-
公开(公告)号：US09182351B2
公开(公告)日：2015-11-10
申请号：US14091199
申请日：2013-11-26
Applicant: Nanometrics Incorporated
Inventor： Andrzej Buczkowski
CPC classification number: G01N21/6489 , G01B11/0625 , G01N21/47 , G01N21/55 , G01N21/6456 , G01N21/88 , G01N21/9501 , G01N2021/4735 , G01N2021/646 , G01N2021/8822 , G01N2201/06113 , G01N2201/1042 , G01N2201/1053 , H04N3/155
Abstract: An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured.
Abstract translation: 光学测量装置能够检测光致发光的任何组合，宽带光的镜面反射以及穿过样品宽度的线的散射光。 测量装置包括在样品上产生第一照明线的第一光源。 可以使用扫描系统扫描样品上的照明点以形成照明线。 检测器对沿着照明线发射的光致发光进行光谱成像。 另外，宽带照明源可以用于在样本上产生第二照明线，其中检测器对第二照明线的宽带照明进行光谱反射。 检测器还可以对来自第一照明线的散射光进行成像。 可以在样品上扫描照明线，使得可以测量样品上的所有位置。
-
公开(公告)号：US08922860B2
公开(公告)日：2014-12-30
申请号：US13613141
申请日：2012-09-13
Applicant: Cameron John Tovey
Inventor： Cameron John Tovey
CPC classification number: G01N21/253 , G01N21/774 , G01N2021/7773 , G01N2021/7793 , G01N2021/7796 , G01N2201/10 , G01N2201/1042 , G01N2201/105
Abstract: Motion control system and method for biosensor scanning that include inputting to a multi-axis motion controller move commands associated with the scan path as defined by multiple axes. The multiple axes including an x-baseline coordinate x0, a y-baseline coordinate y0, an x-direction oscillation amplitude x1, a y-direction oscillation amplitude y1, an oscillation frequency f and a phase φ. The multi-axis motion controller outputs digital commanded positions for each of the multiple axes. A post-processor receives the commanded positions and generates parameterized commanded positions x and y that each include a baseline motion component and an oscillating motion component. The parameterized commanded positions cause the scanning optical system to deflect the light beam to scan the beam spot over the scan path to scan the biosensor.
Abstract translation: 用于生物传感器扫描的运动控制系统和方法包括向多轴运动控制器输入移动与由多个轴定义的扫描路径相关联的命令。 多个轴包括x基线坐标x0，y基线坐标y0，x方向振荡振幅x1，y方向振荡振幅y1，振荡频率f和相位＆phgr。 多轴运动控制器为每个多轴输出数字指令位置。 后处理器接收命令位置并产生每个包括基线运动分量和振荡运动分量的参数化指令位置x和y。 参数化的命令位置使得扫描光学系统偏转光束以扫描扫描路径上的束斑以扫描生物传感器。
-
公开(公告)号：US08259298B2
公开(公告)日：2012-09-04
申请号：US12676210
申请日：2008-09-03
Applicant: Paul Berghmans
Inventor： Paul Berghmans
IPC: G01N21/00
CPC classification number: B07C5/342 , G01N21/85 , G01N21/8901 , G01N2021/8592 , G01N2201/1042
Abstract: The invention relates to a system comprising a broadband optical light source and a sorting device and more specifically to laser sorting devices. The object of the present invention is to provide a system comprising a sorting device with a light-source offering all wavelengths for the sorting process. This is solved by using an all fiber supercontinuum light source.
Abstract translation: 本发明涉及一种包括宽带光源和分类装置的系统，更具体地涉及激光分选装置。 本发明的目的是提供一种包括具有提供用于分选过程的所有波长的光源的分类装置的系统。 这通过使用全纤维超连续光源来解决。
-
公开(公告)号：JP2009528577A
公开(公告)日：2009-08-06
申请号：JP2008557454
申请日：2007-02-23
Applicant: ゼネラル・エレクトリック・カンパニイGeneral Electric Company
Inventor： イェクタ，アーメッド , バラッシュ，ユージーン , フォミチョフ，パヴェル・エイ , マシーノ，ジョセフ
CPC classification number: G01N21/6458 , G01N21/47 , G01N2201/0407 , G01N2201/1042 , G02B21/0048 , G02B21/0076 , G02B21/367
Abstract: 【課題】 １以上の試料のマルチモード撮像システム及び方法を提供する。
【解決手段】 本システムは、１以上の光源と、撮像システムの動作モードに応じて選択される光学系と、画素の選択的読取りが可能な検出器とを備える。 段階的試料移動及び連続的試料移動からなる群から選択される試料移動法を用いて光学系に対して１以上の試料を移動させる。 方法は、（１）撮像システムの動作モードを選択する段階、（２）１以上の光源から、撮像システムの動作モードに応じて選択される光学系を通して光を伝送する段階、（３）段階的試料移動及び連続的試料移動からなる群から選択される試料移動法を用いて１以上の試料を光学系に対して移動させる段階、及び（４）検出器で画素を選択的に読み取る段階を含む。
【選択図】 図１-
公开(公告)号：WO2015080827A1
公开(公告)日：2015-06-04
申请号：PCT/US2014/062980
申请日：2014-10-29
Applicant: NANOMETRICS INCORPORATED
Inventor： BUCZKOWSKI, Andrzej
CPC classification number: G01N21/6489 , G01B11/0625 , G01N21/47 , G01N21/55 , G01N21/6456 , G01N21/88 , G01N21/9501 , G01N2021/4735 , G01N2021/646 , G01N2021/8822 , G01N2201/06113 , G01N2201/1042 , G01N2201/1053 , H04N3/155
Abstract: An optical metrology device capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample is disclosed. The metrology device includes a first light source (110) that produces a first illumination line (122) on the sample (101). A scanning system (116) may be used to scan an illumination spot across the sample to form the illumination line. A detector (130) spectrally images the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source (140) may be used to produce a second illumination line (142) on the sample, where the detector spectrally images specular reflection of the broadband illumination along the second illumination line. The detector may also image scattered light from the first illumination line. The illumination lines may be scanned across the sample so that all positions on the sample may be measured.
Abstract translation: 公开了一种能够检测光致发光光，宽带光的镜面反射和穿过样品宽度的线的散射光的任何组合的光学测量装置。 测量装置包括在样品（101）上产生第一照明线（122）的第一光源（110）。 扫描系统（116）可用于扫描样品上的照明点以形成照明线。 检测器（130）对沿着照明线发射的光致发光进行光谱成像。 另外，宽带照明源（140）可以用于在样本上产生第二照明线（142），其中检测器对第二照明线的宽带照明进行光谱反射。 检测器还可以对来自第一照明线的散射光进行成像。 可以在样品上扫描照明线，使得可以测量样品上的所有位置。
-
Patent Agency Ranking26.发明申请
公开(公告)号：WO2007070277A3
公开(公告)日：2009-04-23
申请号：PCT/US2006046286
申请日：2006-12-04
Applicant: BIO RAD LABORATORIES , CHU DANIEL Y
Inventor： CHU DANIEL Y
CPC classification number: G01N21/253 , G01N2201/0446 , G01N2201/1042
Abstract: Scanning of a microarray is performed through a mask that exposes a plurality, but not all, of the sites of the microarray, and either the mask is movable relative to the microarray or the microarray is movable relative to the mask, or both. The mask is useful as a means of restricting the illumination of sites on the microarray to those that can be illuminated while the scan head is traveling at a steady, target velocity, blocking the passage of light between the scan head and the microarray at those points in the scan head trajectory where the scan head is either accelerating or decelerating. The mask is also useful for reducing background noise in the microarray image by preventing light spillage to sites adjacent to those being scanned.
Abstract translation: 微阵列的扫描通过暴露微阵列的多个但不是全部的掩模进行，并且掩模可以相对于微阵列移动，或者微阵列相对于掩模或两者均可移动。 该掩模可用作将扫描头以稳定的目标速度行进的情况下将微阵列上的部位的照明限制于可被照亮的装置，阻止在那些点处扫描头和微阵列之间的光通过 在扫描头轨迹中扫描头正在加速或减速。 该掩模也可用于通过防止光泄漏到与扫描的那些相邻的位置来减少微阵列图像中的背景噪声。
-
公开(公告)号：US20240201085A1
公开(公告)日：2024-06-20
申请号：US18554145
申请日：2022-03-15
Applicant: Ushio Denki Kabushiki Kaisha
Inventor： Toshikazu NAGASHIMA
CPC classification number: G01N21/49 , G01N21/255 , G01N21/84 , G01N2021/845 , G01N2201/0636 , G01N2201/0638 , G01N2201/0697 , G01N2201/1042
Abstract: A conveyance device supports and conveys an object. The conveyance device has a support portion in which an opening narrower than the object is provided at a position where the object is supported. A lighting device irradiates a first surface of the object with measurement light having a wavelength changing over time through the opening of the support portion. A light receiving device detects object light that is diffusely transmitted light emitted from a second surface of the object.
-
公开(公告)号：US20170241909A1
公开(公告)日：2017-08-24
申请号：US15429172
申请日：2017-02-10
Applicant: FUJIFILM Corporation
Inventor： Yasutake TANAKA
IPC: G01N21/64
CPC classification number: G01N21/6402 , G01N21/55 , G01N21/6456 , G01N27/44721 , G01N2021/6419 , G01N2201/1042
Abstract: A subject-to-be-examined support unit that supports a subject to be examined, a light source unit that outputs light entering the subject-to-be-examined support unit from a side opposite to a side by which a sample is supported, a fluorescent plate that is illuminated with the light that has been output from the light source unit and passed through the subject-to-be-examined support unit and the sample, and emits fluorescence, a photomultiplier that detects fluorescence that has been emitted from the fluorescent plate and passed through the subject-to-be-examined support unit and the sample, and a plate support unit that supports the fluorescent plate are provided. The plate support unit is structured in such a manner that a distance between the subject-to-be-examined support unit and the fluorescent plate is changeable by moving the fluorescent plate in a direction closer to the subject-to-be-examined support unit and in a direction away therefrom.
-
公开(公告)号：US20170003166A1
公开(公告)日：2017-01-05
申请号：US14788561
申请日：2015-06-30
Applicant: Agilent Technologies, Inc.
Inventor： Andrew Ghetler , Adam Kleczewski , Richard P. Tella
CPC classification number: G01J3/0297 , G01J3/10 , G01J3/108 , G01J3/2823 , G01J3/42 , G01N21/274 , G01N21/276 , G01N21/3563 , G01N21/4785 , G01N21/55 , G01N2201/101 , G01N2201/1042 , G01N2201/127
Abstract: A method and apparatus for obtaining reference samples during the generation of a mid-infrared (MW) image without requiring that the sample being imaged be removed is disclosed. A tunable MIR laser generates a light beam that is focused onto a specimen on a specimen stage that moves the specimen in a first direction. An optical assembly includes a scanning assembly having a focusing lens and a mirror that moves in a second direction, different from the first direction, relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the specimen stage. A light detector measures an intensity of light leaving the point on the specimen. A controller forms an image from the measured intensity. A reference stage is positioned such that the mirror moves over the reference stage in response to a command so that the controller can also make a reference measurement.
Abstract translation: 公开了在生成中红外（MW）图像期间获得参考样本而不需要去除被成像的样品的方法和装置。 可调谐的MIR激光产生聚焦在样品台上的试样上的光束，该试样台沿第一方向移动试样。 光学组件包括具有聚焦透镜和反射镜的扫描组件，所述聚焦透镜和反射镜相对于所述平台在与第一方向不同的第二方向上移动，使得聚焦透镜在聚焦透镜和样品台之间保持固定的距离。 光检测器测量离开样品点的光的强度。 控制器根据测量的强度形成图像。 定位参考台，使得反射镜响应于命令而在参考平台上移动，使得控制器也可进行参考测量。
-
公开(公告)号：US20130063724A1
公开(公告)日：2013-03-14
申请号：US13613141
申请日：2012-09-13
Applicant: Cameron John Tovey
Inventor： Cameron John Tovey
IPC: G01B11/00
CPC classification number: G01N21/253 , G01N21/774 , G01N2021/7773 , G01N2021/7793 , G01N2021/7796 , G01N2201/10 , G01N2201/1042 , G01N2201/105
Abstract: Motion control system and method for biosensor scanning that include inputting to a multi-axis motion controller move commands associated with the scan path as defined by multiple axes. The multiple axes including an x-baseline coordinate x0, a y-baseline coordinate y0, an x-direction oscillation amplitude x1, a y-direction oscillation amplitude y1, an oscillation frequency f and a phase φ. The multi-axis motion controller outputs digital commanded positions for each of the multiple axes. A post-processor receives the commanded positions and generates parameterized commanded positions x and y that each include a baseline motion component and an oscillating motion component. The parameterized commanded positions cause the scanning optical system to deflect the light beam to scan the beam spot over the scan path to scan the biosensor.
Abstract translation: 用于生物传感器扫描的运动控制系统和方法包括向多轴运动控制器输入移动与由多个轴定义的扫描路径相关联的命令。 多个轴包括x基线坐标x0，y基线坐标y0，x方向振荡振幅x1，y方向振荡振幅y1，振荡频率f和相位＆phgr。 多轴运动控制器为每个多轴输出数字指令位置。 后处理器接收命令位置并产生每个包括基线运动分量和振荡运动分量的参数化指令位置x和y。 参数化的命令位置使得扫描光学系统偏转光束以扫描扫描路径上的束斑以扫描生物传感器。
-
-
-
-
-
-
-
-
-
Search Results
81
records
(took 0.035 seconds)
