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    VACUUM MEASURING GAUGE
    32.
    发明公开
    VACUUM MEASURING GAUGE 有权
    下压力监测

    公开(公告)号：EP1853890A1

    公开(公告)日：2007-11-14

    申请号：EP06707346.0

    申请日：2006-03-01

    Applicant: Inficon GmbH

    Inventor： KNAPP, Wolfram ,  WÜEST, Martin

    IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J1/30 ,  H01J1/304 ,  H01J41/00 ,  H01J41/02 ,  H01J41/04 ,  H01J41/06 ,  H01J41/08 ,  H01J41/10 ,  H01J19/00 ,  H01J19/02 ,  H01J19/04 ,  H01J19/10

    CPC classification number: G01L21/32 ,  G01L21/12 ,  H01J1/3042 ,  H01J41/04

    Abstract: An electron-emitting cathode (6) consists of an electrically conducting emitter layer (7) attached to a side wall (2) which consists of stainless steel and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (lie) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (VG) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (VA) and is regulated in such a way that an anode current (IA) is kept constant. The emitter layer (7) may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

    Electrode configuration and pressure measuring apparatus
    33.
    发明公开
    Electrode configuration and pressure measuring apparatus 审中-公开
    Elektrodenanordnung und Druckmessvorrichtung

    公开(公告)号：EP1698878A1

    公开(公告)日：2006-09-06

    申请号：EP05004855.2

    申请日：2005-03-04

    Applicant: Inficon GmbH

    Inventor： Knapp, Wolfram ,  Wüest, Martin

    IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J1/30 ,  H01J1/304 ,  H01J41/00 ,  H01J41/02 ,  H01J41/04 ,  H01J41/06 ,  H01J41/08 ,  H01J41/10 ,  H01J19/00 ,  H01J19/02 ,  H01J19/04 ,  H01J19/10 ,  H01J19/24 ,  H01J19/14 ,  H01J19/68 ,  H01J41/14 ,  H01J41/16

    CPC classification number: G01L21/32 ,  G01L21/12 ,  H01J1/3042 ,  H01J41/04

    Abstract: An electron-emitting cathode (6) consists of an electricaly conducting emitter layer (7) attached to a side wall (2) and a gate (9) which is fixed at a mall distance inside a concave emitter surface of the emitter layer (7). The cathode (6) surrounds a reaction area (3) containing a cylindrical grid-like anode (5) and a central ion collector (4) which consists of a straight axial filament. An ion collector current (I IC ) reflecting the densitiy of the gas in the reaction region (3) is measured by a current meter (11) while a gate voltage (Vc) is kept between the ground voltage of the emitter layer (7) and a higher anode voltage (V A ) and is regulated in such a way that an anode current (T A ) is kept constant. The emitter layer (7) may comprise an array of metal, e.g., nickel or molybdenum tips or consist essentially of a semiconductor material like silicon, preferably coated by, e.g., carbide, diamond-like carbon or molybdenum, or of carbon nanotubes or it may be a roughened surface portion of the side wall surface. The gate (9) may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

    Abstract translation: 电子发射阴极（6）由连接到侧壁（2）的电气传导发射极层（7）和在发射极层（7）的凹面发射器表面内的商场距离处固定的栅极（9）组成 ）。 阴极（6）围绕包含圆柱形栅状阳极（5）的反应区域（3）和由直轴向丝线组成的中心离子收集器（4）。 通过电流计（11）测量反映反应区域（3）中气体密度的离子集电极电流（I IC），同时在栅极电压（Vc）保持在发射极层（7）的接地电压之间， 和较高的阳极电压（VA），并且以使得阳极电流（TA）保持恒定的方式被调节。 发射极层（7）可以包括金属阵列，例如镍或钼尖端，或者基本上由诸如硅的半导体材料组成，优选地由碳化物，类金刚石碳或钼或碳纳米管或碳​​纳米管涂覆 可以是侧壁表面的粗糙表面部分。 栅极（9）可以是栅格，或者它可以由分布在发射区上的金属膜覆盖隔离物的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。

    Miniature ionization gauge utilizing multiple collectors
    34.
    发明公开
    Miniature ionization gauge utilizing multiple collectors 失效
    Miniaturisieter Mehrfachkollektorionisationsdruckmesser

    公开(公告)号：EP0899774A3

    公开(公告)日：2006-01-11

    申请号：EP98102090.2

    申请日：1998-02-06

    Applicant: HELIX TECHNOLOGY CORPORATION

    Inventor： Bills, Daniel Granville

    IPC: H01J41/04

    CPC classification number: H01J41/04

    Abstract: An ionization gauge comprises a source of electrons which is disposed outside an anode volume defined by an open anode. A plurality of ion collector electrodes is disposed within said anode volume. A plurality of axially extending anode support posts support the open anode, said anode support posts being electrically connected to the open anode. The plurality of ion collector electrodes are respectively located sufficiently close to said plurality of axially extending anode support posts so as to substantially repel said electrons from said anode support posts.

    三極管型電離真空計
    36.
    发明专利
    三極管型電離真空計 有权

    公开(公告)号：JPWO2016139894A1

    公开(公告)日：2017-10-26

    申请号：JP2017503333

    申请日：2016-02-10

    Applicant: 株式会社アルバック

    Inventor： 宮下　剛 ,  剛 宮下 ,  豊昭 中島 ,  豊昭 中島 ,  万沙洋 福原 ,  万沙洋 福原

    IPC: G01L23/32

    CPC classification number: G01L21/32 ,  H01J41/04

    Abstract: イオンコレクタ表面から放出される粒子の影響を少なくして測定誤差なく測定対象物の圧力を測定することができる三極管型電離真空計を提供する。三極管型電離真空計IGは、フィラメント2と、フィラメントの周囲に配置される筒状の輪郭を有するグリッド3と、グリッドの周囲に同心に配置される筒状のイオンコレクタ4とを備える。イオンコレクタの母線方向の長さL2をグリッドの母線方向の長さL1の6%〜80%の範囲に設定し、イオンコレクタの母線方向の両端部における粒子放出領域が省略されるように構成する。

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