公开(公告)号：KR1020030068709A

公开(公告)日：2003-08-25

申请号：KR1020020008298

申请日：2002-02-16

Applicant: 한국전자통신연구원

Inventor： 김태엽 ,  한기평 ,  김약연 ,  손영준 ,  백문철 ,  조경익

IPC: G01B11/26

Abstract: PURPOSE: A focusing angle measuring apparatus of a focusing waveguide grating coupler is provided to precisely measure a focusing angle of the focusing waveguide grating coupler by using a wide-band optical system, thereby minimizing process and design errors. CONSTITUTION: Light radiated from a wide-band light source(201) is guided into one plane of an image detecting device(211) through a photo guide(202), openings(203,205,206), a relay lens(204), a focusing lens(208) and a beam splitter(207) so that an image of a focusing grating(210) is formed on the plate of the image detecting device(211). At the same time, light is diffracted by means of the focusing grating(210) so that a focus(213) of light is formed. Focusing light(215) is formed on one plane of an image detecting device(211) by means of the focusing lens(208). That is, a shape of the opening(205) is formed on the plane of the image detecting device(211).

Abstract translation: 目的：提供一种聚焦波导光栅耦合器的聚焦角测量装置，通过使用宽带光学系统精确测量聚焦波导光栅耦合器的聚焦角度，从而最小化处理和设计误差。 构成：从宽带光源（201）照射的光通过光引导件（202）引导到图像检测装置（211）的一个平面，开口（203,205,206），中继透镜（204），聚焦透镜 （208）和分束器（207），使得聚焦光栅（210）的图像形成在图像检测装置（211）的板上。 同时，光被聚焦光栅（210）衍射，从而形成光的聚焦（213）。 聚焦光（215）通过聚焦透镜（208）形成在图像检测装置（211）的一个平面上。 也就是说，在图像检测装置（211）的平面上形成开口（205）的形状。

公开(公告)号：KR100378601B1

公开(公告)日：2003-03-31

申请号：KR1020000003869

申请日：2000-01-27

Applicant: 한국전자통신연구원

Inventor： 한기평 ,  손영준 ,  백문철 ,  조경익

IPC: G11B7/00

CPC classification number: B82Y10/00 ,  G11B7/122 ,  G11B7/1387 ,  G11B7/14 ,  G11B15/62 ,  G11B15/64

Abstract: The present invention relates to an optical data recording device using SIL (Solid Immersion Lens) in order to store information with high capacity, and more particularly to the multiple optical-recording apparatus capable of doing multiple information storage and play by forming multiple focus within the SIL. The present invention utilizes the optical technology by multiple source in order to overcome the limit of improving the recording speed and transfer rate due to the mechanical transfer and access, the flying head technology, which was proposed to increase the transfer rate and recording access speed in the near-field recording technology. The present invention can increase the recording speed and transfer rate using optical technology transcending the limit of mechanical transfer and access according to the number of the optical sources and focuses by recording and playing several pits simultaneously after forming multiple optical focus by multiple sources on the recording medium.

Abstract translation: 本发明涉及一种使用SIL（固体浸没透镜）来存储大容量信息的光学数据记录设备，并且更具体地涉及这样的多光学记录设备，其能够进行多个信息存储并通过在 SIL。 本发明利用多源光学技术以克服由于机械传输和接入而提高记录速度和传输速率的限制，飞行磁头技术被提出以提高传输速率和记录访问速度 近场录音技术。 本发明可以利用光学技术来增加记录速度和传输速率，所述光学技术根据光源的数量超越机械传输和访问的限制，并且通过在记录中通过多个源形成多个光学聚焦之后同时记录和播放多个凹坑来聚焦 中。

公开(公告)号：KR1020020051213A

公开(公告)日：2002-06-28

申请号：KR1020000080801

申请日：2000-12-22

Applicant: 한국전자통신연구원

Inventor： 한기평 ,  손영준 ,  김태엽 ,  백문철 ,  조경익

IPC: G11B7/124 ,  G11B7/1374 ,  G11B7/1353 ,  G11B7/1387

Abstract: PURPOSE: A micro near-field optical data storage head using an SIL(Solid Immersion Lens) is provided to use the SIL for a big size lens, and to use diffraction elements for the rest parts, thereby minimizing the size. CONSTITUTION: An optical waveguide(201) has a plane shape. At least more than one condensing diffraction grating(203) is attached to one of both sides of the optical waveguide, and changes a path of an incident light(202) to an SIL(205). More than one optical division diffraction grating(210) is located between a light source and the condensing diffraction grating, and changes a path of a signal light(209). The SIL is composed of a curved part and a plane part, and concentrates the incident light on one point of the plane part. A coil(206) is attached to an option position of an optical storage head, and generates a magnetic field. The curved part of the SIL is formed on a sphere, hemisphere, or super-hemisphere, to make the incident light diffracted by the condensing diffraction grating form an optical point less than diffraction limits.

Abstract translation: 目的：提供使用SIL（固体浸没透镜）的微近场光学数据存储头，以将SIL用于大尺寸透镜，并对其余部分使用衍射元件，从而最小化尺寸。 构成：光波导（201）具有平面形状。 至少一个以上的聚光衍射光栅（203）附着到光波导的两侧之一，并将入射光（202）的路径改变为SIL（205）。 多个光学分割衍射光栅（210）位于光源和聚光衍射光栅之间，并改变信号光的路径（209）。 SIL由弯曲部分和平面部分组成，并将入射光集中在平面部分的一个点上。 线圈（206）附接到光学存储头的可选位置，并产生磁场。 SIL的弯曲部分形成在球体，半球或超半球上，以使由聚光衍射光栅衍射的入射光形成小于衍射极限的光学点。

公开(公告)号：KR1020010076785A

公开(公告)日：2001-08-16

申请号：KR1020000004140

申请日：2000-01-28

Applicant: 한국전자통신연구원

Inventor： 한기평 ,  손영준 ,  백문철 ,  조경익

IPC: G11B7/085

Abstract: PURPOSE: Tracking method and device for a near-field recording of high density are provided to detect a change in an optical signal generated in diffraction by a pit by using a photo diode. CONSTITUTION: A flying head of a suspension is approaching to a disk recording medium for recording and reproducing data. A beam is transferred from a light source to an optical probe by passing through a beam splitter, an optical waveguide, and the suspension. A reflected beam progresses toward a signal processor for detecting a signal. Herein, signals(204a,204b) diffracted by a pit(213) are detected by photo diodes(206a,206b) at the flying head. Incidence beam(201) is concentrated on an SIL(Solid Immersion Lens)(203) by an object lens(202). The beam is signal processed by an adder(208), a subtracter(209), and a divider(210) for generating a tracking signal. In case of the incidence beam in symmetrical state, the beams are symmetrically diffracted for the photo diodes to detect the beam of uniform strength.

Abstract translation: 目的：提供高密度近场记录的跟踪方法和装置，以通过使用光电二极管来检测由凹坑衍射产生的光信号的变化。 构成：悬架的飞头接近用于记录和再现数据的盘记录介质。 通过穿过分束器，光波导和悬架将光束从光源传送到光学探针。 反射光束朝向用于检测信号的信号处理器进行。 这里，由飞溅头的光电二极管（206a，206b）检测由凹坑（213）衍射的信号（204a，204b）。 入射光束（201）通过物镜（202）集中在SIL（固体浸没透镜）203上。 光束由加法器（208），减法器（209）和用于产生跟踪信号的分频器（210）进行信号处理。 在入射光束处于对称状态的情况下，光束对称衍射用于光电二极管以检测均匀强度的光束。

公开(公告)号：KR1019990053062A

公开(公告)日：1999-07-15

申请号：KR1019970072632

申请日：1997-12-23

Applicant: 한국전자통신연구원

Inventor： 김도훈 ,  손영준 ,  권진혁 ,  정해빈 ,  김보우

IPC: G03H1/22

Abstract: 본 발명은 반도체 소자 제작을 위한 스텝퍼나 스캐너의 TTL 정렬 장치에 있어서 내부 전반사형 홀로그래피(total internal reflection holography) 방식에 의한 위상공액파(phase conjugate wave)를 발생시켜 색수차를 보정하는 TTL 정렬을 수행하는 장치에 관한 것이다. 홀로그래피 방법 가운데 특히 내부 전반사형 홀로그래피는 구조가 간단하여 정렬계 구성에 있어서 유리하며 참조광이 광학계에 미치는 영향이 없으므로 반도체 노광장비의 투영광학계에 대한 영향이 적다는 장점이 있다. 이러한 기술을 근거로 하여 ArF 엑시머 레이저의 광을 노광 광원으로 사용하는 웨이퍼 스텝퍼에서 레티클과 웨이퍼의 위치를 직접 정렬하도록 하는 것으로 노광광원에 의한 마스크의 패턴을 굴절되도록 하는 입사 굴절광학계(102)와 반사경(103) 및 편광 빛 분할기(104)와; 상기 패턴을 웨이퍼로 축소 투영시키는 오목 반사경(105)과 출사 광학계(106)와; 아르곤 레이저(110)의 광원으로 부터 파이버를 통해 입사되는 TTL 정렬수단과; 상기 TTL 정렬수단에 의해 반사-굴절 시스템 내로 투영되는 정렬광(111)은 웨이퍼 정렬광(112)과 레티클 정렬광(114)으로 나뉘어져서 각각 레티클(108)과 웨이퍼(107)로 투영되도록 하는 편광 빛 분할기(104)와; 상기 아르곤 레이저(110)로 부터 내부 전반사형 홀로그래픽 TTL 정렬수단까지 정렬광을 전달하도록 하는 단일모드 파이버(202)로 구성되며, 상기 TTL 정렬수단은 내부 전반사형 홀로그램 정렬계(200)를 이용하는 것을 특징으로 한다.