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公开(公告)号：US07514382B2
公开(公告)日：2009-04-07
申请号：US11398669
申请日：2006-04-06
Applicant: Yoshiaki Ikuta , Noriyuki Agata
Inventor： Yoshiaki Ikuta , Noriyuki Agata
CPC classification number: C03C3/06 , C03B19/1453 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2201/23 , C03B2207/36 , Y02P40/57
Abstract: A synthetic quartz glass for an optical member which is free from compaction and rarefaction is obtained. A synthetic quartz glass for an optical member to be used for an optical device employing a light having a wavelength of at most 400 nm and at least 170 nm as a light source, which contains substantially no oxygen excess defects, dissolved oxygen molecules nor reduction type defects, which has a chlorine concentration of at most 50 ppm and a OH group concentration of at most 100 ppm, and which contains oxygen deficient defects within a concentration range of at most 5×1014 defects/cm3 and at least 1×1013 defects/cm3. The fluorine concentration is preferably at most 100 ppm.
Abstract translation: 得到不含压实和稀释的用于光学构件的合成石英玻璃。 用于光学元件的合成石英玻璃，其用于使用波长最多为400nm且至少170nm的光作为光源的光学元件，其基本上不含氧过剩缺陷，溶解氧分子或还原型 其浓度最多为50ppm，OH基浓度为100ppm以下，含有缺氧缺陷量为5×1014个/ cm 3以下且至少1×10 13个缺陷/ cm 3以下的缺陷缺陷。 氟浓度优选为100ppm以下。
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公开(公告)号：US07506521B2
公开(公告)日：2009-03-24
申请号：US11148504
申请日：2005-06-08
Applicant: Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
Inventor： Dana Craig Bookbinder , Richard Michael Fiacco , Kenneth Edward Hrdina , Lisa Anne Moore , Susan Lee Schiefelbein
CPC classification number: C03C3/06 , C03B19/1453 , C03B19/1469 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2203/40 , C03C2203/54 , G03F7/70958
Abstract: Disclosed are high purity synthetic silica material having an internal transmission at 193 nm of at least 99.65%/cm and method of preparing such material. The material is also featured by a high compositional homogeneity in a plane transverse to the intended optical axis. The soot-to-glass process for making the material includes a step of consolidating the soot preform in the presence of H2O and/or O2.
Abstract translation: 公开了具有193nm以上的内透射率为至少99.65％/ cm 3的高纯度合成二氧化硅材料及其制备方法。 该材料的特征还在于横向于预期光轴的平面中具有高的组成均匀性。 用于制造该材料的烟灰 - 玻璃工艺包括在H 2 O和/或O 2存在下固化烟灰预制件的步骤。
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公开(公告)号：US20090053427A1
公开(公告)日：2009-02-26
申请号：US11885745
申请日：2006-02-15
Applicant: Monika Oswald , Jurgen Meyer , Klaus Deller
Inventor： Monika Oswald , Jurgen Meyer , Klaus Deller
CPC classification number: C03B37/01291 , C03B19/01 , C03B19/102 , C03B19/106 , C03B2201/07 , C03B2201/12
Abstract: Glass is produced by depositing presintering composition on a preform set into move in front of a plasma torch which moves back and forth substantially parallel to a longitudinal direction of the preform, a first feed duct feeds the plasma with grains of the presintering composition while optionally a second feed duct feeds the plasma with a fluorine or chlorine compound, preferably a fluorine compound, mixed with a carrier gas, whereby the presintering composition consists of granules of metal oxides or metalloid oxides of a pyrogenic silicon dioxide powder with a BET surface area of 30 to 90 m2/g, a DBP index of 80 or less, a mean aggregate area of less than 25000 nm2 and a mean aggregate circumference of less than 1000 nm, wherein at least 70% of the aggregates have a circumference of less than 1300 nm or a high-purity pyrogenically prepared silicon dioxide having metal contents of less than 0.2 μg/g, which is prepared by reacting a silicon tetrachloride having a metal content of less than 30 ppb by means of flame hydrolysis.
Abstract translation: 玻璃是通过将预烧结组合物沉积在等离子体焰炬之前移动的预成型体上制造的，所述等离子体焰炬基本上平行于预成型件的纵向方向前后移动，第一进料管将预烧结组合物的颗粒进料到等离子体， 第二进料管将等离子体与载体气体混合的氟或氯化合物，优选氟化合物进料，其中预烧结组合物由BET表面积为30的热解二氧化硅粉末的金属氧化物或准金属氧化物颗粒组成 至90m 2 / g，DBP指数为80以下，平均聚集面积小于25000nm 2，平均聚集体周长小于1000nm，其中至少70％的聚集体具有小于1300nm的圆周 或金属含量小于0.2mug / g的高纯度热解法制备的二氧化硅，其通过使金属含量为1的四氯化硅 通过火焰水解30埃以上。
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公开(公告)号：US07469559B2
公开(公告)日：2008-12-30
申请号：US11004027
申请日：2004-12-02
Applicant: Laura J Ball , Bruno P M Baney , Dana C Bookbinder , Keith L House , Rostislav R Khrapko , Susan L Schiefelbein , Lisa A Moore
Inventor： Laura J Ball , Bruno P M Baney , Dana C Bookbinder , Keith L House , Rostislav R Khrapko , Susan L Schiefelbein , Lisa A Moore
IPC: C03C13/04
CPC classification number: C03C3/06 , C03B37/01211 , C03B37/01228 , C03B37/01426 , C03B37/01807 , C03B37/01861 , C03B37/01892 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/20 , C03B2201/28 , C03B2201/31 , C03B2201/32 , C03B2201/50 , C03B2201/54 , C03B2203/26 , C03B2207/30 , C03B2207/90 , C03C25/602 , C03C25/607 , C03C25/68 , C03C2201/11 , C03C2201/23 , C03C2201/50 , C03C2203/50 , G02B6/02
Abstract: A method of forming an alkali metal oxide-doped optical fiber by diffusing an alkali metal into a surface of a glass article is disclosed. The silica glass article may be in the form of a tube or a rod, or a collection of tubes or rods. The silica glass article containing the alkali metal, and impurities that may have been unintentionally diffused into the glass article, is etched to a depth sufficient to remove the impurities. The silica glass article may be further processed to form a complete optical fiber preform. The preform, when drawn into an optical fiber, exhibits a low attenuation.
Abstract translation: 公开了一种通过将碱金属扩散到玻璃制品的表面中形成掺杂碱金属氧化物的光纤的方法。 石英玻璃制品可以是管或棒的形式，或者是管或棒的集合。 含有碱金属的二氧化硅玻璃制品和可能已经无意地扩散到玻璃制品中的杂质被蚀刻到足以除去杂质的深度。 石英玻璃制品可以进一步加工以形成完整的光纤预型件。 当预成型件被拉入光纤时，表现出低的衰减。
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公开(公告)号：US20080131794A1
公开(公告)日：2008-06-05
申请号：US11981434
申请日：2007-10-31
Applicant: Dana Craig Bookbinder , Michael Lucien Genier , Lisa Anne Moore
Inventor： Dana Craig Bookbinder , Michael Lucien Genier , Lisa Anne Moore
CPC classification number: G02B6/102 , C03B2201/07 , C03B2201/12 , C03B2201/21 , C03B2201/22 , C03C3/06 , C03C13/047 , C03C2201/11 , C03C2201/12 , C03C2201/21 , C03C2201/22 , C03C2201/23 , C03C2201/50 , G03F1/60 , G03F7/70958 , H01J61/302
Abstract: An optical member comprising OD-doped silica glass, optionally doped with fluorine. The optical member is particularly advantageous for use in connection with radiation having a wavelength shorter than about 248 nm. In certain embodiments the optical member can be advantageously used for wavelength as short as about 157 nm.
Abstract translation: 一种光学部件，包括掺杂有掺杂二氧化硅的石英玻璃，任选掺杂氟。 光学构件特别有利于与波长短于约248nm的辐射结合使用。 在某些实施方案中，光学构件可有利地用于短至约157nm的波长。
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Patent Agency Ranking
316.发明申请METHOD FOR MANUFACTURING A LENS OF SYNTHETIC QUARTZ GLASS WITH INCREASED H2 CONTENT 有权具有增加的H2含量的合成石英玻璃镜片的制造方法公开(公告)号：US20070266733A1
公开(公告)日：2007-11-22
申请号：US11748151
申请日：2007-05-14
Applicant: Eric Eva
Inventor： Eric Eva
CPC classification number: C03C3/06 , C03B23/0013 , C03B23/0026 , C03B32/00 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C2201/21 , C03C2201/23 , C03C2203/54
Abstract: The invention relates to a method for the manufacture of a lens of synthetic quartz glass with increased H2 content, in particular for a lens for an optical system with an operating wavelength of less than 250 nm, in particular less than 200 nm, with the steps:providing a precursor product of synthetic quartz glass, in particular with a first H2 content of less than 2·1015 molecules/cm3, with a circumferential border surface and two base surfaces lying on opposite sides, wherein at least one partial surface of at least one of said base surfaces has a curvature, andtreating the precursor product in an H2-containing atmosphere in order to produce a precursor product of synthetic quartz glass with a second H2 content that is increased in relation to the first H2 content, in particular with a second H2 content of more than 1016 molecules/cm3, and measuring at least one optical property of said precursor product with said second H2 content.
Abstract translation: 本发明涉及一种用于制造具有增加的H 2 O 3含量的合成石英玻璃透镜的方法，特别是用于具有小于250nm的工作波长的光学系统的透镜，特别是 小于200nm，步骤：提供合成石英玻璃的前体产物，特别是具有小于2.10 15分子/ cm 2的第一H 2 O 3含量 其具有周向边界表面和位于相对侧上的两个基面，其中至少一个所述基底表面的至少一个部分表面具有曲率，并且将前体产物处理成H 2 O 3， 2含量的气氛，以便产生合成石英玻璃的前体产物，其具有相对于第一H 2 N 2含量增加的第二H 2 N 2含量 特别是具有超过10个/ 16个分子/ cm 3的第二H 2 N 2含量，并且测量至少一种光学式 所述前体产物具有所述第二H 2 N 2含量的操作性。
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317.发明申请公开(公告)号：US20060218971A1
公开(公告)日：2006-10-05
申请号：US11350286
申请日：2006-02-09
Applicant: Rolf Martin , Gordon von der Goenna , Ute Natura
Inventor： Rolf Martin , Gordon von der Goenna , Ute Natura
CPC classification number: C03C3/06 , C03B19/1453 , C03B19/1469 , C03B2201/07 , C03B2201/20 , C03B2201/21 , C03C2201/11 , C03C2201/21 , C03C2201/23 , G03F1/60 , Y02P40/57
Abstract: The invention relates to a synthetic quartz glass that can be produced by direct precipitation by means of flame hydrolysis of a silicon precursor, especially a chlorine-containing silicon precursor, which quartz glass when irradiated with laser pulses at a wavelength of 193 nm at an energy density (H) of up to H=1.5 mJ/cm2 and at a repetition frequency of the laser pulses of up to R=4 kHz is characterized by the following properties: in the range of energy densities of up to 1.5 mJ/cm2, the equilibrium absorption of quartz glass rises sublinearly with the energy density for all repetition frequencies of the laser pulses; the dependency of the equilibrium absorption on the repetition frequency of the laser pulses is sublinear; and the relationship of equilibrium absorption and energy density (H) can be described as a function of H1.7; the H2 content being at least 0.2·1018 molecules/cm3. Other aspects of the invention relate to a process for producing such a synthetic quartz glass.
Abstract translation: 本发明涉及一种合成石英玻璃，其可以通过使用硅前体，特别是含氯的硅前体进行火焰水解直接沉淀来制备，该石英玻璃在能量为193nm的激光脉冲下照射时， 高达H = 1.5mJ / cm 2的密度（H）和高达R = 4kHz的激光脉冲的重复频率的特征在于以下特性：在能量密度范围内 高达1.5mJ / cm 2，石英玻璃的平衡吸收与激光脉冲的所有重复频率的能量密度成线性上升; 平衡吸收对激光脉冲重复频率的依赖性是亚线性的; 平衡吸收和能量密度（H）的关系可以描述为H <1.7的函数; H 2含量为至少0.2×10 18分子/ cm 3。 本发明的其它方面涉及一种生产这种合成石英玻璃的方法。
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公开(公告)号：US20060183623A1
公开(公告)日：2006-08-17
申请号：US11398669
申请日：2006-04-06
Applicant: Yoshiaki Ikuta , Noriyuki Agata
Inventor： Yoshiaki Ikuta , Noriyuki Agata
IPC: C03C3/06 , C03B37/07 , C03B37/018
CPC classification number: C03C3/06 , C03B19/1453 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/12 , C03B2201/21 , C03B2201/23 , C03B2207/36 , Y02P40/57
Abstract: A synthetic quartz glass for an optical member which is free from compaction and rarefaction is obtained. A synthetic quartz glass for an optical member to be used for an optical device employing a light having a wavelength of at most 400 nm and at least 170 nm as a light source, which contains substantially no oxygen excess defects, dissolved oxygen molecules nor reduction type defects, which has a chlorine concentration of at most 50 ppm and a OH group concentration of at most 100 ppm, and which contains oxygen deficient defects within a concentration range of at most 5×1014 defects/cm3 and at least 1×1013 defects/cm3. The fluorine concentration is preferably at most 100 ppm.
Abstract translation: 得到不含压实和稀释的用于光学构件的合成石英玻璃。 用于光学元件的合成石英玻璃，其用于使用波长最多为400nm且至少170nm的光作为光源的光学元件，其基本上不含氧过剩缺陷，溶解氧分子或还原型 缺陷，其氯浓度最多为50ppm，OH基浓度为至多100ppm，并且其含有缺氧缺陷的浓度范围至多为5×10 14个/ cm 2以下 > 3％和至少1×10 3个缺陷/ cm 3。 氟浓度优选为100ppm以下。
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公开(公告)号：US20060137398A1
公开(公告)日：2006-06-29
申请号：US11148764
申请日：2005-06-08
Applicant: Daniel Bleaking , Dana Bookbinder , Richard Fiacco , Kenneth Hrdina , Pushkar Tandon , John Maxon , Kimberly Wilbert
Inventor： Daniel Bleaking , Dana Bookbinder , Richard Fiacco , Kenneth Hrdina , Pushkar Tandon , John Maxon , Kimberly Wilbert
CPC classification number: C03C3/06 , C03B19/1453 , C03B2201/03 , C03B2201/04 , C03B2201/07 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03C2201/12 , C03C2201/21 , C03C2201/23
Abstract: Disclosed are high purity synthetic silica glass material having a high OH concentration homogeneity in a plane perpendicular to the optical axis, and process of making the same. The glass has high refractive index homogeneity. The glass can have high internal transmission of at least 99.65%/cm at 193 nm. The process does not require a post-sintering homogenization step. The controlling factors for high compositional homogeneity, thus high refractive index homogeneity, include high initial local soot density uniformity in the soot preform and slow sintering, notably isothermal treatment during consolidation.
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公开(公告)号：US07064093B2
公开(公告)日：2006-06-20
申请号：US10310276
申请日：2002-12-05
Applicant: Bodo Kühn , Bruno Uebbing
Inventor： Bodo Kühn , Bruno Uebbing
IPC: C03C3/06
CPC classification number: C03B19/1453 , C03B19/1415 , C03B2201/07 , C03B2201/20 , C03B2201/21 , C03B2201/23 , C03C3/06 , C03C2201/11 , C03C2201/21 , C03C2201/23 , C03C2203/44 , C03C2203/52
Abstract: The present invention concerns a quartz glass blank for an optical component for the transmission of ultraviolet radiation of a wave length of 250 nm and under, as well as its utilization in microlithography in connection with ultraviolet radiation of a wavelength of 250 nm and under. Such quartz glass blank is to have low induced absorption, while being optimized in respect of compaction and de-compaction. The quartz glass blank according to the invention has the following properties: A glass structure essentially free of oxygen defect sites; a H2 content in the range of 3×1017 molecules/cm3 to 2.0×1018 molecules/cm3; an OH content in the range of 500 weight ppm to 1000 weight ppm; a SiH group content of less than 2×1017 molecules/cm3; a chlorine content in the range of 60 weight ppm to 120 weight ppm; a refractive index inhomogeneity, Δn, of less than 2 ppm; and a stress birefringence of less than 2 nm/cm. For utilization according to the invention, the quartz glass blank—in respect of its minimum and maximum hydrogen content, CH2min and CH2max, as well as its OH content COH—is in accordance with the scaling laws (2), (3) and (4), and P standing for the pulse number and ε for the energy density: CH2min[molecules/cm3]=1.0×108ε2P , (2) CH2max[molecules/cm3]=2×1019ε, (3) COH[weight ppm]=1700ε[mJ/cm2]0.4±50 . (4)
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