公开(公告)号：US20040112833A1

公开(公告)日：2004-06-17

申请号：US10321301

申请日：2002-12-16

Inventor： Tihiro Ohkawa ,  Robert L. Miller

IPC: C02F001/48

CPC classification number: H01J49/42 ,  H01J49/288

Abstract: A band gap mass filter for separating particles of mass (M1) from particles of mass (M2) in a multi-species plasma includes a chamber defining an axis. Coils around the chamber generate an axially aligned magnetic field defined (BnullB0nullB1 sin nullt), with an antenna generating the sinusoidal component (B1 sin nullt) to induce an azimuthal electric field (Enull) in the chamber. The resultant crossed electric and magnetic fields place particles M2 on unconfined orbits for collection inside the chamber, and pass the particles M1 through said chamber for separation from the particles M2. Unconfined orbits for particles M2 are determined according to an null-null plot 1 ( null = null 0 2 + null 1 2 / 2 4 null null 2 , and null null null null = null 0 null null 1 8 null null 2 ) , where null0 is the cyclotron frequency for particles with mass/charge ratio M, and wherein null0nullB0/M and null1nullB1/M.

公开(公告)号：US5747815A

公开(公告)日：1998-05-05

申请号：US685649

申请日：1996-07-24

Applicant: Robert M. Young ,  Carl B. Freidhoff ,  Timothy T. Braggins ,  Thomas V. Congedo

Inventor： Robert M. Young ,  Carl B. Freidhoff ,  Timothy T. Braggins ,  Thomas V. Congedo

IPC: H01J49/28 ,  B01D59/44 ,  H01J49/00

CPC classification number: H01J49/147 ,  H01J49/0018 ,  H01J49/288

Abstract: A gas ionizer is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The gas ionizer is located in a cavity provided in a semiconductor substrate which includes an inlet for introducing the gas to be analyzed. The gas ionizer ionizes the sample of gas drawn into the cavity through the inlet to generate an ionized sample gas. The gas ionizer generates energetic particles or photons which bombard the gas to be sampled to produce ionized gas. The energetic particles or photons can be generated by reverse-bias p-n junctions, radioactive isotopes, electron discharges, point emitters, and thermionic electron emitters. A layer of cesium chloride or cesium iodide having a low work function is formed on top of the reverse-bias p-n junction gas ionizer to increase current emitted per junction area and so that the gas ionizer can be exposed to atmospheric oxygen during storage and can operate in reduced atmosphere with no additional treatments. The cesium chloride layer and the cesium iodide layer do not readily electromigrate. A fabrication process of the mass spectrograph includes using plural masks to ensure proper exposure of resist on both flat and wall surfaces of the semiconductor surface having severe topography.

Abstract translation: 提供一种用于分析气体样品的固态质谱仪中使用的气体离子发生器。 气体离子发生器位于设置在半导体衬底中的空腔中，该半导体衬底包括用于引入待分析气体的入口。 气体离子发生器将通过入口吸入空腔的气体样品离子化，产生离子化样品气体。 气体离子发生器产生能量粒子或光子，其轰击待采样的气体以产生电离气体。 高能粒子或光子可以通过反向偏置p-n结，放射性同位素，电子放电，点发射体和热离子电子发射体产生。 在反向偏压pn结气体离子发生器的顶部形成一层具有低功函数的氯化铯或碘化铯，以增加每个接合面积的电流，从而使气体离子发生器在储存过程中暴露于大气中的氧气， 在减少的气氛，没有额外的治疗。 氯化铯层和碘化铯层不容易电解。 质谱仪的制造方法包括使用多个掩模以确保抗蚀剂在具有严重形貌的半导体表面的平坦表面和壁表面上的适当曝光。

公开(公告)号：US5616920A

公开(公告)日：1997-04-01

申请号：US538865

申请日：1995-10-04

Applicant: Erich Plies

Inventor： Erich Plies

IPC: H01J49/08 ,  H01J35/02 ,  H01J37/05 ,  H01J37/147 ,  H01J49/28 ,  H01J49/48

CPC classification number: H01J37/1477 ,  H01J35/02 ,  H01J37/05 ,  H01J49/288 ,  H01J49/48

Abstract: Purely electrical or magnetic deflection systems are usually utilized in the probe-shaping part of modern electron beam tomographs in order to remove the gas ions generated in the evacuated drift tube by electron impact from the beam. The known deflection systems, however, cause an offset of the electron beam, so that this enters extra-axially into the lens element following the deflection system. In the apparatus for removing ions from an electron beam disclosed herein, a deflection unit (Wien filter) generates an E.times.B field oriented perpendicular to the beam axis that exerts strong shearing forces only on the positively charged gas ions, but does not influence the electrons. The deflection unit is essentially composed of two tube electrodes lying at a constant potential, of an electrostatic octopole deflector, and two saddle coil pairs annularly surrounding the octopole deflector. The apparatus is useful for fast electron beam tomographs, including x-ray scanners.

Abstract translation: 通常在现代电子束断层摄影机的探针成形部分中采用纯电气或磁偏转系统，以便通过电子束从电子束中去除真空漂移管中产生的气体离子。 然而，已知的偏转系统引起电子束的偏移，使得其在偏转系统之后进入到轴向进入透镜元件。 在用于从本文公开的电子束去除离子的装置中，偏转单元（维恩滤波器）产生垂直于光束轴线定向的ExB场，其仅在带正电荷的气体离子上施加强剪切力，但不影响电子。 偏转单元基本上由位于恒定电位的静电八极偏转器的两个管电极和环形围绕八极偏转器的两个鞍形线圈组成。 该装置适用于快速电子束断层扫描仪，包括x射线扫描仪。

公开(公告)号：US5541408A

公开(公告)日：1996-07-30

申请号：US390493

申请日：1995-02-17

Applicant: Fred C. Sittler

Inventor： Fred C. Sittler

IPC: H01J27/26 ,  H01J49/16 ,  H01J49/28 ,  B01D59/44 ,  H01J49/00

CPC classification number: H01J49/168 ,  H01J27/26 ,  H01J49/0018 ,  H01J49/288

Abstract: A micromachined mass spectrometer includes an ionizer, a separation region and a detector. The ionizer is formed from an upper electrode, a center electrode and a lower electrode. Ionization of a sample gas takes place around an edge of the center electrode. Accelerating electrodes extract ionized particles from the ionizer. Ionized particles are accelerated through the separation region. A magnetic field is applied in a direction perpendicular to travel of the ionized particles through the separation region causing the trajectory of the ionized particles to bend. The mass spectrometer is formed using micromachined techniques and is carried on a single substrate.

公开(公告)号：US5536939A

公开(公告)日：1996-07-16

申请号：US320474

申请日：1994-10-07

Applicant: Carl B. Freidhoff ,  Robert M. Young

Inventor： Carl B. Freidhoff ,  Robert M. Young

IPC: H01J49/28 ,  B01D59/44 ,  H01J49/00

CPC classification number: H01J49/0018 ,  H01J49/288

Abstract: A mass filter is provided for use in a solid state mass spectrograph for analyzing a sample of gas. The mass filter is located in a cavity provided in a semiconductor substrate. The mass filter generates an electromagnetic field in the cavity which filters by mass/charge ratio an ionized portion of the sample of gas. The substrate has an inlet through which the gas to be analyzed flows through prior to reaching the mass filter. The mass filter can be either a single-focussing Wien filter or magnetic sector filter or can be a double-focussing filter which uses both an electric field and a magnetic field to separate the ions.

Abstract translation: 提供了用于分析气体样品的固态质谱仪中使用的质量过滤器。 质量过滤器位于设置在半导体衬底中的空腔中。 质量过滤器在空腔中产生电磁场，其通过质量/电荷比率将气体样品的电离部分过滤。 衬底具有入口，待分析的气体在到达质量过滤器之前流过。 质量过滤器可以是单聚焦维恩滤波器或磁性扇形滤波器，或者可以是使用电场和磁场来分离离子的双重聚焦滤波器。

公开(公告)号：US3935451A

公开(公告)日：1976-01-27

申请号：US395021

申请日：1973-09-07

Applicant: George Sargent Janes

Inventor： George Sargent Janes

IPC: B01D59/34 ,  B01D59/50 ,  H01J49/28 ,  H05H1/00 ,  H01J39/34

CPC classification number: H01J49/288 ,  B01D59/34 ,  B01D59/50 ,  H05H1/00

Abstract: Method and apparatus for separating selectively ionized particles of one isotope type from the background environment of charged and neutral particles. In particular, a particle flow is generated which contains neutral particles of plural isotope types, as well as a number of ions of the various isotope types. It is desired to selectively ionize and separately collect only those particles of one isotope type and for this purpose, an acceleration is produced in the ions of the background environment prior to selective ionization of the desired isotope particles. After selective ionization, a further acceleration, in an opposite direction, is produced upon the charged particles which results in a deflection of the selectively ionized particles towards collection surfaces and restores to generally normal flow velocity and charge distribution, the ions from the background environment.

Abstract translation: 选择性地从带电和中性粒子的背景环境中分离出一种同位素型离子化颗粒的方法和装置。 特别地，产生含有多个同位素类型的中性粒子以及各种同位素类型的多个离子的粒子流。 期望选择性地离子化并且仅分别收集一种同位素型的那些颗粒，并且为此目的，在所需同位素颗粒的选择性电离之前，在背景环境的离子中产生加速。 在选择性电离之后，在带电粒子上产生相反方向的进一步的加速，这导致选择性离子化的颗粒向收集表面的偏转并且恢复到大体正常的流速和电荷分布，来自背景环境的离子。

公开(公告)号：US08436317B1

公开(公告)日：2013-05-07

申请号：US13292455

申请日：2011-11-09

Applicant: Zhongwei Chen ,  Xuedong Liu ,  Weiming Ren

Inventor： Zhongwei Chen ,  Xuedong Liu ,  Weiming Ren

IPC: H01J1/50

CPC classification number: H01J37/05 ,  H01J49/288 ,  H01J2237/057

Abstract: This invention provides a multi-pole type Wien filter, which acts more purely approaching its fundamentally expected performance. A 12-electrode electric device acts as an electric deflector, or acts as an electric deflector and an electric stigmator together. A cylindrical 4-coil magnetic device with a magnetic core acts as a magnetic deflector. Both can produce a dipole field while only incurring a negligibly-small 3rd order field harmonic. The magnetic core enhances the strength and more preciously regulates the distribution of the magnetic field originally generated by the coils. Then two ways to construct a Wien filter are proposed. One way is based on both of the foregoing electric and magnetic devices, and the other way is based on the foregoing electric device and a conventional magnetic deflector. The astigmatism in each of such Wien filters can be compensated by the electric stigmator of the electric device.

Abstract translation: 本发明提供了一种多极型Wien滤波器，其更加纯粹地接近其根本预期的性能。 12电极电气装置用作电导向器，或者用作电导向器和电极连接器。 具有磁芯的圆柱形4线圈磁性装置用作磁导流板。 两者都可以产生偶极场，同时只产生一个可忽略的小三阶场谐波。 磁芯增强了强度，更加珍贵地调节了最初由线圈产生的磁场的分布。 然后提出构建维恩滤波器的两种方法。 一种方法是基于上述电气和磁性装置两者，另一种方法是基于前述的电气装置和常规的磁导向装置。 每个这样的维恩滤波器中的像散可以通过电气设备的电极来补偿。

公开(公告)号：US08421029B1

公开(公告)日：2013-04-16

申请号：US13298651

申请日：2011-11-17

Applicant: Weiming Ren ,  Xuedong Liu ,  Zhongwei Chen

Inventor： Weiming Ren ,  Xuedong Liu ,  Zhongwei Chen

IPC: H01J1/50

CPC classification number: H01J49/288 ,  H01J37/05 ,  H01J2237/057

Abstract: This invention provides a design of Wien filter for satisfying Wien Condition so as to ensure the Wien filter's performance. At first, to minimize the magnetic flux leaking out of the Wien filter, the invention proposes three measures to form a magnetic circuit to cover the magnetic device of a Wien filter respectively. The measures especially benefit a Wien filter acting as beam separator or Monochromator in a high resolution SEM. Secondly, based on the Wien filter proposed in cross-reference, several ways are provided for reducing the dissatisfaction of Wien Condition within the Wien filter, which especially modify either or both of the distribution shapes of the on-axis electric and magnetic dipole fields at two ends of the Wien filter. These ways provide more flexibility to reduce the dissatisfaction of Wien Condition in a Wien filter to a given degree at a reasonable manufacturing cost.

Abstract translation: 本发明提供了一种用于满足维恩条件的维恩滤波器的设计，以确保维恩滤波器的性能。 首先，为了使从Wien滤波器漏出的磁通量最小化，本发明提出了三种措施，以分别形成覆盖Wien滤波器的磁性装置的磁路。 该措施特别有益于在高分辨率扫描电镜中作为光束分离器或单色器的维恩滤光片。 其次，基于在交叉引用中提出的维恩滤波器，提供了几种方式来减少维恩滤波器中的维恩条件的不满，其特别地修改了在轴电磁场和磁偶极场的分布形状中的一个或两个 维恩过滤器的两端。 这些方式提供了更多的灵活性，可以以合理的制造成本将维恩过滤器中的维恩条件的不满度降低到给定的程度。

公开(公告)号：US07057170B2

公开(公告)日：2006-06-06

申请号：US10798376

申请日：2004-03-12

Applicant: Carl B. Freidhoff

Inventor： Carl B. Freidhoff

IPC: H01J49/28 ,  B01D59/44

CPC classification number: H01J41/10 ,  H01J49/0013 ,  H01J49/288

Abstract: A solid state compact ion gauge includes an electron source, a gate electrode, an electron collector, a gas ionizer, an ion anode, and a detector all formed within a cavity of a semiconductor substrate formed of two halves bonded together and having open sides for receiving a gase sample. A sample of gas having multiple gas constituents flows into the cavity from the side where gas molecules collide with electrons flowing from the source to the collector forming ions. The ions are forced under an electric field to the detector which includes a set of detectors for sensing the constituent ions.

Abstract translation: 固态紧凑型离子计包括电子源，栅电极，电子收集器，气体离子发生器，离子阳极和检测器，它们全部形成在半导体衬底的空腔内，该半导体衬底由两半结合在一起并具有开放侧面 接收气体样品。 具有多个气体成分的气体样品从气体分子与从源极流到集电器形成离子的电子碰撞的一侧流入空腔。 离子被强制在检测器的电场下，其包括用于感测组成离子的一组检测器。

公开(公告)号：US20030159998A1

公开(公告)日：2003-08-28

申请号：US10086950

申请日：2002-02-28

Inventor： Tihiro Ohkawa

IPC: C02F001/42

CPC classification number: H01J37/32431 ,  H01J49/025 ,  H01J49/288

Abstract: An apparatus for removing selected metal ions from a plasma includes a plasma chamber and at least one silica substrate mounted inside the chamber. More specifically, the substrate is exposed in the chamber so that when metal ions from the plasma contact the substrate they diffuse into the substrate to create a liquified layer. A receptacle is also provided to receive the liquid from the layer as it flows from the substrate.

Abstract translation: 用于从等离子体中去除所选择的金属离子的装置包括等离子体室和安装在室内的至少一个二氧化硅衬底。 更具体地说，衬底暴露在室中，使得当来自等离子体的金属离子与衬底接触时，它们扩散到衬底中以产生液化层。 还提供了一个容器，用于在从衬底流出时从层中接收液体。