shield for the microactuator (9), both mechanically and electrically; it covers the microactuator (9) at the front, and prevents foreign particles from blocking the microactuator (9); in addition it electrically insulates the R/W transducer (6), sensitive to magnetic fields, from regions of the microactuator biased to a high voltage. With the gimbal (8), the strip (40) forms a sealing structure, which in practice surrounds the microactuator (9) on all sides.

    Abstract translation: （8）上形成的悬浮液微致动器（9）被连接到联接器的第一面（43）（5），所以做了R / W换能器（6）从所述相对面（44）的项目。 的孔（41; 56）中的接头（8）允许微致动器（9）的转子（11）和R / W换能器（6）之间的粘合剂的质量（42）的通道。 粘合材料的条带（40），所述模具（25），其容纳微致动器（9）和所述接头（8）之间延伸，并且外侧包围微致动器（9）。 耦合器（8）作为用于微致动器的保护性屏蔽罩（9）机械和电气; 它覆盖微致动器（9）在前面，并从阻塞微致动器（9）防止外来颗粒; 此外它电绝缘R / W换能器（6），对磁场敏感，从微致动器的区域偏置到高电压。 与万向接头（8），所述条带（40）形成的密封结构，这在实践中围绕微致动器（9）在所有侧面上。

    Method for manufacturing a hard disk read/write unit, with micrometric actuation
    23.
    发明公开
    Method for manufacturing a hard disk read/write unit, with micrometric actuation 失效
    Herstellungsverfahrenfüreine Festplatten-Lese / Schreibeinheit，mit mikrometrischerBetätigung

    公开(公告)号：EP0955629A1

    公开(公告)日：1999-11-10

    申请号：EP98830269.1

    申请日：1998-05-05

    Applicant: STMicroelectronics S.r.l.

    Inventor： Mastromatteo, Ubaldo ,  Murari, Bruno ,  Vigna, Benedetto ,  Zerbini, Sarah

    IPC: G11B5/00 ,  G11B5/55 ,  H02N1/00

    CPC classification number: H02N1/006 ,  G11B5/5552 ,  G11B5/58 ,  Y10T29/49027 ,  Y10T29/49032 ,  Y10T29/49052 ,  Y10T29/49053

    Abstract: The method comprises the steps of: forming an integrated device (54) including a microactuator (10) in a semiconductor material wafer (29); forming an immobilisation structure (45,47) of organic material on the wafer; simultaneously forming a securing flange (51) integral with the microactuator (10) and electrical connections for connecting the integrated device to a read/write head; bonding a transducer (6,55) supporting the read/write head to the securing flange (51); connecting the electrical connections to the read/write head; cutting the wafer into dices; bonding the actuator unit to a suspension; and removing the immobilisation structure (45,47).

    Abstract translation: 该方法包括以下步骤：在半导体材料晶片（29）中形成包括微​​致动器（10）的集成器件（54）; 在晶片上形成有机材料的固定结构（45,47）; 同时形成与微致动器（10）成一体的固定凸缘（51）和用于将集成装置连接到读/写头的电连接; 将支撑读/写头的换能器（6,55）接合到固定凸缘（51）; 将电连接连接到读/写头; 将晶片切成骰子; 将致动器单元结合到悬架上; 并移除固定结构（45,47）。

    Vertical movement microelectromechanical device with stopper structure
    25.
    发明公开
    Vertical movement microelectromechanical device with stopper structure 有权
    Mik ur ur ur ur ur ur ur ur ur ur ur ur ur ur ur ur ur ur ur ur

    公开(公告)号：EP1947053A2

    公开(公告)日：2008-07-23

    申请号：EP08150431.8

    申请日：2008-01-18

    Applicant: STMicroelectronics S.r.l.

    Inventor： Merassi, Angelo Antonio ,  Zerbini, Sarah ,  Simoni, Barbara

    IPC: B81B3/00

    CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P2015/0831

    Abstract: In a microelectromechanical device (1), a mobile mass (2) is suspended above a substrate (3) via elastic suspension elements (5), and is rotatable about said elastic suspension elements (5), a cover structure (10) is set above the mobile mass (2) and has an internal surface (10a) facing the mobile mass (2), and a stopper structure (12, 14) is arranged at the internal surface (10a) of the cover structure (10) and extends towards the mobile mass (2) in order to stop a movement of the mobile mass (10) away from the substrate (3) along an axis (z) transverse to the substrate (3). The stopper structure (12, 14) is arranged with respect to the mobile mass (2) so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass (2) about the elastic suspension elements (5).

    Abstract translation: 在微电子机械装置（1）中，通过弹性悬挂元件（5）将移动质量块（2）悬置在基板（3）上方，并可围绕所述弹性悬挂元件（5）旋转，设置盖结构（10） 在移动体（2）的上方并且具有面向移动体（2）的内表面（10a），并且在盖结构（10）的内表面（10a）处布置有止动结构（12,14） 朝向移动质量块（2），以便沿横向于衬底（3）的轴线（z）停止移动质量块（10）远离衬底（3）的移动。 止动器结构（12,14）相对于移动体（2）布置，以便减小往复静电相互作用的影响，特别是使得可移动体（2）在弹性体周围产生的扭转力矩最小化 悬挂元件（5）。

    Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane
    29.
    发明公开
    Integrated gyroscope of semiconductor material with at least one sensitive axis in the sensor plane 有权
    与至少一个集成陀螺仪的敏感轴在传感器平面由半导体材料制成

    公开(公告)号：EP1365211A1

    公开(公告)日：2003-11-26

    申请号：EP02425320.5

    申请日：2002-05-21

    Applicant: STMicroelectronics S.r.l.

    Inventor： Spinola Durante, Guido ,  Zerbini, Sarah ,  Merassi, Angelo

    IPC: G01C19/56 ,  G01P15/00 ,  G01P15/125 ,  G01P9/04

    CPC classification number: G01C19/5747

    Abstract: An integrated gyroscope (1), including an acceleration sensor (23) formed by: a driving assembly (16); a sensitive mass (6) extending in at least one first and second directions (X, Y) and being moved by the driving assembly (16) in the first direction (X); and by a capacitive sensing electrode (20), facing the sensitive mass. The acceleration sensor (23) has an rotation axis (A) parallel to the second direction (Y), and the sensitive mass (6) is sensitive to forces acting in a third direction (Z) perpendicular to the other directions. The capacitive sensing electrode (20) is formed by a conductive material region extending underneath the sensitive mass (6) and spaced therefrom by an air gap.

    Abstract translation: 一种集成陀螺仪（1）包括在由形成加速度传感器（23）：一驱动组件（16）; 一个敏感质量块（6）延伸的至少一个第一和第二方向（X，Y），并通过在第一方向（X）的驱动组件（16）被移动; 和由面对敏感质量的电容感测电极（20）。 加速度传感器（23）具有上旋转轴线（A）平行于第二方向（Y），和敏感质量块（6）是在第三方向（Z）垂直的其他方向作用的力是敏感的。 电容感测电极（20）由导电材料区域延伸的敏感质量块（6），并在空气间隙从那里间隔开的下面形成。

    Integrated gyroscope of semiconductor material
    30.
    发明公开
    Integrated gyroscope of semiconductor material 有权
    Aus Halbleitermaterial hergestellter integrierter Kreisel

    公开(公告)号：EP1253399A1

    公开(公告)日：2002-10-30

    申请号：EP01830277.8

    申请日：2001-04-27

    Applicant: STMicroelectronics S.r.l.

    Inventor： Spinola Durante, Guido ,  Zerbini, Sarah ,  Gardella, Simone

    IPC: G01C19/56 ,  G01P9/04

    CPC classification number: G01C19/5747

    Abstract: The gyroscope (1) is formed by a driving system (16) including a driving mass (5) having an open concave shape; an accelerometer including a sensing mass (6) and comprising mobile sensing electrodes (18); a linkage (24) connecting the driving mass (5) to the sensing mass (6). The sensing mass is surrounded on three sides by the driving mass and has a peripheral portion not facing the sensing mass. The mobile sensing electrodes (18) extend integral with the sensing mass from the peripheral portion not facing the driving mass (5) and are interleaved with fixed sensing electrodes (19a, 19b). Thereby, there are no passing electrical connections extending below the sensing mass (6). Moreover the linkage includes springs (24) placed equidistant from the center of gravity (G2) of the accelerometer, and the gyroscope (1) is anchored to the substrate with anchoring springs (10) placed equidistant from the center of gravity (G1) of the assembly formed by the driving system (16) and by the accelerometer (23).

    Abstract translation: 陀螺仪（1）由包括具有开口凹形的驱动块（5）的驱动系统（16）形成; 包括感测块（6）并包括移动感测电极（18）的加速度计; 将驱动质量块（5）连接到传感块（6）的连杆（24）。 感测质量被驱动质量块三面围绕，并且具有不面向感测质量的周边部分。 移动感测电极（18）与不与驱动质量块（5）相对的周边部分与传感质量块成一整体，并与固定感测电极（19a，19b）交错。 因此，在传感块（6）下方没有延伸的电气连接。 此外，连杆包括从加速度计的重心（G2）等距离放置的弹簧（24），并且陀螺仪（1）通过与从重心（G1）等距离放置的锚定弹簧（10）锚定到基板 所述组件由所述驱动系统（16）和所述加速度计（23）形成。

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