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    31.
    发明专利
    未知

    公开(公告)号：DE69012644T2

    公开(公告)日：1995-04-06

    申请号：DE69012644

    申请日：1990-05-17

    Applicant: CANON KK

    Inventor： NOSE HIROYASU ,  YAMANO AKIHIKO ,  OGUCHI TAKAHIRO ,  MIYAZAKI TOSHIHIKO ,  KAWASE TOSHIMITSU

    IPC: G01B7/00 ,  G01B7/004 ,  G01D5/244 ,  G01D5/245 ,  G01Q20/02 ,  G01Q20/04 ,  H01J37/304 ,  H01L21/68 ,  H01J37/317

    Abstract: A position detecting apparatus for detecting a relative position of two objects which are relatively moved is disclosed. The apparatus has a probe (107), a probe driving device (110), a position detecting device (115) and an object driving device (116). The probe (107) is so provided for the first object (101) of the two objects as to face the surface of the second object (103) of the two objects so as to read information from the surface of the second object (103). The probe driving device (110) allows the probe to two-dimensionally scan on the surface of the second object (103) so that the probe (107) reads the two-dimensional information from the surface of the second object (103). The position detecting device (115) detects a relative positional relation of the two objects (101, 103) by comparing the two-dimensional information obtained by the two-dimensional scan of the probe (107) by the probe driving (110) device with reference to two-dimensional information. The object driving device (116) executes the relative positioning of the two objects (101, 103) on the basis of the result of the detection of the position detecting device (115).

    32.
    发明专利
    未知

    公开(公告)号：DE68915940D1

    公开(公告)日：1994-07-14

    申请号：DE68915940

    申请日：1989-11-06

    Applicant: CANON KK

    Inventor： NOSE HIROYASU ,  TAKAMATSU OSAMU ,  MIYAZAKI TOSHIHIKO ,  KAWASE TOSHIMITSU

    IPC: G01B7/34 ,  G01B21/30 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/252 ,  H01J37/28 ,  H02N2/00

    Abstract: A probe unit (Fig.1) is provided that is suitable for example for use in a scanning tunnel microscope or the like. The electrical probe contact (7) of this unit is centrally located and mounted upon a flexible member (4,5,6). The flexible member (4,5,6) is symmetrically supported (3) at its periphery and is constrained thus so that the electrical probe contact (7) can only move back and forth in a single direction. Flexure of the flexible member (4,5,6) may be driven by electrostatic or piezoelectric forces. Alternatively, the flexible member may include a layer of piezoelectric material, the elongation or contraction of which will cause flexure.

    37.
    发明专利
    未知

    公开(公告)号：DE69128317T2

    公开(公告)日：1998-04-09

    申请号：DE69128317

    申请日：1991-08-13

    Applicant: CANON KK

    Inventor： MIYAZAKI TOSHIHIKO ,  NOSE HIROYASU ,  KURODA RYO ,  KAWASE TOSHIMITSU ,  SHINJO KATSUHIKO

    IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q80/00 ,  G11B5/592 ,  G11B9/00 ,  G11B9/14 ,  H01J37/28 ,  H01L41/09 ,  G01N27/00

    Abstract: A micro-displacement type information detection probe device capable of following all of the undulation on the mu m order, etc. and the periodical surface unevenness on the nm order, etc. of the recording medium or the substrate in performing recording, reproduction, etc. by use of tunnel current, etc. is provided. By forming a cantilever 701 of the first stage by extending the insulation layer laminated on the substrate, providing a layer structure 708 - 710 having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever 702 of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe 703 at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever 701 of the above first stage is displaced.

    38.
    发明专利
    未知

    公开(公告)号：DE69127381T2

    公开(公告)日：1998-01-22

    申请号：DE69127381

    申请日：1991-01-15

    Applicant: CANON KK

    Inventor： SAKAI KUNIHIRO ,  KAWASE TOSHIMITSU ,  YAMANO AKIHIKO ,  KURODA RYO ,  NOSE HIROYASU

    IPC: G11B9/00 ,  G11B9/08 ,  G11B11/08

    Abstract: An information processing apparatus comprises a recording medium having at least an underlying electrode and a photoconductive thin film and having an insulating or semiconducting recording region capable of accumulating an electric charge; and a probe electrode. The invention relates to an information processing method, comprising employing the apparatus; applying a voltage between the underlying electrode and the probe electrode to inject the electric charge into the recording region to record information.

    40.
    发明专利
    未知

    公开(公告)号：DE69126343T2

    公开(公告)日：1997-10-02

    申请号：DE69126343

    申请日：1991-03-07

    Applicant: CANON KK

    Inventor： OGUCHI TAKAHIRO ,  SAKAI KUNIHIRO ,  KAWASE TOSHIMITSU ,  YAMANO AKIHIKO ,  KURODA RYO

    IPC: G01Q60/00 ,  G01Q70/08 ,  G11B9/00 ,  G11B9/14 ,  G11B13/00

    Abstract: This specification discloses a method of recording information on a recording medium which has the relative scanning of the recording medium by a probe for information recording, the relative scanning being effected along the surface of the recording medium, the recording medium being capable of forming two or more kinds of state changes relative to the state of non-recording, and a recording process onto the recording medium through the probe effecting the relative scanning, the recording process being carried out by intermittently forming bits on the recording medium, each of the bits being formed with one of the two or more kinds of state changes in conformity with recording information. The specification also discloses a method of reproducing information recorded on a recording medium by such information recording method. The specification further discloses an apparatus for carrying out the information recording method, and an apparatus for carrying out the information reproducing method.

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