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    공간 광 변조기 분광기 및 광 분석 방법
    22.
    发明授权
    공간 광 변조기 분광기 및 광 분석 방법 失效
    空间光调制器光谱仪

    公开(公告)号：KR100275422B1

    公开(公告)日：2000-12-15

    申请号：KR1019920024776

    申请日：1992-12-19

    Applicant: 텍사스 인스트루먼츠 인코포레이티드

    Inventor： 로날드이.스태포드

    IPC: G02B27/10

    CPC classification number: G01J3/28 ,  G01J3/021 ,  G01J3/0229 ,  G01J2003/2866 ,  G01N2201/0675

    Abstract: 입사한 복사선을 관련 파장 스펙트럼으로 분산하는 프리즘(44)에 복사선의 평행 광선을 제공하기 위해 입구 슬릿(40)과 시준기(42)를 채택한 SLM 분광기가 제공된다. 프리즘(44)로부터의 스펙트럼은 변형가능 미러 장치(DMD)와 같은 공간 광 변조기(SLM)(46)에 입사된다. SLM 표면의 작은 부분을 선택적으로 활성화(또는 불활성화)함으로써 SLM에 입사한 스펙트럼의 일부분을 파라볼라 집속 미러(48)과 같은 집속 장치에 선택적으로 반사 또는 전송하는 것이 가능하다. 집속 장치는 SLM 상의 선택된 셀에 의해 반사된 스펙트럼의 부분을 다시 감지기(50)에 집속한다. 선택된 파장은 SLM에서 어느 열의 셀들이 활성화(또는 불활성화)되었는지의 함수이다. 본 발명의 SLM 분광기는 가시광과, 근적외선 또는 자외선과 같은 가시광에 가까운 광을 분석하는 데에 사용될 수 있다. 감지기 또는 검출기의 출력은 적절히 증폭되어, 적절한 교정 후에 특정 파장 또는 파장 대역에 있는 에너지의 양을 결정하기 위해 채택될 수 있다.

    Method of fluorescence imaging
    27.
    发明公开
    Method of fluorescence imaging 审中-公开
    韦尔法罕zur Erzeugung fluoreszierender Bilder

    公开(公告)号：EP1998165A1

    公开(公告)日：2008-12-03

    申请号：EP07109459.3

    申请日：2007-06-01

    Applicant: The European Community, represented by the European Commission

    Inventor： Bednarkiewicz, Artur ,  Whelan, Maurice

    IPC: G01N21/64 ,  G01J3/44 ,  G02B21/00

    CPC classification number: G01N21/6408 ,  G01N21/6458 ,  G01N2021/6423 ,  G01N2201/0675 ,  G02B21/16 ,  G02B21/365

    Abstract: Method of fluorescence imaging comprising:
    a) illuminating a sample to excite its fluorescence and acquiring an image thereof;
    b) based on spectral and spatial information from the sample's fluorescence image, segmenting the image into regions of similar spectral properties;
    c) for each image segment, exciting the fluorescence of the corresponding sample region, and detecting the corresponding fluorescence;
    d) based on modelling, determining expected fluorescence parameters from the fluorescence signals detected for each region;
    e) scanning the sample and determining final fluorescence parameters based on said expected fluorescence parameters from step d).

    Abstract translation: 荧光成像方法包括：a）照射样品以激发其荧光并获得其图像; b）基于来自样品荧光图像的光谱和空间信息，将图像分割成具有相似光谱性质的区域; c）对于每个图像段，激发相应样品区域的荧光，并检测相应的荧光; d）基于建模，根据为每个区域检测的荧光信号确定预期的荧光参数; e）基于来自步骤d）的所述预期荧光参数扫描样品并确定最终荧光参数。

    MEASUREMENT OF CRITICAL DIMENSION
    29.
    发明公开
    MEASUREMENT OF CRITICAL DIMENSION 审中-公开
    测量临界尺寸

    公开(公告)号：EP2726849A2

    公开(公告)日：2014-05-07

    申请号：EP12806995.2

    申请日：2012-06-12

    Applicant: KLA-Tencor Corporation

    Inventor： KRISHNAN, Shankar ,  WANG, Haiming

    IPC: G01N21/25 ,  G01B11/24 ,  H01L21/66

    CPC classification number: G01N21/55 ,  G01B11/065 ,  G01B2210/56 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/42 ,  G01N21/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214 ,  G01N2201/0675

    Abstract: A spectroscopic instrument for conducting multi-wavelength, multi-azimuth, multi-angle-of-incidence readings on a substrate, the instrument having a broadband light source for producing an illumination beam, an objective for directing the illumination onto the substrate at multiple azimuth angles and multiple angels-of-incidence simultaneously, thereby producing a reflection beam, an aperture plate having an illumination aperture and a plurality of collection apertures formed therein for selectively passing portions of the reflection beam having desired discreet combinations of azimuth angle and angle-of-incident, a detector for receiving the discreet combinations of azimuth angle and angle-of-incident and producing readings, and a processor for interpreting the readings.

    NEAR REAL TIME OPTICAL PHASE CONJUGATION
    30.
    发明公开
    NEAR REAL TIME OPTICAL PHASE CONJUGATION 有权
    快速实时光相位共轭

    公开(公告)号：EP2478466A4

    公开(公告)日：2014-04-16

    申请号：EP10816257

    申请日：2010-09-14

    Applicant: BIO RAD LABORATORIES

    Inventor： HENG XIN

    IPC: G03H1/00 ,  A61B18/00 ,  A61B18/20 ,  A61N5/06 ,  A61N5/067 ,  G01N21/47 ,  G02B26/06

    CPC classification number: A61B18/203 ,  A61B2018/00452 ,  A61B2018/00642 ,  A61B2018/00779 ,  G01N21/4795 ,  G01N2201/0675 ,  G02B26/06 ,  G03H1/0443 ,  G03H1/2294 ,  G03H2001/0072

    Abstract: An optical system and associated method enable near real time optical phase conjugation. In the method, a translucent medium is illuminated by a sample illumination beam. Light scattered by the medium is directed to an electronic image sensor while a reference beam is also directed to the electronic image sensor. The scattered light and the reference beam form an interference pattern at the electronic image sensor. A digital representation of the interference pattern is recorded using the electronic image sensor, and the characteristics of a conjugate of the sample beam are computed from the numerical representation. A conjugate beam having the computed characteristics is generated using a configurable optical element and directed back to the translucent medium. The generation of the conjugate beam may be accomplished using a spatial light modulator.

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