公开(公告)号：US06242136B1

公开(公告)日：2001-06-05

申请号：US09397573

申请日：1999-09-16

Applicant: Lisa A. Moore ,  Charlene Smith

Inventor： Lisa A. Moore ,  Charlene Smith

IPC: G03F900

CPC classification number: C03B19/1453 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  G03F1/60 ,  Y02P40/57

Abstract: High purity silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The inventive silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a “dry,” silicon oxyfluoride glass which exhibits very high transmittance in the vacuum ultraviolet (VUV) wavelength region while maintaining the excellent thermal and physical properties generally associated with high purity fused silica. In addition to containing fluorine and having little or no OH content, the inventive silicon oxyfluoride glass suitable for use as a photomask substrate at 157 nm is also characterized by having less than 1×1017 molecules/cm3 of molecular hydrogen and low chlorine levels.

Abstract translation: 公开了适用于在低于190nm的VUV波长区域中用于光刻应用的光掩模基板的高纯度氟氧化硅玻璃。 本发明的氟氧化硅玻璃在157nm波长下是透射的，使其特别适用于157nm波长区域的光掩模衬底。 本发明的光掩模基材是“真空”的氟氧化硅玻璃，其在真空紫外（VUV）波长区域中表现出非常高的透射率，同时保持通常与高纯度熔融石英相关的优异的热和物理性能。 除了含氟并且具有很少或不含OH含量之外，本发明的适合用作157nm的光掩模衬底的氟氧化硅玻璃的特征还在于具有小于1×10 17分子/ cm 3的分子氢和低氯水平。

公开(公告)号：US6105396A

公开(公告)日：2000-08-22

申请号：US115783

申请日：1998-07-14

Applicant: Paul Francis Glodis ,  Charles Francis Gridley ,  Donald Paul Jablonowski ,  David Kalish ,  Kenneth Lee Walker

Inventor： Paul Francis Glodis ,  Charles Francis Gridley ,  Donald Paul Jablonowski ,  David Kalish ,  Kenneth Lee Walker

IPC: C03C3/04 ,  C03B37/012 ,  C03B37/018 ,  C03B37/027

CPC classification number: C03B37/01211 ,  C03B37/01869 ,  C03B37/01884 ,  C03B37/01892 ,  C03B2201/02 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2203/24

Abstract: A large optical preform 303 is made by a modified chemical vapor deposition (MCVD) process by depositing successive layers of core and cladding materials onto the inside surface of a rotating glass tube 33 having a hydroxyl ion (OH.sup.-) level that is less than 0.5 parts per million (ppm) by weight. The tube is then collapsed inwardly to form a core rod 301 in which the deposited core material 31 has a diameter that is greater than about 5 millimeters and the deposited cladding material 32 has an outside diameter that is less than about 15 millimeters. A machine-vision system 140, 150, 160 monitors and controls the diameter of the glass tube by regulating the pressure within the tube. Moreover, the machine-vision system monitors and controls the straightness of the tube by varying its rotational speed according to angular position. After the core rod 301 is formed, it is plasma etched to remove contaminants, and then overclad with two glass jackets 34, 35 having a hydroxyl ion (OH.sup.-) level that is less than 1.0 ppm by weight to create a large preform 303 from which about 400 kilometers of singlemode optical fiber can be drawn per meter of length.

Abstract translation: 通过改进的化学气相沉积（MCVD）工艺，通过将核心和包层材料的连续层沉积到具有小于0.5的羟基离子（OH-）水平的旋转玻璃管33的内表面上来制造大型光学预成型件303 百万分之几（ppm）（重量）。 管然后向内折叠以形成芯棒301，其中沉积的芯材料31具有大于约5毫米的直径，并且沉积的包层材料32具有小于约15毫米的外径。 机器视觉系统140,150,160通过调节管内的压力来监视和控制玻璃管的直径。 此外，机器视觉系统通过根据角度位置改变其转速来监测和控制管的平直度。 在形成芯棒301之后，将其等离子体蚀刻以除去污染物，然后用两个小于1.0重量ppm的羟基离子（OH-）水平的两个玻璃外套34,35包覆，以从 每米长度可以绘制约400公里的单模光纤。

公开(公告)号：US5203899A

公开(公告)日：1993-04-20

申请号：US832330

申请日：1992-02-07

Applicant: Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

Inventor： Michihisa Kyoto ,  Yoichi Ishiguro ,  Akira Urano ,  Hideo Kakuzen

IPC: C03B37/014

CPC classification number: C03B37/0146 ,  C03B37/01446 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16 ,  Y10S65/90

Abstract: A glass preform which is used for fabricating an optical fiber, has substantially no bubbles therein and contains sufficient amount of fluorine is produced by a method comprising steps of: forming a porous glass soot body from a glass-forming raw material, removing trapped gas and water from pores of the soot body by heating the soot body under pressure lower than several ten Torr. at a temperature at which the soot body is not vitrified, filling the pores of the soot body with a gas containing SiF.sub.4 and uniformly adding fluorine to the soot body, vitrifying the fluorine-added soot body into a transparent glass body, boring said transparent glass body to form a bore therein, and inserting a highly pure quartz rod in said bore to form a glass preform, or a method forming a glass soot composite body having a core portion consisting of a solid glass and a peripheral portion consisting of a porous glass mass, removing trapped gas and water from pores of the soot composite body by heating the soot composite body under a pressure lower than several ten Torr. at a temperature at which the porous glass mass is not vitrified, filling the pores in the porous glass mass of the soot composite body with a gas containing SiF.sub.4 and uniformly adding fluorine to the soot glass mass, and vitrifying the fluorine-added soot glass mass into a transparent glass mass to form a glass preform.

Abstract translation: 用于制造光纤的玻璃预成型体在其中基本上没有气泡并且通过包括以下步骤的方法制造含有足够量的氟：从玻璃形成原料形成多孔玻璃烟炱体，除去被捕获的气体和 通过在低于几十乇的压力下加热烟灰体，从烟灰体的孔中吸收水分。 在烟灰体未被玻璃化的温度下，用含有SiF 4的气体填充烟灰体的孔，并将氟均匀地添加到烟炱体中，将氟化烟炱体玻璃化成透明玻璃体，使透明玻璃镗孔 在其中形成孔，并且将高纯石英棒插入所述孔中以形成玻璃预制件，或者形成玻璃烟灰复合体的方法，所述玻璃烟灰复合体具有由实心玻璃构成的芯部和由多孔玻璃构成的周边部 通过在低于几十乇的压力下加热烟灰复合体，从烟灰复合体的孔中除去捕获的气体和水。 在多孔玻璃体未被玻璃化的温度下，用含有SiF 4的气体填充烟灰复合体的多孔玻璃块中的孔，并向烟灰玻璃块均匀地加入氟，并且将添加氟的烟灰玻璃块 变成透明玻璃块以形成玻璃预制件。

公开(公告)号：US5106401A

公开(公告)日：1992-04-21

申请号：US544942

申请日：1990-06-28

Applicant: Shinji Ishikawa ,  Yuichi Ohga ,  Ichiro Tsuchiya ,  Hiroo Kanamori ,  Hiroshi Yokota ,  Michihisa Kyoto

Inventor： Shinji Ishikawa ,  Yuichi Ohga ,  Ichiro Tsuchiya ,  Hiroo Kanamori ,  Hiroshi Yokota ,  Michihisa Kyoto

IPC: G02B6/00 ,  C03B37/014

CPC classification number: C03B37/01446 ,  C03B37/0146 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  Y10S65/16 ,  Y10S65/90

Abstract: The present invention providesa process for the dehydrating and purifying treatment by heating a porous glass preform for an optical fiber by passing the porous glass preform through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere containing an inert gas and a silicon halogenide gas;a process for the fluorine-doping treatment by heating a porous glass preform for an optical fiber by passing a porous glass preform through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere containing a fluorine compound gas and an inert gas; anda process for the vitrifying treatment by heating a porous glass preform for an opticla fiber by passing the preform, which has been previously dehydrated and purified, through a muffle tube having a SiC layer at least on its inner surface at a high temperature under an atmosphere gas.

公开(公告)号：US20240069272A1

公开(公告)日：2024-02-29

申请号：US18261391

申请日：2021-12-09

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Christian NEUMANN ,  Manuel ROSENBERGER ,  Kay SCHUSTER ,  Jaqueline PLASS

IPC: G02B6/02 ,  C03B37/012 ,  C03B37/014 ,  C03C13/04

CPC classification number: G02B6/02338 ,  C03B37/0122 ,  C03B37/0146 ,  C03C13/046 ,  G02B6/02328 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2203/16 ,  C03B2203/42 ,  C03C2213/04

Abstract: The invention relates to microstructured optical fibers that are drawn through hollow channels and have a core region, which extends along a fiber longitudinal axis, and a jacket region surrounding the core region. The aim of the invention is to reduce a damping increase due to corrosion and to reduce the emission of chlorine on the basis of the microstructured optical fibers. This is achieved in that at least some of the hollow channels are delimited by a wall material made of synthetic quartz glass which has a chlorine concentration of less than 300 wt. ppm and oxygen deficiency centers in a concentration of at least 2×1015 cm-3.

公开(公告)号：US09878933B2

公开(公告)日：2018-01-30

申请号：US14804673

申请日：2015-07-21

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Malte Schwerin ,  Martin Trommer ,  Steffen Zwarg

IPC: C03C3/06 ,  C03B19/06 ,  C03B37/014 ,  C03B19/14 ,  C03C13/04 ,  C03B23/045 ,  C03B23/09

CPC classification number: C03B19/066 ,  C03B19/1453 ,  C03B19/1461 ,  C03B23/045 ,  C03B23/095 ,  C03B23/099 ,  C03B37/01446 ,  C03B37/01453 ,  C03B37/0146 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/40 ,  C03B2201/42 ,  C03C3/06 ,  C03C13/045 ,  C03C2201/12 ,  C03C2201/32 ,  C03C2201/34 ,  C03C2201/36 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2203/46

Abstract: One aspect relates to a method for the manufacture of doped quartz glass. Moreover, one aspect relates to quartz glass obtainable according to the method including providing a soot body, treating the soot body with a gas, heating an intermediate product and vitrifying an intermediate product.

公开(公告)号：US09593034B2

公开(公告)日：2017-03-14

申请号：US14916608

申请日：2014-09-11

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Stefan Ochs

IPC: C03B19/06 ,  C03C3/06 ,  C03B37/014 ,  C03B25/02

CPC classification number: C03B19/06 ,  C03B25/02 ,  C03B37/01413 ,  C03B37/01446 ,  C03B2201/075 ,  C03B2201/40 ,  C03C3/06 ,  C03C2203/00

Abstract: A method for producing a blank of iron-doped silica glass with high silicic acid content for use as heat protection glass is provided. The method involves: (a) producing an iron-doped SiO2 soot body which contains iron in a first oxidation state Fe3+ by flame hydrolysis of a silicon-containing and an iron-containing starting substance, (b) drying the soot body to obtain a mean hydroxyl group content of less than 10 ppm by weight, and (c) vitrifying the soot body under a reducing atmosphere that is suitable for at least partially reducing the iron from the first oxidation state Fe3+ to a second, lower oxidation state Fe2+. A blank is obtained having an iron content between 0.1 and 1% by weight which exhibits an internal transmission of at most 40% in the infrared wavelength range and an internal transmission of at least 85% in the visible spectral range.

Abstract translation: 本发明提供一种用于制造具有高硅酸含量的掺铁石英玻璃的坯料作为保温玻璃的方法。 该方法包括：（a）通过含硅和含铁起始物质的火焰水解生产含有第一氧化态Fe 3+的铁的掺铁SiO 2烟灰体，（b）干燥烟灰体以获得 平均羟基含量小于10重量ppm，和（c）在适于将铁从第一氧化态Fe 3+至少部分还原为第二次氧化态Fe2 +的还原气氛下使烟灰体玻璃化。 获得的铁含量为0.1至1重量％的空白，其在红外波长范围内具有至多40％的内部透光率，在可见光谱范围内内透光率至少为85％。

公开(公告)号：US09586853B2

公开(公告)日：2017-03-07

申请号：US14734122

申请日：2015-06-09

Applicant: Corning Incorporated

Inventor： Amanda Lee Billings ,  Dana Craig Bookbinder ,  Robert Brett Desorcie ,  Liam Ruan de Paor ,  Pushkar Tandon ,  Li Yang

IPC: G02B6/02 ,  C03B37/014 ,  C03B37/012 ,  C03B37/027

CPC classification number: C03B37/01446 ,  C03B37/01211 ,  C03B37/01248 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/20 ,  C03B2203/23 ,  G02B6/02 ,  G02B6/021 ,  G02B6/03627 ,  G02B6/0365 ,  Y02P40/57

Abstract: A method for forming an optical fiber preform and fibers drawn from the preform. The method includes forming a soot cladding monolith, inserting a consolidated core cane into the internal cavity, and processing the resulting core-cladding assembly to form a preform. Processing may include exposing the core-cladding assembly to a drying agent and/or dopant precursor, and sintering the core-cladding assembly in the presence of a reducing agent to densify the soot cladding monolith onto the core cane to form a preform. The preform features low hydroxyl content and low sensitivity to hydrogen. Fibers drawn from the preform exhibit low attenuation losses from absorption by the broad band centered near 1380 nm.

Abstract translation: 一种用于形成光纤预制棒的方法和从所述预成型件拉出的纤维。 该方法包括形成烟灰包覆整料，将固结的芯棒插入内部空腔中，以及处理所得到的芯 - 包层组件以形成预制件。 处理可以包括将芯包层组件暴露于干燥剂和/或掺杂剂前体，以及在还原剂存在下烧结芯 - 包层组件以将烟炱包覆整料致密化到芯棒上以形成预制件。 该预制件具有低羟基含量和对氢的低敏感性。 从预制件中抽出的纤维，由1380nm附近的宽带吸收而产生的衰减损耗低。

公开(公告)号：US20160168010A1

公开(公告)日：2016-06-16

申请号：US14958024

申请日：2015-12-03

Applicant: Corning Incorporated

Inventor： Sezhian Annamalai ,  Carlos Alberto Duran ,  Kenneth Edward Hrdina

IPC: C03C3/06 ,  C03B25/02 ,  C03B19/14 ,  C03C3/112 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/14 ,  C03B2201/23 ,  C03B2201/32 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/112 ,  C03C4/00 ,  C03C2201/12 ,  C03C2201/14 ,  C03C2201/32 ,  C03C2201/40 ,  C03C2201/42 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2203/52

Abstract: A doped silica-titania glass article is provided that includes a glass article having a glass composition comprising (i) a silica-titania base glass, (ii) a fluorine dopant, and (iii) a second dopant. The fluorine dopant has a concentration of fluorine of up to 5 wt. % and the second dopant comprises one or more oxides selected from the group consisting of Al, Nb, Ta, B, Na, K, Mg, Ca and Li oxides at a total oxide concentration from 50 ppm to 6 wt. %. Further, the glass article has an expansivity slope of less than 0.5 ppb/K2 at 20° C. The second dopant can be optional. The composition of the glass article may also contain an OH concentration of less than 100 ppm.

Abstract translation: 提供掺杂二氧化硅 - 二氧化钛玻璃制品，其包括具有玻璃组合物的玻璃制品，所述玻璃组合物包含（i）二氧化硅 - 二氧化钛基底玻璃，（ii）氟掺杂剂和（iii）第二掺杂剂。 氟掺杂剂的氟浓度高达5wt。 ％，第二掺杂剂包含一种或多种选自Al，Nb，Ta，B，Na，K，Mg，Ca和Li氧化物的氧化物，其总氧化物浓度为50ppm至6wt。 ％。 此外，玻璃制品在20℃下具有小于0.5ppb / K 2的膨胀斜率。第二掺杂剂可以是任选的。 玻璃制品的组成也可以含有小于100ppm的OH浓度。

公开(公告)号：US09340444B2

公开(公告)日：2016-05-17

申请号：US14376929

申请日：2012-12-13

Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.

Inventor： Masaaki Hirano ,  Tetsuya Haruna ,  Yoshiaki Tamura

IPC: G02B6/00 ,  C03B37/018 ,  G02B6/02

CPC classification number: C03B37/01815 ,  C03B37/01807 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/50 ,  C03B2207/90 ,  G02B6/02

Abstract: A method includes (1) a thermal diffusion process for using an alkali metal salt raw material having an average particle size of 1 mm or less in diameter, supplying a vapor of the alkali metal salt produced by heating the alkali metal salt raw material together with a carrier gas to the inside of a silica-based glass pipe from one end side of the glass pipe, and heating the glass pipe using a heat source which relatively moves in a longitudinal direction of the glass pipe to cause an oxidation reaction of an alkali metal and thermally diffuse the alkali metal into an inner side of the glass pipe, (2) a collapsing process for collapsing the glass pipe after the thermal diffusion process to prepare a core rod; and (3) a cladding portion addition process for adding a cladding portion around the core rod prepared in the collapsing process.

Abstract translation: 一种方法包括：（1）使用平均粒径为1mm以下的碱金属盐原料的热扩散法，将碱金属盐原料加热生成的碱金属盐蒸气与 从玻璃管的一端侧向二氧化硅系玻璃管的内部输送载气，使用在玻璃管的长度方向相对移动的热源来加热玻璃管，引起碱的氧化反应 金属并将碱金属热扩散到玻璃管的内侧，（2）在热扩散过程之后使玻璃管塌缩的塌缩过程以制备芯棒; 和（3）包层部分添加工艺，用于在折叠过程中制备的芯棒周围添加包层部分。