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公开(公告)号：KR1020030010212A
公开(公告)日：2003-02-05
申请号：KR1020010045070
申请日：2001-07-26
Applicant: 삼성전자주식회사
IPC: H01L21/3105
CPC classification number: H01L27/115 , H01L27/11521 , H01L29/66553
Abstract: PURPOSE: A method for planarizing a non-volatile memory is provided to remove a stepper portion between a cell region of a flash memory device and a peripheral region of a logic device in a process for forming a word line. CONSTITUTION: A floating gate structure is formed on a cell region of a semiconductor substrate(100). A conductive layer(113) is formed on the floating gate structure and the semiconductor substrate(100). A hard mask layer is formed on the conductive layer(113). The first insulating layer is formed on the hard mask layer. The first insulating layer is removed from the cell region. The first insulating layer pattern is formed on a peripheral region. The hard mask layer is removed from the cell region. The second insulating layer(125) is formed on the first insulating layer pattern. The cell region and the peripheral region are planarized by removing the second insulating layer(125) and the first insulating layer pattern. A word line is formed on both sidewalls of the floating gate structure by patterning the conductive layer(113). A gate of a logic device is formed on the peripheral region.
Abstract translation: 目的：提供用于平坦化非易失性存储器的方法，以在形成字线的过程中去除闪速存储器件的单元区域与逻辑器件的外围区域之间的步进器部分。 构成：在半导体衬底（100）的单元区域上形成浮栅结构。 在浮栅结构和半导体衬底（100）上形成导电层（113）。 在导电层（113）上形成硬掩模层。 第一绝缘层形成在硬掩模层上。 第一绝缘层从电池区域移除。 第一绝缘层图案形成在周边区域上。 从单元区域去除硬掩模层。 第二绝缘层（125）形成在第一绝缘层图案上。 通过去除第二绝缘层（125）和第一绝缘层图案来平坦化单元区域和周边区域。 通过图案化导电层（113），在浮栅结构的两个侧壁上形成字线。 逻辑器件的栅极形成在周边区域上。
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公开(公告)号：KR100368594B1
公开(公告)日：2003-01-24
申请号：KR1020010009325
申请日：2001-02-23
Applicant: 삼성전자주식회사
IPC: H01L27/115 , H01L29/788 , H01L21/8247
CPC classification number: H01L27/11521 , H01L21/28273 , H01L21/76895 , H01L27/115 , H01L27/11524 , H01L29/42324 , H01L29/66825 , H01L29/7887
Abstract: A split-gate flash memory includes a first gate insulating layer formed on a semiconductor substrate; a floating gate formed on the first gate insulating layer; a first spacer surrounding the floating gate and a side wall; a first junction region formed on a predetermined portion of the semiconductor substrate between two adjacent floating gates and having an opposite conductivity to that of the semiconductor substrate; a first conductive line formed on the first junction region between two adjacent first spacers; a second gate insulating layer formed on both a predetermined portion of the semiconductor substrate and the side wall of the first spacer; a word line formed on the second gate insulating layer, and having a vertical side wall and a uniform width; a second spacer formed on the vertical side wall of the word line; a second junction region formed on a portion of the semiconductor substrate adjacent the second spacer and having the same conductivity as the first junction region; an interlayer insulator formed over the whole surface of the semiconductor and having a contact hole, the contact hole formed on a portion of the second junction region; and a second conductive line formed on the interlayer insulator and contacting the second junction region through the contact hole.
Abstract translation: 分栅快闪存储器包括形成在半导体衬底上的第一栅极绝缘层; 形成在所述第一栅极绝缘层上的浮置栅极; 围绕所述浮动栅极和侧壁的第一间隔件; 第一结区，形成在所述半导体衬底的预定部分之间，位于两个相邻的浮栅之间，并具有与所述半导体衬底的导电性相反的导电性; 形成在两个相邻第一间隔物之间的第一结区上的第一导线; 第二栅极绝缘层，形成在所述半导体衬底的预定部分和所述第一隔离物的所述侧壁上; 形成在所述第二栅极绝缘层上并具有垂直侧壁和均匀宽度的字线; 形成在字线的垂直侧壁上的第二间隔件; 第二结区，形成在所述半导体衬底的与所述第二间隔物相邻的部分上，并具有与所述第一结区相同的导电性; 层间绝缘体，形成在半导体的整个表面上并具有接触孔，接触孔形成在第二结区的一部分上; 以及形成在层间绝缘体上并通过接触孔与第二结区接触的第二导线。
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公开(公告)号：KR100322564B1
公开(公告)日：2002-07-02
申请号：KR1019980009709
申请日：1998-03-20
Applicant: 삼성전자주식회사
Inventor： 조민수
IPC: B41J2/435
Abstract: PURPOSE: A device for supplying a liquid developer of a printer is provided to supply a liquid developer at a uniform flow rate by removing the vapors contained in a carrier and a condensed developer. CONSTITUTION: A condensed developer supply line(40) connects each developer supply unit with a condensed developer tank. A carrier supply line installed adjacent to the condensed developer supply line connects the developer supply unit with a carrier tank. A vapor container(38) for storing the vapor in the condensed developer or the carrier is connected to the middle portion of the carrier supply line and/or the condensed developer supply line. A valve(39) for opening and closing the vapor container is installed in the upper portion of the vapor container.
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公开(公告)号：KR1020000061504A
公开(公告)日：2000-10-25
申请号：KR1019990010573
申请日：1999-03-26
Applicant: 삼성전자주식회사
Inventor： 조민수
IPC: H01L27/115
Abstract: PURPOSE: An EEPROM cell layout and method for fabricating an EEPROM cell are to prevent a bottleneck of a poly when a cell size is decreased. CONSTITUTION: A method for manufacturing an EEPROM cell having a select transistor connected to a word line(102b) and a sense transistor connected to a sense line(100b) comprises the steps of: defining an active region(100a) and an inactive region(104) of a semiconductor substrate; forming a first insulating film on the semiconductor substrate; etching the first insulating film on the inactive region; ion implanting to form a first conductive region on the active region; etching the first insulating film by using a tunnel region(101) forming mask; forming an oxide film at the tunnel region with the first insulating film etched therefrom; forming a conductive film on the whole surface of the semiconductor substrate; etching the conductive film by using the word line and the sense line forming mask; forming a high pressure junction region on the active region; and ion implanting to form second and third conductive regions at the high pressure junction region.
Abstract translation: 目的：用于制造EEPROM单元的EEPROM单元布局和方法是当单元尺寸减小时防止多晶硅的瓶颈。 构成：一种用于制造具有连接到字线（102b）的选择晶体管和连接到感测线（100b）的检测晶体管）的EEPROM单元的方法包括以下步骤：定义有源区（100a）和无效区（ 104）; 在所述半导体衬底上形成第一绝缘膜; 蚀刻非活性区域上的第一绝缘膜; 离子注入以在活性区上形成第一导电区; 通过使用形成掩模的隧道区（101）蚀刻第一绝缘膜; 在隧道区域形成氧化膜，其中第一绝缘膜被蚀刻; 在半导体衬底的整个表面上形成导电膜; 通过使用字线和感测线形成掩模蚀刻导电膜; 在有源区上形成高压结区; 以及离子注入以在高压接合区域形成第二和第三导电区域。
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Patent Agency Ranking
公开(公告)号：KR1020000056598A
公开(公告)日：2000-09-15
申请号：KR1019990006070
申请日：1999-02-24
Applicant: 삼성전자주식회사
Inventor： 조민수
IPC: B41J29/12
Abstract: PURPOSE: A sealing device for a wet printer is provided to effectively restrain leakage of harmful substances generated in a first chamber to a second chamber during printing operation by sealing clearance of through holes with cut parts of a sealing element to be closely contacted by a connecting element. CONSTITUTION: A sealing device for a wet printer including a belt unit applied with a photosensitive belt, a developing unit for forming images on the photosensitive belt, a first chamber for receiving a drying unit for drying the photosensitive belt and a transfer unit for transferring the formed image to a printing paper, a main body of the printer having a second chamber for receiving a developing solution supply for supplying a developing solution to the developing unit, and an auxiliary frame(14) having through holes(14a) for passing through connecting elements to be mounted in connection with the first and second chambers, includes a sealing element(100) attached to the auxiliary frame and having cut parts(110) of a smaller size than the through holes at corresponding positions to the through holes, so that the cut parts are elastically deformed for elastically and closely contacting the connecting element when the connecting elements passing through the cut parts.
Abstract translation: 目的：提供一种用于湿式打印机的密封装置，用于通过密封元件的切割部分的密封间隙通过密封元件的密封接触来有效地抑制在打印操作期间在第一室中产生的有害物质泄漏到第二室， 元件。 一种用于湿式打印机的密封装置，包括一个施加感光带的皮带单元，用于在感光带上形成图像的显影单元，用于接收用于干燥感光带的干燥单元的第一室和用于传送感光带的转印单元 形成图像到打印纸，打印机的主体具有用于接收用于向显影单元供应显影液的显影剂供应的第二室，以及具有通孔（14a）的辅助框架（14），用于穿过连接 要与第一和第二腔室连接的元件包括附接到辅助框架的密封元件（100），并且在与通孔的相应位置处具有比通孔更小的切割部分（110），使得 当连接元件穿过切割部分时，切割部分弹性变形以弹性地和紧密地接触连接元件。
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公开(公告)号：KR2020000009928U
公开(公告)日：2000-06-05
申请号：KR2019980022040
申请日：1998-11-13
Applicant: 삼성전자주식회사
Inventor： 조민수
IPC: G01F23/30
Abstract: 용기 내에 저수된 액체의 저수레벨 측정장치는 그 하부에 배출구가 마련되는 것으로 제1액체가 저장되는 제1저장부; 상기 제1액체와 다른 비중을 가지는 제2액체가 저장되는 제2저장부; 상기 제1 및 제2액체가 동일레벨을 갖도록 상기 제1저장부와 제2저장부의 하부를 상호 연통시키는 것으로 상기 제1 및 제2액체의 경계면이 위치하는 U자관; 상기 제2저장부의 제2액체에 부유되어 있는 자성부유체; 상기 자성부유체의 자기장 영향권 내에 위치하여 상기 자성부유체의 높이 변화에 따른 제2액체의 레벨을 검지하는 자력센서; 및 상기 자력센서에서 발생되는 전기적 신호로부터 상기 제1저장부 내에 저수된 제1액체의 저수레벨을 측정하는 저수레벨 측정부;를 구비함으로써, 저수레벨의 측정오류를 방지하는 점에 그 장점이 있다.
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公开(公告)号：KR1020000032237A
公开(公告)日：2000-06-05
申请号：KR1019980048640
申请日：1998-11-13
Applicant: 삼성전자주식회사
IPC: B41J29/377
Abstract: PURPOSE: A wet electronic photographic type printer is provided to circulate an engine shell, an air sprayer and the air of a dry unit using one inlet. CONSTITUTION: In an air circulation system of a wet electronic photographic type printer, a first channel(710) is equipped to induce air inlet through an outlet(510) of an engine shell(50) to the outside through a filter(900). In the first channel(710), a return channel(730) branched to induce a flow of air to an air sprayer equipped in a developing unit(200) is connected and also a second channel(720) is connected met with the first channel(710) by way of a condenser(600) by inserting air from the dry unit(400). And an air pump(800) for inserting and erupting air is installed between points(P1) and (P2) where the second channel(720) and the return channel(730) are connected. The air circulation system is composed of a photosensitive medium(100), a squeegee roller(210) and a print unit(300). If the air pump(800) is operated, air is circulated at the same time along the first and the second channels(710,720) and the return channel(730).
Abstract translation: 目的：使用湿式电子照相式打印机，使用一个入口使发动机壳体，空气喷雾器和干燥单元的空气循环。 构成：在湿式电子照相式打印机的空气循环系统中，第一通道（710）被配备成通过过滤器（900）将发动机壳体（50）的出口（510）引入外部。 在第一通道（710）中，连接分支以引起装配在显影单元（200）中的空气喷雾器的空气流的返回通道（730），并且第二通道（720）与第一通道 （710）通过从干燥单元（400）插入空气通过冷凝器（600）。 并且用于插入和喷出空气的空气泵（800）安装在第二通道（720）和返回通道（730）连接的点（P1）和（P2）之间。 空气循环系统由感光介质（100），刮板辊（210）和印刷单元（300）构成。 如果空气泵（800）被操作，空气沿着第一和第二通道（710,720）和返回通道（730）同时循环。
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公开(公告)号：KR2020000008444U
公开(公告)日：2000-05-15
申请号：KR2019980020136
申请日：1998-10-21
Applicant: 삼성전자주식회사
Inventor： 조민수
IPC: B41J2/435
Abstract: 개시된 습식 전자사진방식 프린터의 배기장치는, 엔진셀 배기관의 개방부와 같은 방향에 프린터 본체의 외부와 연결되는 연결관의 개방부가 인접 설치되고, 그 필터에는 배기관의 개방부와 연결되는 유입부 및 연결관의 개방부와 연결되는 배출부가 같은 방향에 마련되어서, 필터의 유입부 및 배출부를 배기관과 연결관의 개방부에 동시에 맞춰서 연결할 수 있도록 구성되어 있다. 이와 같은 구성에 의하면, 필터의 교환시 공기 유입부와 배출부의 연결을 각각 풀거나 잠궈야 하는 번거러움을 해소할 수 있어서 매우 간편하게 착탈작업을 수행할 수 있다.
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公开(公告)号：KR1020000018736A
公开(公告)日：2000-04-06
申请号：KR1019980036481
申请日：1998-09-04
Applicant: 삼성전자주식회사
Inventor： 조민수
IPC: B41J2/175
Abstract: PURPOSE: A suction and exhaust device for a wet printer is provided to improve its structure to exhaust gas remained in an engine shell to outside and to eliminate a drip line with one pump. CONSTITUTION: A suction and exhaust device for a wet printer includes: a photosensitive medium(112) supported by plural support rollers to be traveled on an infinite trace; a development unit installed on the traveling path of the photosensitive medium to squeeze a developer after attaching it to the photosensitive medium; a drying unit(130) installed on the lower flow of the development unit to dry the developer which is remained in the photosensitive medium; a suction path and a spray path(151, 152) connected to the engine shell respectively; a pump(154) feeding gas in the engine shell to the spray path by sucking it out through the suction path; an exhaust path(153) passing the gas which is exhausted to outside; a filter(156) filtrating the gas exhausted to outside; and a cooling piece(160) for cooling the gas which is transferred to the filter from the pump.
Abstract translation: 目的：提供一种用于湿式打印机的抽吸和排气装置，以改善其结构，将留在发动机壳体中的废气排放到外部，并消除一个泵的滴水管路。 构成：用于湿式打印机的抽吸和排气装置包括：由多个支撑辊支撑的感光介质，以便在无限痕迹上移动; 显影单元，其安装在感光介质的行进路径上，以将显影剂附着到感光介质之后挤压显影剂; 干燥单元（130），安装在显影单元的下流中以干燥保留在感光介质中的显影剂; 连接到发动机壳体的吸入路径和喷射路径（151,152）; 泵（154），其通过从所述吸入路径吸出将所述发动机壳体中的气体供给到所述喷射路径; 通过排出到外部的气体的排气路径（153） 将排出到外部的气体过滤的过滤器（156） 以及用于冷却从泵传递到过滤器的气体的冷却片（160）。
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