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    POSITIONAL DEVIATION MEASURING DEVICE AND METHOD THEREOF
    35.
    发明专利
    POSITIONAL DEVIATION MEASURING DEVICE AND METHOD THEREOF 未知

    公开(公告)号：CA2078731A1

    公开(公告)日：1993-03-28

    申请号：CA2078731

    申请日：1992-09-21

    Applicant: CANON KK

    Inventor： NOSE NORIYUKI ,  YOSHII MINORU ,  SAITOH KENJI ,  OSAWA HIROSHI ,  SENTOKU KOICHI ,  TSUJI TOSHIHIKO ,  MATSUMOTO TAKAHIRO

    IPC: H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  G01B9/02

    Abstract: A device and method for measuring the positional deviation between a plurality of diffraction gratings (2a,2b) formed on the same object (1) include an illumination optical system (3,6,20,21) for illuminating the plurality of diffraction gratings with a light beam, the illumination by the optical system generating a plurality of diffracted light beams from the plurality of diffraction gratings, an interference optical system (22,23,10) for forming at least one interference light beam from the plurality of diffracted light beams, a detector (12,14) for detecting the at least one interference light beam, the result of the detection serving as the basis for measuring the positional deviation between the plurality of diffraction gratings, and a measuring portion (31-33,41-44) for measuring the relative positional relation between the illumination optical system and the plurality of diffraction gratings.

    POSITION DETECTOR
    36.
    发明专利
    POSITION DETECTOR 未知

    公开(公告)号：CA2078726A1

    公开(公告)日：1993-03-28

    申请号：CA2078726

    申请日：1992-09-21

    Applicant: CANON KK

    Inventor： MATSUMOTO TAKAHIRO ,  NOSE NORIYUKI ,  YOSHII MINORU ,  SAITOH KENJI ,  HASEGAWA MASANOBU ,  SENTOKU KOICHI

    IPC: G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01B9/00

    Abstract: A position detector includes a diffraction grating provided on the surface of an object, an illumination system for illuminating the diffraction grating, a detection system for detecting diffracted light diffracted from the diffraction grating, and a processing system for detecting positional information relating to the object, The illumination system emits a first pair of beams which are diffracted by the diffraction grating and interfere with each other, and emits a second pair of beams which are diffracted by the diffraction grating and also interfere with each other. The first pair of beams are incident upon the diffraction grating along a plane extending in a first direction in which the diffraction grating extends. The second pair of beams are incident upon the diffraction grating along a plane extending in a second direction in which the diffraction grating extends. The first and second directions are different from a grating line direction. The detection system detects the interfering light and generates first and second beat signals therefrom. The processing system detects positional information with respect to the first direction from the phase state of the first beat signal and with respect to the second direction from the phase state of the second beat signal.

    39.
    发明专利
    未知

    公开(公告)号：FR2615281A1

    公开(公告)日：1988-11-18

    申请号：FR8806317

    申请日：1988-05-10

    Applicant: CANON KK

    Inventor： NOSE NORIYUKI ,  YOSHII MINORU ,  NIWA YUKICHI ,  KURODA RYO

    IPC: G01D5/38 ,  G02B27/44 ,  G01B9/02

    Abstract: A device for measuring a moving distance of two relatively moving objects includes a first diffraction grating provided on one of the two objects and disposed along the relatively moving direction of the two objects, and a measuring portion provided on the other object. The measuring portion includes a second diffraction grating, a light source and a photodetecting system, wherein the light source provides lights which are projected upon two points on the second diffraction grating so that they emanate from the two points in the form of diffraction lights having different diffraction orders. The diffraction lights are directed to the same point on the first diffraction grating and are diffracted again by the first diffraction grating so that they are emitted in the same direction, and the photodetecting system is operable to detect a change in the light intensity caused due to the interference of the two lights emanating from the first diffraction grating. The device further includes a detecting system for detecting the relative moving distance of the two objects on the basis of the detection by the photodetecting.

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