公开(公告)号：DE10228767A1

公开(公告)日：2003-02-06

申请号：DE10228767

申请日：2002-06-27

Applicant: AGILENT TECHNOLOGIES INC

Inventor： YIN HONGFENG ,  KILLEEN KEVIN

IPC: B01L3/00 ,  B01L99/00 ,  B29C43/56 ,  B29C59/02 ,  B29C59/14 ,  B81B1/00 ,  B81C1/00 ,  G01N27/447 ,  G01N30/60 ,  B01D57/00 ,  B01D15/08 ,  B81B7/00

公开(公告)号：DE602006015144D1

公开(公告)日：2010-08-12

申请号：DE602006015144

申请日：2006-11-20

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BRENNEN REID ,  YIN HONGFENG ,  KILLEEN KEVIN ,  SCHLEIFER ARTHUR

IPC: G01N30/36 ,  G01N30/34

公开(公告)号：DE10228767B4

公开(公告)日：2009-08-20

申请号：DE10228767

申请日：2002-06-27

Applicant: AGILENT TECHNOLOGIES INC

Inventor： YIN HONGFENG ,  KILLEEN KEVIN

IPC: B01D57/00 ,  B01D15/08 ,  B01L3/00 ,  B01L99/00 ,  B29C43/56 ,  B29C59/02 ,  B29C59/14 ,  B81B1/00 ,  B81B7/00 ,  B81C1/00 ,  G01N27/447 ,  G01N30/60

公开(公告)号：DE102007050873A1

公开(公告)日：2008-05-08

申请号：DE102007050873

申请日：2007-10-24

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BEERLING TIMOTHY ,  YIN HONGFENG

IPC: B81C1/00 ,  B01L99/00

Abstract: The method involves precipitating a hard mask on a titanium substrate, masking the hard mask with a photoresist layer, and structuring the photo resist layer. A reactive ion etching (RIE) is implemented on the masked hard layer to structure a micro fluidic structure on the hard mask. The structured photo resist layer is removed, and the micro fluidic structure is etched in the hard masked titanium substrate under utilization of a deep reactive ion etching (DRIE) e.g. chlorine-based DRIE etching and a chlorine-boron-trichloride-mixture-based DRIE etching.

公开(公告)号：GB2370519B

公开(公告)日：2004-08-04

申请号：GB0126980

申请日：2001-11-09

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BRENNAN REID A ,  YIN HONGFENG ,  KILLEEN KEVIN P

IPC: B81B1/00 ,  B01L3/00 ,  B01J19/00

公开(公告)号：GB2370519A

公开(公告)日：2002-07-03

申请号：GB0126980

申请日：2001-11-09

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BRENNAN REID A ,  YIN HONGFENG ,  KILLEEN KEVIN P

IPC: B81B1/00 ,  B01L3/00 ,  B01J19/00

Abstract: A micro-device 10 comprises a planar substrate 12 with a microchannel 18 a cover plate 30, sample inlet port 20 and a protruding electro-spray emitter 42 suitably shaped to permit the formation of a Taylor cone from a sample passing there-through, under the influence of an electric field. Fig. 1C showing the device post removal of portions of material to form the protrusion of the electro-spray emitter 42. Also disclosed is a method of manufacture of the aforementioned micro-device comprising the use of "non-mechanical" material removal means, negating the need for "photo-resist masking", such as laser ablation or photochemical etching. Further disclosed is the use of the aforementioned micro-device in electro-spray emission, involving the passing a sample through the device and forming a Taylor cone of a sample material under the influence of an electric field at the mouth 22 of the emitter 42. The micro-device 10 may be used in the preparation of samples for subsequent processing in a mass-spectrometer. The device 10 may be composed of a polymeric material, the emitter 42 may be coated in metal. A variety of emitter 42 shapes are disclosed in later figures. The microchannel may be in the order of 1žm to 200 žm in cross-section.

公开(公告)号：DE10154601A1

公开(公告)日：2002-06-13

申请号：DE10154601

申请日：2001-11-07

Applicant: AGILENT TECHNOLOGIES INC

Inventor： BRENNEN REID A ,  YIN HONGFENG ,  KILLEEN KEVIN P

IPC: B81B1/00 ,  B81C1/00

Abstract: A micro-component (10) comprises a substrate (12) having a planar surface (14) and a micro-channel (18); a covering plate (30) on the planar surface; an electro-spraying emitter forming a section of the substrate and/or the covering plate; and a sample inlet gate in fluid communication with a line and allowing a fluid sample to be conveyed from an external source in a defined sample path. Independent claims are also included for the following: (i) the production of the micro-component; and (ii) for the ionization of a fluid sample in a spraying chamber using the micro-component. Preferred Features: The emitter has a concave or planar end surface arranged next to the sample outlet gate.

公开(公告)号：EP3047266A4

公开(公告)日：2017-04-12

申请号：EP14849464

申请日：2014-08-19

Applicant: AGILENT TECHNOLOGIES INC

Inventor： YIN HONGFENG ,  BRENNEN REID A ,  LYSTER ERIC ,  SLOCUM ROGER

IPC: G01N30/26 ,  G01N30/60

CPC classification number: G01N30/606 ,  G01N30/6065 ,  G01N30/6086