公开(公告)号：EP4120312A1

公开(公告)日：2023-01-18

申请号：EP21866495.1

申请日：2021-08-20

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI, Tomohiro

IPC: H01J3/02 ,  H01J37/04 ,  H01J37/073

Abstract: Provided are an electron gun, an electron gun component, an electron beam applicator, and an alignment method that can align the emission axis of an electron beam with the optical axis of the electron optical system of the counterpart device even when misalignment of a mounted position of the electron gun being mounted to the counterpart device is larger. The electron gun includes: a light source; a vacuum chamber; a photocathode that emits an electron beam in response to receiving light from the light source; an electrode kit; and an electrode kit drive device, the electrode kit includes a photocathode supporting part, and an anode arranged spaced apart from the photocathode supporting part, the photocathode is placed on the photocathode supporting part, and the electrode kit drive device moves the electrode kit in an X-Y plane, where one direction is defined as an X direction, a direction orthogonal to the X direction is defined as a Y direction, and a plane including the X direction and the Y direction is defined as the X-Y plane.

公开(公告)号：EP3951830A1

公开(公告)日：2022-02-09

申请号：EP20890776.6

申请日：2020-10-13

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI, Tomohiro

IPC: H01J37/06 ,  H01J37/073 ,  H01J37/12 ,  H01J37/305 ,  G03F7/20 ,  G21K1/00 ,  H01L21/027 ,  H01L21/66

Abstract: An object is to provide an electron beam applicator suitable for an electron gun having a photocathode and an electron beam emission method in the electron beam applicator. The object can be achieved by an electron beam applicator including: an electron gun section; a main body section; and a control unit. The electron gun section includes a light source, a photocathode that emits an electron beam in response to receiving excitation light emitted from the light source, and an anode. The main body section includes an objective lens that converges an electron beam emitted from the electron gun section. The control unit controls at least convergence power of the objective lens in accordance with a size of an electron beam emitted from the photocathode.

公开(公告)号：EP3734641A1

公开(公告)日：2020-11-04

申请号：EP18897698.9

申请日：2018-12-20

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI, Tomohiro ,  KOIZUMI, Atsushi ,  SHIKANO, Haruka

IPC: H01J37/244 ,  G01N23/2251 ,  H01J37/073 ,  H01J37/252

Abstract: The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection.
A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.

公开(公告)号：EP4503088A1

公开(公告)日：2025-02-05

申请号：EP23854858.0

申请日：2023-08-10

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI, Tomohiro ,  ARAKAWA, Yuta ,  YASUFUKU, Daisuke

IPC: H01J37/075 ,  H01J37/22

Abstract: An object is to provide a creation method of detection data used for an electron beam applicator itself to output detection data created with effective use of a grayscale range. This object can be achieved by the following creation method of detection data. The creation method of detection data includes at least two times of detection data output steps. The first detection data output step includes: a first electron beam irradiation step; a first detection step of generating a detection signal; a first light amount adjustment step; a step of repeating these steps; and a first output step. The second detection data output step includes: a first histogram calculation step of, based on the number of grayscale values in composing an image of the irradiated region or the number of grayscale values in a composed image of the irradiated region and the first light source intensity range, allocating grayscale values within a grayscale range to respective light source intensities in the first light source intensity range or allocating light source intensities within the first light source intensity range to respective grayscale values to set grayscale value-light source intensity correlation values, which associate light source intensities with grayscale values, and calculating frequencies of appearance of irradiated spots having respective grayscale value-light source intensity correlation values from the first detection data; a second detection condition setting step of, to enable effective use of the grayscale range, based on a calculated histogram, setting the light source to have a second light source intensity range and/or setting the emission quantity of the emission substance entering the detector to a second value; a second electron beam irradiation step based on the set second detection condition; a second detection step of generating a detection signal; a second light amount adjustment step; a step of repeating the above steps; and a second output step.

公开(公告)号：EP4421842A1

公开(公告)日：2024-08-28

申请号：EP22883522.9

申请日：2022-10-17

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI, Tomohiro

IPC: H01J37/073 ,  H01J37/26 ,  H01J1/34

CPC classification number: H01J37/073 ,  H01J1/34 ,  H01J37/26

Abstract: This electron beam application device includes: a light source; a photocathode; an anode; detectors; and a control unit. The number of excitation light beams received by the photocathode is two or more. The excitation light beams are each like a pulse, and are emitted such that timings at which the photocathode receives the light beams are different from each other. In one round of detection data creation work, the control unit sets two or more irradiation regions in which the irradiation target is to be irradiated with electron beams, and causes different irradiation regions selected from among the two or more set irradiation regions to be irradiated with two or more pulse-like electron beams formed by reception of the excitation light beams. The detectors generate detection signals by detecting, at different timings, pulse-like discharge objects discharged from the different irradiation regions of the irradiation target, and output the generated detection signals in association with position information of the different irradiation regions. The number of the detectors is less than the number of electron beams with which the irradiation target is irradiated.

公开(公告)号：EP4138114A1

公开(公告)日：2023-02-22

申请号：EP21787785.1

申请日：2021-03-30

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI, Tomohiro ,  SATO, Daiki

IPC: H01J37/073

Abstract: An object is to provide an electron gun that can extend the lifetime of a photocathode. The object can be achieved by an electron gun including: a substrate having a photocathode film formed on a first face; a light source for irradiating the photocathode film with excitation light; an anode; a heater device for heating the photocathode film and/or the substrate; and an output adjustment device that adjusts a heating temperature of the heater device.

公开(公告)号：EP4432328A1

公开(公告)日：2024-09-18

申请号：EP22892632.5

申请日：2022-10-28

Applicant: Photo Electron Soul Inc.

Inventor： IIJIMA, Hokuto

IPC: H01J37/06 ,  H01J37/073 ,  H01J37/28 ,  H01J1/34

CPC classification number: H01J37/073 ,  H01J37/06 ,  H01J37/28 ,  H01J1/34

Abstract: An object is to provide an electron gun, an electron beam applicator, and a multi-electron beam forming method that can form more electron beams than the number of lenses of a multi-lens array. The object can be achieved by an electron gun including: an electron source configured to generate releasable electrons; an anode configured to form an electric field between the electron source and the anode, extract the releasable electrons by the formed electric field, and form electron beams; and a multi-lens array, in which when electron beams with which the multi-lens array is irradiated are defined as first electron beams, m first electron beams (m is any integer of two or greater) are formed, the multi-lens array has n lenses (n is any integer of two or greater), and when electron beams emitted from the multi-lens array are defined as second electron beams, a maximum of m x n second electron beams can be formed.

公开(公告)号：EP4401109A1

公开(公告)日：2024-07-17

申请号：EP22867324.0

申请日：2022-09-05

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI, Tomohiro

IPC: H01J37/073 ,  H01J37/22 ,  H01J37/244 ,  H01J37/252 ,  H01J37/28

CPC classification number: H01J37/073 ,  H01J37/06 ,  H01J37/28 ,  H01J37/252 ,  H01J37/22 ,  H01J37/244 ,  H01J37/04

Abstract: An object is to provide a creation method of detection data and an image composition method for an irradiation target in an electron beam applicator, a program, a storage medium, and an electron beam applicator based on a novel principle. In the creation method of detection data in an electron beam applicator, the electron beam applicator includes a light source, a photocathode configured to generate releasable electrons in response to receiving light from the light source, an anode configured to form an electric field between the photocathode and the anode and extract the releasable electrons by the formed electric field to form an electron beam, a detector configured to detect emission quantity data related to emission from an irradiation target irradiated with the electron beam, and a control unit, and the creation method of detection data includes: an electron beam irradiation step of irradiating an irradiation region of the irradiation target with the electron beam; a detection step of detecting, by the detector, the emission quantity data related to emission from the irradiation region irradiated with the electron beam and generating a detection signal; a quantity of light adjustment step of adjusting a quantity of light reaching the photocathode from the light source so that a signal intensity of the detection signal is a preset value; a step of repeating the electron beam irradiation step, the detection step, and the quantity of light adjustment step until the signal intensity of the detection signal becomes the preset value; and a detection data output step of outputting the quantity of light adjustment data where the signal intensity of the detection signal is the preset value as detection data on the irradiation region.

公开(公告)号：EP4310882A1

公开(公告)日：2024-01-24

申请号：EP22795406.2

申请日：2022-03-25

Applicant: Photo Electron Soul Inc.

Inventor： NISHITANI Tomohiro

IPC: H01J37/073

Abstract: Provided are an electron gun that can extend the lifetime of a photocathode, an electron beam applicator on which the electron gun is mounted, and an irradiation position moving method. This object can be achieved by an electron gun including: a light source; a photocathode that emits an electron beam in response to receiving light from the light source; an anode; a motion device that moves excitation light irradiating the photocathode; and a control unit, the control unit controls the motion device to move an irradiation position of the excitation light from a position R n (n is a natural number) on the photocathode to a position R n+1 outside an excitation light irradiation-caused deteriorated range associated with the position R n , the excitation light irradiation-caused deteriorated range is a range where the photocathode is deteriorated due to irradiation with the excitation light, and the distance between the center of a spot of the excitation light at the position R n and the center of a spot of the excitation light at the position R n+1 is at least three or more times a spot diameter of the excitation light on the photocathode.

公开(公告)号：EP4036953A1

公开(公告)日：2022-08-03

申请号：EP20869775.5

申请日：2020-09-04

Applicant: Photo Electron Soul Inc.

Inventor： IIJIMA Hokuto

IPC: H01J3/02 ,  H01J3/26 ,  H01J37/04 ,  H01J37/073 ,  H01J9/42 ,  H01J1/34

Abstract: An object is to provide an electron gun that makes it possible to verify whether or not an electron beam emitted form a photocathode is misaligned from a designed emission center axis. The object can be achieved by an electron gun including: a light source; a photocathode configured to emit an electron beam in response to receiving light from the light source; and an anode. The electron gun includes an intermediate electrode arranged between the photocathode and the anode, an electron beam shielding member configured to block a part of an electron beam, a measurement unit configured to measure an intensity of an electron beam blocked by the electron beam shielding member, and an electron beam emission direction deflector arranged between the anode and the electron beam shielding member and configured to change a position where an electron beam that passed through the anode reaches the electron beam shielding member. The intermediate electrode has an electron beam passage hole through which an electron beam emitted from the photocathode passes through, and a drift space is formed in the electron beam passage hole such that, when an electric field is generated between the photocathode and the anode by application of a voltage, effect of the electric field can be disregarded.