Abstract:
The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.
Abstract:
A nozzle structure is provided comprising a monolithic body having an array of nozzles. The nozzles having openings with sectional openings having heights of about 100 nm or less. The nozzles are generally associated with one or more well structures.
Abstract:
A nozzle structure is provided comprising a monolithic body having an array of nozzles. The nozzles having openings with sectional openings having heights of about 100 nm or less. The nozzles are generally associated with one or more well structures.
Abstract:
Die Erfindung betrifft eine Vorrichtung insbesondere für ein Patch-Clamping von Vesikeln und/oder für ein Dispensieren von kleinen, definierten Flüssigkeitsmengen auf Oberflächen, bei welcher in einem Substrat (2) zumindest eine Pipette in Form eines Durchgangsloches (8) mit einem vorbestimmten Durchmesser ausgebildet ist, wobei ein Rand (16) des Durchgangsloches (8) um ein vorbestimmtes Mass von einer benachbarten Oberfläche (4) des Substrats (2) vorsteht, und ein Verfahren zur Herstellung der Vorrichtung mit folgenden Schritten: Ausbilden zumindest eines Loches (8), Ausbilden zumindest einer veränderten Oberflächenschicht (12) auf zumindest den Innenflächen des Loches (8), selektives Abtragen des Substrates (2), wobei die veränderte Oberflächenschicht (12) im wesentlichen nicht angegriffen wird, so dass diese über eine Oberfläche (4) des Substrats vorsteht und einen vorstehenden Rand (16) bildet, wobei das Loch (8) in einem geeigneten Verfahrensschritt als Durchgangsloch ausgebildet wird.
Abstract:
A method of manufacturing a plurality of through-holes (132) in a layer (250) of first material (220) by subjecting part of the layer (250) of said first material (220) to ion beam milling. For batch-wise production, the method comprises - after a step of providing the layer (250) of first material (220) and before the step of ion beam milling, providing a second layer (250) of a second material (230) on the layer (250) of first material (220), - providing the second layer (250) of the second material (230) with a plurality of holes, the holes being provided at central locations of pits (210) in the first layer (250), and - subjecting the second layer (250) of the second material (230) to said step of ion beam milling at an angle using said second layer (250) of the second material (230) as a shadow mask.
Abstract:
A micro-machined nozzle includes a substrate (12) having a hole (14) formed on a first side (12a) that extends partially through a thickness dimension of the substrate (12) and a nozzle orifice (16) formed on a second opposite side (12b) that communicates with the hole (14). The nozzle orifice (16) has at least a portion of its interior wall serrated. A method of fabricating a micro-machined nozzle includes the steps of etching a first side (12a) of a silicon substrate (12) to form a hole (14) that extends partially through a thickness dimension of the substrate (12) and etching a second opposite side (12b) of the silicon substrate (12) to form a serrated nozzle orifice (16) that communicates with the hole (14).