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公开(公告)号：US3973850A
公开(公告)日：1976-08-10
申请号：US497940
申请日：1974-08-16
Applicant: Michel Pouey
Inventor： Michel Pouey
CPC classification number: G01J3/1838 , G01J3/189 , Y10S359/90
Abstract: Spectrometric gratings formed by holographic techniques are disclosed. The gratings are employed in monochromator mounts of the type in which fixed entrance and exit slits are combined with simple rotation of the grating to scan the spectral range of interest, the angles of incidence and diffraction and the positions of the slits being so related that the mounts are characterized by improved optical performance due to phase balancing and improved focussing properties according both to geometrical and diffraction theories. The parameters involved in the holographic formation of the gratings, specifically the angularities and positions of the point sources forming the holographic image of the grating lines, are specifically related to the characteristics of the mount as to improve further their optical characteristics, particularly with respect to mounts either employing "normal" (i.e., relatively small) angles of incidence with large grating apertures or employing grazing incidence (i.e., for use in the far ultraviolet region).
Abstract translation: 公开了通过全息技术形成的光谱光栅。 光栅用于单色仪安装，其中固定的入口和出口狭缝与光栅的简单旋转组合以扫描感兴趣的光谱范围，入射角和衍射角以及狭缝的位置如此相关， 由于相位平衡和基于几何和衍射理论的改进的聚焦特性，安装座的特征在于改善的光学性能。 涉及光栅全息形成的参数，特别是形成光栅线的全息图像的点光源的角度和位置，特别是与安装座的特性相关，以进一步提高其光学特性，特别是相对于 使用具有大光栅孔径或采用掠入射（即用于远紫外区域）的“正常”（即相对小的）入射角安装。
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22.发明专利
公开(公告)号：JP2003028715A
公开(公告)日：2003-01-29
申请号：JP2001246318
申请日：2001-07-10
Applicant: Japan Atom Energy Res Inst , Shimadzu Corp , 日本原子力研究所 , 株式会社島津製作所
Inventor： KOIKE MASAHITO , SANO KAZUO , HARADA YOSHIHISA
CPC classification number: G02B5/1861 , G01J3/18 , G01J3/1833 , G01J3/189
Abstract: PROBLEM TO BE SOLVED: To provide a diffraction grating designed to prevent diffraction efficiency from being lowered by a shadow generated by a grating groove, and designed to reduce extremely an aberration caused by conical diffraction, and a conical diffraction oblique-incidence spectroscope provided with the diffraction grating. SOLUTION: In this diffraction grating spectroscope provided with a converged beam generating means (concave mirror 2) for converting a dispersed beam from a light source or an inlet slit 1 into a converged beam, and the diffraction grating (plane diffraction grating 3) arranged on an optical path ranging over from the light source to a focal point of the converged beam, and for conducting wavelength scanning by turning the diffraction grating around an axis determined in parallel to a grating groove direction of a grating face thereof, an expansion coefficient for a groove function of a series expansion showing a groove pattern of the diffraction grating is determined to make all of a rotating axis (y-axis) of the diffraction grating, an incident main beam and a diffraction main beam coplanar, and to bring a value of an expansion coefficient of an optical path function for expressing the focal point of a spectroscopic system including the diffraction grating into substantially zero in at least one wavelength within a wavelength range for conducting the wavelength scanning.
Abstract translation: 要解决的问题：提供一种设计成防止衍射效率被光栅槽产生的阴影降低的衍射光栅，并且被设计成极大地减小由圆锥衍射引起的像差，并且设置有锥形衍射斜入射分光器 衍射光栅。 解决方案：在该衍射光栅分光仪中，设置有用于将来自光源或入口狭缝1的分散光束转换为会聚光束的会聚光束产生装置（凹面镜2），以及衍射光栅（平面衍射光栅3） 从光源到会聚光束的焦点的光路，并且通过围绕平行于其光栅面的光栅槽方向确定的轴转动衍射光栅来进行波长扫描，用于 确定出示出衍射光栅的凹槽图案的串联扩展的凹槽功能，以使衍射光栅的旋转轴（y轴），入射主光束和衍射主光束共面的所有旋转轴（y轴） 用于将包括衍射光栅的分光系统的焦点表达为基本上为零的光路函数的扩展系数 用于进行波长扫描的波长范围内的至少一个波长。
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23.发明专利
公开(公告)号：JP5170488B2
公开(公告)日：2013-03-27
申请号：JP2001246318
申请日：2001-07-10
Applicant: 独立行政法人日本原子力研究開発機構 , 株式会社島津製作所
CPC classification number: G02B5/1861 , G01J3/18 , G01J3/1833 , G01J3/189
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公开(公告)号：US09921104B2
公开(公告)日：2018-03-20
申请号：US15344825
申请日：2016-11-07
Applicant: KLA-Tencor Corporation
Inventor： Shankar Krishnan , Alexander Buettner , Kerstin Purrucker , David Y. Wang
CPC classification number: G01J3/189 , G01J3/0289 , G01J3/10 , G01J3/2803 , G01N21/255 , G01N21/27 , G01N33/00 , G01N2033/0095
Abstract: Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.
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公开(公告)号：US08736844B2
公开(公告)日：2014-05-27
申请号：US13154368
申请日：2011-06-06
Applicant: Eric Szarmes , Huan Ma
Inventor： Eric Szarmes , Huan Ma
IPC: G01J3/45
CPC classification number: G01J3/453 , G01J3/1804 , G01J3/189
Abstract: A Sagnac interferometer can include a beamsplitter arranged to receive an input beam of light of a design wavelength, to split the input beam of light into first and second beams that counter propagate around an optical path, and to recombine the first and second beams into an output beam of light. The optical path can include at least one diffraction grating that is arranged to satisfy an effective Littrow geometry.
Abstract translation: 萨尼亚克干涉仪可以包括分束器，其布置成接收设计波长的输入光束，以将输入光束分成第一和第二光束，所述第一和第二光束在光路周围传播，并且将第一和第二光束复合到 输出光束。 光路可以包括至少一个被设置为满足有效的Littrow几何形状的衍射光栅。
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Patent Agency Ranking
公开(公告)号：US20120212738A1
公开(公告)日：2012-08-23
申请号：US13364226
申请日：2012-02-01
Applicant: Dar Bahatt , Chirag Patel , Roy H. Tan , Derek Prothro
Inventor： Dar Bahatt , Chirag Patel , Roy H. Tan , Derek Prothro
IPC: G01J3/28
CPC classification number: G01N21/31 , G01J3/10 , G01J3/12 , G01J3/18 , G01J3/189 , G01J3/2803 , G01J3/2823 , G01J3/4406 , G01J2003/1204 , G01J2003/1208 , G01J2003/1213 , G01J2003/1226 , G01N21/0332 , G01N21/253 , G01N21/6428 , G01N21/6452 , G01N21/6456 , G01N21/76 , G01N2021/6421 , G01N2021/6432 , G01N2201/06113 , G01N2201/0621 , G01N2201/0697
Abstract: Systems, including methods, apparatus, and algorithms, for spectrally imaging a two-dimensional array of samples.
Abstract translation: 用于对二维样本阵列进行光谱成像的系统，包括方法，装置和算法。
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27.发明申请公开(公告)号：US20120086946A1
公开(公告)日：2012-04-12
申请号：US13154368
申请日：2011-06-06
Applicant: Eric Szarmes , Huan Ma
Inventor： Eric Szarmes , Huan Ma
IPC: G01J3/45
CPC classification number: G01J3/453 , G01J3/1804 , G01J3/189
Abstract: A Sagnac interferometer can include a beamsplitter arranged to receive an input beam of light of a design wavelength, to split the input beam of light into first and second beams that counter propagate around an optical path, and to recombine the first and second beams into an output beam of light. The optical path can include at least one diffraction grating that is arranged to satisfy an effective Littrow geometry.
Abstract translation: 萨尼亚克干涉仪可以包括分束器，其布置成接收设计波长的输入光束，以将输入光束分成第一和第二光束，所述第一和第二光束在光路周围传播，并且将第一和第二光束复合到 输出光束。 光路可以包括至少一个被设置为满足有效的Littrow几何形状的衍射光栅。
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28.发明申请Apparatus and Method for Controlling Operation of Vehicles or Machinery by Intoxicated or Impaired Individuals 审中-公开通过有毒或受伤个人控制车辆或机械的操作的装置和方法公开(公告)号：US20120078473A1
公开(公告)日：2012-03-29
申请号：US13314703
申请日：2011-12-08
Applicant: Trent Ridder , Bentley Laaksonen , Ben Ver Steeg
Inventor： Trent Ridder , Bentley Laaksonen , Ben Ver Steeg
IPC: B60K28/06
CPC classification number: A61B5/0071 , A61B5/117 , A61B5/14546 , A61B5/1455 , A61B5/4845 , G01J3/02 , G01J3/0218 , G01J3/0229 , G01J3/0291 , G01J3/14 , G01J3/189 , G01N21/274 , G01N21/359 , G01N21/474 , G01N2201/129
Abstract: The present invention discloses apparatuses and methods for non-invasive determination of attributes of human tissue by quantitative infrared spectroscopy. The embodiments of the present invention include subsystems optimized to contend with the complexities of the tissue measurements. The subsystems can include an illumination/modulation subsystem, a tissue sampling subsystem, a calibration maintenance subsystem, a data acquisition subsystem, and a computing subsystem. Embodiments of the present invention provide analyte property determination and identity determination or verification from the same spectroscopic information, making unauthorized use or misleading results less likely that in systems that include separate analyte and identity determinations. The invention can be used to prevent operation of automobiles or other equipment unless the operator has an acceptable alcohol concentration, and to limit operation of automobiles or other equipment to authorized individuals who are not intoxicated or drug-impaired.
Abstract translation: 本发明公开了通过定量红外光谱法非侵入性地确定人体组织属性的装置和方法。 本发明的实施例包括被优化以应对组织测量的复杂性的子系统。 子系统可以包括照明/调制子系统，组织采样子系统，校准维护子系统，数据采集子系统和计算子系统。 本发明的实施方案提供了来自相同光谱信息的分析物质性质确定和鉴别确认或验证，使得在包括单独的分析物和身份确定的系统中不太可能使用未经授权的使用或误导结果。 本发明可以用于防止汽车或其他设备的操作，除非操作人员具有可接受的酒精浓度，并且将汽车或其他设备的操作限制于不会中毒或药物受损的授权个人。
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29.发明授权Method of obtaining stigmatic imaging in spectral analysis using a concave grating 失效使用凹面光栅在光谱分析中获得眩晕成像的方法
公开(公告)号：US3985443A
公开(公告)日：1976-10-12
申请号：US583674
申请日：1975-06-04
Applicant: Nils Allan Danielsson , Karl-Peter Christian Lindblom
Inventor： Nils Allan Danielsson , Karl-Peter Christian Lindblom
Abstract: The invention relates to a method of obtaining stigmatic imaging in spectral analysis using a concave grating in offplane mounts. The invention comprises placing on one hand the object, which may be an entrance slit, and on the other the focal surface in such a manner with respect to the concave grating that certain conditions specified in disclosed formulae and relating to an othogonal three dimensional coordinate system the origo of which lies in the middle of the grating surface, the X-axis of which runs along the normal to the grating surface, and the Z-axis of which is parallel with the grooves of the grating, are satisfied at a value for the angle between the XY-plane and a line from a selected point on the object to origo that differs from zero.
Abstract translation: 本发明涉及一种使用离散平台上的凹形光栅在光谱分析中获得眩晕成像的方法。 本发明包括一方面将物体（其可以是入口狭缝）和另一方面放置在相对于凹形光栅的方式的焦面上，所述条件在公开的公式中指定的某些条件并涉及正交三维坐标系 其原点位于光栅表面的中间，其X轴沿着光栅表面的法线延伸，并且其Z轴与光栅的凹槽平行，其值为 XY平面与从物体上的选定点到原点的线之间的角度不同于零。
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公开(公告)号：US3775010A
公开(公告)日：1973-11-27
申请号：US3775010D
申请日：1972-02-29
Applicant: CARY INSTRUMENTS
Inventor： CHUPP V , DUFFIELD J
CPC classification number: G01J3/1804 , G01J3/189
Abstract: The grating of an asymmetric, double pass, grating monochromator has an axis of rotation which extends at an angle Psi relative to a normal to a plane H H''. That plane is normal to, and bisects, a line extending between the monochromator entrance and exit slits. The angle Psi is characterized in that spectral overlap is substantially elmininated.
Abstract translation: 非对称双通道光栅单色仪的光栅具有相对于平面H H'的法线以一角度PSI延伸的旋转轴。 该平面与单色仪入口和出射狭缝之间延伸的线是平行的，并且平分。 角度PSI的特征在于，光谱重叠基本上被终止。
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