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    Vaporizer
    32.
    发明专利
    Vaporizer 有权
    喷雾器

    公开(公告)号：JP2012169671A

    公开(公告)日：2012-09-06

    申请号：JP2012120995

    申请日：2012-05-28

    Applicant: Watanabe Shoko:Kk ,  Masayuki Toda ,  株式会社渡辺商行 ,  昌之 都田

    Inventor： TODA MASAYUKI ,  KUSUHARA MASAKI ,  DOI MIKIO ,  UMEDA MASARU ,  FUKAGAWA MITSURU ,  KANNO YOICHI ,  UCHIZAWA OSAMU ,  YAMAMOTO KOHEI ,  MEGURO TOSHIKATSU

    IPC: H01L21/31 ,  C23C16/448

    Abstract: PROBLEM TO BE SOLVED: To provide a vaporizer for MOCVD, which can obtain a vaporized gas in which a material solution is uniformly dispersed, and to provide a method for vaporizing the material solution.SOLUTION: The vaporizer has: (1) a dispersion part 8 having a gas introducing port 4 for introducing a pressurized carrier gas 3 to a gas passage, means for supplying a material solution 5a to the gas passage, and a gas exit 7 for sending the carrier gas containing the material solution to a vaporization part 22; (2) a vaporization part 22 including a vaporization tube 20 of which one end is connected to a reaction tube of an MOCVD system and the other end is connected to the gas exit 7, and heating means for heating the vaporization tube 20, and for heating and vaporizing the carrier gas containing the material solution sent from the dispersion part 8; and (3) the dispersion part 8 having a main body 1 of the dispersion part having a cylindrical hollow part, a rod 10 having an outer diameter smaller than an inner diameter of the cylindrical hollow part, and a spiral groove 60 on the side of the vaporization part 22 in the outer periphery of the rod 10. The rod 10 is inserted into the cylindrical hollow part.

    Abstract translation: 要解决的问题：提供一种用于MOCVD的蒸发器，其可以获得材料溶液均匀分散的汽化气体，并提供用于蒸发材料溶液的方法。 蒸发器具有：（1）分散部分8，其具有用于将加压载气3引入气体通道的气体引入口4，用于向气体通道供应材料溶液5a的装置和气体出口 7，用于将含有原料溶液的载气送至气化部22; （2）蒸发部分22，其包括蒸发管20，其一端连接到MOCVD系统的反应管，另一端连接到气体出口7，加热装置用于加热蒸发管20，并且用于 加热并蒸发含有从分散部分8送出的原料溶液的载气; 和（3）具有分散部分的主体1的分散部分8具有圆柱形中空部分，具有小于圆柱形中空部分的内径的外径的杆10和在圆柱形中空部分的侧面上的螺旋形槽60 气泡部分22在杆10的外周。杆10插入到圆柱形中空部分中。 版权所有（C）2012，JPO＆INPIT

    Bcn based insulating film, method of producing the same and semiconductor device
    35.
    发明专利
    Bcn based insulating film, method of producing the same and semiconductor device 审中-公开
    基于BCN的绝缘膜，其制造方法和半导体器件

    公开(公告)号：JP2012094900A

    公开(公告)日：2012-05-17

    申请号：JP2012014596

    申请日：2012-01-26

    Applicant: Takashi Sugino ,  Watanabe Shoko:Kk ,  隆 杉野 ,  株式会社渡辺商行

    Inventor： SUGINO TAKASHI ,  AOKI HIDEMITSU ,  KIMURA CHIHARU

    IPC: H01L21/314 ,  H01L21/3065 ,  H01L21/31 ,  H01L21/768 ,  H01L23/522

    Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor device in which a BCN film can be deposited using a non-corrosive organic aminoboron based gas in place of a conventional BClgas, for example, a BCN film having a stabilized low dielectric constant and a high hardness (Young's modulus) can be deposited using tris(dimethylamino)boron by plasma CVD.SOLUTION: In a method of producing an insulating film, a boron carbon nitride (BCN) based insulating film is deposited using an organic aminoboron based gas. The organic aminoboron based gas is tris(dimethylamino)boron. The BCN based insulating film has a dielectric constant of 2.5 or lower and an elastic modulus (Young's modulus) of 8 GPa or higher.

    Abstract translation: 要解决的问题：提供一种制造半导体器件的方法，其中可以使用非腐蚀性有机氨基硼烷基气体代替常规BCl 3“3”沉积BCN膜， / SB>气体，例如，可以使用三（二甲基氨基）硼通过等离子体CVD沉积具有稳定的低介电常数和高硬度（杨氏模量）的BCN膜。 解决方案：在制造绝缘膜的方法中，使用有机氨基硼基气体沉积氮化硼（BCN）基绝缘膜。 有机氨基硼系气体是三（二甲氨基）硼。 BCN型绝缘膜的介电常数为2.5以下，弹性模量（杨氏模量）为8GPa以上。 版权所有（C）2012，JPO＆INPIT

    Vaporization method
    38.
    发明专利
    Vaporization method 审中-公开
    蒸发方法

    公开(公告)号：JP2010067995A

    公开(公告)日：2010-03-25

    申请号：JP2009279849

    申请日：2009-12-09

    Applicant: Masayuki Tsuda ,  Watanabe Shoko:Kk ,  株式会社渡辺商行 ,  昌之 都田

    Inventor： KUSUHARA MASAKI ,  TSUDA MASAYUKI

    IPC: H01L21/31 ,  C23C16/448 ,  H01L21/205

    Abstract: PROBLEM TO BE SOLVED: To provide a vaporization method which allows a long path of a reaction tube to be secured by centrifugal force generated when a carrier gas passing through the inside and is capable of uniformly accelerating vaporization with radiant heat from a heater by stirring the carrier gas having a material solution dispersed therein, in a direction crossing a pass direction of the carrier gas.
    SOLUTION: The carrier gas having the material solution dispersed therein, which comprises a liquid or powder, is supplied to a spiral reaction tube 103 from the upstream side, and the carrier gas having the material solution dispersed therein, which passes the inside of the reaction tube 103, is vaporized by radiant heat from a heater 104.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种汽化方法，其允许当载气通过内部并且能够均匀地加热从加热器的辐射热汽化时产生的离心力来确保反应管的长路径 通过在与载气的通过方向交叉的方向上搅拌其中分散有材料溶液的载气。 解决方案：其中分散有液体或粉末的材料溶液的载气从上游侧供应到螺旋反应管103，并且其中分散有材料溶液的载气通过内部 反应管103由加热器104的辐射热蒸发。版权所有（C）2010，JPO＆INPIT

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