OPTICAL BANDWIDTH METER FOR VERY NARROW BANDWIDTH LASER EMITTED LIGHT
    332.
    发明公开
    OPTICAL BANDWIDTH METER FOR VERY NARROW BANDWIDTH LASER EMITTED LIGHT 有权
    用于激光叶片光学带宽很窄的带宽发出的光

    公开(公告)号:EP1649244A4

    公开(公告)日:2009-08-26

    申请号:EP04777419

    申请日:2004-06-29

    Applicant: CYMER INC

    Inventor: RAFAC ROBERT J

    Abstract: A method and apparatus for measuring bandwidth of light emitted from a laser is disclosed which may comprise: a first and second wavelength sensitive optical bandwidth detectors providing, respectively, an output representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first and second bandwidth detectors, and an actual bandwidth calculation apparatus adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter or a second actual bandwidth parameter. The first actual bandwidth parameter may be a spectrum full width at some percent of the maximum ("FWXM"), and the second actual bandwidth parameter may be a portion containing some percentage of the energy ("EX"). The first and second bandwidth detectors may an etalon and the outputs may be representative of a fringe width of a fringe of an optical output of the respective etalon at FWXM. The precomputed calibration variables may be derived from respective three dimensional plots representing, respectively, detector outputs in relation to a calibrating input light with known values of the first and second actual bandwidth parameters, which may be FWXM and EX. The first/second three dimensional plot may provide a solution: (first/second output) = (a/d * (calibrating input light known value of FWXM)) + (b/e* (calibrating input light known value of EX) +c/f; and the actual bandwidth calculation apparatus may use the derived equation: (first actual bandwidth parameter) = ((b * (second output)) -(e * (first output)) + ce - bf) / (bd - ae), or the equation: (second actual bandwidth parameter) = ((a * (second output)) - (d * (first output)) + cd - af) / (ae - bd). FWXM may be FWHM and EX may be E95. The transfer function of the first optical bandwidth detector may be selected to be much more sensitive to FWXM than to EX and the transfer function of the second optical bandwidth detector may be selected to be much more sensitive to EX than to FWXM.

    Hochauflösendes Fourier-Transform-Spektrometer
    334.
    发明公开
    Hochauflösendes Fourier-Transform-Spektrometer 审中-公开
    Hochauflösendes傅里叶变换Spektrometer

    公开(公告)号:EP1519168A1

    公开(公告)日:2005-03-30

    申请号:EP03405695.2

    申请日:2003-09-24

    CPC classification number: G01J3/45

    Abstract: Das Fourier-Transform-Spektrometer, FTS, auf Basis eines Michelson-Spektrometers beinhaltet mindestens ein erstes Weglängenveränderungsmittel (A1) zur Veränderung optischer Weglängen des ersten Lichtweges (L1) gegenüber optischen Weglängen des zweiten Lichtweges (L2) um einen optischen Wegunterschied 2ε, eine Detektions-Einheit (D) zur Erzeugung mindestens zweier Teil-Interferogramme I x und I y , und eine AuswerteEinheit (8) zur Erzeugung eines Gesamt-Interferogramms I durch Kombination der mindestens zwei Teil-Interferogramme I x und I y und zur Bestimmung eines Spektrums mittels einer Fourier-Transformation des Gesamt-Interferogramms I auf. In mindestens einem der beiden Lichtwege (L1,L2) ist mindestens ein doppelbrechendes Element (5) mit zwei Achsen x,y der Doppelbrechung angeordnet, welche Achsen x,y zwei Polarisationsachsen x,y definieren, und wobei durch das mindestens eine doppelbrechende Element (5) ein optischer Wegunterschied 2δ zwischen x-polarisierten Lichtwellen (Lx) und y-polarisierten Lichtwellen (Ly) erzeugbar ist. Es sind eine Polarisationseinheit (P) und eine Detektions-Einheit (D) vorhanden, mittels der das Licht polarisationsabhängig detektierbar ist, wodurch die Teil-Interferogramme I x und I y erzeugbar sind. Das FTS hat eine hohe Auflösung und kann sehr kompakt ausgeführt werden.

    Abstract translation: 在光路(L1,L2)中,双折射元件(5)具有限定两个偏振轴(x,y)的两个正交折射轴(x,y)。 该元件在两个极化波(Lx,Ly)之间产生光程差2delta。 提供偏振单元(P)。 由复合光(L)产生x偏振光束(Lx)和y偏振光束(Ly)。 光束(Lx)由检测器(D)记录,其测量x偏振光的强度,产生作为路径差(2i)的函数的相应的部分干涉图(Ix)。 类似地产生另一束(Ly)的部分干涉图(Iy)。 对于相应的方法,包括独立权利要求。

    COMBINING INTERFERENCE FRINGE PATTERNS TO A MOIRE FRINGE PATTERN
    335.
    发明授权
    COMBINING INTERFERENCE FRINGE PATTERNS TO A MOIRE FRINGE PATTERN 有权
    干扰线像到图像莫尔组合

    公开(公告)号:EP1153263B1

    公开(公告)日:2004-12-08

    申请号:EP00901234.5

    申请日:2000-01-27

    CPC classification number: G01B11/161 G01B9/02032 G01B9/02087 G01J3/45

    Abstract: An interferometer (1) is arranged to form a first interference fringe pattern comprising at least ten interference fringes; recording an image of said first interference fringe pattern; perturbing an optical path in the interferometer (1) to form a second interference fringe pattern comprising at least ten interference fringes; and combining an image of said second interference fringe pattern with the recorded image of the first interference fringe pattern to produce a further image comprising a moiré fringe pattern arising from a difference or differences between the first and second interference fringe patterns. The combining step involves subtraction (4) of digital images. Different wavelengths and interferometers are used: Michelson, Mach-Zehnder, Fizeau, Twyman-Green. In this new approach, all the errors of a poor quality, misaligned system are accepted and then eliminated by the combination process, producing a moiré fringe pattern. The method enables very large aperture optical systems for traditional and engineering interferometers to be constructed from inexpensive and basic components.

    VORRICHTUNG ZUR ERFASSUNG ODER ERZEUGUNG OPTISCHER SIGNALE
    336.
    发明公开
    VORRICHTUNG ZUR ERFASSUNG ODER ERZEUGUNG OPTISCHER SIGNALE 审中-公开
    DEVICE FOR购建或者生产的光信号

    公开(公告)号:EP1181500A1

    公开(公告)日:2002-02-27

    申请号:EP00925185.1

    申请日:2000-04-07

    Inventor: WEITZEL, Thilo

    CPC classification number: G01J3/18 G01J3/021 G01J3/0256 G01J3/45

    Abstract: The invention relates to a device for detecting optical signals or for generating optical signals by the modulation of optical carriers. Said device comprises the following: elements for generating at least one reference light beam, whose frequency or phase has been shifted and/or modulated or whose timing has been shifted, in relation to the optical signal which is to be detected; elements which allow the optical signal which is to be detected and/or the reference light beam(s) to be aligned in such a way, that they can be used for interference; at least one detector with a demodulator which can detect an amplitude modulation.

    COMBINING INTERFERENCE FRINGE PATTERNS TO A MOIRE FRINGE PATTERN
    337.
    发明公开
    COMBINING INTERFERENCE FRINGE PATTERNS TO A MOIRE FRINGE PATTERN 有权
    干扰线像到图像莫尔组合

    公开(公告)号:EP1153263A1

    公开(公告)日:2001-11-14

    申请号:EP00901234.5

    申请日:2000-01-27

    CPC classification number: G01B11/161 G01B9/02032 G01B9/02087 G01J3/45

    Abstract: An interferometer (1) is arranged to form a first interference fringe pattern comprising at least ten interference fringes; recording an image of said first interference fringe pattern; perturbing an optical path in the interferometer (1) to form a second interference fringe pattern comprising at least ten interference fringes; and combining an image of said second interference fringe pattern with the recorded image of the first interference fringe pattern to produce a further image comprising a moiré fringe pattern arising from a difference or differences between the first and second interference fringe patterns. The combining step involves subtraction (4) of digital images. Different wavelengths and interferometers are used: Michelson, Mach-Zehnder, Fizeau, Twyman-Green. In this new approach, all the errors of a poor quality, misaligned system are accepted and then eliminated by the combination process, producing a moiré fringe pattern. The method enables very large aperture optical systems for traditional and engineering interferometers to be constructed from inexpensive and basic components.

    SPECTRAL IMAGING APPARATUS AND METHODOLOGY
    338.
    发明公开
    SPECTRAL IMAGING APPARATUS AND METHODOLOGY 有权
    DEVICE AND METHOD FOR光谱图像

    公开(公告)号:EP1046016A1

    公开(公告)日:2000-10-25

    申请号:EP99902098.5

    申请日:1999-01-06

    CPC classification number: G01J3/2823 G01J3/45 G01J2003/2866

    Abstract: A method and apparatus for spectral imaging system is provided. The system is for measuring the fluorescence, luminescence, or absorption at selected locations on a sample. An interferometric spectral discriminator creates an interferogram. The system can be calibrated with a slit (503). A large offset in the pathlength in the interferometer can be introduced to produce a high fringe density thus creating a monochrome image. A metaphase finder is used to locate areas of interest.

    Data collection in spectroscopy
    340.
    发明公开
    Data collection in spectroscopy 有权
    Datenerfassungfürdie Spektroskopie

    公开(公告)号:EP0982581A1

    公开(公告)日:2000-03-01

    申请号:EP98306920.4

    申请日:1998-08-28

    CPC classification number: G01J3/28 G01J3/45

    Abstract: A spectrometer, typically an FT-IR spectrometer, is operated in a continuous mode so that it is carrying out scans on a continuous basis. The acquired data is stored and can be retrieved when a sample measurement is made. This improves the response of the instrument.

    Abstract translation: 光谱仪(通常为FT-IR光谱仪)以连续模式操作,以便连续进行扫描。 采集的数据被存储并且可以在进行样本测量时被检索。 这提高了仪器的响应。

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