公开(公告)号：KR1020110005772A

公开(公告)日：2011-01-19

申请号：KR1020107015308

申请日：2009-05-07

Applicant: 하마마츠 포토닉스 가부시키가이샤

Inventor： 시바야마가츠미 ,  요키노다카후미

IPC: G01J3/18 ,  G02B7/00

CPC classification number: G02B7/022 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/18 ,  G01J3/2803

Abstract: 본 발명은 신뢰성이 높은 분광(分光)모듈을 제공한다. 본 발명의 분광모듈(1)에서는 한쪽의 면(2a)으로부터 입사한 광을 투과시키는 기판(2)과, 기판(2)의 다른 쪽의 면(2b)에 대면하는 입사면(3a)을 가지고, 기판(2)을 투과하여 입사면(3a)으로부터 입사한 광을 투과시키는 렌즈부(3)와, 렌즈부(3)에 형성되어 렌즈부(3)에 입사한 광을 분광하고, 아울러, 반사하는 분광부(4)와, 분광부(4)에 의해서 반사된 광을 검출하는 광검출소자(5)와, 다른 쪽의 면(2b)과 입사면(3a)과의 사이에 형성되어 기판(2)에 대해서 렌즈부(3)를 지지하는 지지부(8)를 구비하고 있다. 이 분광모듈(1)에서는 지지부(8)에 의해 다른 쪽의 면(2b)과 입사면(3a)와의 사이에 틈새(S)가 형성되기 때문에, 다른 쪽의 면(2b)과 입사면(3a)과의 접촉에 의한 흠집의 발생을 방지할 수 있어, 분광모듈(1)의 신뢰성을 향상시킬 수 있다.

公开(公告)号：KR1020100017081A

公开(公告)日：2010-02-16

申请号：KR1020097000424

申请日：2008-06-05

Applicant: 하마마츠 포토닉스 가부시키가이샤

Inventor： 시바야마가츠미 ,  테이크만헬무트 ,  스즈키도모후미 ,  힐러디에트마르 ,  스탈케르울리치

IPC: G01J3/02

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0243 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/2803

Abstract: In this spectroscopic module (1), a light detecting element (4) has a light passing opening (4b) through which light entering a body section (2) passes. Therefore, the displacement of the relative positional relationship between the light passing opening (4b) and a light detecting section (4a) of the light detecting element (4) can be prevented from occurring. Moreover, an optical element (7) for guiding the light entering the body section (2) is placed in the light passing opening (4b). Consequently, light to enter the body section (2) can be certainly guided without part of the light to enter the body section (2) being blocked off by the edge on the light-entering side of the light passing opening (4b). Accordingly, this spectroscopic module (1) enables improved reliability.

Abstract translation: 在该分光模块（1）中，光检测元件（4）具有通过主体部（2）的光通过的光通过开口（4b）。 因此，可以防止光通过开口（4b）与光检测元件（4）的光检测部分（4a）之间的相对位置关系的位移发生。 此外，用于引导进入身体部分（2）的光的光学元件（7）被放置在光通过开口（4b）中。 因此，能够可靠地引导进入身体部（2）的光而不会使一部分光进入身体部（2）被光通过开口（4b）的光入射侧的边缘阻挡。 因此，该分光模块（1）能够提高可靠性。

公开(公告)号：KR1020100017079A

公开(公告)日：2010-02-16

申请号：KR1020097000422

申请日：2008-06-05

Applicant: 하마마츠 포토닉스 가부시키가이샤

Inventor： 시바야마가츠미 ,  테이크만헬무트 ,  요키노다카후미 ,  스즈키도모후미 ,  힐러디에트마르 ,  스탈케르울리치

IPC: G01J3/02

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/18 ,  G01J3/2803

Abstract: Since a spectroscopic module (1) has a plate-shaped body section (2), the spectroscopic module can be reduced in size by reducing the thickness of the body section (2). Moreover, since the body section (2) is plate-shaped, the spectroscopic module (1) can be manufactured, for example, by using a wafer process. More specifically, by providing lens sections (3), diffraction layers (4), reflection layers (6) and light detecting elements (7) in a matrix form on a glass wafer which becomes many body sections (2) and dicing the glass wafer, many spectroscopic modules (1) can be manufactured. This enables easy mass production of spectroscopic modules (1).

Abstract translation: 由于分光模块（1）具有板状主体部（2），所以可以通过减小主体部（2）的厚度来减小分光模块的尺寸。 此外，由于主体部（2）是板状的，所以可以例如通过使用晶片工艺来制造分光模块（1）。 更具体地说，通过在成为许多主体部分（2）的玻璃晶片上提供矩阵形式的透镜部分（3），衍射层（4），反射层（6）和光检测元件（7），并将玻璃晶片 ，可以制造许多光谱模块（1）。 这使得能够容易地批量生产光谱模块（1）。

公开(公告)号：KR1020090073092A

公开(公告)日：2009-07-02

申请号：KR1020097004509

申请日：2007-08-03

Applicant: 아이코니시스 인코포레이티드

Inventor： 김영민 ,  주야닝 ,  아가왈야쉬 ,  왕시우종 ,  암스트롱애론 ,  보거딩로버트 ,  맥지너타이앤드류 ,  세뽀안띠 ,  이체토브킨일리아 ,  킬패트릭마이클 ,  치포우라스페트로스 ,  타파스트리안타파일로스피.

IPC: G01N33/48 ,  G06K9/00 ,  G01N23/00

CPC classification number: G01N35/00732 ,  G01J3/2803 ,  G01J3/4406 ,  G01N21/6428 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6439 ,  G01N2021/6441 ,  G01N2021/6482 ,  G01N2035/00851 ,  G01N2201/06113 ,  G01N2201/12

Abstract: Optical means for automatic microscopic detection and analysis of fluorescent signals from a treated biological sample.

Abstract translation: 用于自动显微检测和分析来自经处理的生物样品的荧光信号的光学装置。

公开(公告)号：KR1020080111503A

公开(公告)日：2008-12-23

申请号：KR1020087026063

申请日：2007-03-23

Applicant: 사이머 엘엘씨

Inventor： 라팍로버트제이.

IPC: G01B9/02

CPC classification number: G01J3/02 ,  G01J3/027 ,  G01J3/26 ,  G01J3/2803 ,  G01J9/0246

Abstract: A method and apparatus is disclosed which may comprise detecting the bandwidth of laser output light pulses of a pulsed laser utilizing an array of light detecting elements by the steps which may comprise passing a portion of the laser output light produced by the pulsed laser to the array of light detecting elements in a manner that shifts the portion of the laser beam across the array of light detecting elements to avoid aliasing artifacts in output of the light detecting array. The portion of the image formed by the laser output light may be under-sampled, e.g., in the spatial or time domains. The relevant feature size of an image of an output of a fringe pattern generating element being sampled may comprise a size that is small with respect to the size of individual light detecting elements in the array of light detecting elements. ® KIPO & WIPO 2009

Abstract translation: 公开了一种方法和装置，其可以包括通过步骤检测利用光检测元件阵列的脉冲激光器的激光输出光脉冲的带宽，该步骤可以包括将由脉冲激光产生的激光输出光的一部分传递到阵列 的光检测元件，其方式是将激光束的该部分移动穿过光检测元件阵列，以避免光检测阵列的输出中的伪像。 由激光输出光形成的图像的部分可能在例如空间或时域中被低采样。 被采样的条纹图案生成元件的输出的图像的相关特征尺寸可以包括相对于光检测元件阵列中的各个光检测元件的尺寸小的尺寸。 ®KIPO＆WIPO 2009

公开(公告)号：KR100791716B1

公开(公告)日：2008-01-03

申请号：KR1020060081587

申请日：2006-08-28

Applicant: 동부일렉트로닉스 주식회사

Inventor： 홍정표

IPC: H01L21/3065

CPC classification number: H01L22/26 ,  G01J3/2803 ,  H01J37/32853

Abstract: An apparatus for detecting an end point in an etch chamber and a dry cleaning method are provided to minimize the damage of the inside of the etch chamber by detecting accurately the end point. An etch chamber dry cleaning process is performed to execute a dry cleaning process in an inside of an etch chamber(100). A wavelength detection process is performed to detect a plurality of wavelengths caused by a chemical reaction in the inside of the etch chamber(110). An end point decision process is performed to decide an end point by combining a rapidly reducing point of one of the various wavelengths and a rapidly increasing point of one of the various wavelengths(120). The end point detection is performed by using a CCD(Charge Coupled Device).

Abstract translation: 提供了用于检测蚀刻室中的端点的装置和干式清洗方法，以便通过精确检测终点来最小化蚀刻室内部的损坏。 执行蚀刻室干洗处理以在蚀刻室（100）的内部执行干洗处理。 执行波长检测处理以检测由蚀刻室（110）内部的化学反应引起的多个波长。 执行终点决定处理以通过组合各种波长中的一个的快速减少点和各种波长（120）之一的快速增加点来决定终点。 通过使用CCD（电荷耦合器件）来执行终点检测。

公开(公告)号：KR1020070001189A

公开(公告)日：2007-01-03

申请号：KR1020067018959

申请日：2005-03-16

Applicant: 케논 콤포넨트 가부시키가이샤

Inventor： 가이호쯔다까히로

IPC: H04N1/028 ,  H04N1/04

CPC classification number: G01J3/50 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/2803 ,  G01J3/501 ,  G01J3/51 ,  G01J3/513 ,  H04N1/02815 ,  H04N1/02835 ,  H04N1/193 ,  H04N1/486

Abstract: A color image sensor which uses a sensor array that has, as a lighting light source, 3-color light emitting elements capable of independently controlling light emitting timings respectively and at least three rows of pixels respectively constituted by a plurality of pixels, respective rows of pixels being provided with color filters having different transmitting wavelength regions, and which independently controls the lighting start and lighting period of each light emitting element, whereby it is possible to prevent color misregistration in an output image signal and regulate the image signal level of each color component. ® KIPO & WIPO 2007

Abstract translation: 一种彩色图像传感器，其使用具有作为照明光源的能够分别独立地控制发光定时的3色发光元件和分别由多个像素构成的至少三行像素的传感器阵列，各行 像素设置有具有不同透射波长区域的滤色器，并且其独立地控制每个发光元件的点亮开始和点亮周期，由此可以防止输出图像信号中的颜色对准并调节每种颜色的图像信号电平 零件。 ®KIPO＆WIPO 2007

公开(公告)号：KR100650571B1

公开(公告)日：2006-11-27

申请号：KR1020067003657

申请日：2002-03-19

Applicant: 유디 테크놀로지 코포레이션

Inventor： 엘모어더글라스엘 ,  짜오메이웨이 ,  라볼트존에프

IPC: G01J3/40 ,  G01N21/62

CPC classification number: G01J3/14 ,  G01J3/02 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0294 ,  G01J3/28 ,  G01J3/2803 ,  G01J3/42 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/3577

Abstract: An apparatus (300') and method capable of providing spatially multiplexed IR spectral information simultaneously in real-time for multiple samples or multiple spatial areas of one sample using IR absorption phenomena requires no moving parts or Fourier Transform during operation, and self-compensates for background spectra and degradation of component performance over time. IR spectral information and chemical analysis of the samples is determined by using one or more IR sources (310, 311), one or more sampling accessories (330, 331) for positioning the sample volumes, one or more optically dispersive elements (350), a focal plane array (FPA) (370) arranged to detect the dispersed light beams, and a processor (380) and display (390) to control the FPA (370), and display(390) to control the FPA (370) and display IR spectrograph.

公开(公告)号：KR1020060047298A

公开(公告)日：2006-05-18

申请号：KR1020050032948

申请日：2005-04-21

Applicant: 위스트론 코포레이션

Inventor： 탄분킷 ,  호치문

IPC: G01J3/50

CPC classification number: G01J3/2803 ,  G01J1/46 ,  G01J3/0259 ,  G01J3/50 ,  G01J3/513

Abstract: 색상 감지기는 단일의 집적 회로 칩 상에 구현된다. 색상 감지기는 복수의 색상 감지기 회로 및 이득 선택 제어를 포함한다. 복수의 색상 감지기 회로 내의 각각의 색상 감지기 회로는 광 검출기, 증폭기 및 이득 선택 회로를 포함한다. 증폭기는 광 검출기에 접속된다. 증폭기는 광 검출기로부터의 신호를 증폭한다. 이득 선택 회로는 증폭기에 접속된다. 이득 선택에 의해 증폭기의 이득이 제어된다. 이득 선택 회로는 가변 피드백 저항을 포함한다. 이득 선택 제어는 각각의 색상 감지기 회로마다 구별되는 가변 피드백 저항의 값을 선택한다.

公开(公告)号：KR1020050016248A

公开(公告)日：2005-02-21

申请号：KR1020040064355

申请日：2004-08-16

Applicant: 포톤, 아이엔씨.

Inventor： 거트만제프리엘.

IPC: G01J3/12 ,  G01J3/18

CPC classification number: G01J3/2803 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/50 ,  G01J3/502 ,  G01J3/504 ,  G01J2001/4247 ,  G01N21/4788 ,  G01N21/57 ,  G01N2021/575

Abstract: PURPOSE: An improved real-time goniospectrophotometer is provided to economically and quickly obtain each dependence of a color spectrum by using sample materials or a light source. CONSTITUTION: An improved real-time goniospectrophotometer parabola-irradiates light from a light source in order to provide light beam from an azimuth angle within a zenith angle. Light is spectrum jet from the beam. An angular spectrum is obtained correspondingly to the zenith angle. The light beam includes a discrete beam set. Each beam included in the discrete beam set corresponds to the zenith angle within the zenith angle. The discrete beam set is collimated. Spectrum distribution of light from the light beam refers to diffraction of the light beam in a diffraction lattice.

Abstract translation: 目的：提供一种改进的实时分光光度计，通过使用样品材料或光源经济快速地获得色谱的每个依赖性。 构成：改进的实时分光光度计抛物线 - 照射来自光源的光，以便提供在天顶角内的方位角的光束。 光是光束的光谱射流。 相应于天顶角获得角谱。 光束包括离散束组。 包含在离散束组中的每个束对应于天顶角内的天顶角。 离散束组被准直。 来自光束的光的光谱分布是指光束在衍射晶格中的衍射。