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公开(公告)号：EP2039940A2
公开(公告)日：2009-03-25
申请号：EP08158448.4
申请日：2008-06-18
Applicant: Honeywell International Inc.
Inventor： Yang, Wei
CPC classification number: F04D17/168 , B81B3/0021 , B81B2201/034 , B81B2201/036 , B81B2203/056 , F04D17/127
Abstract: A radial turbomolecular vacuum pump that includes a rotor made from a silicon rotor surface comprising monolithically fabricated micro blades, and a stator made from a silicon stator surface comprising corresponding monolithically fabricated grooves. The micro blades and grooves are arranged in multiple rings, and the rotor and stator disks are placed in proximity, creating interdigitated stator and rotor blade rings. The interdigitated stator and rotor blade rings form a multi-stage compression in the radial direction.
Abstract translation: 一种径向涡轮分子真空泵，其包括由包括单片制造的微型叶片的硅转子表面制成的转子，以及由硅定子表面制成的定子，该定子由包括相应的单片制造的凹槽构成。 微型叶片和槽布置在多个环中，并且转子和定子盘被放置在邻近处，产生交错的定子和转子叶片环。 交叉定子和转子叶片环在径向方向形成多级压缩。
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22.发明公开Micromechanical component comprising a diamond layer, and production process 失效Mikromechanische Struktur mit Diamantschicht und Herstellungsverfahren
公开(公告)号：EP1271155A1
公开(公告)日：2003-01-02
申请号：EP02020310.5
申请日：1995-03-21
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor： Shiomi, Hiromu, Itami Works of Sumitomo Electric , Nishibayashi, Yoshiki c/o Itami Works of Sumitomo , Shikata, Shin-ichi c/o Itami Works of Sumitomo
CPC classification number: G01P15/0802 , B81B3/007 , B81B2201/0235 , B81B2201/0264 , B81B2201/034 , B81B2201/035 , B81B2201/054 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00682 , B81C2201/0109 , G01H3/08 , G01H11/00 , G01H11/06 , G01P15/125 , G01P2015/0828
Abstract: A micro mechanical component, in particular an accelerometer, of the present invention comprises a diamond base, and a diamond cantilever supported on the base and relatively driving to the base. A process for producing a micromechanical component involves forming of a dummy layer promoting the growth of diamond, depositing a diamond layer by vapor phase synthesis (CVD), and removing said dummy layer.
Abstract translation: 本发明的微机械部件，特别是加速度计包括金刚石基座和支撑在基座上并相对地驱动到基座的金刚石悬臂。 制造微机械部件的方法包括形成促进金刚石生长的虚拟层，通过气相合成（CVD）沉积金刚石层，以及去除所述虚设层。
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23.发明公开Micro mechanical component and production process thereof 失效Mikromechanisches Bauelement und Verfahren zur Herstellung desselben。
公开(公告)号：EP0674181A2
公开(公告)日：1995-09-27
申请号：EP95104148.2
申请日：1995-03-21
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor： Shiomi, Hiromu, c/o Itami Works of Sumimoto Elec. , Nishibayahi. Yoshiki, c/o Itami Works of Sumimoto , Shikata, Shin-ichi, c/o Itami Works of Sumimoto
CPC classification number: G01P15/0802 , B81B3/007 , B81B2201/0235 , B81B2201/0264 , B81B2201/034 , B81B2201/035 , B81B2201/054 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00682 , B81C2201/0109 , G01H3/08 , G01H11/00 , G01H11/06 , G01P15/125 , G01P2015/0828
Abstract: A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.
Abstract translation: 本发明的微型机械部件包括底座以及至少一个驱动部分，其支撑在基座上并相对地驱动到基座，驱动部分由金刚石层形成。 因此，由于驱动部具有优异的机械强度和弹性模量，因此从传统的水平，作为微细的机械部件处理成微细的机械部件，可以大大提高其操作性能。 此外，由于驱动部在恶劣的环境下表现出优异的装置特性，所以作为微机械部件的应用范围可以从传统的范围得到广泛的扩展。
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公开(公告)号：EP0518112A1
公开(公告)日：1992-12-16
申请号：EP92108797.9
申请日：1992-05-25
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor： Ueda, Minoru, c/o Osaka Works of Sumitomo , Iiyama, Michitomo, c/o Osaka Works of Sumitomo
CPC classification number: B81C1/00198 , B81B2201/034 , B81B2201/035 , B81B2201/037 , B81B2203/056 , C04B41/009 , C04B41/53 , C04B41/91 , C23C16/408 , G03F7/00 , Y10S505/785 , C04B35/45 , C04B35/584
Abstract: A novel ceramic material for sacrificial layers used in the process for fabricating "micromachines" having dimensions of several tens micrometers to several hundreds micrometers.
The sacrificial layers are made of oxide ceramic containing rare earth, Ba and Cu such as Re₁Ba₂Cu₃O 7-x (Re = rare earth) which can be etched easily and selectively with HCl solution (1/1000) without spoiling dimensional precision of the machine elements.Abstract translation: 用于制造尺寸为几十微米至几百微米的“微机械”的方法中的用于牺牲层的新型陶瓷材料。 牺牲层由含有稀土，Ba和Cu的氧化物陶瓷制成，例如Re1Ba2Cu3O7-x（Re =稀土），可以用HCl溶液（1/1000）容易且选择性地蚀刻，而不损害机器元件的尺寸精度。
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公开(公告)号：JP2016517355A
公开(公告)日：2016-06-16
申请号：JP2015562500
申请日：2014-03-13
IPC: B81B3/00 , B81C1/00 , G01P15/08 , G01P15/093 , G01P15/125 , G02B26/08 , H01L29/84
CPC classification number: F16C11/12 , B81B3/0043 , B81B2201/0235 , B81B2201/034 , B81B2201/042 , B81B2203/0118 , B81B2203/0163 , B81C1/0015 , B81C1/00198 , B81C1/00523 , B81C2201/013 , E05D1/02 , E05D7/00 , E05D11/0081 , F16F1/48 , F16F2224/025 , F16F2226/00 , F16F2226/042 , G01C19/02 , G01P15/09 , G01P15/093 , G01P15/125 , G02B26/0833 , G02B26/105 , Y10T16/522 , Y10T16/525 , Y10T29/24 , Y10T29/25
Abstract: 機械デバイス(20,50,70,80,120)は、強固且つ弾性の材料からなる細長い要素(26,54,66,90,122)を含む。強固フレーム(28,52,64,92)は、フレームに取り付けられる要素の少なくとも一端を固定するように、及び、ビームとフレームとの間に、要素に沿って長手方向に設けられたギャップを、要素がギャップ内で自由に動けるように画定するように構成される。強固且つ弾性の材料とは異なる固形充填材料(30,56,68,94,102,124)は、要素とフレームとの間のギャップを少なくとも一部を充填して、要素の第1の動作モードを許可する一方で、異なる第2の動作モードを阻止する。
Abstract translation: 机械装置（20,50,70,80,120）包括一个细长元件（26,54,66,90,122）包括刚性和弹性材料。 坚固的框架（28,52,64,92），以便固定附接至框架元件的至少一个端部，并且，所述光束和所述框架之间，在纵向方向上沿着所述元件提供的间隙， 元件被配置为定义为自由地在间隙内移动。 牢固地与不同的固体填充材料和弹性材料（30,56,68,94,102,124）是填补至少的元件与框架之间的间隙的一部分，同时允许元件的操作的第一模式 在防止不同的第二工作模式。
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Patent Agency Ranking
公开(公告)号：JPWO2007125969A1
公开(公告)日：2009-09-10
申请号：JP2008513242
申请日：2007-04-25
Applicant: パナソニック株式会社
CPC classification number: B81B5/00 , B81B2201/018 , B81B2201/034 , H01H1/0036 , H01P1/127
Abstract: 本発明のマイクロマシンスイッチは、信号を通過させるべき信号電極間を電気的に接続するための第1の制御信号と、当該信号電極間の電気的な接続を切断するための第2の制御信号とを含む外部からの制御信号に応じて、当該信号電極間の電気的な接続を切り替えるマイクロマシンスイッチであって、基板と、基板上に設けられ、基板上を回転可能な回転体と、回転体上に設けられた可動電極と、一方端が可動電極の一方端と電気的に接続され、他方端が基板上に設けられた第1の信号電極と、回転体の周囲であって回転体の回転によって可動電極の他方端と電気的に接続される位置に設けられた第2の信号電極と、可動電極の他方端と第2の信号電極とが電気的に接続される位置まで、第1の制御信号に応じて回転体を回転させ、可動電極の他方端と第2の信号電極との電気的な接続が切断される位置まで、第2の制御信号に応じて回転体を回転させる駆動部とを備える。
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公开(公告)号：KR1020150140293A
公开(公告)日：2015-12-15
申请号：KR1020157029478
申请日：2014-03-13
CPC classification number: F16C11/12 , B81B3/0043 , B81B2201/0235 , B81B2201/034 , B81B2201/042 , B81B2203/0118 , B81B2203/0163 , B81C1/0015 , B81C1/00198 , B81C1/00523 , B81C2201/013 , E05D1/02 , E05D7/00 , E05D11/0081 , F16F1/48 , F16F2224/025 , F16F2226/00 , F16F2226/042 , G01C19/02 , G01P15/09 , G01P15/093 , G01P15/125 , G02B26/0833 , G02B26/105 , Y10T16/522 , Y10T16/525 , Y10T29/24 , Y10T29/25
Abstract: 기계적디바이스(20, 50, 70, 80, 120)가단단하고탄력있는재료로만들어진길고좁은구성요소(26, 54, 66, 90, 122)를포함한다. 단단한프레임(28, 52, 64, 92)은프레임에부착되는구성요소의적어도하나의단부에고정하고, 빔과프레임사이에구성요소를따라세로방향으로연장되는갭을형성하여, 구성요소가갭 내에서자유롭게움직이도록구성된다. 단단하고탄력있는재료와상이한고체충전재재료(30, 56, 68, 94, 102, 124)가구성요소와프레임사이의갭의적어도일부분을충전하여갭 내에서구성요소의제1 모드의움직임을허용하지만, 상이한제2 모드의움직임을억제하도록한다.
Abstract translation: 机械装置包括由刚性弹性材料制成的长而窄的元件。 刚性框架构造成锚固附接到框架的元件的至少一个端部并且限定沿着梁和框架之间的元件纵向延伸的间隙，使得元件在间隙内自由移动 。 与刚性弹性材料不同的固体填充材料填充元件和框架之间的间隙的至少一部分，以便允许元件在间隙内的第一移动模式，同时抑制不同的第二模式 运动。
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公开(公告)号：KR101748064B1
公开(公告)日：2017-06-15
申请号：KR1020157029478
申请日：2014-03-13
CPC classification number: F16C11/12 , B81B3/0043 , B81B2201/0235 , B81B2201/034 , B81B2201/042 , B81B2203/0118 , B81B2203/0163 , B81C1/0015 , B81C1/00198 , B81C1/00523 , B81C2201/013 , E05D1/02 , E05D7/00 , E05D11/0081 , F16F1/48 , F16F2224/025 , F16F2226/00 , F16F2226/042 , G01C19/02 , G01P15/09 , G01P15/093 , G01P15/125 , G02B26/0833 , G02B26/105 , Y10T16/522 , Y10T16/525 , Y10T29/24 , Y10T29/25
Abstract: 기계적디바이스(20, 50, 70, 80, 120)가단단하고탄력있는재료로만들어진길고좁은구성요소(26, 54, 66, 90, 122)를포함한다. 단단한프레임(28, 52, 64, 92)은프레임에부착되는구성요소의적어도하나의단부에고정하고, 빔과프레임사이에구성요소를따라세로방향으로연장되는갭을형성하여, 구성요소가갭 내에서자유롭게움직이도록구성된다. 단단하고탄력있는재료와상이한고체충전재재료(30, 56, 68, 94, 102, 124)가구성요소와프레임사이의갭의적어도일부분을충전하여갭 내에서구성요소의제1 모드의움직임을허용하지만, 상이한제2 모드의움직임을억제하도록한다.
Abstract translation: 机械装置20,50,70,80,120包括由刚性和弹性材料制成的长而窄的部件26,54,66,90,122。 刚性框架28,52,64,92被固定到附接到框架的部件的至少一个端部并且形成沿着梁和框架之间的部件纵向延伸的间隙， 并配置为可以自由移动。 （30,56,68,94,102,124）与所述刚性弹性材料以及所述框架与所述框架之间的所述间隙的至少一部分不同以允许所述部件的所述第一模式在所述间隙内移动 由此抑制彼此不同的第二模式中的移动。
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公开(公告)号：US12132420B2
公开(公告)日：2024-10-29
申请号：US16725825
申请日：2019-12-23
Applicant: MEMS Drive (Nanjing) Co., Ltd.
Inventor： Xiaolei Liu , Guiqin Wang , Matthew Ng
IPC: H02N1/00 , B81B3/00 , B81B7/00 , B81B7/02 , G02B7/02 , G02B7/09 , G02B27/64 , H02N2/02 , H04N23/68 , H10N30/20
CPC classification number: H02N1/008 , B81B3/0021 , B81B3/0062 , B81B7/0006 , B81B7/008 , B81B7/02 , G02B7/09 , G02B27/646 , H02N2/02 , H04N23/687 , H10N30/20 , H10N30/2044 , B81B2201/033 , B81B2201/034 , B81B2201/047 , B81B2203/0118 , B81B2203/0136 , B81B2203/05 , B81B2203/053
Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.
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公开(公告)号：US20240243035A1
公开(公告)日：2024-07-18
申请号：US18622715
申请日：2024-03-29
Applicant: Frore Systems Inc.
Inventor： Vikram Mukundan , Suryaprakash Ganti , Seshagiri Rao Madhavapeddy , Ananth Saran Yalamarthy , Prathima Kapa
IPC: H01L23/473 , B81B3/00 , G06F1/20 , H01L23/40
CPC classification number: H01L23/4735 , B81B3/0021 , G06F1/20 , H01L23/40 , B81B2201/034 , B81B2203/0118 , B81B2203/0307 , B81B2203/0315 , B81B2203/033 , B81B2207/99
Abstract: A cooling system is described. The cooling system includes a bottom plate, a support structure, and a cooling element. The bottom plate has orifices therein. The cooling element has a central axis and is supported by the support structure at the central axis. A first portion of the cooling element is on a first side of the central axis and a second portion of the cooling element is on a second side of the central axis opposite to the first side. The first and second portions of the cooling element are unpinned. The first portion and the second portion are configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure. The support structure couples the cooling element to the bottom plate. At least one of the support structure is an adhesive support structure or the support structure undergoes rotational motion in response to the vibrational motion. The adhesive support structure has at least one lateral dimension defined by a trench in the cooling element or the bottom plate.
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