Imaging coherent radiometer
    22.
    发明公开
    Imaging coherent radiometer 失效
    成像相干放射线计

    公开(公告)号:EP0256300A3

    公开(公告)日:1990-03-14

    申请号:EP87110016.0

    申请日:1987-07-10

    Abstract: An imaging coherent radiometer for detecting and determining the location and wavelength of coherent radiation or coherent lack of radiation in the presence of non-coherent ambient radiation. The apparatus includes an unequal path interferometer which divides incoming radiation containing coherent and non-coherent radiation into a first beam path and a second beam path through which a first beam and a second beam, respectively, travel. The optical path length difference between the first beam path and the second beam path are greater than the coherence length of the non-coherent radiation, but substantially less than the coherence length of the coherent radiation or coherent lack of radiation. Modulation means are provided to cause a predetermined difference in the optical frequencies between the first beam and the second beam proportional to a modulation signal. The first and second beams are then recombined into a recombined beam. Detecting means are provided to detect the interference of the first and second beams across the entire wavefront of the recombined beam, and over the entire image of the scene being viewed. Processing means detect and determine the location and wavelength of coherent radiation or coherent lack of radiation in the scene being viewed by the apparatus. This information can then be visually displayed. Additional processing means to respond to specific coherent wavelengths or wavelength sets.

    TIME-MULTIPLEXED SPECTRALLY CONTROLLED INTERFEROMETRY
    23.
    发明申请
    TIME-MULTIPLEXED SPECTRALLY CONTROLLED INTERFEROMETRY 审中-公开
    时间多光谱控制干涉

    公开(公告)号:US20160282190A1

    公开(公告)日:2016-09-29

    申请号:US14927320

    申请日:2015-10-29

    Applicant: ARTUR OLSZAK

    Inventor: ARTUR OLSZAK

    Abstract: A tunable light source having a temporal coherence length such that interference fringes are detected within the optical path difference of the interferometer is spectrally controlled to produce multiple wavelengths during sequential fractions of the integration time of the detector of the interferometer. The wavelengths are selected so as to produce a visible correlogram at each integration time according to spectrally controlled interferometry (SCI) principles. Such different wavelengths may be produced by stepwise or continuous modulation. The modulation step is repeated sequentially while changing the period of modulation to produce a succession of predetermined spatial patterns of interference fringes, as required for interferometric measurements. The approach enables the practice of SCI with common-path apparatus used for conventional phase shifting, thereby combining the advantages of high-coherence and white-light interferometry. A suitable time-modulated source combines a coherent source with an optical modulator and a waveform generator synchronized with the source.

    Abstract translation: 具有时间相干长度的可调谐光源,使得在干涉仪的光程差内检测到干涉条纹被光谱控制,以在干涉仪的检测器的积分时间的连续分数期间产生多个波长。 选择波长以便根据光谱控制的干涉测量(SCI)原理在每个积分时间产生可见的相关图。 这种不同的波长可以通过逐步或连续的调制来产生。 顺序地重复调制步骤,同时根据干涉测量的要求改变调制周期以产生一系列预定的干涉条纹的空间图案。 该方法使得用于常规相移的通路设备的SCI的实践,从而结合了高相干性和白光干涉测量的优点。 合适的时间调制源将相干光源与光调制器和与源同步的波形发生器组合。

    Method and apparatus for gas discharge laser output light coherency reduction

    公开(公告)号:US20050286599A1

    公开(公告)日:2005-12-29

    申请号:US10881533

    申请日:2004-06-29

    Abstract: A method and apparatus for producing with a gas discharge laser an output laser beam comprising output laser light pulses, for delivery as a light source to a utilizing tool is disclosed which may comprise a beam path and a beam homogenizer in the beam path. The beam homogenizer may comprise at least one beam image inverter or spatial rotator, which may comprise a spatial coherency cell position shifter. The homogenizer may comprise a delay path which is longer than, but approximately the same delay as the temporal coherence length of the source beam. The homogenizer may comprise a pair of conjoined dove prisms having a partially reflective coating at the conjoined surfaces of each, a right triangle prism comprising a hypotenuse face facing the source beam and fully reflective adjoining side faces or an isosceles triangle prism having a face facing the source beam and fully reflective adjoining side faces or combinations of these, which may serve as a source beam multiple alternating inverted image creating mechanism. The beam path may be part of a bandwidth measuring the bandwidths of an output laser beam comprising output laser light in the range of below 500 femtometers at accuracies within tens of femtometers. The homogenizer may comprise a rotating diffuser which may be a ground glass diffuser which may also be etched. The wavemeter may also comprise a collimator in the beam path collimating the diffused light; a confocal etalon creating an output based upon the collimated light entering the confocal etalon; and a detector detecting the output of the confocal etalon and may also comprise a scanning mechanism scanning the angle of incidence of the collimated light entering the confocal etalon which may scan the collimated light across the confocal etalon or scan the etalon across the collimated light, and may comprise an acousto-optical scanner. The confocal etalon may have a free spectral range approximately equal to the E95 width of the beam being measured. The detector may comprise a photomultiplier detecting an intensity pattern of the output of the confocal etalon.

    Wavefront sensing and correction with deformable mirror
    25.
    发明授权
    Wavefront sensing and correction with deformable mirror 失效
    带可变形镜的波前感测和校正

    公开(公告)号:US5026977A

    公开(公告)日:1991-06-25

    申请号:US538896

    申请日:1990-06-15

    CPC classification number: G01J9/02 G01J2009/0249

    Abstract: A closed loop system sends one portion of a coherent laser beam along a first path and another portion of the beam along a second path which is directed at a mirror formed on piezoelectric membrane. After reflection, both return beams are mixed on a photodetector array and the array output is analyzed to determine the values of a charge distribution on the piezoelectric membrane which will null or maintain constant the phase of the mixed beam.

    Abstract translation: 闭环系统沿着沿着第二路径的第一路径和第二路径沿着第一路径发送一部分相干激光束,该第二路径指向形成在压电膜上的反射镜。 在反射之后,将两个返回光束混合在光电检测器阵列上,并且分析阵列输出以确定压电膜上的电荷分布的值,其将使混合光束的相位失真或保持恒定。

    Method and apparatus for simultaneously measuring a plurality of
spectral wavelengths present in electromagnetic radiation
    26.
    发明授权
    Method and apparatus for simultaneously measuring a plurality of spectral wavelengths present in electromagnetic radiation 失效
    用于同时测量存在于电磁辐射中的多个光谱波长的方法和装置

    公开(公告)号:US4905169A

    公开(公告)日:1990-02-27

    申请号:US366348

    申请日:1989-06-15

    Abstract: An apparatus and method simultaneously measures a plurality of spectral wavelengths present in electromagnetic radiation. A modulatable birefringent optical element is employed to divide a polarized light beam into two components, thereby producing a phase difference in two resulting light beams such that the two beams can be made to interfere with one another when recombined, the interference pattern providing the wavelength information required for the analysis of the incident light. The interferometer thus created performs in a similar manner to a Michelson interferometer, but with no moving parts, and with a resolution dependent on the degree of phase shift introduced by the modulator.

    Abstract translation: 一种装置和方法同时测量电磁辐射中存在的多个光谱波长。 采用可调制的双折射光学元件将偏振光束分成两个分量,从而在两个产生的光束中产生相位差,使得当重新组合时可以使两个光束彼此干扰,提供波长信息的干涉图案 需要分析入射光。 这样创建的干涉仪以与迈克尔逊干涉仪类似的方式执行,但没有移动部件,并且具有取决于由调制器引入的相移程度的分辨率。

    How to reduce the interference of the gas discharge laser of output light and equipment

    公开(公告)号:JP2008505495A

    公开(公告)日:2008-02-21

    申请号:JP2007519267

    申请日:2005-06-17

    Abstract: 【課題】利用ツールへの光源としての送出のために出力レーザ光パルスを含む出力レーザビームをガス放電レーザで生成する方法及び装置を提供する。
    【解決手段】ビーム経路とビーム経路におけるビームホモジナイザーとを含むことができる利用ツールに対する光源として送出するための出力レーザ光パルスを含む出力レーザビームをガス放電レーザで生成する方法及び装置。 ビームホモジナイザーは、空間的干渉セル位置移動機器を含むことができる少なくとも1つのビーム像インバータ又は空間回転子を含むことができる。 ホモジナイザーは、ソースビームの時間的干渉長さよりも長いが、それとほぼ同じ遅延である遅延経路を含むことができる。 ホモジナイザーは、部分反射コーティングを各々の相互接合面に有する一対の相互接合ダブプリズム、ソースビームに面する斜辺面と全反射する隣接する側面とを含む直角三角形プリズム、又はソースビームに面する面と全反射する隣接する側面とを有する二等辺三角形プリズム、又はこれらの組合せを含むことができ、これらは、ソースビーム多重交替反転像作成機構として機能することができる。 ビーム経路は、数十フェムトメートル以内の精度で500フェムトメートル未満の範囲の出力レーザ光を含む出力レーザビームの帯域幅を測定する帯域幅の一部とすることができる。 ホモジナイザーは、エッチングされてもよいグランドグラス拡散器とすることができる回転拡散器を含むことができる。 波長計はまた、拡散光を平行化するビーム経路内のコリメータと、エタロンに入射する平行光に基づいて出力を作成する共焦点エタロンと、共焦点エタロンの出力を検出する検出器とを含むことができ、また、共焦点エタロンにわたって平行光を走査するか又は平行光にわたってエタロンを走査することができる、共焦点エタロンに入射する平行光の入射角を走査する走査機構を含むこともでき、かつ音響光学スキャナを含むことができる。 共焦点エタロンは、測定されているビームのE59幅にほぼ等しい自由スペクトル領域を有することができる。 検出器は、共焦点エタロンの出力の強度パターンを検出する光電子増倍管を含むことができる。
    【選択図】図4

    METHOD AND DEVICE FOR DETECTING COHERENT RADIATION
    30.
    发明申请
    METHOD AND DEVICE FOR DETECTING COHERENT RADIATION 审中-公开
    用于检测相干辐射的方法和装置

    公开(公告)号:WO2010116288A3

    公开(公告)日:2010-12-02

    申请号:PCT/IB2010051375

    申请日:2010-03-30

    Inventor: BAIER JOHANNES

    Abstract: The present invention relates to a method and device for detecting coherent optical radiation. In the proposed method, an emission wavelength (8) of a laser (5) is tuned or set close to a wavelength (9) of the coherent radiation (3) to be detected. The coherent radiation (3) is coupled into the laser cavity and a resulting periodic modulation in output power of the laser emission of the laser are measured or detected. The proposed method and device are only sensitive to coherent radiation in a narrow wavelength range.

    Abstract translation: 本发明涉及一种用于检测相干光辐射的方法和装置。 在所提出的方法中,激光器(5)的发射波长(8)被调谐或设置为接近待检测的相干辐射(3)的波长(9)。 相干辐射(3)耦合到激光腔中,并且测量或检测对激光器的激光发射的输出功率的所得到的周期性调制。 所提出的方法和装置仅对窄波长范围内的相干辐射敏感。

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