Abstract:
The present invention relates to a method of forming a plasma resistant oxyfluoride coating layer, including: mounting a substrate on a substrate holder provided in a chamber; causing an electron beam scanned from an electron gun to be incident on an oxide evaporation source accommodated in a first crucible, and heating, melting, and vaporizing the oxide evaporation source as the electron beam is incident on the oxide evaporation source; vaporizing a fluoride accommodated in a second crucible; and advancing an evaporation gas generated from the oxide evaporation source and a fluorine-containing gas generated from the fluoride toward the substrate, and reacting the evaporation gas generated from the oxide evaporation source and the fluorine-containing gas generated from the fluoride to deposit an oxyfluoride on the substrate. According to the present invention, it is possible to form a dense and stable oxyfluoride coating layer having excellent plasma resistance, suppressed generation of contaminant particles, and no cracks.
Abstract:
The present invention relates to plasma-resistant glass containing 32-52 mol % of SiO2, 5-15 mol % of Al2O3, 30-35 mol % of CaO, and 0.1-15 mol % of CaF2 as chemical components, and a manufacturing method thereof. According to the present invention, a glass stability index KH is 2.0 or higher, and a plasma-resistant characteristic of an etch rate of lower than 10 nm/min for a mixed plasma of fluorine and argon (Ar) is exhibited.
Abstract:
Disclosed is a method of manufacturing a gallium oxide thin film for a power semiconductor using a dopant activation technology that maximizes dopant activation effect and rearrangement effect of lattice in a grown epitaxial at the same time by performing in-situ annealing in a growth condition of a nitrogen atmosphere at the same time as the growth of a doped layer is finished.
Abstract:
The present invention relates to a collection apparatus for collecting particulate matter generated due to friction between a rotor and a brake pad in a brake system of a transport facility, the collection apparatus including a first collector configured to surround a portion of an outer side surface of the rotor, an upper collector configured to surround a portion of an outer peripheral surface of the rotor, and a second collector configured to surround a portion of an inner side surface of the rotor, wherein the first collector and the second collector are made of porous ceramic foam. According to the present invention, particulate matter generated due to friction between a rotor and a brake pad in a brake system of a transport facility can be efficiently collected, and by reducing the amount of particulate matter generated when braking a transport facility, air pollution can be prevented.
Abstract:
The present invention provides a method for manufacturing a composite carbonate in a semi-dry manner by using combustion ash and, more specifically, provides a method for manufacturing a composite carbonate in a semi-dry manner by using combustion ash, the method comprising a step of adding a small amount of water to combustion ash containing calcium ions in an atmosphere of carbon dioxide. According to the present invention, carbon mineralization is carried out in a semi-dry manner by the manufacturing method, so that the composite carbonate can be efficiently produced. In addition, the composite carbonate can be utilized as a component for a concrete composition.
Abstract:
A graphene-containing coating film includes at least one hydrate represented by Chemical Formula 1 as described herein, a graphene positioned in a shape on the surface of the hydrate represented by Chemical Formula 1, and a silica particle positioned on the surface of the hydrate of Chemical Formula 1 and positioned on the surface of the graphene in a shape of discontinuous island. Particularly, the silica particle includes agglomeration of a plurality of silica nanoparticles. A method of preparing the graphene-containing coating film and a vehicle part such as a head lamp including the same are also provided.
Abstract:
Disclosed are an excellent-durability carbon-based catalyst for a fuel cell, a preparation method therefor, and a proton exchange membrane fuel cell comprising same, the excellent-durability carbon-based catalyst for a fuel cell, in order to protect a carbon-based support which rapidly corrodes in a fuel cell operating environment, having a ceramic material having strong corrosion resistance coated so as to form a ceramic coating layer of which a portion protrudes in the form of needles.
Abstract:
The present disclosure relates to a method for expressing, water-solubilizing, and purifying protein by using a calsequestrin-tag (CSQ-tag). Also provided are: a recombinant expression vector containing a CSQ-tag and a target protein; a host cell transformed using the recombinant expression vector; and a method for expressing and purifying a target protein by using a CSQ tag.
Abstract:
A device for producing nanoparticles includes: a first connector comprising a first supply tube fitting member, a second supply tube fitting member, and a first discharge tube fitting member; a first tube having one side connected to the first supply tube fitting member; a second tube having one side connected to the second supply tube fitting member; a first conduit having one side connected to the first discharge tube fitting member; a first supply connected to another side of the first tube to supply a first material to the first conduit; and a second supply connected to another side of the second tube to supply a second material to the first conduit.
Abstract:
Disclosed is a silicon-carbon composite negative-electrode active material for a lithium secondary battery having improved electrochemical properties which contains a carbon material derived from a wood-based material and a compound containing an isocyanate functional group in order to improve unstable dispersibility of silicon-based particles used as a negative-electrode active material for a lithium secondary battery, thereby improving electrical conductivity and producing stable electrode slurry. Further, a method for producing the same, and a lithium secondary battery including the same are disclosed.