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公开(公告)号：KR1020020010891A
公开(公告)日：2002-02-06
申请号：KR1020017008232
申请日：1999-12-10
Applicant: 도쿄엘렉트론가부시키가이샤
IPC: H05H1/00
CPC classification number: H01J37/32834 , H01J41/12 , H01J41/18 , H05H1/54
Abstract: 본발명은제 1 영역및 제 2 영역으로부터이온을펌핑하는방법및 장치에관한것이다. 본발명의펌프는, 다수의도관(30)을한정하는개구를구비한구획부재와, 도관에연장되는자력을제공하는자석(24) 그룹과, 도관으로부터제 2 영역으로이온을가속하는정전계를발생시키기위한다수의전위소스(14)를구비한다.
Abstract translation: 一种用于从第一到第二区域泵送离子的等离子体泵和方法，所述泵包括具有限定多个导管（30）的通孔的分隔构件; 一组磁体（24），用于提供延伸到导管的磁力; 以及用于产生将离子从管道加速到第二区域的静电场的多个电位源（14）。
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公开(公告)号：KR1020060013545A
公开(公告)日：2006-02-10
申请号：KR1020057021975
申请日：2004-05-18
Applicant: 가부시끼가이샤 도시바
Abstract: A sputter ion pump comprising a metallic pump container (51) containing a cathode (52) and an anode (53) disposed oppositely to each other, and a permanent magnet (57) located between the cathode and the inner surface of the pump container. After the anode, the cathode and a magnetic material are arranged in the pump container, the pump container is magnetized from the outside of the pump container to form a the permanent magnet.
Abstract translation: 一种溅射离子泵，包括含有彼此相对设置的阴极（52）和阳极（53）的金属泵容器（51）和位于泵容器的阴极和内表面之间的永磁体（57）。 在阳极之后，阴极和磁性材料布置在泵容器中，泵容器从泵容器的外部被磁化，以形成永磁体。
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公开(公告)号：US11708824B2
公开(公告)日：2023-07-25
申请号：US16071476
申请日：2017-01-20
Applicant: APR Technologies AB
Inventor： Robert Thorslund , Peter Nilsson
IPC: F04B19/00 , H01L23/467 , F04B53/00 , F28F13/16 , F04B43/04 , F04B37/10 , F04B33/00 , F04B39/06 , H01J41/18 , F04B17/03 , F04B49/06 , H02K44/00 , H02K44/02
CPC classification number: F04B19/006 , F04B19/00 , F04B33/00 , F04B37/10 , F04B39/06 , F04B43/043 , F04B53/00 , F28F13/16 , H01J41/18 , H01L23/467 , F04B17/03 , F04B49/06 , H01L2924/00 , H01L2924/0002 , H02K44/00 , H02K44/02
Abstract: A fluidic device is disclosed, comprising an enclosed passage that is adapted to convey a circulating fluid. The enclosed passage comprises a flow unit having a first electrode and a second electrode offset from the first electrode in a downstream direction of a flow of the circulating fluid. The first electrode is formed as a grid structure and arranged to allow the circulating fluid to flow through the first electrode. The fluidic device may be used for controlling or regulating the flow of the fluid circulating in the enclosed passage, and thereby act as a valve opening, reducing or even closing the passage.
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公开(公告)号：US20160233063A1
公开(公告)日：2016-08-11
申请号：US14874165
申请日：2015-10-02
Applicant: Hamilton Sundstrand Corporation
Inventor： Ben D. Gardner , David E. Burchfield
IPC: H01J41/12
Abstract: Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process. In various embodiments, one or more wire internal to the anode structure and having a time-varying electric potential may alter the trajectory of the ions leaving the anode tube, as may the shape of the anode near the ends of the anode tube.
Abstract translation: 在离子泵内，由于阳极管的对称性和大致对称的电场存在，加速离子离开阳极管的中心部分。 阳极管中的表观对称性可以通过使阳极管纵向分段并对每个段施加独立电压而改变。 两个相邻段上的电压可以以不同的速率变化以实现光栅化处理。 在各种实施例中，阳极结构内部并且具有随时间变化的电势的一个或多个导线可以改变离开阳极管的离子的轨迹，阳极的形状可以靠近阳极管的端部。
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公开(公告)号：US20070280834A1
公开(公告)日：2007-12-06
申请号：US11807644
申请日：2007-05-30
Applicant: Luca Bonmassar , Michele Mura
Inventor： Luca Bonmassar , Michele Mura
IPC: F04B37/02
CPC classification number: H01J41/18
Abstract: A sputter ion pump (1) has an improved magnet assembly comprising primary magnets (9a, 9b), disposed on opposite ends of the pump cells of an anode, and secondary magnets (11; 11′, 11″) disposed on one side only of the pump cells, whereby the assembly exhibits an asymmetrical configuration. The sputter ion pump with the improved magnet assembly allows for attaining high pumping speeds even at low pressures with reduced size, weight and manufacturing cost of the pump itself.
Abstract translation: 溅射离子泵（1）具有改进的磁体组件，其包括设置在阳极的泵电池的相对端上的主磁体（9a，9b）和设置在阳极上的次级磁体（11; 11'，11“） 泵单元仅一侧，由此组件呈现不对称的构造。 具有改进的磁体组件的溅射离子泵允许即使在低压下获得高泵送速度，减小了泵本身的尺寸，重量和制造成本。
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Patent Agency Ranking
公开(公告)号：US20020159891A1
公开(公告)日：2002-10-31
申请号：US09959879
申请日：2001-11-09
Inventor： Guo Hua Shen
IPC: H02K044/08
CPC classification number: H01J41/18 , H01J27/08 , H01J2237/1825
Abstract: There is provided a sputter ion pump that it has a simple structure, a size and a weight can be reduced, the magnetic fields in the vicinity of a central axis can be nullified in the both of a radial and axial directions, and ultimate pressure of the pump can be increased. The sputter ion pump comprises a vacuum chamber that includes an inner wall having a cylindrical section where is formed to be rugged in a cross section. The rugged cylindrical section has outer recesses each of which is provided with a permanent magnets each having a same shape and a same characteristic so that a magnetic pole is directed to a same direction. The rugged cylindrical section has also inner recesses each of which is provided with a cylindrical anode electrode member spaced from the vacuum chamber wall. The rugged cylindrical section of the vacuum chamber wall is formed as a cathode electrode. A cylindrical shield member having a peripheral portion provided with evacuating bores is provided coaxially to the permanent magnets and anode electrodes. The permanent magnets and anode electrode members are arranged with equal spacing in a axis symmetrical configuraton.
Abstract translation: 提供了一种溅射离子泵，其具有简单的结构，可以减小尺寸和重量，中心轴附近的磁场可以在径向和轴向方向上无效，并且极限压力 泵可以增加。 溅射离子泵包括真空室，该真空室包括具有圆柱形部分的内壁，其形成为在横截面中坚固。 凹凸的圆柱形部分具有外部凹槽，每个凹槽设置有各自具有相同形状和相同特性的永磁体，使得磁极指向相同的方向。 凹凸的圆柱形部分还具有内部凹槽，每个凹槽设置有与真空室壁间隔开的圆柱形阳极电极构件。 真空室壁的凹凸圆柱形部分形成为阴极电极。 具有设置有抽气孔的周边部分的圆筒形屏蔽构件与永磁体和阳极电极同轴地设置。 永磁体和阳极电极构件以等轴配置的等间距布置。
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37.发明授权
公开(公告)号：US5240381A
公开(公告)日：1993-08-31
申请号：US833853
申请日：1992-02-12
Applicant: Kazutoshi Nagai , Tohru Satake , Hideaki Hayashi , Takanari Yasui
Inventor： Kazutoshi Nagai , Tohru Satake , Hideaki Hayashi , Takanari Yasui
Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.
Abstract translation: 公开了一种包括这种高真空装置和辅助真空泵的排气装置和高真空泵送装置，其中在真空容器中实现高真空，使得真空容器内的气体分子被离子化并加速而被排出， 此外，在高真空泵送单元中，从真空泵向后扩散或解吸的那些气体分子被离子化并加速以返回到真空泵。
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公开(公告)号：US3614440A
公开(公告)日：1971-10-19
申请号：US3614440D
申请日：1968-06-24
Applicant: KAMAN SCIENCES CORP , ELISABETH HELEN CARR
Inventor： CARR BARNEY J
CPC classification number: F03H1/00 , H01J27/02 , H01J27/06 , H01J41/00 , H01J41/06 , H01J41/18 , H05H3/06
Abstract: Apparatus for ionizing gases at very low pressures comprising inner and outer electrodes wherein the inner electrode is substantially circular in cross section and the outer electrode surrounding the inner electrode may be other than a figure of revolution or may be eccentrically positioned with respect to the inner electrode which inner electrode is less in length than two times the length of the surrounding outer electrode and is spaced therefrom a distance which is greater than the diameter of the inner electrode for a distance of not less than two-thirds the length of the surrounding outer electrode.
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公开(公告)号：US3383543A
公开(公告)日：1968-05-14
申请号：US41971964
申请日：1964-12-21
Applicant: RAYTHEON CO
Inventor： ROBERT HARPER , HANS-JOACHIM KRAHN
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公开(公告)号：US3240421A
公开(公告)日：1966-03-15
申请号：US25364063
申请日：1963-01-24
Applicant: ITT
Inventor： FARNSWORTH PHILO T
IPC: H01J41/18
CPC classification number: H01J41/18
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