Complementary metal oxide semiconductor (CMOS) ultrasonic transducers and methods for forming the same

    公开(公告)号:AU2018203942A1

    公开(公告)日:2018-06-21

    申请号:AU2018203942

    申请日:2018-06-04

    Abstract: An apparatus, comprising: a semiconductor wafer having a complementary metal oxide semiconductor (CMOS) integrated circuit and an electrode; a conductive membrane bonded to the semiconductor wafer to form a bonded structure such that a sealed cavity exists between an uppermost portion of the semiconductor wafer and a first side of the conductive membrane, thereby defining, at least in part, an ultrasonic transducer, with the sealed cavity disposed between the conductive membrane and the electrode; and the uppermost portion of the semiconductor wafer providing an electrical connection between the CMOS integrated circuit and the first side of the conductive membrane. 136 144 1310 128 '' 1'' -'' D18 138 142 . .. . .. . .. S. .'.6.4. . W ... l' . . . . . . . . . . . . . . \ . . . . . . . . . . . . . . 2602 118 2602 104.102 2602 18 242 FIG. 2610 12

    Monolithic ultrasonic imaging devices, systems and methods

    公开(公告)号:AU2014235032A1

    公开(公告)日:2015-10-01

    申请号:AU2014235032

    申请日:2014-03-13

    Abstract: To implement a single-chip ultrasonic imaging solution, on-chip signal processing may be employed in the receive signal path to reduce data bandwidth and a high-speed serial data module may be used to move data for all received channels off-chip as digital data stream. The digitization of received signals on-chip allows advanced digital signal processing to be performed on-chip, and thus permits the full integration of an entire ultrasonic imaging system on a single semiconductor substrate. Various novel waveform generation techniques, transducer configuration and biasing methodologies, etc., are likewise disclosed. HIFU methods may additionally or alternatively be employed as a component of the "ultrasound- on- a-chip" solution disclosed herein.

    MONOLITHIC ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS

    公开(公告)号:CA2903479A1

    公开(公告)日:2014-09-25

    申请号:CA2903479

    申请日:2014-03-13

    Abstract: To implement a single-chip ultrasonic imaging solution, on-chip signal processing may be employed in the receive signal path to reduce data bandwidth and a high-speed serial data module may be used to move data for all received channels off-chip as digital data stream. The digitization of received signals on-chip allows advanced digital signal processing to be performed on-chip, and thus permits the full integration of an entire ultrasonic imaging system on a single semiconductor substrate. Various novel waveform generation techniques, transducer configuration and biasing methodologies, etc., are likewise disclosed. HIFU methods may additionally or alternatively be employed as a component of the "ultrasound- on- a-chip" solution disclosed herein.

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