Abstract:
PURPOSE: A pigment dispersion composition for a color filter is provided to ensure excellent dispersibility and stability while satisfying high brightness and high contrast and to prevent the degradation of color reproductivity. CONSTITUTION: A pigment dispersion composition for a color filter includes: pigment including diazo-based yellow pigment kneaded with an acrylic resin, ester-based resin or combination thereof; a binder resin; and a dispersing agent. The average molecular weight of pigment within the pigment dispersion composition is 50-150 nm. The binder resin has the average molecular weight of 5,000-40,000.
Abstract:
PURPOSE: A photosensitive resin composition for dye, coloring composition, and color filter is provided to ensure dispersion stability, chemical resistance and brightness. CONSTITUTION: A dye is represented by chemical formula 1. A coloring composition contains the dye of chemical formula 1, binder resin, and solvent. The composition further contains pigment and/or dispersing agent. The pigment is selected from a group consisting of yellow pigment of C.I.Yellow138, C.I.Yellow139, C.I.Yellow150, and C.I.Yellow183; red pigment selected from C.I.Red254, and mixture thereof.
Abstract:
PURPOSE: A photoresist resin composition for a color filter, and the color filter using thereof are provided to manufacture the high definition color filter with the uniform thickness of a film, and to secure the excellent dispersion stability of a pigment, and the mobility. CONSTITUTION: A photoresist resin composition for a color filter contains the following: a dispersion resin selected from an unsaturated ethylene oligomer marked with chemical formula 1 or its homopolymer, or the unsaturated ethylene oligomer and an unsaturated ethylene monomer copolymer; an acrylic binder resin containing a carboxy group; a photo-polymerizable monomer; a photopolymerization initiator; and a pigment and a solvent. In the chemical formula 1, R1 and R1` are aliphatic hydrocarbon groups of C1~C4, respectively. R2 and R2` are hydrogen atoms or methyl groups, respectively.
Abstract:
PURPOSE: A composition for forming a hard-mask layer and a manufacturing method of a patterned material using thereof are provided to improve the anti-reflection property applied to a short wavelength area and to apply a coating spin-on method. CONSTITUTION: A composition for forming a hard-mask layer contains a copolymer marked with chemical formula 1. In chemical formula 1, R1 is a substituted or non-substituted alkylene of C1~C4. R2, R3, R7, and R8 are hydrogen, a hydroxyl group, a straight, branched, or cyclic alkyl group of C1~C10, an alkoxy group, or an aryl group of C6~C20. R4, R5, and R6 are the hydrogen, the hydroxyl group, an alkyl ether group of C1~C4, a phenyl dialkylene ether group, or their combination.
Abstract:
본 발명은 열로서 가교되고 광에 의해 발생하는 산에 의해 탈 가교가 이루어지는 화합물을 포함하는 것을 특징으로 하는 바닥반사방지막 조성물에 관한 것이다. 상기 바닥반사방지막 조성물은 짧은 파장 영역(예를 들어, 157, 193, 248nm)에서 강한 흡수를 갖는 단위구조를 포함하는 방향족 고리 함유 중합체를 포함하고, 상기 열로서 가교되고 광에 의해 발생하는 산에 의해 탈 가교가 이루어지는 화합물은 방향족 고리 함유 중합체와 가교반응을 일으키며, 노광에 의해 탈 가교됨으로써 포토리쏘그라픽 공정상의 현상액에 의해 용해가 가능한 성질을 지닌다. 따라서 본 발명은 포토리쏘그라픽 공정에서 포토레지스트의 현상 공정에서 포토레지스트와 함께 용해가 이루어짐으로써 공정이 단순화되고 포토레지스트막의 형성두께를 감소시킬 뿐만 아니라 포토리쏘그래픽 공정 마진을 높일 수 있는 바닥반사방지막을 형성할 수 있는 것이다. 포토리쏘그래픽, 바닥 반사방지막(BARC), 가교제, 방향족 고리
Abstract:
A gap-fill composition is provided to be charged without voids even when filling a via hole or a trench hole having big aspect ratio, and to ensure dry etch rate identical a low-K dielectric interlayer insulating film or high wet etch selectivity. A gap-fill composition comprises a compound selected from the group consisting of an aromatic ring-containing compound represented by chemical formula 1 or chemical formula 2, which has average molecular weight(Mw) of 1,000-20,000; and an organic solvent. In chemical formula 1, n is
Abstract translation:即使在填充具有大纵横比的通孔或沟槽孔时也提供填充空隙的组合物,以便确保干蚀刻速率与低K电介质层间绝缘膜相同或高湿蚀刻选择性。 间隙填充组合物包含选自化学式1或化学式2表示的含芳环的化合物的化合物,其平均分子量(Mw)为1,000-20,000; 和有机溶剂。 在化学式1中,n为<= n <= 190; R1和R2独立地为选自化学式3-5的任何一种; R3由化学式6表示; 并且R 4和R 5独立地是氢或烷基。 在化学式2中,n为<= n <= 190; R6为选自化学式3-5的任何一种; R7由化学式6表示; 而R8-R11独立地是氢或烷基。
Abstract:
The present invention relates to a color filter ink composition including an acryl-based resin, a polymerizable monomer, a pigment, a leveling agent, and a solvent. The pigment is represented by the following Chemical Formula 1, and the leveling agent is a polymer including a repeating unit including at least one of the following Chemical Formula 2, Chemical Formula 3, or combinations thereof. In the above Formulae 1 to 3, each substituent is the same as in the detailed description.
Abstract:
An antireflective hard mask composition, a method for forming a pattern on a substrate by using the composition, and a semiconductor integrated circuit device formed by the method are provided to improve optical properties, mechanical properties and dry etching resistance and to form a pattern having a high aspect ratio. An antireflective hard mask composition comprises 1-20 wt% of a polymer containing an aromatic ring represented by the formula 1, 2 or 3; 0.001-5 wt% of an initiator; and 75-98.8 wt% of an organic solvent, wherein 1
Abstract:
An anti-reflective hard mask composition is provided to realize high etching selectivity and excellent resistance against multi-etching and to minimize reflection between a resist layer and a backside layer. An anti-reflective hard mask composition comprises: (a) an aromatic ring-containing polymer comprising a compound represented by the following formula 1; and (b) an organic solvent. In formula 1, each of m and n is equal to or greater than 1 and less than 190, wherein m+n is 190 or less; R1, R2 and R3 are the same or different, and represent any one substituent of H, OH, C1-C10 alkyl, C6-C10 aryl, allyl and halogen atoms; and R2 and R4 are the same or different, and represent -CH2- and the following formula.