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    Field emission electron gun and electron beam applied device using the same
    31.
    发明授权
    Field emission electron gun and electron beam applied device using the same 有权
    场发射电子枪和电子束施加装置使用相同

    公开(公告)号：US07732764B2

    公开(公告)日：2010-06-08

    申请号：US11831989

    申请日：2007-08-01

    Applicant: Tadashi Fujieda ,  Makoto Okai ,  Kishio Hidaka ,  Mitsuo Hayashibara ,  Shunichi Watanabe

    Inventor： Tadashi Fujieda ,  Makoto Okai ,  Kishio Hidaka ,  Mitsuo Hayashibara ,  Shunichi Watanabe

    IPC: H01J31/073 ,  H01J37/26 ,  H01J37/30

    CPC classification number: H01J37/073 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/3044 ,  H01J9/025 ,  H01J37/3174 ,  H01J2201/3043 ,  H01J2201/30434 ,  H01J2201/30469 ,  H01J2201/30484 ,  H01J2201/30488 ,  H01J2201/30496 ,  H01J2237/06341 ,  H01J2237/26

    Abstract: The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.

    Abstract translation: 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外，还要获得能量扩散比电子枪窄的电子束。 此外，还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于，在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料，用于场发射电子的提取器和用于加速电子的加速器。 此外，还将场致发射电子枪应用于各种电子束施加装置。

    FIELD ELECTRON EMISSION SOURCE AND METHOD FOR MANUFACTURING THE SAME
    32.
    发明申请
    FIELD ELECTRON EMISSION SOURCE AND METHOD FOR MANUFACTURING THE SAME 有权
    场电子发射源及其制造方法

    公开(公告)号：US20090146547A1

    公开(公告)日：2009-06-11

    申请号：US12180210

    申请日：2008-07-25

    Applicant: LI QIAN ,  LIANG LIU ,  SHOU-SHAN FAN

    Inventor： LI QIAN ,  LIANG LIU ,  SHOU-SHAN FAN

    IPC: H01J1/62 ,  H01J9/00

    CPC classification number: H01J31/127 ,  H01J1/304 ,  H01J3/021 ,  H01J9/025 ,  H01J2201/30484 ,  H01J2201/30492 ,  H01J2201/30496 ,  H01J2203/0272

    Abstract: A method for manufacturing a field electron emission source includes: providing an insulating substrate; patterning a cathode layer on at least one portion of the insulating substrate; forming a number of emitters on the cathode layer; coating a photoresist layer on the insulating substrate, the cathode layer and the emitters; exposing predetermined portions of the photoresist layer to radiation, wherein the exposed portions are corresponding to the emitters; forming a mesh structure on the photoresist layer; and removing the exposed portions of photoresist layer. The method can be easily performed and the achieved the field electron emission source has a high electron emission efficiency.

    Abstract translation: 场致发射源的制造方法包括：提供绝缘基板; 在绝缘基板的至少一部分上构图阴极层; 在阴极层上形成多个发射体; 在绝缘基板，阴极层和发射体上涂覆光致抗蚀剂层; 将光致抗蚀剂层的预定部分暴露于辐射，其中暴露部分对应于发射体; 在光致抗蚀剂层上形成网状结构; 并去除光致抗蚀剂层的暴露部分。 该方法可以容易地进行，并且实现了场电子发射源具有高的电子发射效率。

    CARBON NANOTUBE PASTE FOR A HIGH POWER FIELD EMISSION EMITTER AND METHOD OF MANUFACTURING THE SAME
    33.
    发明申请
    CARBON NANOTUBE PASTE FOR A HIGH POWER FIELD EMISSION EMITTER AND METHOD OF MANUFACTURING THE SAME 审中-公开
    用于高功率场排放发生器的碳纳米管浆料及其制造方法

    公开(公告)号：WO2016111405A1

    公开(公告)日：2016-07-14

    申请号：PCT/KR2015/000593

    申请日：2015-01-21

    Applicant: VACUUM SCIENCE & INSTRUMENT CO., LTD

    Inventor： KIM, Dae-Jun ,  KIM, Dong-Il ,  PARK, Kwan-Soo

    IPC: H01J1/304 ,  C01B31/02

    CPC classification number: H01J1/304 ,  H01J9/025 ,  H01J2201/30469 ,  H01J2201/30484 ,  H01J2201/30488 ,  H01J2201/30496

    Abstract: The present invention provides a carbon nanotube (CNT) paste and a method of manufacturing the CNT paste. The carbon nanotube (CNT) paste includes first nano powder including insulating refractory material, second nano powder including metallic oxide material, solvent disgregating the first nano powder and the second nano powder, carbon nano tube disgregated in the solvent to operate as a field emission source, and organic binder included in the solvent for an attachment with an emitter electrode. Therefore, high power characteristics may be maintained even after high temperature process is performed for forming a CNT emitter.

    Abstract translation: 本发明提供一种碳纳米管（CNT）糊剂及其制造方法。 碳纳米管（CNT）浆料包括包括绝缘耐火材料的第一纳米粉末，包含金属氧化物材料的第二纳米粉末，分散第一纳米粉末和第二纳米粉末的溶剂，分散在溶剂中作为场发射源的碳纳米管 以及包含在用于与发射极连接的溶剂中的有机粘合剂。 因此，即使在用于形成CNT发射体的高温处理之后，也可以保持高功率特性。

    Field emission electron gun and electron beam application device using the same
    36.
    发明专利
    Field emission electron gun and electron beam application device using the same 审中-公开
    场发射电子枪和电子束应用装置

    公开(公告)号：JP2008041289A

    公开(公告)日：2008-02-21

    申请号：JP2006210454

    申请日：2006-08-02

    Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

    Inventor： FUJIEDA TADASHI ,  OKAI MAKOTO ,  HIDAKA KISHIFU ,  HAYASHIBARA MITSUO ,  WATANABE SHUNICHI

    IPC: H01J1/304 ,  H01J37/073

    CPC classification number: H01J37/073 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/3044 ,  H01J9/025 ,  H01J37/3174 ,  H01J2201/3043 ,  H01J2201/30434 ,  H01J2201/30469 ,  H01J2201/30484 ,  H01J2201/30488 ,  H01J2201/30496 ,  H01J2237/06341 ,  H01J2237/26

    Abstract: PROBLEM TO BE SOLVED: To facilitate adjustment of the optical axis of an electron beam from a field emission electron gun equipped with an electron source made of a fibered carbonic material, and to obtain an electron beam having an energy width narrower than that of the electron gun, and to provide a high-resolution electron beam application device equipped with the field emission electron gun. SOLUTION: The field emission electron gun includes the electron source made of the fibered carbonic material and a conductive base material supporting it, an extraction unit that causes field emission of electrons, and an accelerator that accelerates electrons. In the field emission electron gun, the fibered carbonic material is sheathed with a material having a band gap. The field emission electron gun applies to various electron beam application devices. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：为了便于从配备有由纤维碳材料制成的电子源的场致发射电子枪对电子束的光轴进行调节，并且获得具有比其更窄的能量宽度的电子束的电子束。 的电子枪，并提供配备有场发射电子枪的高分辨率电子束施加装置。 解决方案：场发射电子枪包括由纤维碳材料制成的电子源和支撑它的导电基底材料，引起电子场发射的提取单元和加速电子的加速器。 在场致发射电子枪中，纤维状碳材料用具有带隙的材料包覆。 场发射电子枪适用于各种电子束施加装置。 版权所有（C）2008，JPO＆INPIT

    고출력 전계방출 에미터용 카본나노튜브 페이스트 및 이의 제조방법
    39.
    发明公开
    고출력 전계방출 에미터용 카본나노튜브 페이스트 및 이의 제조방법 有权
    碳纳米管浆料及其制造方法

    公开(公告)号：KR1020160084153A

    公开(公告)日：2016-07-13

    申请号：KR1020150000702

    申请日：2015-01-05

    Applicant: (주) 브이에스아이

    Inventor： 김대준 ,  김동일 ,  박관수

    IPC: H01J35/06 ,  B82Y10/00 ,  B82Y40/00

    CPC classification number: H01J1/304 ,  H01J9/025 ,  H01J2201/30469 ,  H01J2201/30484 ,  H01J2201/30488 ,  H01J2201/30496 ,  H01J35/065 ,  B82Y10/00 ,  B82Y40/00 ,  Y10S977/939

    Abstract: 본발명은카본나노튜브페이스트및 이의제조방법에관한것으로, 카본나노튜브페이스트는, 절연내화물로이루어진제1 나노파우더, 금속산화물로이루어진제2 나노파우더, 제1 나노파우더및 제2 나노파우더를분산시키기위한용매, 전계방출원으로용매에분산되는카본나노튜브, 및에미터전극과의접착을위해용매에첨가되는유기바인더를포함한다. 따라서, 카본나노튜브에미터의제조를위한고온공정을거친후에도고출력특성을유지할수 있다.

    Abstract translation: 本发明涉及碳纳米管糊及其制造方法。 碳纳米管糊包括：由绝缘耐火材料制成的第一纳米粉末; 由金属氧化物材料制成的第二纳米粉末; 用于分散第一纳米粉末和第二纳米粉末的溶剂; 分散在溶剂中的碳纳米管作为场致发射源工作; 和添加到溶剂中用于附着到发射电极的有机粘合剂。 因此，即使在进行高温处理以形成碳纳米管发射体之后，也可以维持高功率特性。

    전자 방출원 형성용 수계 조성물 및 이를 이용한 전자방출원
    40.
    发明公开
    전자 방출원 형성용 수계 조성물 및 이를 이용한 전자방출원 无效
    用于制备电子发射器的水基组合物和使用其制备的发射体

    公开(公告)号：KR1020090090168A

    公开(公告)日：2009-08-25

    申请号：KR1020080015475

    申请日：2008-02-20

    Applicant: 삼성에스디아이 주식회사

    Inventor： 김윤진 ,  김재명 ,  주규남 ,  박현기 ,  이소라 ,  문희성

    IPC: H01J1/304 ,  H01J9/02 ,  C01B31/02 ,  B82Y40/00

    CPC classification number: H01J1/304 ,  H01J31/127 ,  H01J2201/30446 ,  H01J2201/30469 ,  H01J2201/30484 ,  H01J2329/0439 ,  H01J2329/0455 ,  H01J2329/0465 ,  B82Y40/00 ,  H01J9/025

    Abstract: A water-based composition for the emitter formation and an emitter using the same are provided to improve the performance of emission by manufacturing the emitter with the composition in which the actual carbon does not exist. An electrode(210) pattern is molded on a substrate(200). The lift-off type photoresist is coated on a substrate including the electrode pattern. The photoresist is left through the UV(Ultraviolet rays), the hard baking process, the flood exposure process and the photolithography process. The water-based composition for the emitter formation is coated. The drying procedure is performed. In the lift off process, an emitter(350) and the photoresist are separated. The emitter pattern is clearly molded by performing the hardening process.

    Abstract translation: 提供了用于发射体形成的水基组合物和使用其的发射体，以通过用不存在实际碳的组成制造发射体来改善发射性能。 在基板（200）上模制电极（210）图案。 剥离型光致抗蚀剂涂布在包括电极图案的基板上。 光致抗蚀剂通过UV（紫外线），硬烘烤工艺，泛光曝光工艺和光刻工艺。 用于发射体形成的水基组合物被涂覆。 执行干燥程序。 在剥离过程中，发射体（350）和光致抗蚀剂被分离。 发射极图案通过进行硬化处理而明显地成型。

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